公开(公告)号：US10897215B2

公开(公告)日：2021-01-19

申请号：US15913590

申请日：2018-03-06

Applicant: STMicroelectronics S.r.l.

Inventor： Francesco Procopio ,  Carlo Valzasina ,  Alberto Corigliano ,  Raffaele Ardito ,  Giacomo Gafforelli

IPC: H02N2/18

Abstract: A piezoelectric transducer for energy-harvesting systems includes a substrate, a piezoelectric cantilever element, a first magnetic element, and a second magnetic element, mobile with respect to the first magnetic element. The first magnetic element is coupled to the piezoelectric cantilever element. The first magnetic element and the second magnetic element are set in such a way that, in response to relative movements between the first magnetic element and the second magnetic element through an interval of relative positions, the first magnetic element and the second magnetic element approach one another without coming into direct contact, and the interaction between the first magnetic element and the second magnetic element determines application of a force pulse on the piezoelectric cantilever element.

公开(公告)号：US10794738B2

公开(公告)日：2020-10-06

申请号：US16049262

申请日：2018-07-30

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Dario Paci ,  Francesco Procopio ,  Carlo Valzasina ,  Paolo Angelini ,  Francesco Diazzi ,  Roberto Pio Baorda ,  Danilo Karim Kaddouri

IPC: G01K15/00 ,  G01D18/00 ,  G01K13/00 ,  H05B3/16 ,  B81C99/00 ,  G01R33/00 ,  G01R33/09

Abstract: An integrated sensor device including a first die, housing a sensor element to detect a quantity external to the sensor device and transduce the external quantity into an electrical sensing signal; a second die mechanically coupled to the first die so that the first and second dies are stacked on one another along one and the same axis; and at least one heater of a resistive type integrated in the first die and/or in the second die, having a first conduction terminal and a second conduction terminal configured to couple respective first and second conduction terminals of a signal generator for causing an electric current to flow, in use, between the first and second conduction terminals of the heater and generate heat by the Joule effect. It is possible to carry out calibration in temperature of the sensor element.

公开(公告)号：US10534170B2

公开(公告)日：2020-01-14

申请号：US16226005

申请日：2018-12-19

Applicant: STMicroelectronics S.r.l.

Inventor： Francesco Procopio ,  Giulio Ricotti

IPC: G02B26/08 ,  H04N9/31 ,  G03B21/00 ,  H01L41/04 ,  H01L41/09

Abstract: A MEMS device includes a fixed supporting body forming a cavity, a mobile element suspended over the cavity, and an elastic element arranged between the fixed supporting body and the mobile element. First, second, third, and fourth piezoelectric elements are mechanically coupled to the elastic element, which has a shape symmetrical with respect to a direction. The first and second piezoelectric elements are arranged symmetrically with respect to the third and fourth piezoelectric elements, respectively. The first and fourth piezoelectric elements are configured to receive a first control signal, whereas the second and third piezoelectric elements are configured to receive a second control signal, which is in phase opposition with respect to the first control signal so that the first, second, third, and fourth piezoelectric elements deform the elastic element, with consequent rotation of the mobile element about the direction.

公开(公告)号：US11950511B2

公开(公告)日：2024-04-02

申请号：US16277952

申请日：2019-02-15

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Francesco Procopio ,  Fabio Quaglia

IPC: H01L41/047 ,  B06B1/02 ,  B06B1/06 ,  G10K9/125 ,  G10K11/02 ,  H10N30/87

CPC classification number: H10N30/87 ,  B06B1/0292 ,  B06B1/06 ,  B06B1/0622 ,  G10K9/125 ,  G10K11/02

Abstract: A device for emitting an ultrasound acoustic wave in a propagation medium, comprising: a package including a base substrate and a cap coupled to the base substrate and defining therewith a chamber in the package; a semiconductor die, coupled to the base substrate in the chamber, comprising a semiconductor body; a micromachined ultrasonic transducer (MUT) integrated at least in part in the semiconductor body and including a cavity in the semiconductor body and a membrane suspended over the cavity; and an actuator, operatively coupled to the membrane, which can be operated for generating a deflection of the membrane. The membrane is designed in such a way that a resonance frequency thereof matches an acoustic resonance frequency that, during operation of the MUT, develops in said chamber of the package.

公开(公告)号：US20160373031A1

公开(公告)日：2016-12-22

申请号：US14980762

申请日：2015-12-28

Applicant: STMicroelectronics S.R.L.

Inventor： Francesco Procopio ,  Attilio Frangi

IPC: H02N2/18 ,  H01L41/113

CPC classification number: H02N2/186 ,  H01L41/1136 ,  H02N2/181

Abstract: A piezoelectric transducer includes: an anchorage; a beam of semiconductor material, extending in cantilever fashion from the anchorage in a main direction parallel to a first axis and having a face parallel to a first plane defined by the first axis and by a second axis perpendicular to the first axis; and a piezoelectric layer on the face of the beam. A cross-section of the beam perpendicular to the first axis is asymmetrical and is shaped so that the beam presents deformations out of the first plane in response to forces applied to the anchorage and oriented according to the first axis.

Abstract translation: 压电换能器包括：锚固件; 一半导体材料束，从平行于第一轴的主方向上的锚固件以悬臂的方式延伸，并且具有平行于由第一轴线限定的第一平面和垂直于第一轴线的第二轴线的面; 和在光束表面上的压电层。 垂直于第一轴线的梁的横截面是不对称的并且被成形为使得梁响应于施加到锚固件的力并根据第一轴线而定向而将变形从第一平面出来。

公开(公告)号：US10197795B2

公开(公告)日：2019-02-05

申请号：US15588204

申请日：2017-05-05

Applicant: STMicroelectronics S.r.l.

Inventor： Francesco Procopio ,  Giulio Ricotti

IPC: G02B26/08 ,  G03B21/00 ,  H01L41/04 ,  H01L41/09

Abstract: A MEMS device includes a fixed supporting body forming a cavity, a mobile element suspended over the cavity, and an elastic element arranged between the fixed supporting body and the mobile element. First, second, third, and fourth piezoelectric elements are mechanically coupled to the elastic element, which has a shape symmetrical with respect to a direction. The first and second piezoelectric elements are arranged symmetrically with respect to the third and fourth piezoelectric elements, respectively. The first and fourth piezoelectric elements are configured to receive a first control signal, whereas the second and third piezoelectric elements are configured to receive a second control signal, which is in phase opposition with respect to the first control signal so that the first, second, third, and fourth piezoelectric elements deform the elastic element, with consequent rotation of the mobile element about the direction.

公开(公告)号：US20180149859A1

公开(公告)日：2018-05-31

申请号：US15588204

申请日：2017-05-05

Applicant: STMicroelectronics S.r.l.

Inventor： Francesco Procopio ,  Giulio Ricotti

IPC: G02B26/08 ,  H01L41/09 ,  H01L41/04 ,  G03B21/00

CPC classification number: G02B26/0858 ,  G03B21/008 ,  H01L41/042 ,  H01L41/09 ,  H04N9/3129

Abstract: A MEMS device includes a fixed supporting body forming a cavity, a mobile element suspended over the cavity, and an elastic element arranged between the fixed supporting body and the mobile element. First, second, third, and fourth piezoelectric elements are mechanically coupled to the elastic element, which has a shape symmetrical with respect to a direction. The first and second piezoelectric elements are arranged symmetrically with respect to the third and fourth piezoelectric elements, respectively. The first and fourth piezoelectric elements are configured to receive a first control signal, whereas the second and third piezoelectric elements are configured to receive a second control signal, which is in phase opposition with respect to the first control signal so that the first, second, third, and fourth piezoelectric elements deform the elastic element, with consequent rotation of the mobile element about the direction.

公开(公告)号：US09941821B2

公开(公告)日：2018-04-10

申请号：US14446237

申请日：2014-07-29

Applicant: STMicroelectronics S.r.l.

Inventor： Francesco Procopio ,  Carlo Valzasina ,  Alberto Corigliano ,  Raffaele Ardito ,  Giacomo Gafforelli

IPC: H02N2/18

CPC classification number: H02N2/186 ,  H02N2/181 ,  H02N2/188

Abstract: A piezoelectric transducer for energy-harvesting systems includes a substrate, a piezoelectric cantilever element, a first magnetic element, and a second magnetic element, mobile with respect to the first magnetic element. The first magnetic element is coupled to the piezoelectric cantilever element. The first magnetic element and the second magnetic element are set in such a way that, in response to relative movements between the first magnetic element and the second magnetic element through an interval of relative positions, the first magnetic element and the second magnetic element approach one another without coming into direct contact, and the interaction between the first magnetic element and the second magnetic element determines application of a force pulse on the piezoelectric cantilever element.

公开(公告)号：US20160320425A1

公开(公告)日：2016-11-03

申请号：US14971155

申请日：2015-12-16

Applicant: STMicroelectronics S.r.l.

Inventor： Francesco Procopio ,  Carlo Valzasina

IPC: G01P15/09 ,  H01L41/27 ,  H01L41/25

CPC classification number: G01P15/09 ,  G01L1/16 ,  G01P15/0922 ,  G01P2015/0817 ,  H01L41/1132 ,  H01L41/25 ,  H01L41/27 ,  H01L41/332

Abstract: The piezoelectric sensor is formed in a semiconductor material chip having a surface defining a plane and integrating a structure for sensing forces acting in the plane. The chip is formed by a substrate defining a cantilever having a first end, constrained to an anchorage portion of the substrate, and a second end, which is free to bend under the action of external forces. The cantilever has first and second longitudinal halves, each carrying a respective strip element of piezoelectric material, which extends parallel to the chip plane.

Abstract translation: 压电传感器形成在具有限定平面的表面并且集成用于感测作用在平面中的力的结构的半导体材料芯片中。 芯片由限定悬臂的基板形成，该悬臂具有被限制到基板的锚定部分的第一端和在外力作用下自由弯曲的第二端。 悬臂具有第一和第二纵向半部，每个具有平行于芯片平面延伸的压电材料的相应带状元件。

公开(公告)号：US08760156B2

公开(公告)日：2014-06-24

申请号：US13905006

申请日：2013-05-29

Applicant: STMicroelectronics S.r.l.

Inventor： Lorenzo Baldo ,  Francesco Procopio ,  Sarah Zerbini

IPC: G01R33/02

CPC classification number: G01R33/0286 ,  G01R33/0005 ,  G01R33/028 ,  G01R33/038

Abstract: Two suspended masses are configured so as to be flowed by respective currents flowing in the magnetometer plane in mutually transversal directions and are capacitively coupled to lower electrodes. Mobile sensing electrodes are carried by the first suspended mass and are capacitively coupled to respective fixed sensing electrodes. The first suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a first horizontal direction. The second suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a second horizontal direction, and the first suspended mass is configured so as to be mobile in a direction parallel to the plane and transversal to the current flowing in the first suspended mass in presence of a magnetic field having a component in a vertical direction.

Abstract translation: 两个悬挂质量被配置为使得在相互横向上在磁力计平面中流动的相应电流流动，并且电容耦合到下电极。 移动感测电极由第一悬浮质量携带并且电容耦合到相应的固定感测电极。 第一悬挂质量被配置为在存在具有在第一水平方向上的分量的磁场的情况下在横向于平面的方向上是可移动的。 第二悬挂质量被配置为在存在具有在第二水平方向上的分量的磁场的情况下在横向于平面的方向上是可移动的，并且第一悬挂质量被配置为在平行于 并且在存在具有在垂直方向上的分量的磁场的情况下横向于在第一悬浮质量块中流动的电流。