Micro-actuator for hard-disk drive, and manufacturing process thereof
    3.
    发明申请
    Micro-actuator for hard-disk drive, and manufacturing process thereof 有权
    用于硬盘驱动器的微执行器及其制造方法

    公开(公告)号:US20040070888A1

    公开(公告)日:2004-04-15

    申请号:US10601332

    申请日:2003-06-20

    CPC classification number: B81B3/0021 H02N1/006

    Abstract: A micro-electro-mechanical device formed by a body of semiconductor material having a thickness and defining a mobile part and a fixed part. The mobile part is formed by a mobile platform, supporting arms extending from the mobile platform to the fixed part, and by mobile electrodes fixed to the mobile platform. The fixed part has fixed electrodes facing the mobile electrodes, a first biasing region fixed to the fixed electrodes, a second biasing region fixed to the supporting arms, and an insulation region of insulating material extending through the entire thickness of the body. The insulation region insulates electrically at least one between the first and the second biasing regions from the rest of the fixed part.

    Abstract translation: 由具有厚度并限定可移动部分和固定部分的半导体材料体形成的微电子机械装置。 可移动部分由移动平台,从移动平台延伸到固定部分的支撑臂,以及固定到移动平台的移动电极形成。 固定部分具有面向移动电极的固定电极,固定到固定电极的第一偏置区域,固定到支撑臂的第二偏压区域以及延伸穿过主体整个厚度的绝缘材料的绝缘区域。 绝缘区域在第一和第二偏压区域之间至少一个与固定部件的其余部分绝缘。

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