公开(公告)号：US11214870B2

公开(公告)日：2022-01-04

申请号：US15990051

申请日：2018-05-25

Applicant: Samsung Display Co., Ltd.

Inventor： Jaihyuk Choi ,  Jong-hoon Park ,  Kyungjoo Min ,  Wonwoong Park ,  Sukwon Jung ,  Hyunwoo Joo ,  Myungsoo Huh

IPC: C23C16/458 ,  C23C16/44 ,  H01J37/32 ,  C23C16/50 ,  H01L21/687 ,  C23C16/509 ,  C23C16/455 ,  H01R9/16 ,  H01R9/00 ,  H01L21/02

Abstract: A chemical vapor deposition (CVD) system may include a chamber, a susceptor provided in the chamber to support a substrate, a gas distribution part provided over the susceptor, a first ground strap bar provided on a bottom inner surface of the chamber and electrically connected to the chamber, a second ground strap bar provided on a bottom surface of the susceptor and electrically connected to the susceptor, and a plurality of ground straps electrically connected to the first and second ground strap bars, each of the plurality of ground straps including two opposite portions that are fastened to the first and second ground strap bars, respectively.

公开(公告)号：US20220238306A1

公开(公告)日：2022-07-28

申请号：US17718047

申请日：2022-04-11

Applicant: Samsung Display Co., Ltd.

Inventor： Jong-hoon Park ,  Sukwon Jung ,  Hyunwoo Joo ,  Jaihyuk Choi ,  Kyungjoo Min ,  Wonwoong Park

IPC: H01J37/32 ,  C23C16/44 ,  H01L51/56 ,  C23C16/505 ,  C23C16/455 ,  C23C16/509

Abstract: A chemical vapor deposition apparatus includes a chamber, a susceptor supporting a substrate, a backing plate to which power is applied, a diffuser providing a deposition gas, and a first insulator. The first insulator may include a first portion covering a top surface of the backing plate, and a second portion assembled with the first portion and covering a sidewall of the backing plate.

公开(公告)号：US10908648B2

公开(公告)日：2021-02-02

申请号：US16882391

申请日：2020-05-22

Applicant: Samsung Display Co., Ltd.

Inventor： Jaihyuk Choi ,  Sukwon Jung ,  Myungsoo Huh

IPC: G06F1/16 ,  H05K1/02 ,  H05K3/00 ,  H05K1/03 ,  H04M1/02 ,  H01L51/00 ,  H01L51/52

Abstract: Disclosed is a foldable display apparatus in which a crack prevention layer is disposed on a surface of a display panel. The crack prevention layer includes thin film pattern portions disposed along a folding axis of the foldable display apparatus.

公开(公告)号：US10664015B2

公开(公告)日：2020-05-26

申请号：US15869481

申请日：2018-01-12

Applicant: Samsung Display Co., Ltd.

Inventor： Jaihyuk Choi ,  Sukwon Jung ,  Myungsoo Huh

IPC: H05K1/02 ,  G06F1/16 ,  H05K3/00 ,  H05K1/03 ,  H04M1/02 ,  H01L51/00 ,  H01L51/52

Abstract: Disclosed is a foldable display apparatus in which a crack prevention layer is disposed on a surface of a display panel. The crack prevention layer includes thin film pattern portions disposed along a folding axis of the foldable display apparatus.

公开(公告)号：US10361263B2

公开(公告)日：2019-07-23

申请号：US15949614

申请日：2018-04-10

Applicant: Samsung Display Co., Ltd.

Inventor： Jaihyuk Choi ,  Sukwon Jung ,  Myungsoo Huh ,  Seok-jin Ko ,  Hyunwoo Joo

IPC: H01L27/32 ,  H01L27/12 ,  H01L29/786

Abstract: Provided is a display apparatus. The display apparatus includes a base substrate, a first transistor disposed on the base substrate and including a first semiconductor layer including a first layer and a second layer disposed to come into contact with a first layer and including a compound made of at least two materials of a Group IV elements, a first control electrode overlapping the first semiconductor layer, a first input electrode connected to the first semiconductor layer, and a first output electrode connected to the first semiconductor layer, a second transistor and an organic light emitting diode.

公开(公告)号：US10211427B2

公开(公告)日：2019-02-19

申请号：US15640945

申请日：2017-07-03

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Myungsoo Huh ,  Sunghun Key ,  Sungchul Kim ,  Cheollae Roh ,  Sukwon Jung ,  Hyunwoo Joo ,  Jaihyuk Choi

IPC: H01L51/52 ,  H01J37/32 ,  C23C16/04 ,  C23C16/34 ,  C23C16/455 ,  C23C16/505

Abstract: A display device and an apparatus and method for manufacturing the same are disclosed. The display device includes: a substrate; a display unit formed on the substrate; and an inorganic layer formed on the display unit, wherein a water vapor transmission rate (WVTR) of the inorganic layer is 5×10−5 g/m2 day or less. The apparatus for manufacturing a display device includes: a chamber; a shower head for spraying a mixed gas into the chamber; a plasma generation unit for forming plasma from the mixed gas; a susceptor facing the shower head and on which a substrate is seated; and a power supply unit electrically connected to the plasma generation unit, wherein a frequency of a current supplied from the power supply unit to the plasma generation unit is between about 27 MHz and about 42 MHz.

公开(公告)号：US20180366688A1

公开(公告)日：2018-12-20

申请号：US16111037

申请日：2018-08-23

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Choelmin Jang ,  Dongkyun Ko ,  Inkyo Kim ,  Sukwon Jung ,  Nam Ha ,  Myungsoo Huh

IPC: H01L51/56 ,  C23C16/54 ,  H01L51/52 ,  C23C16/455 ,  H01L51/00 ,  C23C16/44

CPC classification number: H01L51/56 ,  C23C16/4412 ,  C23C16/45551 ,  C23C16/45563 ,  C23C16/54 ,  H01L51/0097 ,  H01L51/5253 ,  H01L51/5256

Abstract: An apparatus and method for manufacturing a display apparatus includes: a chamber; a first nozzle unit at the chamber, the first nozzle unit configured to deposit an organic layer or an inorganic layer on a substrate; a second nozzle unit at the chamber, the second nozzle unit configured to deposit the organic layer or the inorganic layer on a substrate and the second nozzle unit being linearly aligned with the first nozzle unit in a first direction; and an injection nozzle unit between the first nozzle unit and the second nozzle unit, the injection nozzle unit configured to inject a first gas in the chamber toward the substrate.

公开(公告)号：US12207530B2

公开(公告)日：2025-01-21

申请号：US14929159

申请日：2015-10-30

Applicant: Samsung Display Co., Ltd.

Inventor： Choelmin Jang ,  Dongkyun Ko ,  Inkyo Kim ,  Sukwon Jung ,  Nam Ha ,  Myungsoo Huh

IPC: C23C16/44 ,  C23C16/455 ,  C23C16/54 ,  H10K50/844 ,  H10K71/00 ,  H10K77/10

Abstract: An apparatus and method for manufacturing a display apparatus includes: a chamber; a first nozzle unit at the chamber, the first nozzle unit configured to deposit an organic layer or an inorganic layer on a substrate; a second nozzle unit at the chamber, the second nozzle unit configured to deposit the organic layer or the inorganic layer on a substrate and the second nozzle unit being linearly aligned with the first nozzle unit in a first direction; and an injection nozzle unit between the first nozzle unit and the second nozzle unit, the injection nozzle unit configured to inject a first gas in the chamber toward the substrate.

公开(公告)号：US20190211445A1

公开(公告)日：2019-07-11

申请号：US16160757

申请日：2018-10-15

Applicant: Samsung Display Co., Ltd.

Inventor： Seokjin Ko ,  Myungsoo Huh ,  Sukwon Jung ,  Dongkyun Ko ,  Inkyo Kim

IPC: C23C16/44 ,  C23C16/46

CPC classification number: C23C16/4405 ,  C23C16/46

Abstract: An apparatus for manufacturing a display apparatus includes: a chamber; a head unit configured to supply a process gas and a cleaning gas to an inside of the chamber; which has a storage space where the process gas or the cleaning gas is temporarily stored, and including a nozzle connected to the storage space and configured to guide the process gas or the cleaning gas from the storage space to the inside of the chamber; a susceptor unit arranged to face the head unit and on which a substrate is placeable; a cleaning gas supply unit connected to the head unit and configured to plasmarize the cleaning gas and supply the cleaning gas that is plasmarized to the head unit; and a cleaning gas ejection unit connected to the cleaning gas supply unit and configured to supply the cleaning gas to at least two portions of the storage space.

公开(公告)号：US10316219B2

公开(公告)日：2019-06-11

申请号：US15647259

申请日：2017-07-12

Applicant: Samsung Display Co., Ltd. ,  Myongji University Industry and Academia Cooperation Foundation

Inventor： Byungwook Ahn ,  Kikyung Youk ,  Sukwon Jung ,  Jeongho Hwang ,  Jongdeok Park ,  Seungchan Lee ,  Intae Son ,  Junhyup Lee

IPC: G06F3/041 ,  C09J5/06 ,  H05K5/00 ,  H05K5/03 ,  C09J11/08 ,  B32B7/12 ,  B32B5/16 ,  B32B27/06 ,  C09J11/06

Abstract: A thermally releasable adhesive member including a base resin and microcapsules dispersed and disposed in the base resin. The microcapsule includes a core part, a shell part wrapping the core part, and an organic solvent disposed in the core part, and an average diameter of the microcapsules is in a range from about 50 nm to about 500 nm. The adhesive member may maintain high optical transmittance and may be easily detached at a high temperature.