PHASE SHIFT MASKS FOR EXTREME ULTRAVIOLET LITHOGRAPHY

    公开(公告)号:US20230018819A1

    公开(公告)日:2023-01-19

    申请号:US17933872

    申请日:2022-09-21

    Abstract: Phase shift masks for an extreme ultraviolet lithography process includes a substrate, a reflection layer on the substrate, a capping layer on the reflection layer, and phase shift patterns on the capping layer. Each of the phase shift patterns may include a lower absorption pattern on the capping layer and an upper absorption pattern on the lower absorption pattern. A refractive index of the upper absorption pattern may be higher than a refractive index of the lower absorption pattern, and a thickness of the upper absorption pattern is smaller than a thickness of the lower absorption pattern.

    Computing device and method of operating the same

    公开(公告)号:US11527247B2

    公开(公告)日:2022-12-13

    申请号:US17123649

    申请日:2020-12-16

    Inventor: Dongwan Kim

    Abstract: Provided are a computing device and a method of operating the same. The computing device may include a memory storing one or more instructions, and a processor configured to execute the one or more instructions stored in the memory to recognize a trigger word for another voice assistant, and analyze a response of the other voice assistant to a speech given to the other voice assistant. The computing device simulates an operation performed to correspond to the speech, and performs a subsequent operation, based on a result of the simulating and a result of the analyzing of the response of the other voice assistant.

    Phase shift masks for extreme ultraviolet lithography

    公开(公告)号:US11774846B2

    公开(公告)日:2023-10-03

    申请号:US17933872

    申请日:2022-09-21

    CPC classification number: G03F1/26 G03F1/24

    Abstract: Phase shift masks for an extreme ultraviolet lithography process includes a substrate, a reflection layer on the substrate, a capping layer on the reflection layer, and phase shift patterns on the capping layer. Each of the phase shift patterns may include a lower absorption pattern on the capping layer and an upper absorption pattern on the lower absorption pattern. A refractive index of the upper absorption pattern may be higher than a refractive index of the lower absorption pattern, and a thickness of the upper absorption pattern is smaller than a thickness of the lower absorption pattern.

    Phase shift masks for extreme ultraviolet lithography

    公开(公告)号:US11487197B2

    公开(公告)日:2022-11-01

    申请号:US17120480

    申请日:2020-12-14

    Abstract: Phase shift masks for an extreme ultraviolet lithography process includes a substrate, a reflection layer on the substrate, a capping layer on the reflection layer, and phase shift patterns on the capping layer. Each of the phase shift patterns may include a lower absorption pattern on the capping layer and an upper absorption pattern on the lower absorption pattern. A refractive index of the upper absorption pattern may be higher than a refractive index of the lower absorption pattern, and a thickness of the upper absorption pattern is smaller than a thickness of the lower absorption pattern.

    Electronic device and operation method thereof

    公开(公告)号:US12288555B2

    公开(公告)日:2025-04-29

    申请号:US17944618

    申请日:2022-09-14

    Abstract: An electronic device receives a voice input, and determines whether the voice input is matched with a natural language understanding (NLU) model for determining the presence or absence of a verb. The electronic device further identifies a display context object associated with the voice input based on the voice input being matched with the NLU model. The electronic device calculates a similarity value between the voice input and the display context object, and update a user interface (UI) depending on the calculated the similarity values.

    GRID FOR SEMICONDUCTOR PROCESS
    6.
    发明申请

    公开(公告)号:US20250132133A1

    公开(公告)日:2025-04-24

    申请号:US18640999

    申请日:2024-04-19

    Abstract: A substrate processing apparatus comprises a process chamber, a stage in the process chamber, the stage supporting a substrate, and a grid in the process chamber and upwardly spaced apart from the stage. The grid includes a dielectric plate having a central axis that extends in a first direction, a first electrode plate embedded in the dielectric plate, a second electrode plate downwardly spaced apart from the first electrode plate and embedded in the dielectric plate, and a third electrode plate downwardly spaced apart from the second electrode plate and embedded in the dielectric plate.

    Electronic device and control method thereof

    公开(公告)号:US11600275B2

    公开(公告)日:2023-03-07

    申请号:US17102959

    申请日:2020-11-24

    Inventor: Dongwan Kim

    Abstract: An electronic device performing voice recognition on user utterance based on first voice assistance. The electronic device may receive information on recognition characteristic of second voice assistance for user utterance from an external device and adjust recognition characteristic of the first voice assistance based on the information on the recognition characteristic of the second voice assistance.

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