公开(公告)号：US20220157566A1

公开(公告)日：2022-05-19

申请号：US17356998

申请日：2021-06-24

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jiye KIM ,  In Cheol SONG ,  Woongpil JEON ,  Daihong KIM ,  Jaebeom PARK ,  Byungho CHUN

IPC: H01J37/32 ,  H05K9/00 ,  C23C16/505

Abstract: An apparatus for manufacturing a semiconductor device includes a chamber including a lower housing and an upper housing, heater chucks in the lower housing, shower heads on the heater chucks, the shower heads being between the lower housing and the upper housing, power supplies connected to the shower heads to provide radio-frequency powers to the shower heads, power straps in the upper housing to connect the shower heads to the power supplies, and shielding members in the upper housing, the shielding members enclosing the power straps and the shower heads, respectively, the shielding members to prevent electromagnetic interference of the radio-frequency powers between the power straps and between the shower heads.

公开(公告)号：US20240321557A1

公开(公告)日：2024-09-26

申请号：US18679784

申请日：2024-05-31

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jiye KIM ,  In Cheol Cheol SONG ,  Woongpil JEON ,  Daihong KIM ,  Jaebeom PARK ,  Byungho CHUN

IPC: H01J37/32 ,  C23C16/505 ,  H05K9/00

CPC classification number: H01J37/32449 ,  C23C16/505 ,  H01J37/32082 ,  H05K9/0081 ,  H01J2237/3321

Abstract: An apparatus for manufacturing a semiconductor device includes a chamber including a lower housing and an upper housing, heater chucks in the lower housing, shower heads on the heater chucks, the shower heads being between the lower housing and the upper housing, power supplies connected to the shower heads to provide radio-frequency powers to the shower heads, power straps in the upper housing to connect the shower heads to the power supplies, and shielding members in the upper housing, the shielding members enclosing the power straps and the shower heads, respectively, the shielding members to prevent electromagnetic interference of the radio-frequency powers between the power straps and between the shower heads.

公开(公告)号：US20170139514A1

公开(公告)日：2017-05-18

申请号：US15351788

申请日：2016-11-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Mi Jeong KIM ,  Chan KWAK ,  Junghwa KIM ,  Dong Su KO ,  Kwanghee KIM ,  Jiye KIM

IPC: G06F3/041 ,  C22F1/14 ,  B32B15/08 ,  B22F1/00 ,  G06F3/045 ,  B32B15/02

CPC classification number: G06F3/0412 ,  B22F1/0025 ,  B22F2301/255 ,  B22F2304/05 ,  B32B15/02 ,  B32B15/08 ,  B32B2307/202 ,  B32B2457/208 ,  C22F1/14 ,  G06F3/045 ,  G06F2203/04102 ,  G06F2203/04103 ,  H01B1/02 ,  H01B1/22

Abstract: An electrical conductor includes a substrate; and a conductive layer disposed on the substrate and including a plurality of silver nanowires, wherein the silver nanowires exhibit a main peak assigned to a (111) crystal plane in an X-ray diffraction spectrum thereof, and a 2θ full width at half maximum (FWHM) of the main peak after Gaussian fitting is less than about 0.40 degrees.