摘要:
An elevation and index apparatus of a water hydraulic driven type has a rotary table (5) supported pivotally by a cross roller bearing (15), a water hydraulic motor (9) and a water hydraulic cylinder (8), each fixed to a table base (14) supporting a power transmission mechanism and the cross roller bearing (15), a main elevation shaft (7) connected to an output shaft of the water hydraulic cylinder (8), an elevation and index table (1) connected to the main elevation shaft (7) through a bearing (7a) and connected to the rotary table (5) so as to restrict pivotal movement, and a casing (18) disposed outside the table base (14) and enclosing the power transmission mechanism.
摘要:
A hydraulic drive system that does not cause a decrease in efficiency of actuators, does not hinder an optimal action of devices such as flow adjustment valves, and does not cause any corrosion of water acting as an operating fluid. The system uses water as an operating fluid. The system includes a hydraulic generation apparatus 40 including, a main tank 41, a return path 52, an accessory tank 54, and a water disposal apparatus 56 disposed in a path 57. The operating fluid from structuring devices of the processing apparatuses 10, 20 and 30 flows through the return path 52. The operating fluid flows from the accessory tank 54 to the main tank 41 through the path 57 and the water disposal apparatus 56.
摘要:
A hydraulic control valve has a valve block provided with a plurality of ports, a valve body formed with ports corresponding to the ports of the valve block, and a plate disposed between the valve block and the valve body. The plate has a flow passage for providing communication between the ports of the valve block and the ports of the valve body. A filter is disposed in the flow passage.
摘要:
A method of dressing a polishing member with a diamond dresser having diamond particles arranged on a surface thereof is provided. The method includes determining dressing conditions by performing a simulation of a distribution of a sliding distance of the diamond dresser on a surface of the polishing member, and dressing the polishing member with the diamond dresser under the dressing conditions determined. The simulation includes calculation of the sliding distance corrected in accordance with a depth of the diamond particles thrusting into the polishing member.
摘要:
A polishing apparatus is provided for polishing wafers at a high yield rate even if roll-off exists. The polishing apparatus polishes a wafer W by applying a pressure between a polishing member (polishing pad) 201 and the wafer W held by a holding member (top ring) 52 and relatively moving the polishing member 201 to the wafer W. The polishing apparatus comprises a top ring 52 for holding the wafer W, a pressure adjusting mechanism 206 for adjusting a supporting pressure with which the wafer W is supported on a supporting surface by a retainer ring 203, and a control unit 208 for controlling the pressure adjusting mechanism 206 to bring the supporting pressure to a desired pressure based on a roll off quantity of the wafer W. The top ring 52 comprises an air bag 202 for pressing the wafer W against the polishing pad 201, a retainer ring 203 which surrounds the wafer W, and an air bag 204 for pressing the retainer ring 203.
摘要:
An ink-jet recording method is disclosed, including recording on an ink-jet recording sheet containing a non-water-absorbing support and provided thereon an ink absorbing layer containing polyvinyl alcohol, fine inorganic particles and boric acid or its salt, using an ink-jet recording apparatus and a water-based recording liquid containing a high boiling solvent compound having a hydroxy group, wherein the amount of boric acid or its salt contained in the ink absorbing layer of the recording sheet (X), the amount of a hydroxy group contained in polyvinyl alcohol contained in the ink absorbing layer of the recording sheet (Y) and the maximum amount of the the hydroxy group contained in the high boiling solvent contained in a unit area when recorded on the recording sheet at a maximum ejecting amount of the water-based recording liquid (Z) satisfy the following requirements: 0.05≦X/Y≦0.5 (1) Z/Y≦4. (2)
摘要:
A silver halide photographic light-sensitive material is disclosed, which comprises a support and a silver halide photographic emulsion layer and a protective layer provided in that order on a first side of the support, and a backing layer and a protective backing layer provided in that order on a second side of the support opposite to the silver halide photographic emulsion layer, an outermost layer of the material containing a fluorine-containing anionic surfactant and a fluorine-containing cationic surfactant and an outermost layer on the second side of the support containing a compound represented by the Following formula (A) or (B):Formula (A) RCOOMFormula (B) R.sub.1 --CO--O--X--O--CO--R.sub.2.
摘要:
A polishing apparatus (30) has a polishing surface (32), a top ring (36) for holding a wafer (W), motors (46, 56) to move the polishing surface (32) and the wafer (W) relative to each other at a relative speed, and a vertical movement mechanism (54) to press the wafer (W) against the polishing surface (32) under a pressing pressure. The polishing apparatus (30) also has a controller (44) to adjust a polishing condition in a non-Preston range in which a polishing rate is not proportional to a product of the pressing pressure and the relative speed. The polishing apparatus (30) can simultaneously achieve uniform supply of a chemical liquid to a surface of the wafer (W) and a uniform polishing rate within the surface of the wafer (W).
摘要:
In an ink jet recording sheet having an ink absorptive layer comprising hydrophilic binder, fine particles having average particle diameter of not more than 200 nm and water soluble cationic polymer having specific structure, wherein the layer surface pH of said ink absorptive layer of 3 to 6.
摘要:
An ink-jet recording sheet has a recording layer comprising a hydrophilic binder, fine inorganic particles having an average primary particle diameter of 30 nm or less, and a cation type water-soluble mordant having an average molecular weight of 50,000 or less. An ink-jet recording method in which excellent water resistance is provided.