公开(公告)号：US07999949B2

公开(公告)日：2011-08-16

申请号：US11739679

申请日：2007-04-24

Applicant: Tongxin Lu ,  Xiaohan Wang

Inventor： Tongxin Lu ,  Xiaohan Wang

IPC: G01B11/30

CPC classification number: G01N21/211 ,  G01B11/0625 ,  G01N21/9501 ,  G01N2021/213 ,  G01N2021/8427 ,  G01N2201/0636 ,  G01N2201/0637

Abstract: The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. A method is disclosed for extracting information of a device-under-test for an ellipsometer, comprising the steps: providing a plurality of incoming polarized beams using a plurality of polarizers, where each of the beams being polarized at a designated polarizing angle; using a parabolic reflector to focus said plurality of incoming polarized beams on a spot on a DUT; using a parabolic reflector to collect a plurality of beams reflected from said DUT; and analyzing said collected beams using a plurality of analyzers, wherein each of the analyzers having a designated polarizing angle with respect to its respective polarizer.

Abstract translation: 本发明公开了一种光学测量和/或检查装置，其在一个应用中可用于半导体器件的检查。 公开了一种用于提取椭偏仪的未测试装置的信息的方法，包括以下步骤：使用多个偏振器提供多个入射偏振光束，其中每个光束以指定的偏振角极化; 使用抛物面反射器将所述多个入射偏振光束聚焦在DUT上的点上; 使用抛物面反射器收集从所述DUT反射的多个光束; 以及使用多个分析器分析所述收集的束，其中每个分析器相对于其各自的偏振器具有指定的偏振角。

公开(公告)号：US20070263220A1

公开(公告)日：2007-11-15

申请号：US11747173

申请日：2007-05-10

Applicant: Tongxin Lu ,  Xiaohan Wang

Inventor： Tongxin Lu ,  Xiaohan Wang

IPC: G01J4/00 ,  G01N21/55

CPC classification number: G01J3/02 ,  G01J3/0216 ,  G01J3/0224 ,  G01J3/0243 ,  G01J3/10 ,  G01N21/8806

Abstract: The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. It comprises a light source for providing light rays; a half-parabolic-shaped reflector having an inner reflecting surface, where the reflector having a focal point and an axis of summary, and a device-under-test is disposed thereabout the focal point. The light rays coming into the reflector that is in-parallel with the axis of summary would be directed to the focal point and reflect off said device-under-test and generate information indicative of said device-under-test, and then the reflected light rays exit said reflector. A detector array receives the exited light rays and the light rays can be analyzed to determine the characteristics of the device-under-test.

Abstract translation: 本发明公开了一种光学测量和/或检查装置，其在一个应用中可用于半导体器件的检查。 它包括用于提供光线的光源; 具有内部反射表面的半抛物线形反射器，其中具有焦点和总结轴的反射器和被测试装置设置在焦点附近。 进入反射器的与概要轴平行的光线将被引导到焦点并反射出所测试的设备，并产生指示所述被测器件的信号，然后反射光 射线离开所述反射器。 检测器阵列接收出射的光线，并且可以分析光线以确定被测器件的特性。

公开(公告)号：US20080024790A1

公开(公告)日：2008-01-31

申请号：US11831880

申请日：2007-07-31

Applicant: Tongxin Lu ,  Xiaohan Wang

Inventor： Tongxin Lu ,  Xiaohan Wang

IPC: G01B9/02

CPC classification number: G01B11/306 ,  G01N21/8806 ,  G01N21/9501

Abstract: An optical inspection device of a device-under-test is disclosed, said device comprising a light source, an image rotator, a parabolic reflector, and one or more detectors, wherein said light source provides a light beam traveling through said image rotator and reflecting off said parabolic reflector to a device-under-test and thereby creating diffracted light beams off said device-under-test, and said diffracted light beams reflecting off said parabolic reflector and travels through said image rotator and are received by the detectors.

Abstract translation: 公开了一种被测设备的光学检测装置，所述装置包括光源，图像旋转器，抛物面反射器和一个或多个检测器，其中所述光源提供穿过所述图像旋转器的光束并反射 将所述抛物面反射器关闭到被测器件，从而产生离开所述器件未被测试的衍射光束，并且所述衍射光束反射离开所述抛物面反射器并且穿过所述图像旋转器并被所述检测器接收。

公开(公告)号：US20070247624A1

公开(公告)日：2007-10-25

申请号：US11739679

申请日：2007-04-24

Applicant: Tongxin Lu ,  Xiaohan Wang

Inventor： Tongxin Lu ,  Xiaohan Wang

IPC: G01J4/00

CPC classification number: G01N21/211 ,  G01B11/0625 ,  G01N21/9501 ,  G01N2021/213 ,  G01N2021/8427 ,  G01N2201/0636 ,  G01N2201/0637

Abstract: The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. A method is disclosed for extracting information of a device-under-test for an ellipsometer, comprising the steps: providing a plurality of incoming polarized beams using a plurality of polarizers, where each of the beams being polarized at a designated polarizing angle; using a parabolic reflector to focus said plurality of incoming polarized beams on a spot on a DUT; using a parabolic reflector to collect a plurality of beams reflected from said DUT; and analyzing said collected beams using a plurality of analyzers, wherein each of the analyzers having a designated polarizing angle with respect to its respective polarizer.

Abstract translation: 本发明公开了一种光学测量和/或检查装置，其在一个应用中可用于半导体器件的检查。 公开了一种用于提取椭偏仪的未测试装置的信息的方法，包括以下步骤：使用多个偏振器提供多个入射偏振光束，其中每个光束以指定的偏振角极化; 使用抛物面反射器将所述多个入射偏振光束聚焦在DUT上的点上; 使用抛物面反射器收集从所述DUT反射的多个光束; 以及使用多个分析器分析所述收集的束，其中每个分析器相对于其各自的偏振器具有指定的偏振角。

公开(公告)号：US20070242267A1

公开(公告)日：2007-10-18

申请号：US11735979

申请日：2007-04-16

Applicant: Tongxin Lu ,  Xiaohan Wang

Inventor： Tongxin Lu ,  Xiaohan Wang

IPC: G01J3/40

CPC classification number: G01N21/9501 ,  G01B11/0625 ,  G01N2021/8427 ,  G01N2201/0636 ,  G01N2201/0637

Abstract: The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. It comprises a light source for providing light rays; a half-parabolic-shaped reflector having an inner reflecting surface, where the reflector having a focal point and an axis of summary, and a device-under-test is disposed thereabout the focal point. The light rays coming into the reflector that is in-parallel with the axis of summary would be directed to the focal point and reflect off said device-under-test and generate information indicative of said device-under-test, and then the reflected light rays exit said reflector. A detector receives the exited light rays and the light rays can be analyzed to determine the characteristics of the device-under-test.

Abstract translation: 本发明公开了一种光学测量和/或检查装置，其在一个应用中可用于半导体器件的检查。 它包括用于提供光线的光源; 具有内部反射表面的半抛物线形反射器，其中具有焦点和总结轴的反射器和被测试装置设置在焦点附近。 进入反射器的与概要轴平行的光线将被引导到焦点并反射出所测试的器件，并产生指示所述被测器件的信号，然后反射光 射线离开所述反射器。 检测器接收退出的光线，并且可以分析光线以确定被测器件的特性。

公开(公告)号：US20100118308A1

公开(公告)日：2010-05-13

申请号：US12436113

申请日：2009-05-05

Applicant: Tongxin Lu ,  Xiaohan Wang

Inventor： Tongxin Lu ,  Xiaohan Wang

IPC: G01N21/55

CPC classification number: G01B11/0625 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0216 ,  G01N21/9501 ,  G01N2021/8427 ,  G01N2201/0637

Abstract: The present invention is an optical system, comprising: a light source for providing light rays; a combined two or more parabolic reflectors or elliptical reflectors having inner reflecting surfaces, wherein the reflectors sharing a common focal point, and a device-under-test is disposed thereabout the focal point; wherein the collimated light rays coming into the parabolic reflector parallel to the axis of symmetry of each parabolic reflector would be directed to the focal point on the surface of the device-under-test. The reflected light rays from the device-under-test are directed by the other parabolic reflectors along the axes of symmetry of each parabolic reflector and generate information indicative of the device-under-test; wherein the reflected light rays exit the reflector; and a detector for receiving the exited light rays.

Abstract translation: 本发明是一种光学系统，包括：用于提供光线的光源; 具有内部反射表面的组合的两个或更多个抛物线反射器或椭圆形反射器，其中共享公共焦点的反射器和被测设备被布置在焦点附近; 其中进入抛物面反射器的平行于每个抛物面反射器的对称轴的准直光线将被引导到被测器件的表面上的焦点。 来自被测器件的反射光线被其他抛物面反射器沿着每个抛物面反射器的对称轴引导，并产生指示被测器件的信息; 其中所述反射光线离开所述反射器; 以及用于接收退出的光线的检测器。

公开(公告)号：US5672877A

公开(公告)日：1997-09-30

申请号：US623908

申请日：1996-03-27

Applicant: John R. Liebig ,  Steven M. Jones ,  Xiaohan Wang

Inventor： John R. Liebig ,  Steven M. Jones ,  Xiaohan Wang

IPC: G01T1/161 ,  G01T1/164 ,  G01T1/166

CPC classification number: G01T1/1648 ,  A61B6/037 ,  A61B6/5235 ,  A61B6/5247

Abstract: A method of coregistering medical image data of different modalities is provided. In the method, an emission scan of an object is performed using a nuclear medicine imaging system to acquire single-photon emission computed tomography (SPECT) image data. A transmission scan of the object is performed simultaneously with the emission scan using the same nuclear medicine imaging system in order to acquire nuclear medicine transmission image data. The emission scan is performed using a roving zoom window, while the transmission scan is performed using the full field of view of the detectors. By knowing the position of the zoom windows for each detection angle, the nuclear medicine transmission image data can be coregistered with the SPECT emission image data as a result of the simultaneous scans. Image data of a modality other than SPECT, such as x-ray computed tomography (x-ray CT) data, magnetic resonance imaging (MRI) data, or positron emission tomography (PET) data, is also provided, which it is desired to have coregistered with the SPECT emission data. The nuclear medicine transmission image data is therefore coregistered with the image data of the different modality. As a result, the image data of the different modality becomes coregistered with the SPECT image data.

Abstract translation: 提供了一种使不同形式的医学图像数据结合的方法。 在该方法中，使用核医学成像系统进行物体的发射扫描，以获取单光子发射计算机断层摄影（SPECT）图像数据。 与使用相同的核医学成像系统的发射扫描同时进行物体的透射扫描，以获得核医学传播图像数据。 使用粗纱缩放窗口进行发射扫描，而使用检测器的全视场执行透射扫描。 通过了解每个检测角度的变焦窗口的位置，作为同时扫描的结果，核医学传播图像数据可以与SPECT发射图像数据结合。 还提供了诸如x射线计算机断层摄影（x射线CT）数据，磁共振成像（MRI）数据或正电子发射断层摄影（PET）数据之外的SPECT之外的模式的图像数据，期望 与SPECT排放数据有核心关系。 因此，核医学传播图像数据与不同形式的图像数据结合在一起。 结果，不同模态的图像数据变得与SPECT图像数据成为核心。

公开(公告)号：US5552606A

公开(公告)日：1996-09-03

申请号：US439134

申请日：1995-05-11

Applicant: Steven M. Jones ,  Michael J. Janicki ,  Thomas E. Lang ,  John R. Liebig ,  Xiaohan Wang

Inventor： Steven M. Jones ,  Michael J. Janicki ,  Thomas E. Lang ,  John R. Liebig ,  Xiaohan Wang

IPC: G01T1/161 ,  G01T1/164 ,  G01T1/00

CPC classification number: G01T1/1615 ,  A61B6/037 ,  G01T1/1611 ,  G01T1/1642 ,  G01T1/1648

Abstract: A variable filter arrangement wherein differently sized and shaped filters are automatically selected and installed from a collection of filters housed within a configuration for use with a radiation source. The line source is typically used for transmission scanning to collect attenuation correction factors. A line source is utilized in the preferred embodiment and a series of filters (e.g., differently sized "bow-tie" filters) are rotatably attached to a central junction so that a particular filter can be rotated into an installed position. When installed, the filter acts to attenuate the radiation emitted from the line source to reduce radiation emitted on an otherwise unobstructed area of a scintillation detector. Differently sized filters are advantageously used to accommodate differently sized patents and also to accommodate different unobstructed parts of a detector for different angles of rotation during an ECT transmission scan. The system includes processing intelligence to automatically select the proper filter given body contour (e.g., profile) information.

Abstract translation: 可变过滤器装置，其中不同尺寸和形状的过滤器被自动选择并从容纳在用于辐射源的配置内的过滤器的集合中安装。 线源通常用于传输扫描以收集衰减校正因子。 在优选实施例中使用线源，并且一系列过滤器（例如，不同尺寸的“蝴蝶结”过滤器）可旋转地附接到中心连接点，使得特定的过滤器可以旋转到安装位置。 当安装时，滤波器用于衰减从线源发射的辐射，以减少在闪烁检测器的其他无阻挡区域上发射的辐射。 不同大小的过滤器有利地用于适应不同大小的专利，并且还可以在ECT传输扫描期间适应不同旋转角度的检测器的不同的不阻碍部分。 该系统包括处理智能以自动选择给定身体轮廓（例如，轮廓）信息的适当的过滤器。

公开(公告)号：US20160073150A1

公开(公告)日：2016-03-10

申请号：US14880244

申请日：2015-10-11

Applicant: Janos Redei ,  Xiaohan Wang

Inventor： Janos Redei ,  Xiaohan Wang

IPC: H04N21/2743 ,  H04N21/222 ,  H04N21/258 ,  H04N7/173

CPC classification number: H04N21/2743 ,  H04N7/17318 ,  H04N21/2223 ,  H04N21/25866 ,  H04N21/25891

Abstract: A technique for post-processing media content on a network by a GPU cloud computing system is provided. The system includes a plurality of computer systems providing a content submission connection for uploading the media content. The system includes a processor configured to receive descriptive information related to the media content via the network, receive the media content via the content submission connection which has a quicker uploading bandwidth than the network, process the media content; and distribute processed media content via the network that is separated from the content submission connection. The system further includes a distributed GPU cloud computing platform to perform parallel post-processing of the media content, and an immersive 3D interface.

Abstract translation: 提供了一种由GPU云计算系统对网络上的媒体内容进行后处理的技术。 该系统包括提供用于上载媒体内容的内容提交连接的多个计算机系统。 该系统包括经由网络接收与媒体内容相关的描述信息的处理器，经由内容提交连接接收媒体内容，该内容提交连接具有比网络更快的上传带宽，处理媒体内容; 并通过与内容提交连接分离的网络来分发经处理的媒体内容。 该系统还包括分布式GPU云计算平台，用于执行媒体内容的并行后处理，以及沉浸式3D界面。

公开(公告)号：US5081581A

公开(公告)日：1992-01-14

申请号：US331993

申请日：1989-03-31

Applicant: Kenneth F. Koral ,  W. Leslie Rogers ,  Neal H. Clinthorne ,  Xiaohan Wang

Inventor： Kenneth F. Koral ,  W. Leslie Rogers ,  Neal H. Clinthorne ,  Xiaohan Wang

IPC: G01T1/164 ,  G06T11/00

CPC classification number: G06T11/005 ,  G01T1/1647

Abstract: A system for removing the effects of Compton scattering in systems such as tomographic scanning and radioisotope imaging arrangements, which detect gamma rays, utilizes the smoothness of the Compton component over the image to reduce computing time. Data responsive to energy states of the photons which are detected are received and values corresponding thereto are stored in at least one memory location. In some embodiments, where imaging is the ultimate function of the gamma ray detection system, the data correspond to predetermined image grid points. Also, the data which is stored is processed so as to be separated into a first data set corresponding to unscattered ones of the detected photons and a second data set corresponding to scattered ones of the detected photons. The gamma ray detection arrangement is calibrated by acquiring a spectral shape corresponding to unscattered photons. The processing utilizes non-linear least squares fitting analysis. The first data set is summed within specified limits, for determining a number of the unscattered ones of the detected photons. A scatter-free image can then be formed from this data set.

Abstract translation: 用于消除科普顿散射在诸如层析扫描和放射性同位素成像布置的系统中的影响的系统，其检测伽马射线，利用Compton分量在图像上的平滑度来减少计算时间。 接收响应于检测到的光子的能量状态的数据，并且对应于其的值被存储在至少一个存储器位置中。 在一些实施例中，其中成像是伽马射线检测系统的最终功能，数据对应于预定的图像网格点。 而且，对存储的数据进行处理，以被分离成对应于未被分散的检测到的光子的第一数据集和对应于所检测到的光子的散射的第二数据集。 通过获取对应于未散射光子的光谱形状来校准伽马射线检测装置。 该处理采用非线性最小二乘拟合分析。 第一数据集合在指定限度内，用于确定检测到的光子中未散射的光子的数量。 然后可以从该数据集形成无散射图像。