公开(公告)号：US06633371B1

公开(公告)日：2003-10-14

申请号：US10185539

申请日：2002-06-26

Applicant: Tongxin Lu ,  Zheng Yan

Inventor： Tongxin Lu ,  Zheng Yan

IPC: G01N2100

CPC classification number: G01M11/33

Abstract: Method and apparatus for wavelength control and measurement are disclosed. An optical signal to be measured is tapped off a portion thereof referring to as a source signal. Together with a reference signal, the source signal is coupled to a tunable filter. The frequency response or passing band of the tunable filter is so controlled that one wavelength &lgr;x from the source signal and one wavelength &lgr;rx from the reference signal transmit through. Relying on a band separation filter, the wavelength &lgr;rx is separated from the reference signal and coupled to a gas cell of a known spectrum, a filtered signal of the wavelength &lgr;rx is then coupled to a photo-detector for subsequent electrical measurement. In accordance with the known spectrum, the wavelength &lgr;x can be precisely derived.

Abstract translation: 公开了用于波长控制和测量的方法和装置。 将要测量的光信号作为源信号从其一部分分接。 与参考信号一起，源信号耦合到可调滤波器。 可调谐滤波器的频率响应或通过频带受到如此控制，从源信号和一个波长λ rx 的一个波长λ x 从参考信号传输通过。 依赖于带分离滤光器，将波长λ rx 与参考信号分离，并耦合到已知光谱的气体单元，波长λ rx 然后耦合到光电检测器以进行后续的电测量。 根据已知的光谱，可以精确地导出波长λ x 。

公开(公告)号：US20080024790A1

公开(公告)日：2008-01-31

申请号：US11831880

申请日：2007-07-31

Applicant: Tongxin Lu ,  Xiaohan Wang

Inventor： Tongxin Lu ,  Xiaohan Wang

IPC: G01B9/02

CPC classification number: G01B11/306 ,  G01N21/8806 ,  G01N21/9501

Abstract: An optical inspection device of a device-under-test is disclosed, said device comprising a light source, an image rotator, a parabolic reflector, and one or more detectors, wherein said light source provides a light beam traveling through said image rotator and reflecting off said parabolic reflector to a device-under-test and thereby creating diffracted light beams off said device-under-test, and said diffracted light beams reflecting off said parabolic reflector and travels through said image rotator and are received by the detectors.

Abstract translation: 公开了一种被测设备的光学检测装置，所述装置包括光源，图像旋转器，抛物面反射器和一个或多个检测器，其中所述光源提供穿过所述图像旋转器的光束并反射 将所述抛物面反射器关闭到被测器件，从而产生离开所述器件未被测试的衍射光束，并且所述衍射光束反射离开所述抛物面反射器并且穿过所述图像旋转器并被所述检测器接收。

公开(公告)号：US20070247624A1

公开(公告)日：2007-10-25

申请号：US11739679

申请日：2007-04-24

Applicant: Tongxin Lu ,  Xiaohan Wang

Inventor： Tongxin Lu ,  Xiaohan Wang

IPC: G01J4/00

CPC classification number: G01N21/211 ,  G01B11/0625 ,  G01N21/9501 ,  G01N2021/213 ,  G01N2021/8427 ,  G01N2201/0636 ,  G01N2201/0637

Abstract: The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. A method is disclosed for extracting information of a device-under-test for an ellipsometer, comprising the steps: providing a plurality of incoming polarized beams using a plurality of polarizers, where each of the beams being polarized at a designated polarizing angle; using a parabolic reflector to focus said plurality of incoming polarized beams on a spot on a DUT; using a parabolic reflector to collect a plurality of beams reflected from said DUT; and analyzing said collected beams using a plurality of analyzers, wherein each of the analyzers having a designated polarizing angle with respect to its respective polarizer.

Abstract translation: 本发明公开了一种光学测量和/或检查装置，其在一个应用中可用于半导体器件的检查。 公开了一种用于提取椭偏仪的未测试装置的信息的方法，包括以下步骤：使用多个偏振器提供多个入射偏振光束，其中每个光束以指定的偏振角极化; 使用抛物面反射器将所述多个入射偏振光束聚焦在DUT上的点上; 使用抛物面反射器收集从所述DUT反射的多个光束; 以及使用多个分析器分析所述收集的束，其中每个分析器相对于其各自的偏振器具有指定的偏振角。

公开(公告)号：US20070242267A1

公开(公告)日：2007-10-18

申请号：US11735979

申请日：2007-04-16

Applicant: Tongxin Lu ,  Xiaohan Wang

Inventor： Tongxin Lu ,  Xiaohan Wang

IPC: G01J3/40

CPC classification number: G01N21/9501 ,  G01B11/0625 ,  G01N2021/8427 ,  G01N2201/0636 ,  G01N2201/0637

Abstract: The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. It comprises a light source for providing light rays; a half-parabolic-shaped reflector having an inner reflecting surface, where the reflector having a focal point and an axis of summary, and a device-under-test is disposed thereabout the focal point. The light rays coming into the reflector that is in-parallel with the axis of summary would be directed to the focal point and reflect off said device-under-test and generate information indicative of said device-under-test, and then the reflected light rays exit said reflector. A detector receives the exited light rays and the light rays can be analyzed to determine the characteristics of the device-under-test.

Abstract translation: 本发明公开了一种光学测量和/或检查装置，其在一个应用中可用于半导体器件的检查。 它包括用于提供光线的光源; 具有内部反射表面的半抛物线形反射器，其中具有焦点和总结轴的反射器和被测试装置设置在焦点附近。 进入反射器的与概要轴平行的光线将被引导到焦点并反射出所测试的器件，并产生指示所述被测器件的信号，然后反射光 射线离开所述反射器。 检测器接收退出的光线，并且可以分析光线以确定被测器件的特性。

公开(公告)号：US5654820A

公开(公告)日：1997-08-05

申请号：US415892

申请日：1995-04-03

Applicant: Tongxin Lu ,  Satish S. Udpa

Inventor： Tongxin Lu ,  Satish S. Udpa

IPC: G06T11/00 ,  G02B26/08 ,  G01S13/00 ,  G06F15/00

CPC classification number: G06T11/006 ,  G06T2211/424

Abstract: An optoelectronic tomographic reconstruction system utilizes spacial light modulators in charge couple devices to perform projection iterative reconstruction techniques and simultaneous iterative reconstruction techniques. A back projection processor uses a linear array of analog spacial light modulators in a cylindrical lens, an image detection array, and an image rotator. The image rotator smears a projected image at the same angle as the projection was taken. The back projection processor thus smears the projection back to the image space. An optoelectronic forward projection processor uses an spacial light modulator array, an image rotator, and an image detecting array. A reconstructed image displayed by the spacial light modulator is smeared by the rotator to forward project the reconstructed image on the image detecting array at the same angle as when the measured projection was taken. The forward projection processor thus smears the reconstructed image back into the projection space.

Abstract translation: 光电断层重建系统利用电荷耦合器件中的空间光调制器来执行投影迭代重建技术和同步迭代重建技术。 背投影处理器在柱面透镜，图像检测阵列和图像旋转器中使用模拟空间光调制器的线性阵列。 图像旋转器以与投影拍摄的角度相同的角度涂抹投影图像。 背投影处理器因此将投影物涂抹回图像空间。 光电前投影处理器使用空间光调制器阵列，图像旋转器和图像检测阵列。 由空间光调制器显示的重建图像被旋转体涂抹，以与测量的投影时相同的角度向前投影图像检测阵列上的重建图像。 因此，前向投影处理器将重建的图像拖回投影空间。

公开(公告)号：US5414623A

公开(公告)日：1995-05-09

申请号：US880716

申请日：1992-05-08

Applicant: Tongxin Lu ,  Satish S. Udpa

Inventor： Tongxin Lu ,  Satish S. Udpa

IPC: G06T11/00 ,  G06F15/00

CPC classification number: G06T11/006 ,  G06T2211/424

Abstract: An optoelectronic tomographic reconstruction system utilizes spacial light modulators in charge couple devices to perform projection iterative reconstruction techniques and simultaneous iterative reconstruction techniques. A back projection processor uses a linear array of analog spacial light modulators in a cylindrical lens, an image detection array, and an image rotator. The image rotator smears a projected image at the same angle as the projection was taken. The back projection processor thus smears the projection back to the image space. An optoelectronic forward projection processor uses an spacial light modulator array, an image rotator, and an image detecting array. A reconstructed image displayed by the spacial light modulator is smeared by the rotator to forward project the reconstructed image on the image detecting array at the same angle as when the measured projection was taken. The forward projection processor thus smears the reconstructed image back into the projection space.

Abstract translation: 光电断层重建系统利用电荷耦合器件中的空间光调制器来执行投影迭代重建技术和同步迭代重建技术。 背投影处理器在柱面透镜，图像检测阵列和图像旋转器中使用模拟空间光调制器的线性阵列。 图像旋转器以与投影拍摄的角度相同的角度涂抹投影图像。 背投影处理器因此将投影物涂抹回图像空间。 光电前投影处理器使用空间光调制器阵列，图像旋转器和图像检测阵列。 由空间光调制器显示的重建图像被旋转体涂抹，以与测量的投影时相同的角度向前投影图像检测阵列上的重建图像。 因此，前向投影处理器将重建的图像拖回投影空间。

公开(公告)号：US20100118308A1

公开(公告)日：2010-05-13

申请号：US12436113

申请日：2009-05-05

Applicant: Tongxin Lu ,  Xiaohan Wang

Inventor： Tongxin Lu ,  Xiaohan Wang

IPC: G01N21/55

CPC classification number: G01B11/0625 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0216 ,  G01N21/9501 ,  G01N2021/8427 ,  G01N2201/0637

Abstract: The present invention is an optical system, comprising: a light source for providing light rays; a combined two or more parabolic reflectors or elliptical reflectors having inner reflecting surfaces, wherein the reflectors sharing a common focal point, and a device-under-test is disposed thereabout the focal point; wherein the collimated light rays coming into the parabolic reflector parallel to the axis of symmetry of each parabolic reflector would be directed to the focal point on the surface of the device-under-test. The reflected light rays from the device-under-test are directed by the other parabolic reflectors along the axes of symmetry of each parabolic reflector and generate information indicative of the device-under-test; wherein the reflected light rays exit the reflector; and a detector for receiving the exited light rays.

Abstract translation: 本发明是一种光学系统，包括：用于提供光线的光源; 具有内部反射表面的组合的两个或更多个抛物线反射器或椭圆形反射器，其中共享公共焦点的反射器和被测设备被布置在焦点附近; 其中进入抛物面反射器的平行于每个抛物面反射器的对称轴的准直光线将被引导到被测器件的表面上的焦点。 来自被测器件的反射光线被其他抛物面反射器沿着每个抛物面反射器的对称轴引导，并产生指示被测器件的信息; 其中所述反射光线离开所述反射器; 以及用于接收退出的光线的检测器。

公开(公告)号：US07999949B2

公开(公告)日：2011-08-16

申请号：US11739679

申请日：2007-04-24

Applicant: Tongxin Lu ,  Xiaohan Wang

Inventor： Tongxin Lu ,  Xiaohan Wang

IPC: G01B11/30

CPC classification number: G01N21/211 ,  G01B11/0625 ,  G01N21/9501 ,  G01N2021/213 ,  G01N2021/8427 ,  G01N2201/0636 ,  G01N2201/0637

Abstract: The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. A method is disclosed for extracting information of a device-under-test for an ellipsometer, comprising the steps: providing a plurality of incoming polarized beams using a plurality of polarizers, where each of the beams being polarized at a designated polarizing angle; using a parabolic reflector to focus said plurality of incoming polarized beams on a spot on a DUT; using a parabolic reflector to collect a plurality of beams reflected from said DUT; and analyzing said collected beams using a plurality of analyzers, wherein each of the analyzers having a designated polarizing angle with respect to its respective polarizer.

Abstract translation: 本发明公开了一种光学测量和/或检查装置，其在一个应用中可用于半导体器件的检查。 公开了一种用于提取椭偏仪的未测试装置的信息的方法，包括以下步骤：使用多个偏振器提供多个入射偏振光束，其中每个光束以指定的偏振角极化; 使用抛物面反射器将所述多个入射偏振光束聚焦在DUT上的点上; 使用抛物面反射器收集从所述DUT反射的多个光束; 以及使用多个分析器分析所述收集的束，其中每个分析器相对于其各自的偏振器具有指定的偏振角。

公开(公告)号：US20070263220A1

公开(公告)日：2007-11-15

申请号：US11747173

申请日：2007-05-10

Applicant: Tongxin Lu ,  Xiaohan Wang

Inventor： Tongxin Lu ,  Xiaohan Wang

IPC: G01J4/00 ,  G01N21/55

CPC classification number: G01J3/02 ,  G01J3/0216 ,  G01J3/0224 ,  G01J3/0243 ,  G01J3/10 ,  G01N21/8806

Abstract: The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. It comprises a light source for providing light rays; a half-parabolic-shaped reflector having an inner reflecting surface, where the reflector having a focal point and an axis of summary, and a device-under-test is disposed thereabout the focal point. The light rays coming into the reflector that is in-parallel with the axis of summary would be directed to the focal point and reflect off said device-under-test and generate information indicative of said device-under-test, and then the reflected light rays exit said reflector. A detector array receives the exited light rays and the light rays can be analyzed to determine the characteristics of the device-under-test.

Abstract translation: 本发明公开了一种光学测量和/或检查装置，其在一个应用中可用于半导体器件的检查。 它包括用于提供光线的光源; 具有内部反射表面的半抛物线形反射器，其中具有焦点和总结轴的反射器和被测试装置设置在焦点附近。 进入反射器的与概要轴平行的光线将被引导到焦点并反射出所测试的设备，并产生指示所述被测器件的信号，然后反射光 射线离开所述反射器。 检测器阵列接收出射的光线，并且可以分析光线以确定被测器件的特性。

公开(公告)号：US06674953B2

公开(公告)日：2004-01-06

申请号：US10038079

申请日：2002-01-02

Applicant: Zhupei Shi ,  Tongxin Lu ,  Minh Tran ,  Jerry Lee

Inventor： Zhupei Shi ,  Tongxin Lu ,  Minh Tran ,  Jerry Lee

IPC: G02B600

CPC classification number: G02B6/266

Abstract: A controllable attenuator includes a pair of collimators respectively connected to input and output fibers. A pair of reflection devices are respectively positioned behind the pair of collimators opposite to the corresponding input and output fibers. A U-like light path is defined among the pair of collimators and the pair of reflection devices. A neutral density filter is moveably positioned between the pair of reflection devices wherein a moving direction of the filter is preferably parallel to a longitudinal direction of the pair of collimators. An ND filter position indicator such as a potentiometer, is used to dynamically monitor attenuation setting.

Abstract translation: 可控衰减器包括分别连接到输入和输出光纤的一对准直器。 一对反射装置分别位于与对应的输入和输出光纤相对的一对准直器的后面。 在一对准直器和一对反射装置中限定U形光路。 中性密度过滤器可移动地定位在一对反射装置之间，其中过滤器的移动方向优选地平行于一对准直器的纵向方向。 ND滤波器位置指示器（如电位计）用于动态监测衰减设置。