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1.发明授权Joint structure for coupling components in a joint portion of a fluid flow passage 有权用于联接流体流动通道的接合部分中的部件的接头结构公开(公告)号：US06945568B2
公开(公告)日：2005-09-20
申请号：US10285479
申请日：2002-11-01
Applicant: Toshihiko Ozawa , Takashi Imai
Inventor： Toshihiko Ozawa , Takashi Imai
CPC classification number: F16L13/02 , F16L13/10 , F16L23/00 , Y10T403/477
Abstract: In a joint structure for coupling a first component (21) to a second component (22) in a joint portion of a fluid flow passage, the second component (22) has a portion thereof inserted into the first component (21) to engage with the first component (21). The second component (22) is provided with a flange portion (26), which is disposed adjacent to a bottom surface of the first component (21) and welded or bonded to the bottom surface, so that these components (22, 21) are coupled with each other in an easy and a fluid-tight manner in a condition in which they are prevented from rotating relative to each other without using any locking pin. There is no fear that the components (22, 21) dissolve in a fluid or gaseous material passing through the fluid flow passage. The joint structure is easy in maintenance.
Abstract translation: 在用于将流体流动通道的接合部分中的第一部件（21）耦合到第二部件（22）的接合结构中，第二部件（22）的一部分插入到第一部件（21）中以与 第一部件（21）。 第二部件（22）设置有凸缘部分（26），其邻近第一部件（21）的底表面设置并焊接或粘合到底表面，使得这些部件（22,21）是 在不使用任何锁定销的情况下，在彼此相对于彼此旋转的状态下以易于且流体密封的方式彼此联接。 不用担心组分（22,21）溶解在通过流体流动通道的流体或气体材料中。 接头结构维护方便。
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公开(公告)号：US5739898A
公开(公告)日：1998-04-14
申请号：US312241
申请日：1994-09-26
Applicant: Toshihiko Ozawa , Masaya Komatsu , Masato Shibuya , Hiroshi Ooki , Masaomi Kameyama , Yoshifumi Tokoyoda
Inventor： Toshihiko Ozawa , Masaya Komatsu , Masato Shibuya , Hiroshi Ooki , Masaomi Kameyama , Yoshifumi Tokoyoda
CPC classification number: G03F7/70566 , G03F7/70125 , G03F7/70475 , G03F7/70583
Abstract: The present invention relates to a projection exposure method and an exposure apparatus for projecting a pattern on a photo-mask through a projection optical system onto a predetermined photosensitive material. The photosensitive material is a nonlinear photosensitive material in which the effective light intensity distribution is nonlinear to the intensity of incident exposure light. Further, multiple exposure is made with plural patterns having a certain lateral shift therebetween, or multiple exposure is made with shifting the position of an identical pattern, whereby multiple exposure is effected with patterns different in intensity distribution on the photosensitive material. A high-resolution pattern can be formed over the resolution limit of projection optical system by the above arrangement.
Abstract translation: 本发明涉及一种用于通过投影光学系统将光掩模上的图案投影到预定感光材料上的投影曝光方法和曝光装置。 感光材料是非线性感光材料，其中有效光强度分布对入射曝光光的强度是非线性的。 此外，通过在其间具有一定的横向偏移的多个图案进行多次曝光，或者通过移位相同图案的位置进行多次曝光，由此通过感光材料上的强度分布不同的图案来实现多次曝光。 通过上述布置，可以在投影光学系统的分辨率极限上形成高分辨率图案。
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公开(公告)号：US06945437B2
公开(公告)日：2005-09-20
申请号：US10245592
申请日：2002-09-18
Applicant: Toshihiko Ozawa , Takashi Imai
Inventor： Toshihiko Ozawa , Takashi Imai
CPC classification number: B67D7/007 , B67D7/0272 , B67D7/0294
Abstract: In a siphon tube (1) of a reservoir, even when a front end of tube (1) is in the vicinity of the bottom of the reservoir, there is no fear that slurries are sucked by tube (1) which: reaches the bottom of the reservoir to draw a liquid contained therein out of the reservoir is characterized by a liquid-inlet opening (3) directed normal to a longitudinal axis of tube (1). Tube (1) has its front end formed into: an inverted T-shape provided with opposite end openings in a laterally extending portion thereof, each of which openings forms the liquid-inlet opening (3); or, an L-shaped curved form a front end of which forms an opening directed normal to the longitudinal axis of tube (1); or, is closed with a cap so that an opening is disposed adjacent to an upper surface of the cap to serve as the liquid-inlet opening.
Abstract translation: 在储存器的虹吸管（1）中，即使当管（1）的前端处于储存器底部附近时，也不必担心由管（1）吸出浆料，该管（1）到达底部 将储存器中所含的液体抽出储存器的特征在于垂直于管（1）的纵向轴线的液体入口开口（3）。 管（1）的前端形成为：在其横向延伸部分中设置有相对端部开口的倒T形，每个开口形成液体入口（3）; 或者L形弯曲形式，其前端形成垂直于管（1）的纵向轴线的开口; 或者用盖封闭，使得开口邻近盖的上表面设置以用作液体入口。
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4.发明申请Projection optical system and an exposure apparatus with the projection optical system 审中-公开投影光学系统和投影光学系统的曝光装置公开(公告)号：US20050122499A1
公开(公告)日：2005-06-09
申请号：US10982781
申请日：2004-11-08
Applicant: Yasuhiro Omura , Naomasa Shiraishi , Issey Tanaka , Soichi Owa , Toshihiko Ozawa , Shunsuke Niisaka
Inventor： Yasuhiro Omura , Naomasa Shiraishi , Issey Tanaka , Soichi Owa , Toshihiko Ozawa , Shunsuke Niisaka
CPC classification number: G02B17/0892 , G02B13/24 , G02B17/08 , G03F7/70225 , G03F7/70233 , G03F7/70358 , G03F7/70566 , G03F7/70966
Abstract: A projection optical system, which forms a reduced image of a first surface onto a second surface, has excellent optical performance without substantially being affected by birefringence despite the use of optical material having intrinsic birefringence. This is done by suitably arranging certain crystal axes of radiation transmissive members that make up the projection optical system relative to the optical axis of the projection optical system, and by suitably arranging the certain crystal axes of the radiation transmissive members relative to the crystal axes of other radiation transmissive members in the projection optical system.
Abstract translation: 将第一表面的缩小图像形成到第二表面上的投影光学系统虽然使用具有固有双折射的光学材料，但是基本上不受双折射的影响，具有优异的光学性能。 这通过适当地布置构成投影光学系统的相对于投影光学系统的光轴的辐射透射构件的某些晶轴，并且通过将辐射透射构件的某些晶轴相对于晶体轴适当地布置 投影光学系统中的其他辐射透射构件。
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公开(公告)号：US06870668B2
公开(公告)日：2005-03-22
申请号：US10398524
申请日：2001-10-09
Applicant: Toshihiko Ozawa
Inventor： Toshihiko Ozawa
CPC classification number: G03F7/70591 , G02B7/36 , G02B27/0012 , G02B27/0043 , G03F7/706 , G03F7/70966
Abstract: The present invention accomplishes an evaluation of image formation performance in which the influence of a coat is accurately reflected. According to the present invention, for the evaluation of image formation performance of an optical system obtained is a pupil transmittance distribution (a distribution of light transmittance on an exit pupil surface) of a light beam that enters an image point to be evaluated of the optical system. At least one of a rotational symmetrical component, an odd symmetrical component, and an even symmetrical component is extracted from the obtained pupil transmittance distribution as an evaluation index.
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Patent Agency Ranking
公开(公告)号：US06843285B2
公开(公告)日：2005-01-18
申请号：US10434562
申请日：2003-05-09
Applicant: Toshihiko Ozawa
Inventor： Toshihiko Ozawa
IPC: B65D41/02 , B65D8/02 , B67D1/08 , B67D7/02 , B67D7/32 , F16L37/23 , B65B1/04 , B65B3/04 , B67C3/00
CPC classification number: B67D1/0835 , B67D7/0288 , Y10T137/86324 , Y10T137/86332 , Y10T137/8634 , Y10T137/86348
Abstract: The object of this invention is to improve safety by preventing the leakage of liquid caused by the internal pressure of a container. A liquid path plug in which a pipe is provided in the lid section of the plug, and a gas path plug which does not have a pipe are attached to openings of the container. The engaging groove section is formed on the end surface of the liquid path cap which closes the through hole provided in the liquid path plug section of the liquid path plug. The engaging protrusion section and the engaging hole section are formed on the end surface of the gas path cap which is provided in the gas path plug section of the gas path plug and closes the through hole. The gas path cap is detached by engaging the engaging pin of the detaching fixture on the engaging hole section of the gas path cap and by turning the gas path cap. The liquid path cap is detached by engaging the engaging protrusion section of the detached gas path cap on the engaging groove section of the liquid path cap and by turning the gas path cap.
Abstract translation: 本发明的目的是通过防止由容器的内部压力引起的液体泄漏来提高安全性。 其中在塞子的盖部分中设置管的液体通道塞和不具有管的气体通道塞被附接到容器的开口。 接合槽部形成在液体通道帽的端面上，其封闭设置在液体通道插塞的液体通道插塞部分中的通孔。 接合突起部分和接合孔部分形成在设置在气体路径塞的气体路径插塞部分中的气体通道帽的端表面上并且关闭通孔。 通过将分离固定件的接合销接合在气体通道帽的接合孔部分上并且转动气体通道帽来分离气体通道盖。 通过使分离的气体通道盖的接合突起部分接合在液体通道帽的接合槽部分上并转动气体通道帽来分离液体通道盖。
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公开(公告)号：US20050018278A1
公开(公告)日：2005-01-27
申请号：US10921227
申请日：2004-08-19
Applicant: Toshihiko Ozawa
Inventor： Toshihiko Ozawa
CPC classification number: G03F7/70591 , G02B7/36 , G02B27/0012 , G02B27/0043 , G03F7/706 , G03F7/70966
Abstract: The present invention accomplishes an evaluation of image formation performance in which the influence of a coat is accurately reflected. According to the present invention, for the evaluation of image formation performance of an optical system obtained is a pupil transmittance distribution (a distribution of light transmittance on an exit pupil surface) of a light beam that enters an image point to be evaluated of the optical system. At least one of a rotational symmetrical component, an odd symmetrical component, and an even symmetrical component is extracted from the obtained pupil transmittance distribution as an evaluation index.
Abstract translation: 本发明实现了涂层的影响被精确反映的图像形成性能的评价。 根据本发明，对于所获得的光学系统的图像形成性能的评价是进入要被评估的图像点的光束的光瞳透射率分布（出射光瞳表面上的透光率的分布） 系统。 从获得的瞳孔透射率分布中提取旋转对称分量，奇对称分量和均匀对称分量中的至少一个作为评价指标。
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公开(公告)号：US20050018277A1
公开(公告)日：2005-01-27
申请号：US10921138
申请日：2004-08-19
Applicant: Toshihiko Ozawa
Inventor： Toshihiko Ozawa
CPC classification number: G03F7/70591 , G02B7/36 , G02B27/0012 , G02B27/0043 , G03F7/706 , G03F7/70966
Abstract: The present invention accomplishes an evaluation of image formation performance in which the influence of a coat is accurately reflected. According to the present invention, for the evaluation of image formation performance of an optical system obtained is a pupil transmittance distribution (a distribution of light transmittance on an exit pupil surface) of a light beam that enters an image point to be evaluated of the optical system. At least one of a rotational symmetrical component, an odd symmetrical component, and an even symmetrical component is extracted from the obtained pupil transmittance distribution as an evaluation index.
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公开(公告)号：US06661499B2
公开(公告)日：2003-12-09
申请号：US10226347
申请日：2002-08-23
Applicant: Yasuhiro Omura , Toshihiko Ozawa , Takashi Mori , Hideki Komatsuda
Inventor： Yasuhiro Omura , Toshihiko Ozawa , Takashi Mori , Hideki Komatsuda
IPC: G03B2772
CPC classification number: G02B17/0892 , G02B13/143 , G02B17/08 , G03F7/70108 , G03F7/70225 , G03F7/70275 , G03F7/70566
Abstract: A projection exposure apparatus (10) for forming an image of a pattern present on a first object such as a reticle (R) onto a second object, such as a wafer (W). The apparatus comprises along three optical axes (AZ1, AX, AZ2), an illumination optical system capable of illuminating the reticle with partially polarized light, and a catadioptric projection optical system (40-70) arranged adjacent the reticle and opposite the illumination optical system. The catadioptric projection optical system comprises one or more substantially spherical mirrors (48), a plurality of refractive members (42, 48, 72, 74), and one or more plane mirrors (60, 66). The plane mirrors are designed and arranged so as to allow a substantially unpolarized image of the reticle pattern, which is illuminated with partially polarized light, to be formed on the wafer.
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10.发明授权公开(公告)号：US06561039B2
公开(公告)日：2003-05-13
申请号：US10121011
申请日：2002-04-10
Applicant: Toshihiko Ozawa
Inventor： Toshihiko Ozawa
IPC: G01L700
CPC classification number: G01L7/061 , G01L7/063 , G01L19/0672
Abstract: This pressure gauge comprises a mounting section connected to a joint provided partway along a pipeline, and a measurement section provided on the mounting section, and in which the upwards movement of an actuator rod causes a rotation of a needle. In the mounting section, a concave section is provided with a base which interconnects with the inside of the pipeline, and inside this concave section is provided a diaphragm with a closed base, with an outer surface comprising a bellows section formed as a concertina shape, and with a central aperture for housing the tip of the actuator rod, and the pressure of fluid within the pipeline acts upon the base of the diaphragm compressing the diaphragm. At the tip of the actuator rod housed within the housing aperture is installed a protective cap which is constructed from polytetrafluoroethylene resin or a vinyl chloride or the like with excellent chemical resistance.
Abstract translation: 该压力计包括连接到沿着管道一次设置的接头的安装部分和设置在安装部分上的测量部分，并且致动器杆的向上运动引起针的旋转。 在安装部分中，凹部设置有与管道内部相互连接的基部，并且在该凹部内设置有具有封闭基部的隔膜，外表面包括形成为手环形状的波纹管部， 并且具有用于容纳致动器杆的尖端的中心孔，并且管道内的流体的压力作用在压缩膜片的隔膜的基部上。 在容纳在壳体孔内的致动器杆的末端安装有由聚四氟乙烯树脂或具有优异耐化学性的氯乙烯等构成的保护盖。
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