公开(公告)号：US20240247375A1

公开(公告)日：2024-07-25

申请号：US18625401

申请日：2024-04-03

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Gregg KOTTAS ,  Siddharth HARIKRISHNA MOHAN ,  Matthew KING

IPC: C23C16/455 ,  B41J2/00 ,  C23C14/12 ,  C23C14/24 ,  H10K71/13

CPC classification number: C23C16/45563 ,  B41J2/00 ,  C23C14/12 ,  C23C14/24 ,  C23C14/243 ,  C23C16/45519 ,  H10K71/135

Abstract: Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.

公开(公告)号：US20230232697A1

公开(公告)日：2023-07-20

申请号：US18103667

申请日：2023-01-31

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Gregory MCGRAW ,  Gregg KOTTAS ,  Xin XU ,  Julia J. BROWN

IPC: B41J2/11 ,  B05B12/18

CPC classification number: H10K71/13 ,  B05B12/18 ,  H10K50/11 ,  H10K71/00 ,  H10K2101/10 ,  H10K2101/40

Abstract: Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.

公开(公告)号：US20230063757A1

公开(公告)日：2023-03-02

申请号：US17880130

申请日：2022-08-03

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Craig Anthony OUTTEN ,  Gregory MCGRAW ,  Kent Khuong NGUYEN ,  Steven Shigeki AOCHI ,  Neil D. NGUYEN ,  David SMILEY ,  Michael FILIPPI

IPC: B05B7/16

Abstract: An organic vapor jet printing (OVJP) device is provided that includes an OVJP print head having a nozzle configured to eject an organic material entrained in a carrier gas, one or more heaters to heat the nozzle, and one or more heat sinks to remove heat from the region of the nozzle. OVJP deposition devices and techniques are also provided in which heat sinks are arranged in the region of one or more OVJP nozzle, which maintain an ambient temperature of not more than 40 C. when the print head is operated at an operating temperature of 450 C.

公开(公告)号：US20210351385A1

公开(公告)日：2021-11-11

申请号：US17224240

申请日：2021-04-07

Applicant: Universal Display Corporation

Inventor： Matthew KING ,  Gregg KOTTAS ,  Gregory MCGRAW ,  William E. QUINN

IPC: H01L51/56 ,  H01L51/00 ,  B41J2/14

Abstract: Embodiments of the disclosed subject matter provide an apparatus having a device with a micronozzle array disposed on a micro-fabricated fluidic die. The device may include a first gas distribution plate and a second opposing plate, where the micro-fabricated fluidic die is disposed between the first gas distribution plate and the second opposing plate, wherein the first gas distribution plate is irreversibly joined to the micronozzle array with a seal that is gas-tight, and where the first gas distribution plate includes a plurality of sealed flow paths. A manifold may be reversibly joined to the first gas distribution plate, where the micro-fabricated fluidic die and the first gas distribution plate and the second opposing plate are disposed between the manifold. A thermally conductive plate may have at least one window that provides a clearance fit for the device across a range of motion relative to the thermally conductive plate.

公开(公告)号：US20210280785A1

公开(公告)日：2021-09-09

申请号：US16331615

申请日：2017-10-18

Applicant: Universal Display Corporation

Inventor： Xin XU ,  Gregory MCGRAW ,  William E. QUINN

IPC: H01L51/00 ,  C23C14/22 ,  C23C14/12 ,  C23C14/24

Abstract: Devices and techniques are provided for depositing material on a substrate, such as for fabrication of OLEDs and layers used in OLEDs. A depositor block includes one or more delivery apertures, one or more exhaust apertures, and one or more confinement gas channels. Each delivery aperture is arranged such that it is between an exhaust aperture and a confinement gas channel, thereby improving deposition by reducing overspray of material.

公开(公告)号：US20210167291A1

公开(公告)日：2021-06-03

申请号：US17142490

申请日：2021-01-06

Applicant: Universal Display Corporation

Inventor： Michael HACK ,  William E. QUINN ,  Gregory MCGRAW ,  William T. MAYWEATHER, III ,  Julia J. BROWN

IPC: H01L51/00 ,  C23C16/30 ,  H01L51/52 ,  H01L51/50

Abstract: Embodiments of the disclosed subject matter provide systems and methods of depositing a film on a selective area of a substrate. A first jet of a first material may be ejected from a first nozzle assembly of a jet head having a plurality of nozzle assemblies to form a first portion of a film deposition on the substrate. A second jet of a second material may be ejected from a second nozzle assembly of the plurality of nozzle assemblies, the second nozzle assembly being aligned with the first nozzle assembly parallel to a direction of motion between the plurality of nozzle assemblies and the substrate, and the second material being different than the first material. The second material may react with the first portion of the film deposition to form a composite film deposition on the substrate when using reactive gas precursors.

公开(公告)号：US20190232325A1

公开(公告)日：2019-08-01

申请号：US16254998

申请日：2019-01-23

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Matthew KING

IPC: B05C5/02 ,  G03F7/00

CPC classification number: B05C5/027 ,  B05C5/0212 ,  G03F7/0015 ,  H01L51/0002 ,  H01L51/5004 ,  H01L2251/552

Abstract: Embodiments of the disclosed subject matter provide a device that may have a first depositor that includes one or more delivery apertures surrounded by one or more exhaust apertures, where the one or more delivery apertures and the one or more exhaust apertures are enclosed within a perimeter of a boss that protrudes from a substrate-facing side of the one or more delivery apertures. The delivery channels for the one or more delivery apertures and exhaust channels for the one or more exhaust apertures may be routed orthogonally to each other. The one or more delivery apertures may be configured to permit jets of delivery gas pass through a lower surface of the first depositor. The lower surface of the first depositor may include the one or more exhaust apertures to remove surplus vapor from a delivery zone. Embodiments may also provide a method of forming a print head.

公开(公告)号：US20230112871A1

公开(公告)日：2023-04-13

申请号：US18079976

申请日：2022-12-13

Applicant: Universal Display Corporation

Inventor： Xin XU ,  Gregory MCGRAW ,  William E. QUINN ,  Gregg KOTTAS ,  Jason PAYNTER ,  Julia J. BROWN

IPC: H01L51/00

Abstract: Embodiments of the disclosed subject matter provide a device having a substrate, and a plurality of unit areas of an organic light emitting diode (OLED) display disposed on the substrate. The unit areas may be repeating, area-filling subdivisions on the substrate that each have an anode and a cathode. The organic film may be disposed over portions of the device other than the unit areas. The device may include at least one pixel having a plurality of sub-pixels disposed within each of the plurality of unit areas. The cathode of at least one pixel of each of the plurality of unit areas may be a common cathode.

公开(公告)号：US20220333230A1

公开(公告)日：2022-10-20

申请号：US17854232

申请日：2022-06-30

Applicant: Universal Display Corporation

Inventor： Matthew KING ,  Gregg KOTTAS ,  Gregory MCGRAW ,  William E. QUINN

IPC: C23C14/24 ,  H01L51/56 ,  C23C14/12

Abstract: Embodiments of the disclosed subject matter provide an apparatus having a device with a micronozzle array disposed on a micro-fabricated fluidic die. The device may include a first gas distribution plate and a second opposing plate, where the micro-fabricated fluidic die is disposed between the first gas distribution plate and the second opposing plate, wherein the first gas distribution plate is irreversibly joined to the micronozzle array with a seal that is gas-tight, and where the first gas distribution plate includes a plurality of sealed flow paths. A manifold may be reversibly joined to the first gas distribution plate, where the micro-fabricated fluidic die and the first gas distribution plate and the second opposing plate are disposed between the manifold. A thermally conductive plate may have at least one window that provides a clearance fit for the device across a range of motion relative to the thermally conductive plate.

公开(公告)号：US20220143642A1

公开(公告)日：2022-05-12

申请号：US17582071

申请日：2022-01-24

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Matthew KING ,  Elliot H. HARTFORD ,  Siddharth HARIKRISHNA MOHAN

IPC: B05B12/18 ,  C23C14/22 ,  C23C14/04 ,  C23C14/12

Abstract: Embodiments of the disclosed subject matter provide a device including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, and a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel.