公开(公告)号：US11976360B2

公开(公告)日：2024-05-07

申请号：US18099339

申请日：2023-01-20

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  William E. Quinn ,  Gregg Kottas ,  Siddharth Harikrishna Mohan ,  Matthew King

IPC: C23C16/455 ,  B41J2/00 ,  C23C14/12 ,  C23C14/24 ,  H10K71/13

CPC classification number: C23C16/45563 ,  B41J2/00 ,  C23C14/12 ,  C23C14/24 ,  C23C14/243 ,  C23C16/45519 ,  H10K71/135

Abstract: Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.

公开(公告)号：US11946131B2

公开(公告)日：2024-04-02

申请号：US15982187

申请日：2018-05-17

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  Edwin Van Den Tillaart ,  William E. Quinn ,  Sven Pekelder ,  Matthew King

IPC: C23C14/24 ,  C23C14/12 ,  C23C14/22 ,  H10K50/11 ,  H10K50/15 ,  H10K50/16 ,  H10K50/18 ,  H10K50/81 ,  H10K50/82 ,  B05D1/00 ,  H10K71/16

CPC classification number: C23C14/243 ,  C23C14/12 ,  C23C14/228 ,  H10K50/11 ,  H10K50/15 ,  H10K50/16 ,  H10K50/18 ,  H10K50/81 ,  H10K50/82 ,  B05D1/60 ,  H10K71/16

Abstract: Designs and arrangements for sublimation cells are provided, which enriches an inert carrier gas with organic vapor such that the partial pressure of the organic vapor is highly stable in time. Stability is achieved by controlling the local rates of evaporation along the solid-gas interface through one or more crucibles, thereby reducing the effects of greater headspace and lowering interfacial area as the source depletes. Local evaporation rates also can be controlled using either temperature distribution or convective flow fields.

公开(公告)号：US11793059B2

公开(公告)日：2023-10-17

申请号：US17394769

申请日：2021-08-05

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Jason Paynter ,  Gregory McGraw ,  Matthew King

IPC: H10K71/00 ,  H10K50/842 ,  H10K71/60

CPC classification number: H10K71/00 ,  H10K50/8426 ,  H10K71/611 ,  H10K71/811 ,  H10K71/821

Abstract: Techniques and devices are provided for attaching a die to a metal manifold. A metal-containing ink is used to deposit a metal trace on the die and thereby to form a gasket, after which the die is compressed against the manifold to form a sealed connection between the two.

公开(公告)号：US11746408B2

公开(公告)日：2023-09-05

申请号：US17389694

申请日：2021-07-30

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Gregory Mcgraw ,  Matthew King ,  Gregg Kottas

IPC: C23C14/22 ,  C23C14/12 ,  C23C14/24 ,  H10K50/11 ,  H10K71/10 ,  H10K101/40

CPC classification number: C23C14/228 ,  C23C14/12 ,  C23C14/243 ,  H10K50/11 ,  H10K71/10 ,  H10K2101/40

Abstract: Embodiments of the disclosed subject matter provide a vapor distribution manifold that ejects organic vapor laden gas into a chamber and withdraws chamber gas, where vapor ejected from the manifold is incident on, and condenses onto, a deposition surface within the chamber that moves relative to one or more print heads in a direction orthogonal to a platen normal and a linear extent of the manifold. The volumetric flow of gas withdrawn by the manifold from the chamber may be greater than the volumetric flow of gas injected into the chamber by the manifold. The net outflow of gas from the chamber through the manifold may prevent organic vapor from diffusing beyond the extent of the gap between the manifold and deposition surface. The manifold may be configured so that long axes of delivery and exhaust apertures are perpendicular to a print direction.

公开(公告)号：US10566534B2

公开(公告)日：2020-02-18

申请号：US15291756

申请日：2016-10-12

Applicant: Universal Display Corporation

Inventor： Matthew King ,  William E. Quinn ,  Gregory McGraw ,  Siddharth Harikrishna Mohan ,  Elliot H. Hartford, Jr. ,  Benjamin Swedlove ,  Gregg Kottas ,  Tomasz Trojacki ,  Julia J. Brown

IPC: C23C14/12 ,  C23C14/24 ,  H01L51/56 ,  H01L51/00 ,  H01L51/50 ,  H01L51/52 ,  C23C14/22

Abstract: Systems and arrangements of OVJP deposition devices are provided, in which one or more organic material crucibles are directly attached to an injection block and a print head without the need for external delivery components such as feedtubes. Each crucible may be hermetically sealed until it is attached to the injection block, allowing for a single device to provide for storage, transport, and deposition of the organic material.

公开(公告)号：US11267012B2

公开(公告)日：2022-03-08

申请号：US14643887

申请日：2015-03-10

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  William E. Quinn ,  Matthew King ,  Elliot H. Hartford, Jr. ,  Siddharth Harikrishna Mohan

IPC: B05B12/18 ,  C23C14/22 ,  C23C14/04 ,  C23C14/12

Abstract: Embodiments of the disclosed subject matter provide a device including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, and a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel.

公开(公告)号：US11220737B2

公开(公告)日：2022-01-11

申请号：US14730768

申请日：2015-06-04

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  William E. Quinn ,  Matthew King ,  Elliot H. Hartford, Jr. ,  Siddharth Harikrishna Mohan ,  Benjamin Swedlove ,  Gregg Kottas

IPC: C23C14/12 ,  C23C14/54 ,  C23C14/22 ,  B41J2/045 ,  C23C14/04 ,  H01L51/56 ,  H01L51/00 ,  B05D1/00

Abstract: Embodiments of the disclosed subject matter provide methods and systems including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel, and an actuator to adjust a fly height separation between a deposition nozzle aperture of the nozzle and a deposition target. The adjustment of the fly height separation may stop and/or start the deposition of the material from the nozzle.

公开(公告)号：US11033924B2

公开(公告)日：2021-06-15

申请号：US16254998

申请日：2019-01-23

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  William E. Quinn ,  Matthew King

IPC: B05C5/02 ,  G03F7/00 ,  H01L51/00 ,  B05B7/00 ,  H01L51/50

Abstract: Embodiments of the disclosed subject matter provide a device that may have a first depositor that includes one or more delivery apertures surrounded by one or more exhaust apertures, where the one or more delivery apertures and the one or more exhaust apertures are enclosed within a perimeter of a boss that protrudes from a substrate-facing side of the one or more delivery apertures. The delivery channels for the one or more delivery apertures and exhaust channels for the one or more exhaust apertures may be routed orthogonally to each other. The one or more delivery apertures may be configured to permit jets of delivery gas pass through a lower surface of the first depositor. The lower surface of the first depositor may include the one or more exhaust apertures to remove surplus vapor from a delivery zone. Embodiments may also provide a method of forming a print head.

公开(公告)号：US11584991B2

公开(公告)日：2023-02-21

申请号：US16891148

申请日：2020-06-03

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  William E. Quinn ,  Gregg Kottas ,  Siddharth Harikrishna Mohan ,  Matthew King

IPC: C23C16/455 ,  C23C14/12 ,  H01L51/00 ,  C23C14/24 ,  B41J2/00

Abstract: Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.

公开(公告)号：US11778889B2

公开(公告)日：2023-10-03

申请号：US17361469

申请日：2021-06-29

Applicant: Universal Display Corporation

Inventor： Matthew King ,  Gregg Kottas ,  Igor Kozin ,  Gregory McGraw ,  William E. Quinn

IPC: H01L51/56 ,  B05B12/12 ,  H01L51/00 ,  H10K71/00 ,  H10K71/13

CPC classification number: H10K71/00 ,  B05B12/124 ,  H10K71/13

Abstract: Embodiments of the disclosed subject matter provide a device having a print head that includes a micronozzle array of depositors to deposit a material on a substrate. A reflective optical device may reflect a signal output by at least one optical sensor, and to reflect the signal from a surface of the substrate to the optical sensor. A processor may determine a distance between the optical sensor and the target surface of the substrate. The device may include one or more actuators coupled to the at least one print head to move the print head relative to an internal reference frame and adjust a position of the print head to the substrate. The sensor may be fixedly coupled with a mount to the internal reference frame. The print head may be configured to move independently of the optical sensor in at least one axis of linear or rotational motion.