公开(公告)号：US06947149B2

公开(公告)日：2005-09-20

申请号：US10435370

申请日：2003-05-12

申请人： Fumio Kobayashi ,  Zongtao Ge ,  Kunihiko Tanaka

发明人： Fumio Kobayashi ,  Zongtao Ge ,  Kunihiko Tanaka

IPC分类号： G01B11/26 ,  G01B11/00 ,  G01B11/27 ,  G01M11/00 ,  G02B6/36 ,  G02B6/38 ,  G01B9/02

CPC分类号： G02B6/3863 ,  G01B11/272 ,  G02B6/3807

摘要： While a ferrule held by a clamping apparatus is rotated by a predetermined angle, respective interference fringe images of a spherical leading end part of the ferrule are obtained at three or more rotational positions. Respective interference fringe center positions are obtained in thus obtained three or more interference fringe images. The center position of a circle passing near each of the interference fringe center positions is calculated and defined as a measured center position. Relative distance information between the measured center position and a position corresponding to the rotational center position of the spherical leading end part of the ferrule or the relative distance information and relative directional information thereof are outputted as an inclination error adjustment value for the axis of the ferrule.

摘要翻译： 当由夹持装置保持的套圈旋转预定角度时，在三个或更多个旋转位置处获得套圈的球形前端部的相应的干涉条纹图像。 在这样获得的三个或更多个干涉条纹图像中获得各干涉条纹中心位置。 通过靠近每个干涉条纹中心位置的圆的中心位置被计算并定义为测量的中心位置。 输出测量中心位置与对应于套圈的球形前端部分的旋转中心位置的位置或相对距离信息及其相对方向信息之间的相对距离信息作为套圈轴线的倾斜误差调整值 。

公开(公告)号：US07245384B2

公开(公告)日：2007-07-17

申请号：US10465623

申请日：2003-06-20

申请人： Zongtao Ge ,  Fumio Kobayashi ,  Kunihiko Tanaka

发明人： Zongtao Ge ,  Fumio Kobayashi ,  Kunihiko Tanaka

IPC分类号： G01B9/02

CPC分类号： G01B9/02084 ,  G01B9/02032 ,  G01B11/26

摘要： A sample inclination measuring method rotates, by a predetermined angle with respect to an interferometer apparatus, a columnar member having a leading end face in a planar form while the columnar member is held by a clamping apparatus, detects a relative angle between a reference surface of the interferometer apparatus and the leading end face at each of two rotational positions, and measures the inclination of the axis of the columnar member by using a predetermined arithmetic expression according to thus detected two angles.

摘要翻译： 样品倾斜测量方法相对于干涉仪装置以预定角度旋转，当柱形构件被夹紧装置保持时，具有平面形状的前端面的柱状构件，检测相对角度， 所述干涉仪装置和所述前端面位于两个旋转位置的每一个处，并且通过使用根据这样检测的两个角度的预定算术表达来测量所述柱状构件的轴线的倾斜度。

公开(公告)号：US06707559B2

公开(公告)日：2004-03-16

申请号：US10021014

申请日：2001-12-19

申请人： Zongtao Ge

发明人： Zongtao Ge

IPC分类号： G01B902

CPC分类号： G01B11/26 ,  G01B11/02

摘要： A method of detecting a posture of an object comprises the steps of acquiring fringe image data carrying phase information of the object; subjecting the whole or part of fringe image data to arithmetic processing using Fourier transform so as to determine a tilt frequency of a fringe corresponding to an inclination of the object in the fringe image data; and detecting the inclination of the object according to the tilt frequency.

摘要翻译： 一种检测物体的姿势的方法包括以下步骤：获取携带物体的相位信息的条纹图像数据; 使用傅里叶变换对条纹图像数据的全部或部分进行算术处理，以便确定与条纹图像数据中的对象的倾斜度相对应的条纹的倾斜频率; 并根据倾斜频率检测物体的倾斜度。

公开(公告)号：US06621579B2

公开(公告)日：2003-09-16

申请号：US09816113

申请日：2001-03-26

申请人： Zongtao Ge

发明人： Zongtao Ge

IPC分类号： G01B902

CPC分类号： G01J9/02

摘要： In a fringe analysis method using Fourier transform, fringe image data is determined in a state where a wavefront from an object and a wavefront from a reference are relatively inclined with respect to each other by a minute amount, and a carrier fringe occurring due to this inclination is superposed on a fringe occurring due to wavefront information of the object. The inclination is set such that the carrier frequency occurring due to the inclination is a predetermined multiple of the basic frequency determined by the wavefront information of the object and observing means.

摘要翻译： 在使用傅立叶变换的边缘分析方法中，在来自物体的波前和来自基准的波前相对于彼此相对倾斜微小量的状态下确定条纹图像数据，并且由于该原因而发生的载波边缘 由于物体的波前信息，斜率叠加在边缘上。 斜率被设定为使得由于倾斜而发生的载波频率是由对象和观察装置的波前信息确定的基本频率的预定倍数。

公开(公告)号：US08059278B2

公开(公告)日：2011-11-15

申请号：US12578997

申请日：2009-10-14

申请人： Zongtao Ge ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

发明人： Zongtao Ge ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

IPC分类号： G01B11/02

CPC分类号： G01M11/0271 ,  G01M11/025

摘要： The relative position of a test surface is sequentially changed from a reference position where a surface central axis is aligned with a measurement optical axis such that the measurement optical axis is sequentially moved to a plurality of annular regions obtained by dividing the test surface in a diametric direction. The test surface is rotated on a rotation axis whenever the relative position is changed. Measurement light composed of a plane wave is radiated to the rotating test surface, and a one-dimensional image sensor captures interference fringes at each of a plurality of rotational positions. The shape information of each annular region is calculated on the basis of the captured interference fringes at each rotational position, and the shape information is connected to calculate the shape information of the entire measurement region.

摘要翻译： 测试表面的相对位置从表面中心轴与测量光轴对准的参考位置顺序地改变，使得测量光轴顺序地移动到通过将测试表面分成直径而获得的多个环形区域 方向。 每当相对位置改变时，测试表面都会在旋转轴上旋转。 由平面波构成的测量光被照射到旋转测试表面，并且一维图像传感器在多个旋转位置中的每一个处捕获干涉条纹。 基于每个旋转位置处的捕获的干涉条纹来计算每个环形区域的形状信息，并且形状信息被连接以计算整个测量区域的形状信息。

公开(公告)号：US07538890B2

公开(公告)日：2009-05-26

申请号：US11144709

申请日：2005-06-06

申请人： Zongtao Ge ,  Takayuki Saito ,  Minoru Kurose

发明人： Zongtao Ge ,  Takayuki Saito ,  Minoru Kurose

IPC分类号： G01B11/02

CPC分类号： G01J9/02 ,  G01J1/4257 ,  G02B5/005

摘要： The light beam measurement apparatus comprises a beam splitter that divides a light beam emitted from a light source unit into two luminous fluxes, a semi-transmitting/reflecting surface that reflects part of one of the divided luminous fluxes back in the opposite direction to the direction of incidence as a sample luminous flux, and reflection-type reference light producing means that converts part of the luminous flux transmitted through the semi-transmitting/reflecting surface into a wavefront-shaped reference luminous flux and outputs this reference luminous flux; this light beam measurement apparatus can carry out both wavefront measurement and light beam spot characteristic measurement on a light beam simultaneously.

摘要翻译： 光束测量装置包括：分束器，其将从光源单元发射的光束分成两个光束;半透射/反射表面，其将一个分割光束的一部分反向与方向相反的方向 作为样品光通量的入射角，以及反射型参照光产生装置，其将通过半透射/反射表面透射的光束的一部分转换为波前参考光通量并输出该参考光通量; 该光束测量装置可以同时对光束进行波前测量和光束点特性测量。

公开(公告)号：US07880897B2

公开(公告)日：2011-02-01

申请号：US12334034

申请日：2008-12-12

申请人： Zongtao Ge

发明人： Zongtao Ge

IPC分类号： G01B9/02

CPC分类号： G01B11/2441 ,  G01B11/255 ,  G01M11/025 ,  G01M11/0271

摘要： The light wave interferometer apparatus is provided and includes: a luminous flux, which is sent from the light source and divided into two portions by the luminous flux separation and composition unit, are combined with each other again under the condition that the divided luminous fluxes hold wavefront information corresponding to the surface shapes of the aspherical lens to be inspected and the reference aspherical lens by the respectively corresponding basis spherical lenses. Therefore, a wavefront difference of the aspherical lens to be inspected with respect to the reference aspherical lens is made to be interference fringe information and formed on an image pickup plane of the interferometer CCD camera. The basis spherical lenses have the basis spherical surfaces, the curvatures of which are equal to each other.

摘要翻译： 提供了光波干涉仪装置，其包括：从光源发送并由光束分离和合成单元分成两部分的光束在分开的光束保持的条件下再次组合 对应于待检查的非球面透镜的表面形状的波前信息和通过分别对应的基准球面透镜的参考非球面透镜。 因此，将相对于参考非球面透镜检查的非球面透镜的波前差设为干涉条纹信息并形成在干涉仪CCD照相机的摄像平面上。 基本球面透镜具有基础球面，其曲率彼此相等。

公开(公告)号：US07792366B1

公开(公告)日：2010-09-07

申请号：US12732836

申请日：2010-03-26

申请人： Zongtao Ge ,  Kenichi Takahashi

发明人： Zongtao Ge ,  Kenichi Takahashi

IPC分类号： G06K9/62 ,  G01B9/00

CPC分类号： G01B11/272 ,  G01M11/0221 ,  G06T7/001 ,  G06T2207/30108

摘要： An optical element to be measured is irradiated with the light which has passed through an indicator, thereby to form an indicator image on an image pick-up surface. Maximum peak coordinates are specified and stored as a position of the indicator image relating to the first surface. Whether the second largest peak may be specified or not is determined. In case that this result is NO, the maximum peak indicator image is deleted, and maximum peak coordinates are specified again and stored as a position of the indicator image relating to the second surface.

摘要翻译： 用已经通过指示器的光照射要测量的光学元件，从而在图像拾取表面上形成指示图像。 指定最大峰值坐标并将其存储为与第一表面有关的指示器图像的位置。 确定是否可以指定第二大峰值。 在该结果为“否”的情况下，最大峰值指示图像被删除，并且再次指定最大峰值坐标并存储为与第二表面相关的指示器图像的位置。

公开(公告)号：US07119907B2

公开(公告)日：2006-10-10

申请号：US10446050

申请日：2003-05-28

申请人： Zongtao Ge

发明人： Zongtao Ge

IPC分类号： G01B9/02

CPC分类号： G01B9/02083 ,  G01B9/0201 ,  G01B9/0209

摘要： In a low coherent interference fringe analysis method, a light intensity distribution of interference fringes formed by object light and reference light in a sample is represented by a light intensity distribution function using an envelope function. Subsequently, phase shifting is carried out, so as to measure the light intensity at each shift stage. According to thus measured light intensities at respective shift stages, unknowns of the light intensity distribution function are computed. Then, according to the computed unknowns, a peak position of a curve of the envelope function is determined. According to thus determined peak position, phase information of the sample is determined.

公开(公告)号：US06768554B2

公开(公告)日：2004-07-27

申请号：US09775584

申请日：2001-02-05

申请人： Zongtao Ge

发明人： Zongtao Ge

IPC分类号： G01B902

CPC分类号： G01B9/00

摘要： In a fringe analysis method comprising the step of subjecting fringe image data carrying wavefront information of an object to be observed to Fourier transform method so as to determine a wavefront of the object, the fringe image data is multiplied by a window function corresponding to an effective data area of the fringe image data before the Fourier transform method is applied to.

摘要翻译： 在一种条纹分析方法中，包括对携带物体的波前信息的边缘图像数据进行傅立叶变换处理以确定物体的波前的步骤，将边缘图像数据乘以对应于有效 在傅立叶变换方法之前的条纹图像数据的数据区域被应用于。