公开(公告)号：US20210375574A1

公开(公告)日：2021-12-02

申请号：US16972384

申请日：2020-10-23

Applicant: Arizona Board of Regents on behalf of Arizona State University

Inventor： Peter Williams

IPC: H01J27/10 ,  H01J9/14 ,  H01J49/12

Abstract: A duoplasmatron ion source with a partially ferromagnetic anode can be used in multiple applications, including the production of negative ions for secondary ion mass spectrometers and particle accelerators. A partially ferromagnetic anode, which may be embodied in a partially ferromagnetic anode insert, includes a ferromagnetic and non-ferromagnetic portions joined together at a juncture, with an ion extraction aperture defined in the ferromagnetic portion and the juncture being laterally offset from the aperture. An asymmetric magnetic field produced by the partially ferromagnetic region facilitates extraction of charged ions from the central, most intense region of a source plasma in the duoplasmatron ion source. A ferromagnetic conical portion of the anode defines the ion extraction aperture in order to maximize the magnetic field in the vicinity of this aperture.

公开(公告)号：US10677697B2

公开(公告)日：2020-06-09

申请号：US16139545

申请日：2018-09-24

Applicant: Hitachi High-Tech Science Corporation

Inventor： Atsushi Uemoto ,  Tatsuya Asahata ,  Makoto Sato ,  Yo Yamamoto

IPC: H01J27/10 ,  H01J37/18 ,  G01N1/32 ,  G01N1/44 ,  G01N1/28 ,  H01J37/31 ,  H01J37/317

Abstract: According to one embodiment, an automatic sample preparation apparatus includes: a charged particle beam irradiation optical system configured to perform irradiation with a charged particle beam; a sample stage configured to move with the sample placed thereon; a sample piece transfer device for holding and transferring the sample piece separated and extracted from the sample; a sample piece holder-fixing bed configured to hold a sample piece holder to which the sample piece is transferred; a gas supply portion configured to irradiate gas forming a deposition film with the charged particle beam; and a computer configured to control the charged particle beam irradiation optical system, the sample piece transfer device, and the gas supply portion to transfer and stop the sample piece held by the sample piece transfer device with a gap between the sample piece holder and the sample piece, and connect the sample piece to the sample piece holder.

公开(公告)号：US5317161A

公开(公告)日：1994-05-31

申请号：US888661

申请日：1992-05-21

Applicant: Alfred Chalupka ,  Gertraud Lammer ,  Gerhard Stengl ,  Peter Wolf ,  Johannes Fegerl

Inventor： Alfred Chalupka ,  Gertraud Lammer ,  Gerhard Stengl ,  Peter Wolf ,  Johannes Fegerl

IPC: G03F7/20 ,  H01J27/02 ,  H01J27/10 ,  H01J37/08 ,  H01J37/12 ,  H01L21/027

CPC classification number: H01J27/10 ,  H01J37/08 ,  H01J37/12

Abstract: In addition to the three electrodes of a unipotential lens following a plasma chamber, an ion source for ion beam lithography or ion beam semiconductor or the like has a fourth electrode which is at the same potential as the second electrode and at a potential lower than the potential of the first and third electrodes The result is improved resolution.

Abstract translation: 除了等离子体室之后的单能透镜的三个电极之外，用于离子束光刻或离子束半导体等的离子源具有与第二电极处于相同电位并且具有比第二电极低的电位的第四电极 第一和第三电极的电位结果是提高了分辨率。

公开(公告)号：US4891525A

公开(公告)日：1990-01-02

申请号：US271241

申请日：1988-11-14

Applicant: Larry E. Frisa ,  Monroe L. King ,  Stephen E. Sampayan

Inventor： Larry E. Frisa ,  Monroe L. King ,  Stephen E. Sampayan

IPC: H01J27/20 ,  H01J27/08 ,  H01J27/10 ,  H01J37/08 ,  H01L21/265

CPC classification number: H01J37/08 ,  H01J27/10

Abstract: An ion source of the side extraction type which includes auxiliary electrodes surrounding the cathode at the ends of the anode, and insulators surrounding the auxiliary electrodes and electrically isolating them from the anode. The auxiliary electrodes essentially define the ends of the discharge chamber, leaving the anode confined to the cylindrical surface surrounding the filament. Each insulator is made up of an inner insulator and an outer insulator with an annular space defined between them. The inner and outer insulators are each in the form of a cylinder with a radially extending flange formed at one end, and interfit with the anode and with each other such that cylindrical spaces are defined between the outer flange portion and the anode and between the inner and outer flange portions. These and other features contribute to improve the electrical isolation between the auxiliary electrode and the anode, prolong source life, and improve beam purity.

Abstract translation: 侧面提取型离子源包括在阳极端部包围阴极的辅助电极，以及包围辅助电极并将其与阳极电隔离的绝缘体。 辅助电极基本上限定了放电室的端部，使阳极限制在围绕灯丝的圆柱形表面上。 每个绝缘体由内绝缘体和外绝缘体组成，其间具有限定的环形空间。 内绝缘体和外绝缘体各自为圆柱形，其一端形成有径向延伸的凸缘，并且与阳极相互配合，使得圆柱形空间限定在外凸缘部分和阳极之间以及内部 和外凸缘部分。 这些和其他特征有助于改善辅助电极和阳极之间的电隔离，延长源寿命，并提高光束纯度。

公开(公告)号：US4123686A

公开(公告)日：1978-10-31

申请号：US774655

申请日：1977-03-04

Applicant: Roderich Keller ,  Michael Muller

Inventor： Roderich Keller ,  Michael Muller

IPC: H01J3/04 ,  H01J27/00 ,  H01J27/10 ,  H05H7/08

CPC classification number: H01J27/10 ,  H01J3/04

Abstract: A source for generating singly and/or multiply charged ions composed essentially of a glow cathode, an intermediate electrode and an anode electrode having a common axis of symmetry and bordering a gas discharge chamber and each presenting a passage opening coaxial with the axis of symmetry, and a system producing a magnetic field having an axial component along the axis of symmetry, with the anode electrode opening being at a location where the magnitude of the axial component of the magnetic field is substantially equal to its maximum value.

Abstract translation: 用于产生单和/或多电荷离子的源，其基本上由辉光阴极，中间电极和具有公共对称轴线的接触气体放电室的阳极组成，并且每个具有与对称轴同轴的通道开口， 以及产生沿着对称轴具有轴向分量的磁场的系统，其中阳极电极开口位于磁场的轴向分量的大小基本上等于其最大值的位置。

公开(公告)号：US3458743A

公开(公告)日：1969-07-29

申请号：US3458743D

申请日：1966-12-19

Applicant: RADIATION DYNAMICS

Inventor： CLELAND MARSHALL R ,  THOMPSON CHESTER C JR

IPC: H01J27/10 ,  H05H1/00

CPC classification number: H01J27/10

公开(公告)号：US3005931A

公开(公告)日：1961-10-24

申请号：US1846160

申请日：1960-03-29

Applicant: DANDL RAPHAEL A

Inventor： DANDL RAPHAEL A

IPC: H01J27/10 ,  H05H1/22

CPC classification number: H05H1/22 ,  H01J27/10

公开(公告)号：US10134557B2

公开(公告)日：2018-11-20

申请号：US14897232

申请日：2014-06-12

Applicant: General Plasma, Inc.

Inventor： John E. Madocks

IPC: H01J27/14 ,  H01J27/10 ,  H01J27/02 ,  H01J37/08

Abstract: A linear anode layer ion source is provided that includes a top pole having a linear ion emitting slit. An anode under the top pole has a slit aligned with the top pole ion emitting slit. At least one magnet creates a magnetic field that passes through the anode slit. Wherein the width of the anode slit is 3 mm or less. A process of generating an accelerated ion beam is also provided that includes flowing a gas into proximity to said anode. By energizing a power supply electron flow is induced to the anode and the gas is ionized. Accelerating the ions from the anode through the linear ion emitting slit generates an accelerated ion beam by a process superior to that using a racetrack-shaped slit.

公开(公告)号：US07655928B2

公开(公告)日：2010-02-02

申请号：US11693237

申请日：2007-03-29

Applicant: Kasegn D. Tekletsadik

Inventor： Kasegn D. Tekletsadik

IPC: H01J27/00 ,  H01J37/317 ,  H01J27/06 ,  H01J27/10 ,  G21F3/00 ,  A61N5/00

CPC classification number: H01J37/3171 ,  H01J5/46 ,  H01J37/248 ,  H01R13/53

Abstract: Ion accelerating devices including connection mechanisms with integrated shielding electrode and related methods are disclosed. According to an embodiment, an ion accelerating device of an ion implantation system comprises: a first element; a first connection system within the first element, the first connection system including a first connector and a first encapsulated shielding electrode around the first connector; and a second connection system within a second element other than the first element, the second connection system being coupled to the first connector; wherein the first encapsulated shielding electrode includes a first shielding portion adjacent to a first interface surface of the first element where the second connection system interfaces with the first element, in a cross-sectional view, the first shielding portion being substantially U-shaped.

Abstract translation: 公开了包括具有集成屏蔽电极的连接机构和相关方法的离子加速装置。 根据实施例，离子注入系统的离子加速装置包括：第一元件; 所述第一连接系统包括第一连接器和围绕所述第一连接器的第一封装屏蔽电极; 以及除了所述第一元件之外的第二元件内的第二连接系统，所述第二连接系统联接到所述第一连接器; 其中所述第一封装屏蔽电极包括与所述第一元件的第一接口表面相邻的第一屏蔽部分，其中所述第二连接系统与所述第一元件接合，在横截面图中，所述第一屏蔽部分基本上为U形。

公开(公告)号：US4093858A

公开(公告)日：1978-06-06

申请号：US804189

申请日：1977-06-06

Applicant: Maasaki Kobayashi ,  Krsto Prelec ,  Theodorus J Sluyters

Inventor： Maasaki Kobayashi ,  Krsto Prelec ,  Theodorus J Sluyters

IPC: H01J27/02 ,  H01J27/10 ,  H01J27/22 ,  H01J27/00

CPC classification number: H01J27/028 ,  H01J27/10 ,  H01J27/22

Abstract: Longitudinally extending, foraminous cartridge means having a cylindrical side wall forming one flat, circular, tip end surface and an opposite end; an open-ended cavity, and uniformly spaced orifices for venting the cavity through the side wall in the annulus of a plasma ring for uniformly ejecting cesium for coating the flat, circular, surface. To this end, the cavity is filled with a cesium containing substance and attached to a heater in a hollow-discharge duoplasmatron. By coating the flat circular surface with a uniform monolayer of cesium and locating it in an electrical potential well at the end of a hollow-discharge, ion duoplasmatron source of an annular hydrogen plasma ring, the negative hydrogen production from the duoplasmatron is increased. The negative hydrogen is produced on the flat surface of the cartridge and extracted by the electrical potential well along a trajectory coaxial with the axis of the plasma ring.

Abstract translation: 纵向延伸，有孔筒意味着具有形成一个平坦的，圆形的顶端表面和相对端的圆柱形侧壁; 开口腔，以及均匀间隔的孔，用于通过等离子体环的环中的侧壁排出空腔，用于均匀地喷射铯以涂覆平坦的圆形表面。 为此，空腔中填充含铯物质，并连接到中空排放二重质量管中的加热器。 通过用均匀的铯单层涂覆平坦的圆形表面，并将其定位在环形氢等离子体环的中空放电，离子二等离子体源的末端的电势井中，来自二重质量子的负氢产生增加。 在墨盒的平坦表面上产生负的氢气，并沿着与等离子体环的轴线同轴的轨迹由电位井提取。