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    AUTOMATIC SAMPLE PREPARATION APPARATUS
    1.
    发明申请
    AUTOMATIC SAMPLE PREPARATION APPARATUS 有权

    公开(公告)号：US20210341362A1

    公开(公告)日：2021-11-04

    申请号：US17373932

    申请日：2021-07-13

    Applicant: Hitachi High-Tech Science Corporation

    Inventor： Atsushi Uemoto ,  Tatsuya Asahata ,  Makoto Sato ,  Yo Yamamoto

    IPC: G01N1/44 ,  H01J37/317 ,  H01J37/31 ,  G01N1/28

    Abstract: An automatic sample preparation apparatus that automatically prepares a sample piece from a sample and includes a focused ion beam irradiation optical system, an electron beam irradiation optical system configured to irradiate an electron beam from a direction different from a direction of the focused ion beam, a sample piece transfer device configured to hold and transfer the sample piece separated and extracted from the sample, a detector configured to detect secondary charged particles emitted from an irradiation object, and a computer configured to recognize a position of the sample piece transfer device by image-recognition using an image data of the focused ion beam and the electron beam generated by irradiating the sample piece transfer device with the focused ion beam and the electron beam, and drive the sample piece transfer device, wherein the image data includes a reference mark.

    Automatic sample preparation apparatus
    4.
    发明授权
    Automatic sample preparation apparatus 有权

    公开(公告)号：US11835438B2

    公开(公告)日：2023-12-05

    申请号：US17373932

    申请日：2021-07-13

    Applicant: Hitachi High-Tech Science Corporation

    Inventor： Atsushi Uemoto ,  Tatsuya Asahata ,  Makoto Sato ,  Yo Yamamoto

    IPC: G01N1/44 ,  G01N1/28 ,  H01J37/31 ,  H01J37/317

    CPC classification number: G01N1/44 ,  G01N1/28 ,  H01J37/31 ,  H01J37/317

    Abstract: An automatic sample preparation apparatus that automatically prepares a sample piece from a sample and includes a focused ion beam irradiation optical system, an electron beam irradiation optical system configured to irradiate an electron beam from a direction different from a direction of the focused ion beam, a sample piece transfer device configured to hold and transfer the sample piece separated and extracted from the sample, a detector configured to detect secondary charged particles emitted from an irradiation object, and a computer configured to recognize a position of the sample piece transfer device by image-recognition using an image data of the focused ion beam and the electron beam generated by irradiating the sample piece transfer device with the focused ion beam and the electron beam, and drive the sample piece transfer device, wherein the image data includes a reference mark.

    Composite charged particle beam apparatus
    6.
    发明授权
    Composite charged particle beam apparatus 有权
    复合带电粒子束装置

    公开(公告)号：US08642980B2

    公开(公告)日：2014-02-04

    申请号：US13840311

    申请日：2013-03-15

    Applicant: Hitachi High-Tech Science Corporation

    Inventor： Xin Man ,  Yo Yamamoto ,  Atsushi Uemoto ,  Tatsuya Asahata

    IPC: G01N23/225 ,  H01J37/26 ,  H01J37/317

    CPC classification number: H01J37/20 ,  H01J37/023 ,  H01J37/3005 ,  H01J2237/0245

    Abstract: Provided is a composite charged particle beam apparatus, including: an electron beam column for irradiating a sample with an electron beam; an ion beam column for irradiating the sample with an ion beam to perform etching processing; a sample stage drive portion for moving a sample stage in an irradiation axis direction of the electron beam; and a column adjusting portion for moving the ion beam column relatively to a sample chamber such that the sample is irradiated with the ion beam at a position irradiated with the electron beam.

    Abstract translation: 提供一种复合带电粒子束装置，包括：用于用电子束照射样品的电子束柱; 离子束柱，用离子束照射样品进行蚀刻处理; 用于在电子束的照射轴方向移动样品台的样品台驱动部分; 以及用于相对于样品室移动离子束柱的柱调节部分，使得样品在被电子束照射的位置处被离子束照射。

    Automatic sample preparation apparatus and automatic sample preparation method
    7.
    发明授权
    Automatic sample preparation apparatus and automatic sample preparation method 有权

    公开(公告)号：US11073453B2

    公开(公告)日：2021-07-27

    申请号：US16935575

    申请日：2020-07-22

    Applicant: Hitachi High-Tech Science Corporation

    Inventor： Atsushi Uemoto ,  Tatsuya Asahata ,  Makoto Sato ,  Yo Yamamoto

    IPC: G01N1/44 ,  H01J37/31 ,  G01N1/28 ,  H01J37/317

    Abstract: An automatic sample preparation apparatus that automatically prepares a sample piece from a sample includes: a focused ion beam irradiation optical system configured to irradiate a focused ion beam; an electron beam irradiation optical system configured to irradiate an electron beam from a direction different from a direction of the focused ion beam; a sample piece transfer device configured to hold and transfer the sample piece separated and extracted from the sample; a detector configured to detect secondary charged particles emitted from an irradiation object by irradiating the irradiation object with the focused ion beam and/or the electron beam; and a computer configured to recognize a position of the sample piece transfer device by image-recognition using an image data of the focused ion beam and the electron beam generated by irradiating the sample piece transfer device with the focused ion beam and the electron beam, and drive the transfer device.

    Charged particle beam apparatus
    9.
    发明授权
    Charged particle beam apparatus 有权

    公开(公告)号：US09620333B2

    公开(公告)日：2017-04-11

    申请号：US14833563

    申请日：2015-08-24

    Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

    Inventor： Satoshi Tomimatsu ,  Makoto Sato ,  Atsushi Uemoto ,  Tatsuya Asahata ,  Yo Yamamoto

    IPC: H01J37/26 ,  H01J37/302 ,  H01J37/20

    CPC classification number: H01J37/3023 ,  H01J37/20 ,  H01J2237/208 ,  H01J2237/31745

    Abstract: A charged particle beam apparatus automatically prepares a sample piece from a sample and includes a charged particle beam irradiation optical system that irradiates a charged particle beam to a sample placed on a movable sample stage. A sample piece transferring unit holds and transfers a sample piece separated and extracted from the sample, and a holder support holds a sample piece holder to which the sample piece is transferred. A computer controls a position of an object based on a template prepared from an image of the object acquired by irradition with the charged particle beam and position information acquired from the image of the object. The sample piece transferring unit includes a needle that transfers the sample piece separated and extrated from the sample, and a needle actuting mechanism that actuates the needle. The computer controls the needle actuating mechanism so as to approach the needle to the sample piece using the template formed from an absorbed current image acquired by irradiating the needle with the charged particle beam.

    Charged particle beam apparatus having improved needle movement control
    10.
    发明授权
    Charged particle beam apparatus having improved needle movement control 有权
    具有改进的针运动控制的带电粒子束装置

    公开(公告)号：US09218937B2

    公开(公告)日：2015-12-22

    申请号：US14617273

    申请日：2015-02-09

    Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

    Inventor： Atsushi Uemoto ,  Tatsuya Asahata ,  Hidekazu Suzuki ,  Yo Yamamoto

    IPC: H01J37/20 ,  H01J37/28 ,  H01J37/26

    CPC classification number: H01J37/20 ,  H01J37/261 ,  H01J37/3023 ,  H01J2237/063 ,  H01J2237/08 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/208 ,  H01J2237/2448 ,  H01J2237/2482 ,  H01J2237/2602

    Abstract: A charged particle beam apparatus includes: a charged particle beam column configured to irradiate an irradiation target with a charged particle beam; a detector configured to detect secondary charged particles emitted from the irradiation target by the irradiation of the charged particle beam; a needle arranged in an irradiation area of the charged particle beam; a needle actuator configured to actuate the needle; and a controller configured to control the needle actuator to actuate the needle along a movement route that is configured by a preset target position and preset way points. The controller controls the needle actuator to set an actuating direction of the needle for each of the way points.

    Abstract translation: 带电粒子束装置包括：带电粒子束柱，被配置为用照射目标的带电粒子束; 检测器，被配置为通过照射带电粒子束来检测从照射目标物发射的二次带电粒子; 布置在带电粒子束的照射区域中的针; 针致动器，其构造成致动所述针; 以及控制器，被配置为控制针致动器沿着由预设目标位置和预设路线点构成的移动路线致动针。 控制器控制针致动器以为每个路点设置针的致动方向。

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