公开(公告)号：US07307815B2

公开(公告)日：2007-12-11

申请号：US10849312

申请日：2004-05-19

申请人： Cherng-Chyi Han ,  Kenichi Takano

发明人： Cherng-Chyi Han ,  Kenichi Takano

IPC分类号： G11B5/147

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3143 ,  G11B5/3163 ,  Y10T29/49041 ,  Y10T29/49044 ,  Y10T29/49048 ,  Y10T29/4906 ,  Y10T29/49062

摘要： A perpendicular magnetic recording (PMR) head with single or double coil layers has a small write shield stitched onto a main write shield. The stitched shield allows the main write pole to produce a vertical write field with sharp vertical gradients that is reduced on both sides of the write pole so that adjacent track erasures are eliminated. From a fabrication point of view, both the main pole and the stitched shield are defined and formed using a single photolithographic process, a trim mask and CMP lapping process so that the main shield can be stitched onto a self-aligned main pole and stitched shield.

摘要翻译： 具有单线圈或双线圈层的垂直磁记录（PMR）头具有缝合在主写屏蔽上的小写写屏蔽。 拼接屏蔽允许主写柱产生垂直写入场，其尖锐的垂直梯度在写入极的两侧减小，从而消除相邻的轨迹擦除。 从制造的角度来看，使用单一光刻工艺，修剪掩模和CMP研磨工艺来限定和形成主极和缝合屏蔽物，使得主屏蔽可以缝合到自对准的主极和缝合屏蔽 。

公开(公告)号：US07193814B2

公开(公告)日：2007-03-20

申请号：US10780514

申请日：2004-02-17

申请人： Cherng-Chyi Han ,  Mao-Min Chen ,  Lei Zhang ,  Xiaomin Liu

发明人： Cherng-Chyi Han ,  Mao-Min Chen ,  Lei Zhang ,  Xiaomin Liu

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3116 ,  Y10T29/49032 ,  Y10T29/49046

摘要： For high track density recording, tighter reader and writer track width control are essential. This has been achieved by using a plated NiPd write gap which is self-aligned with a plated 23 KG pole material. Heat dissipation by the writer is thus improved since alumina has been replaced with nonmagnetic metal materials, such as Ru, leading to less pole tip protrusion which in turn leads to better writer track width control

摘要翻译： 对于高轨道密度记录，更紧密的读写器轨道宽度控制是至关重要的。 这已经通过使用与电镀的23KG极材料自对准的镀NiPd写入间隙来实现。 因此，由于氧化铝被诸如Ru之类的非磁性金属材料所代替，导致作者的散热得到改善，导致较少的极尖突起，这又导致更好的写入器轨道宽度控制

公开(公告)号：US07154708B2

公开(公告)日：2006-12-26

申请号：US11172173

申请日：2005-06-30

申请人： Devendra S. Chhabra ,  Rod Lee ,  Glen Garfunkel ,  Mor Dovek ,  Cherng-Chyi Han

发明人： Devendra S. Chhabra ,  Rod Lee ,  Glen Garfunkel ,  Mor Dovek ,  Cherng-Chyi Han

IPC分类号： G11B5/60

CPC分类号： G11B5/6005 ,  G11B5/3136 ,  Y10T29/49027 ,  Y10T29/4903 ,  Y10T29/49032

摘要： A magnetic read/write head and slider assembly and method for forming said magnetic read/write head and slider assembly, wherein said assembly has improved heat spreading and dissipation properties and exhibits significantly reduced thermal protrusion during operation. The method of formation is simple and efficient, involving only the extension of one of the conductive mounting pads so that it is in thermal contact with a portion of the slider assembly surface that is over the read/write element.

公开(公告)号：US20050259356A1

公开(公告)日：2005-11-24

申请号：US10849312

申请日：2004-05-19

申请人： Cherng-Chyi Han ,  Kenichi Takano

发明人： Cherng-Chyi Han ,  Kenichi Takano

IPC分类号： G11B5/127 ,  G11B5/147 ,  G11B5/31

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3143 ,  G11B5/3163 ,  Y10T29/49041 ,  Y10T29/49044 ,  Y10T29/49048 ,  Y10T29/4906 ,  Y10T29/49062

摘要： A perpendicular magnetic recording (PMR) head with single or double coil layers has a small write shield stitched onto a main write shield. The stitched shield allows the main write pole to produce a vertical write field with sharp vertical gradients that is reduced on both sides of the write pole so that adjacent track erasures are eliminated. From a fabrication point of view, both the main pole and the stitched shield are defined and formed using a single photolithographic process, a trim mask and CMP lapping process so that the main shield can be stitched onto a self-aligned main pole and stitched shield.

摘要翻译： 具有单线圈或双线圈层的垂直磁记录（PMR）头具有缝合在主写屏蔽上的小写写屏蔽。 拼接屏蔽允许主写柱产生垂直写入场，其尖锐的垂直梯度在写入极的两侧减小，从而消除相邻的轨迹擦除。 从制造的角度来看，使用单一光刻工艺，修剪掩模和CMP研磨工艺来限定和形成主极和缝合屏蔽物，使得主屏蔽可以缝合到自对准的主极和缝合屏蔽 。

公开(公告)号：US20050219746A1

公开(公告)日：2005-10-06

申请号：US10814077

申请日：2004-03-31

申请人： Kenichi Takano ,  Cherng-Chyi Han

发明人： Kenichi Takano ,  Cherng-Chyi Han

IPC分类号： G11B5/127 ,  G11B5/147 ,  G11B5/31

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3113 ,  G11B5/3143

摘要： A PMR write head has a stitched shield formation which results in a strong perpendicular write field with sharp vertical gradients. The shape of the stitched shield is determined by two design parameters, d=½(WSWSLE-WMPTE), and TSWS, where WSWSLE is the width of the leading edge of the stitched shield in the ABS plane, WMPTE is the width of the trailing edge of the main magnetic pole in the ABS plane and TSWS is the thickness of the stitched shield. By a proper choice of these parameters, the write field of the head is sharply limited in the cross-track direction, so that adjacent track erasures are eliminated.

摘要翻译： PMR写头具有缝合的屏蔽结构，其形成具有尖锐垂直梯度的强垂直写入场。 缝合屏蔽的形状由两个设计参数d =½（W> SWSLE-> W> MP MP TE TE TE TE SUB SUB SUB SUB SUB SUB SUB SUB SUB SUB SUB SUB SUB SUB and and and and and and and and） W SHSLE 是ABS平面中缝合屏蔽的前缘的宽度，W> MPTE 是ABS平面中主磁极的后缘的宽度 而T SWS 是缝合屏蔽的厚度。 通过这些参数的适当选择，头部的写入场在交叉轨道方向上被大大限制，从而消除了相邻的轨迹擦除。

公开(公告)号：US20050180049A1

公开(公告)日：2005-08-18

申请号：US10780514

申请日：2004-02-17

申请人： Cherng-Chyi Han ,  Mao-Min Chen ,  Lei Zhang ,  Xiaomin Liu

发明人： Cherng-Chyi Han ,  Mao-Min Chen ,  Lei Zhang ,  Xiaomin Liu

IPC分类号： G11B5/147 ,  G11B5/31

CPC分类号： G11B5/3116 ,  Y10T29/49032 ,  Y10T29/49046

摘要： For high track density recording, tighter reader and writer track width control are essential. This has been achieved by using a plated NiPd write gap which is self-aligned with a plated 23 KG pole material. Heat dissipation by the writer is thus improved since alumina has been replaced with nonmagnetic metal materials, such as Ru, leading to less pole tip protrusion which in turn leads to better writer track width control

摘要翻译： 对于高轨道密度记录，更紧密的读写器轨道宽度控制是至关重要的。 这已经通过使用与电镀的23KG极材料自对准的镀NiPd写入间隙来实现。 因此，由于氧化铝被诸如Ru之类的非磁性金属材料所代替，导致作者的散热得到改善，导致较少的极尖突起，这又导致更好的写入器轨道宽度控制

公开(公告)号：US20050177996A1

公开(公告)日：2005-08-18

申请号：US10781168

申请日：2004-02-18

申请人： Danning Yang ,  Cherng-Chyi Han

发明人： Danning Yang ,  Cherng-Chyi Han

IPC分类号： G11B5/31 ,  G11B5/127 ,  G11B5/147

CPC分类号： G11B5/1278 ,  Y10T29/49039 ,  Y10T29/49041 ,  Y10T29/49048 ,  Y10T29/49052

摘要： For PMR (Perpendicular Magnetic Recording) design, one of the major technology problems is the use of CMP to fabricate the pole structure. If the device is under-polished there is a danger of leaving behind a magnetic shorting layer while if it is over-polished there may be damage to the main pole. This problem has been overcome by surrounding the main pole, write gap, stitched write head pillar with a layer of CMP etch stop material which, using optical inspection alone, allows CMP (performed under a first set of conditions) to be terminated just as the stitched write head gets exposed. This is followed by a second CMP step (performed under a second set of conditions) for further fine trimming of the stitched head, as needed.

摘要翻译： 对于PMR（垂直磁记录）设计，主要的技术问题之一是使用CMP制造极结构。 如果设备磨光不足，则会有留下磁性短路层的危险，而如果超磨光，则可能会损坏主极。 通过使用CMP蚀刻停止材料层围绕主极，写入间隙，缝合写头柱来克服这个问题，其使用光学检查单独允许CMP（在第一组条件下执行）被终止，就像 拼接写头被曝光。 接下来是第二CMP步骤（在第二组条件下执行），以根据需要进一步精细修剪缝合的头部。

公开(公告)号：US06929958B2

公开(公告)日：2005-08-16

申请号：US10719723

申请日：2003-11-21

申请人： Cherng-Chyi Han ,  Rodney E. Lee

发明人： Cherng-Chyi Han ,  Rodney E. Lee

IPC分类号： H01L21/00 ,  H01L21/302 ,  H01L21/461 ,  H01L43/12

CPC分类号： H01L43/12

摘要： A method for forming small, isolated device structures by photolithography, utilizing overlapping bi-layer suspension-bridge shaped photomasks. The use of a suspended mask to define a device shape beneath it eliminates the problems associated with uneven undercutting of the usual bi-layer mask which is a stencil portion formed on a lower pedestal. In particular, the use of a suspended mask eliminates undesirable dielectric buildup around the device caused by an insufficiently undercut pedestal or of premature mask lift-off caused by an overly undercut pedestal.

公开(公告)号：US20050127416A1

公开(公告)日：2005-06-16

申请号：US10732013

申请日：2003-12-10

申请人： Cherng-Chyi Han ,  Liubo Hong

发明人： Cherng-Chyi Han ,  Liubo Hong

IPC分类号： H01F10/32 ,  G11C11/14 ,  H01L21/8246 ,  H01L27/105 ,  H01L27/22 ,  H01L29/82 ,  H01L31/062 ,  H01L43/08 ,  H01L43/12

CPC分类号： H01L27/222 ,  H01L43/12

摘要： A method for forming MRAM cell structures wherein the topography of the cell is substantially flat and the distance between a bit line and a magnetic free layer, a word line and a magnetic free layer or a word line and a bit line and a magnetic free layer is precise and well controlled. The method includes the formation of an MTJ film stack over which is formed both a capping and sacrificial layer. The stack is patterned by conventional means, then is covered by a layer of insulation which is thinned by CMP to expose a remaining portion of the sacrificial layer. The remaining portion of the sacrificial layer can be precisely removed by an etching process, leaving only the well dimensioned capping layer to separate the bit line from the magnetic free layer and the capping layer. The bit line and an intervening layer of insulation separate the free layer from a word line in an equally precise and controlled manner.

公开(公告)号：US20050024765A1

公开(公告)日：2005-02-03

申请号：US10633132

申请日：2003-08-01

申请人： Cherng-Chyi Han ,  Danning Yang ,  Mao-Min Chen

发明人： Cherng-Chyi Han ,  Danning Yang ,  Mao-Min Chen

IPC分类号： G11B5/127 ,  G11B5/147 ,  G11B5/31

CPC分类号： G11B5/3136 ,  G11B5/127 ,  G11B5/147 ,  G11B5/31 ,  G11B5/3196

摘要： An inductive-type write head and its method of fabrication are disclosed. The write head has a vertically separated two-element planar coil of reduced resistance which is the result of forming the lower of the two coils with windings of a greater height and substantially larger cross-sectional area than those of the upper coil. The formation of a lower coil with greater height is possible because of a surface planarization that allows separating the coils by an alumina layer of minimal thickness. This method allows the reduction of coil resistance without the necessity of enlarging the head dimensions. The reduced resistance results in lower power consumption and the elimination of pole tip protrusion caused by excessive heating during operation.

摘要翻译： 公开了一种电感式写入头及其制造方法。 写头具有具有降低的电阻的垂直分离的两元件平面线圈，其是形成两个线圈中较低的线圈的结果，其绕组具有比上部线圈的更大的高度和大得多的横截面积的绕组。 由于表面平坦化，允许通过最小厚度的氧化铝层分离线圈，所以形成较高高度的下线圈是可能的。 该方法允许减小线圈电阻而不需要扩大头部尺寸。 降低的电阻导致较低的功率消耗和由于操作期间的过度加热而导致的极尖突起的消除。