Abstract:
A pressure reducing fluid regulator having a housing with a flange including a plurality of ear-shaped protrusions is disclosed. Each of the protrusions includes at least one aperture configured to receive fastener such that the circumferential spacing between first and second fasteners is less than the circumferential spacing between the second fastener and a third fastener. The regulator includes a valve having a valve seat, a valve disc, a valve stem coupled to the valve disc and a valve guide that holds the valve stem. A lever having a first end coupled to the valve stem and a second end coupled to a diaphragm applies a force to the valve stem in a direction that is non-parallel to the longitudinal axis of the valve stem to cause the valve stem to frictionally engage the valve guide. The valve stem includes a stop that limits travel of the valve stem and disc toward the valve seat.
Abstract:
An organic light emitting device having an anode, a cathode and an organic layer disposed between the anode and the cathode is provided. In one aspect, the organic layer comprises a compound having at least one zwitterionic carbon donor ligand. In another aspect, the organic layer comprises a carbene compound, including the following: In another aspect, the organic layer comprises a carbene compound, including: In another aspect, the organic layer comprises a carbene compound that includes a triazole ring and has the structure: In another aspect, the organic layer comprises a carbene compound that includes a tetrazole ring and has the structure:
Abstract:
A wafer based APC method for controlling an oxide (Cu, or TaN) polish step is described and combines a feed forward model that compensates for incoming wafer variations with a feed backward model which compensates for CMP variations. The method is geared toward minimizing Rs 3σ variations. A Rs target value is inputted with metrology data from previous processes that affects the width and thickness of the copper layer. A copper thickness target and polish time for the first wafer is determined. Post CMP measurement data of the first wafer is used to modify the polish rate with a disturbance factor and an updated polish time is computed for subsequent wafers. The CMP recipe for each wafer is adjusted with metrology data and post CMP measurements. The APC method is successful in controlling copper Rs variations for the 90 nm technology node and is independent of copper pattern density.