公开(公告)号：US07782525B2

公开(公告)日：2010-08-24

申请号：US12367422

申请日：2009-02-06

Applicant: Jeffrey Brian Sampsell ,  Clarence Chui ,  Manish Kothari

Inventor： Jeffrey Brian Sampsell ,  Clarence Chui ,  Manish Kothari

IPC: G02B26/00

CPC classification number: G09G3/3466 ,  G02B26/001 ,  G09G3/2074 ,  G09G3/2081 ,  G09G2300/06 ,  G09G2310/0267 ,  G09G2310/0297

Abstract: A light modulator is arranged as an array of rows and columns of interferometric display elements. Each element is divided into sub-rows of sub-elements. Array connection lines transmit operating signals to the display elements, with one connection line corresponding to one row of display elements in the array. Sub-array connection lines electrically connect to each array connection line. Switches transmit the operating signals from each array connection line to the sub-rows to effect gray scale modulation.

Abstract translation: 光调制器被布置为干涉式显示元件的行和列的阵列。 每个元素被划分成子行子元素。 阵列连接线将工作信号发送到显示元件，其中一条连接线对应于阵列中的一行显示元件。 子阵列连接线电连接到每个阵列连接线。 开关将来自每个阵列连接线的操作信号传输到子行以实现灰度调制。

公开(公告)号：US07763546B2

公开(公告)日：2010-07-27

申请号：US11462026

申请日：2006-08-02

Applicant: Manish Kothari ,  Jeffrey B. Sampsell

Inventor： Manish Kothari ,  Jeffrey B. Sampsell

IPC: H01L21/302

CPC classification number: B81C1/00579 ,  B81C2201/0109 ,  B81C2201/0132

Abstract: Provided herein are methods for preventing the formation and accumulation of surface-associated charges, and deleterious effects associated therewith, during the manufacture of a MEMS device. In some embodiments, methods provided herein comprise etching a sacrificial material in the presence of an ionized gas, wherein the ionized gas neutralizes charged species produced during the etching process and allows for their removal along with other etching byproducts. Also disclosed are microelectromechanical devices formed by methods of the invention, and visual display devices incorporating such devices.

Abstract translation: 本文提供了在制造MEMS器件期间防止表面相关电荷的形成和累积以及与其相关的有害影响的方法。 在一些实施例中，本文提供的方法包括在存在电离气体的情况下蚀刻牺牲材料，其中电离气体中和在蚀刻工艺期间产生的带电物质，并允许其与其它蚀刻副产物一起去除。 还公开了通过本发明的方法形成的微机电装置以及包括这种装置的视觉显示装置。

公开(公告)号：US20100147790A1

公开(公告)日：2010-06-17

申请号：US12711634

申请日：2010-02-24

Applicant: Teruo Sasagawa ,  Clarence Chui ,  Manish Kothari ,  SuryaPrakash Ganti ,  Jeffrey B. Sampsell ,  Chun-Ming Wang

Inventor： Teruo Sasagawa ,  Clarence Chui ,  Manish Kothari ,  SuryaPrakash Ganti ,  Jeffrey B. Sampsell ,  Chun-Ming Wang

IPC: H01B13/00

CPC classification number: G02B26/0841 ,  B81B2201/042 ,  B81B2203/0307 ,  B81C1/00595 ,  B81C2201/014 ,  G02B26/001

Abstract: A microelectromechanical systems device having support structures formed of sacrificial material surrounded by a protective material. The microelectromechanical systems device includes a substrate having an electrode formed thereon. Another electrode is separated from the first electrode by a cavity and forms a movable layer, which is supported by support structures formed of a sacrificial material.

公开(公告)号：US20100118382A1

公开(公告)日：2010-05-13

申请号：US12687850

申请日：2010-01-14

Applicant: Manish Kothari ,  Lior Kogut ,  Jeffrey B. Sampsell

Inventor： Manish Kothari ,  Lior Kogut ,  Jeffrey B. Sampsell

IPC: G02B26/00

CPC classification number: G02B26/001

Abstract: A microelectromechanical system (MEMS) device includes a first electrode, a second electrode electrically insulated from the first electrode, and a third electrode electrically insulated from the first electrode and the second electrode. The MEMS device also includes a support structure which separates the first electrode from the second electrode and a reflective element located and movable between a first position and a second position. The reflective element is in contact with a portion of the device when in the first position and is not in contact with the portion of the device when in the second position. An adhesive force is generated between the reflective element and the portion when the reflective element is in the first position. Voltages applied to the first electrode, the second electrode, and the third electrode at least partially reduce or counteract the adhesive force.

Abstract translation: 微机电系统（MEMS）装置包括第一电极，与第一电极电绝缘的第二电极和与第一电极和第二电极电绝缘的第三电极。 MEMS器件还包括将第一电极与第二电极分开的支撑结构和位于第一位置和第二位置之间并可移动的反射元件。 反射元件在处于第一位置时与装置的一部分接触，并且当处于第二位置时不与装置的部分接触。 当反射元件处于第一位置时，在反射元件和部分之间产生粘合力。 施加到第一电极，第二电极和第三电极的电压至少部分地减小或抵消粘附力。

公开(公告)号：US20100096011A1

公开(公告)日：2010-04-22

申请号：US12356437

申请日：2009-01-20

Applicant: Jonathan C. Griffiths ,  Manish Kothari

Inventor： Jonathan C. Griffiths ,  Manish Kothari

IPC: H01L31/00 ,  H01L31/0232 ,  G02B27/14

CPC classification number: G02B5/288 ,  G02B26/001 ,  H01L31/02168 ,  H01L31/02327 ,  H01L31/0547 ,  Y02E10/52

Abstract: Devices incorporating an interferometric stack configured to reflect a certain color and transmit longer wavelengths through the interferometric stack. In one example, a color filtering includes two partial reflectors comprising an extinction coefficient that is less than about one at wavelengths greater than about 800 nm. The two partial reflectors define an optical resonant cavity forming an interferometric stack configured to reflect color and transmit some electromagnetic waves. In another example, a photovoltaic device includes two photovoltaic active layers that act as partial reflectors to form an interferometric stack. The photovoltaic device is configured to reflect color and produce power.

Abstract translation: 结合了干涉式叠层的装置被配置为反射某种颜色并通过干涉式叠层传输更长的波长。 在一个示例中，颜色滤波包括两个部分反射器，其包括消光系数，其小于约一个波长大于约800nm。 两个部分反射器限定形成被配置为反射颜色并传输一些电磁波的干涉式叠层的光学谐振腔。 在另一示例中，光伏器件包括用作部分反射器以形成干涉式叠层的两个光伏有源层。 光伏器件被配置为反射颜色并产生电力。

公开(公告)号：US07566940B2

公开(公告)日：2009-07-28

申请号：US11490880

申请日：2006-07-21

Applicant: Teruo Sasagawa ,  SuryaPrakash Ganti ,  Mark W. Miles ,  Clarence Chui ,  Manish Kothari ,  Ming-Hau Tung

Inventor： Teruo Sasagawa ,  SuryaPrakash Ganti ,  Mark W. Miles ,  Clarence Chui ,  Manish Kothari ,  Ming-Hau Tung

IPC: H01L29/82

CPC classification number: G02B26/001 ,  B81B3/007 ,  B81B2201/047 ,  B81B2203/0307 ,  B81B2203/053

Abstract: Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, portions of the rivet structures extend through the movable layer and contact underlying layers. In other embodiments, the material used to form the rigid support structures may also be used to passivate otherwise exposed electrical leads in electrical connection with the MEMS devices, protecting the electrical leads from damage or other interference.

Abstract translation: MEMS器件的实施例包括通过间隙与导电固定层间隔开的导电可移动层，并且由导电可移动层中的上凹部的刚性支撑结构或铆钉支撑，或由导电可移动层中的凹陷下方的柱支撑。 在某些实施例中，铆钉结构的部分延伸穿过可移动层并接触下面的层。 在其他实施例中，用于形成刚性支撑结构的材料也可以用于钝化与MEMS装置电连接的其它暴露的电引线，保护电引线免受损坏或其他干扰。

公开(公告)号：US20090135464A1

公开(公告)日：2009-05-28

申请号：US12367422

申请日：2009-02-06

Applicant: Jeffrey Brian Sampsell ,  Clarence Chui ,  Manish Kothari

Inventor： Jeffrey Brian Sampsell ,  Clarence Chui ,  Manish Kothari

IPC: G02B26/02

CPC classification number: G09G3/3466 ,  G02B26/001 ,  G09G3/2074 ,  G09G3/2081 ,  G09G2300/06 ,  G09G2310/0267 ,  G09G2310/0297

Abstract: A light modulator is arranged as an array of rows and columns of interferometric display elements. Each element is divided into sub-rows of sub-elements. Array connection lines transmit operating signals to the display elements, with one connection line corresponding to one row of display elements in the array. Sub-array connection lines electrically connect to each array connection line. Switches transmit the operating signals from each array connection line to the sub-rows to effect gray scale modulation.

Abstract translation: 光调制器被布置为干涉式显示元件的行和列的阵列。 每个元素被划分成子行子元素。 阵列连接线将工作信号发送到显示元件，其中一条连接线对应于阵列中的一行显示元件。 子阵列连接线电连接到每个阵列连接线。 开关将来自每个阵列连接线的操作信号传输到子行以实现灰度调制。

公开(公告)号：US07489428B2

公开(公告)日：2009-02-10

申请号：US11649439

申请日：2007-01-03

Applicant: Jeffrey Brian Sampsell ,  Clarence Chui ,  Manish Kothari

Inventor： Jeffrey Brian Sampsell ,  Clarence Chui ,  Manish Kothari

IPC: G02B26/08 ,  G02B26/00

CPC classification number: G09G3/3466 ,  G02B26/001 ,  G09G3/2074 ,  G09G3/2081 ,  G09G2300/06 ,  G09G2310/0267 ,  G09G2310/0297

Abstract: A light modulator is arranged as an array of rows and columns of interferometric display elements. Each element is divided into sub-rows of sub-elements. Array connection lines transmit operating signals to the display elements, with one connection line corresponding to one row of display elements in the array. Sub-array connection lines electrically connect to each array connection line. Switches transmit the operating signals from each array connection line to the sub-rows to effect gray scale modulation.

Abstract translation: 光调制器被布置为干涉式显示元件的行和列的阵列。 每个元素被划分成子行子元素。 阵列连接线将工作信号发送到显示元件，其中一条连接线对应于阵列中的一行显示元件。 子阵列连接线电连接到每个阵列连接线。 开关将来自每个阵列连接线的操作信号传输到子行以实现灰度调制。

公开(公告)号：US07460291B2

公开(公告)日：2008-12-02

申请号：US10644312

申请日：2003-08-19

Applicant: Jeffrey Brian Sampsell ,  Mark W. Miles ,  Clarence Chui ,  Manish Kothari

Inventor： Jeffrey Brian Sampsell ,  Mark W. Miles ,  Clarence Chui ,  Manish Kothari

IPC: G02B26/00

CPC classification number: B82Y20/00 ,  G01J3/26 ,  G02B6/12 ,  G02B26/001 ,  G02B2006/12104 ,  G02F1/13725 ,  G02F1/216 ,  G02F2203/03 ,  G09G3/3466

Abstract: A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts.

Abstract translation: 公开了一种可分离调制器架构。 调制器具有从空腔上的柔性层悬挂的反射镜。 柔性层还形成用于镜子的支撑和支撑柱。 另一种可分离的调制器架构具有悬挂在空腔上的反射镜。 调制器由支持和支持柱支持。 支撑柱包括在支撑柱塞上的柔性层。 总线结构可以形成在布置在支撑柱上的柔性层上。

公开(公告)号：US07460246B2

公开(公告)日：2008-12-02

申请号：US11066724

申请日：2005-02-24

Applicant: Manish Kothari

Inventor： Manish Kothari

IPC: G01B9/02

CPC classification number: G09G3/3466 ,  G01J3/26 ,  G02B26/001 ,  G09G3/3406 ,  G09G2320/041 ,  G09G2320/0626 ,  G09G2360/144

Abstract: Certain embodiments of the invention provide a light sensor comprising at least one interferometric element that absorbs light in at least one wavelength. The interferometric element comprises a first surface and a second surface substantially parallel to the first surface. The second surface is spaced a gap distance from the first surface in a direction substantially perpendicular to the first surface. The light wavelength absorbed is dependent on the gap distance. The interferometric element further comprises a temperature sensor. The temperature sensor is responsive to changes in temperature of at least a portion of the interferometric element due to absorption of light by the interferometric element.

Abstract translation: 本发明的某些实施例提供一种光传感器，其包括吸收至少一个波长的光的至少一个干涉测量元件。 干涉测量元件包括基本上平行于第一表面的第一表面和第二表面。 第二表面在基本上垂直于第一表面的方向上与第一表面间隔开间隙。 吸收的光波长取决于间隙距离。 干涉测量元件还包括温度传感器。 由于干涉测量元件的光吸收，温度传感器响应干涉测量元件的至少一部分的温度变化。