公开(公告)号：US06597448B1

公开(公告)日：2003-07-22

申请号：US09644069

申请日：2000-08-23

申请人： Hidetoshi Nishiyama ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Tetsuya Watanabe ,  Hisato Nakamura ,  Takahiro Jingu ,  Yuko Inoue ,  Keiichi Saiki ,  Kenji Watanabe

发明人： Hidetoshi Nishiyama ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Tetsuya Watanabe ,  Hisato Nakamura ,  Takahiro Jingu ,  Yuko Inoue ,  Keiichi Saiki ,  Kenji Watanabe

IPC分类号： G01N2188

CPC分类号： G01N21/898

摘要： A system and method of inspecting a foreign particle or a defect on a sample are provided. Such a method comprises irradiating light to an object to be inspected; detecting reflected light or scattered light from the object to be inspected irradiated with the light; detecting a signal of the foreign particle or the defect from the detected signal; providing information related to a size of the foreign particle or the defect from the signal of the detected foreign particle or the defect; and outputting information on a display screen a distribution of the size of the foreign particle or defect with information indicating a cause of the distribution of the foreign particle or defect.

摘要翻译： 提供了检查样品上的外来颗粒或缺陷的系统和方法。 这种方法包括将光照射到被检测物体上; 检测来自被检查物体的反射光或散射光用光照射; 从检测到的信号中检测外来粒子或缺陷的信号; 从检测到的异物或缺陷的信号提供与异物或缺陷的尺寸有关的信息; 并且在显示屏幕上输出外来粒子或缺陷的大小的分布，其中指示出异物或缺陷的分布原因的信息。

公开(公告)号：US5725933A

公开(公告)日：1998-03-10

申请号：US684549

申请日：1996-07-19

申请人： Hidetoshi Nishiyama

发明人： Hidetoshi Nishiyama

IPC分类号： B32B7/04 ,  B32B7/12 ,  B32B27/12 ,  B65D65/08 ,  B65D85/68

CPC分类号： B32B7/04 ,  B32B27/12 ,  Y10T428/24777 ,  Y10T428/249983 ,  Y10T428/28 ,  Y10T428/2839 ,  Y10T428/2848 ,  Y10T442/674

摘要： A working protection cover 1, 8 for preventing a vehicle body from becoming damaged during an automobile assembly line operation is free from the possibility of easily slipping off position upon mere contact of an operator with the cover, and has good durability. The working protection cover 1, 8 comprises a thermoplastic resin sheet 9 and a cloth-made sheet 10 bonded to the back of the thermoplastic resin sheet 9. The working protection cover 1, 8 has a non-slip tape 17 bonded to the back thereof, the non-slip tape 17 being made from a foam material made from a polyolefin resin and a synthetic rubber in combination. The working protection cover 1, 8 is fitted with a locking element 24, 40 for locking the cover 1, 8 to a vehicle body.

摘要翻译： 用于防止车体在汽车装配线操作期间被损坏的工作保护盖1,8没有在操作者与盖接触时容易地脱离位置的可能性，并且具有良好的耐久性。 工作保护盖1,8包括热塑性树脂片9和粘合到热塑性树脂片9的背面的制成片10.工作保护盖1,8具有粘合到其背面的防滑胶带17 防滑胶带17由由聚烯烃树脂和合成橡胶组成的泡沫材料制成。 工作保护盖1,8配有用于将盖子1,8锁定到车身上的锁定元件24,40。

公开(公告)号：US5585179A

公开(公告)日：1996-12-17

申请号：US464972

申请日：1995-06-05

申请人： Hidetoshi Nishiyama

发明人： Hidetoshi Nishiyama

IPC分类号： B32B7/04 ,  B32B7/12 ,  B32B27/12 ,  B32B3/26

CPC分类号： B32B7/04 ,  B32B27/12 ,  Y10T428/24777 ,  Y10T428/249983 ,  Y10T428/28 ,  Y10T428/2839 ,  Y10T428/2848 ,  Y10T442/674

摘要： A working protection cover 1, 8 for preventing a vehicle body from becoming damaged during an automobile assembly line operation is free from the possibility of easily slipping off position upon mere contact of an operator with the cover, and has good durability. The working protection cover 1, 8 comprises a thermoplastic resin sheet 9 and a cloth-made sheet 10 bonded to the back of the thermoplastic resin sheet 9. The working protection cover 1, 8 has a non-slip tape 17 bonded to the back thereof, the non-slip tape 17 being made from a foam material made from a polyolefin resin and a synthetic rubber in combination. The working protection cover 1, 8 is fitted with a locking element 24, 40 for locking the cover 1, 8 to a vehicle body.

摘要翻译： 用于防止车体在汽车装配线操作期间被损坏的工作保护盖1,8没有在操作者与盖接触时容易地脱离位置的可能性，并且具有良好的耐久性。 工作保护盖1,8包括热塑性树脂片9和粘合到热塑性树脂片9的背面的制成片10.工作保护盖1,8具有粘合到其背面的防滑胶带17 防滑胶带17由由聚烯烃树脂和合成橡胶组成的泡沫材料制成。 工作保护盖1,8配有用于将盖子1,8锁定到车身上的锁定元件24,40。

公开(公告)号：US08559000B2

公开(公告)日：2013-10-15

申请号：US13593171

申请日：2012-08-23

申请人： Akira Hamamatsu ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Hidetoshi Nishiyama ,  Kenji Oka ,  Takanori Ninomiya ,  Maki Tanaka ,  Kenji Watanabe ,  Tetsuya Watanabe ,  Yoshio Morishige

发明人： Akira Hamamatsu ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Hidetoshi Nishiyama ,  Kenji Oka ,  Takanori Ninomiya ,  Maki Tanaka ,  Kenji Watanabe ,  Tetsuya Watanabe ,  Yoshio Morishige

IPC分类号： G01N21/00 ,  G06K9/00

CPC分类号： G06T7/001 ,  G01N21/8851 ,  G01N21/9501 ,  G01N2021/8861 ,  G01N2021/8867 ,  G06T7/97 ,  G06T2207/10152 ,  G06T2207/30148

摘要： A method and apparatus of inspecting a sample, in which the sample is inspected under a plurality of inspection conditions, and inspection data obtained by inspecting the sample under each of the plurality of inspection conditions and position information on the sample of the inspection date in correspondence with the respective inspection conditions, are stored. The inspection data for each of the plurality of inspection conditions is against each other by the use of the position information on the sample to determine a position to be inspected in detail, and an image of the sample at a position to be inspected in detail is obtained. The obtained image is classified, the inspection condition of the sample by the use of information of classification of the image is determined.

摘要翻译： 在多个检查条件下对样本进行检查的检查方法和装置以及在多个检查条件下检查样本而获得的检查数据和对应于检查日期样本的位置信息 具有相应的检查条件。 多个检查条件中的每一个的检查数据通过使用关于样本的位置信息彼此相对来确定待检查的位置，并且在待检查位置处的样本的图像是详细的 获得。 对所获得的图像进行分类，确定通过使用图像分类信息的样本的检查条件。

公开(公告)号：US20130194579A1

公开(公告)日：2013-08-01

申请号：US13818781

申请日：2011-07-19

申请人： Yukihisa Mohara ,  Hidetoshi Nishiyama ,  Shuichi Chikamatsu ,  Eiji Imai ,  Koichi Taniguchi

发明人： Yukihisa Mohara ,  Hidetoshi Nishiyama ,  Shuichi Chikamatsu ,  Eiji Imai ,  Koichi Taniguchi

IPC分类号： G01N21/95

CPC分类号： G01N21/9501 ,  G01N21/956 ,  G01N2021/95676

摘要： In a conventional art, vibrations of compositions (for example, a Z-stage, a θ-stage, a wafer chuck, and a detection optical system mounted above a stage linear scale) within a device are not precisely fed back to a coordinate value.The present invention provides an inspection apparatus that inspects a substrate, including: a substrate holder that holds the substrate; a travel unit that travels the substrate holder; an irradiation unit that irradiates the substrate with light; a charge storage detector that detects the light from the substrate, and stores electric charges; a measurement unit that measures a change in relative position between the substrate holder and the travel unit; and a processing unit, in which the charge storage detector stores the electric charges on the basis of a charge transfer signal obtained on the basis of a measurement result from the measurement unit, and the processing unit detects a defect of the substrate with the use of an image generated by storing the electric charge on the basis of the charge transfer signal.

摘要翻译： 在传统技术中，装置内的组合物（例如，Z级，θ级，晶片卡盘和安装在级线性标尺上方的检测光学系统）的振动不被精确地反馈到坐标值 。 本发明提供一种检查基板的检查装置，包括：保持基板的基板保持件; 行进单元，其行进所述基板保持器; 照射单元，其用光照射所述基板; 电荷存储检测器，其检测来自基板的光，并存储电荷; 测量单元，其测量衬底保持器和行进单元之间的相对位置的变化; 以及处理单元，其中所述电荷存储检测器基于根据来自所述测量单元的测量结果获得的电荷转移信号来存储电荷，并且所述处理单元使用所述电荷检测器检测所述基板的缺陷 基于电荷转移信号存储电荷而产生的图像。

公开(公告)号：US20120268742A1

公开(公告)日：2012-10-25

申请号：US13386243

申请日：2010-06-21

申请人： Hisashi Hatano ,  Hiroyuki Yamashita ,  Hidetoshi Nishiyama

发明人： Hisashi Hatano ,  Hiroyuki Yamashita ,  Hidetoshi Nishiyama

IPC分类号： G01N21/88 ,  G01J4/00

CPC分类号： G01N21/956 ,  G01N21/9501 ,  G01R31/2656 ,  H01L21/681

摘要： Provided is a pattern defect inspecting apparatus wherein inspection performance is stabilized. The defect inspecting apparatus, which has a plurality of configuration units and inspects defects on the surface of a sample, is provided with a means for monitoring time-dependent changes and failures of some of or all of the configuration units, and a means for notifying the user of the results of the monitoring. Furthermore, a unit which can perform correction is provided with a correcting means, and also a means for replacing a failure component with a spare component which has been prepared in the device.

摘要翻译： 提供了一种图案缺陷检查装置，其中检查性能稳定。 具有多个配置单元并且检查样品表面上的缺陷的缺陷检查装置设置有用于监视部分或全部配置单元的时间依赖性变化和故障的装置，以及用于通知 用户的监控结果。 此外，可以进行校正的单元设置有校正装置，并且还具有用于在设备中准备的备用部件替换故障部件的装置。

公开(公告)号：US20120262709A1

公开(公告)日：2012-10-18

申请号：US13529363

申请日：2012-06-21

申请人： Sachio Uto ,  Minori Noguchi ,  Hidetoshi Nishiyama ,  Yoshimasa Ohshima ,  Akira Hamamatsu ,  Takahiro Jingu ,  Toshihiko Nakata ,  Masahiro Watanabe

发明人： Sachio Uto ,  Minori Noguchi ,  Hidetoshi Nishiyama ,  Yoshimasa Ohshima ,  Akira Hamamatsu ,  Takahiro Jingu ,  Toshihiko Nakata ,  Masahiro Watanabe

IPC分类号： G01N21/88

CPC分类号： G01N21/00 ,  G01N21/9501 ,  G06T7/0004 ,  G06T2207/30148

摘要： An inspecting apparatus and method including first and second illuminating units for illuminating a surface of a specimen to be inspected with different incident angles and first and second detecting optical units arranged at different elevation angle directions to the surface of the specimen for detecting images of the specimen illuminated by the first and second illuminating units.

摘要翻译： 一种检查装置和方法，包括：第一和第二照明单元，用于以不同的入射角照射待检查样本的表面;以及第一和第二检测光学单元，其以不同的仰角方向布置在样本的表面上，用于检测样本的图像 由第一和第二照明单元照亮。

公开(公告)号：US08158937B2

公开(公告)日：2012-04-17

申请号：US12546069

申请日：2009-08-24

申请人： Mitsuru Koizumi ,  Hidetoshi Nishiyama

发明人： Mitsuru Koizumi ,  Hidetoshi Nishiyama

IPC分类号： G01N23/00

CPC分类号： H01J37/28 ,  H01J2237/022 ,  H01J2237/0268 ,  H01J2237/2004 ,  H01J2237/2608

摘要： A particle beam system is offered which can prevent contamination of the inside of the objective lens, the objective lens being located at the front end of the optical column. The particle beam system has an optical column equipped with a particle beam source for emitting a particle beam and a beam passage pipe through which the beam passes. The system further includes a vacuum chamber connected with the front end portion of the column. The beam passed through the pipe is released from the front end of the column. An inner pipe is detachably disposed inside the beam passage pipe located at the front-end side of the column.

摘要翻译： 提供一种粒子束系统，其可以防止物镜内部的污染，物镜位于光学柱的前端。 粒子束系统具有装备有用于发射粒子束的粒子束源和光束通过的射束通过管的光学柱。 该系统还包括与柱的前端部连接的真空室。 通过管道的梁从柱的前端释放。 内管可拆卸地设置在位于塔的前端侧的梁通道管内。

公开(公告)号：US20110310382A1

公开(公告)日：2011-12-22

申请号：US13221935

申请日：2011-08-31

申请人： Sachio UTO ,  Minori Noguchi ,  Hidetoshi Nishiyama ,  Yoshimasa Ohshima ,  Akira Hamamatsu ,  Takahiro Jingu ,  Toshihiko Nakata ,  Masahiro Watanabe

发明人： Sachio UTO ,  Minori Noguchi ,  Hidetoshi Nishiyama ,  Yoshimasa Ohshima ,  Akira Hamamatsu ,  Takahiro Jingu ,  Toshihiko Nakata ,  Masahiro Watanabe

IPC分类号： G01N21/00

CPC分类号： G01N21/00 ,  G01N21/9501 ,  G06T7/0004 ,  G06T2207/30148

摘要： An inspecting apparatus and method including first and second illuminating units for illuminating a surface of a specimen to be inspected with different incident angles and first and second detecting optical units arranged at different elevation angle directions to the surface of the specimen for detecting images of the specimen illuminated by the first and second illuminating units.

摘要翻译： 一种检查装置和方法，包括：第一和第二照明单元，用于以不同的入射角照射待检查样本的表面;以及第一和第二检测光学单元，其以不同的仰角方向布置在样本的表面上，用于检测样本的图像 由第一和第二照明单元照亮。

公开(公告)号：US08051322B2

公开(公告)日：2011-11-01

申请号：US12435679

申请日：2009-05-05

申请人： Norihisa Matsumoto ,  Nodoka Mimura ,  Hidetoshi Nishiyama ,  Makoto Watanabe

发明人： Norihisa Matsumoto ,  Nodoka Mimura ,  Hidetoshi Nishiyama ,  Makoto Watanabe

IPC分类号： G06F11/00

CPC分类号： H04L12/4633

摘要： In a communication system using an IP tunnel for communication between application processing apparatuses (hereinafter, processing apparatuses), an application can be moved to an arbitrary processing apparatus, update of tunnel tables included in the respective processing apparatuses is quickly performed, and a buffer for waiting for packets during the table update is made small. A redundancy managing apparatus manages a correspondence between a virtual IP address (VIP) of an application in a communication system and an IP address (RIP) of an processing apparatus to execute the application. The processing apparatus notifies the VIP of the communication partner application of the application to the redundancy managing apparatus. The redundancy managing apparatus notifies the VIP of the communication partner application of the moved application and the RIP of the processing apparatus to execute the communication partner application to the processing apparatus of the movement destination (failover destination) of the application.

摘要翻译： 在使用IP隧道进行应用处理装置（以下称为处理装置）之间的通信的通信系统中，可以将应用移动到任意的处理装置，快速地进行各处理装置中包含的隧道表的更新， 在表更新期间等待数据包变小。 冗余管理装置管理通信系统中的应用的虚拟IP地址（VIP）与执行应用的处理装置的IP地址（RIP）之间的对应关系。 处理装置将应用的通信对方应用的VIP通知给冗余管理装置。 冗余管理装置将移动的应用的通信对方应用的VIP和处理装置的RIP通知给应用的移动目的地（故障切换目的地）的处理装置的通信对方应用。