公开(公告)号：US09404872B1

公开(公告)日：2016-08-02

申请号：US13538552

申请日：2012-06-29

申请人： Haiming Wang ,  Guorong V. Zhuang ,  Shankar Krishnan ,  Klaus Flock ,  Johannes D. de Veer

发明人： Haiming Wang ,  Guorong V. Zhuang ,  Shankar Krishnan ,  Klaus Flock ,  Johannes D. de Veer

IPC分类号： G01J4/00 ,  G01N21/55 ,  G01N21/88 ,  G01N21/21

CPC分类号： G01N21/8806 ,  G01N21/211 ,  G01N21/274 ,  G01N21/93 ,  G01N21/9501 ,  G01N21/95607 ,  G01N2021/213

摘要： The present invention may include an illumination source configured to illuminate a surface of a sample, a detector configured to detect at least a portion of light reflected from the surface of the sample, a selectably configurable optical system comprising: a rotatable polarizing element disposed in the illumination arm of the optical system, an analyzing element disposed in the collection arm of the optical system, and a rotatable-translatable compensator element disposed in the collection arm of the optical system, and a control system communicatively configured to selectably configure the optical system in the a rotating compensator (RCSE) mode, a rotating polarizer (RPSE) mode, or a rotating polarizer and compensator (RPRC) mode.

摘要翻译： 本发明可以包括被配置为照亮样品的表面的照明源，被配置为检测从样品的表面反射的光的至少一部分的检测器，可选择地配置的光学系统，包括：可旋转偏振元件，其设置在 光学系统的照明臂，设置在光学系统的收集臂中的分析元件和设置在光学系统的收集臂中的可旋转平移补偿元件，以及通信地配置为可选择地将光学系统配置在 旋转补偿器（RCSE）模式，旋转偏振器（RPSE）模式或旋转偏振器和补偿器（RPRC）模式。

公开(公告)号：US20130003068A1

公开(公告)日：2013-01-03

申请号：US13174815

申请日：2011-07-01

申请人： Shankar Krishnan ,  Haiming Wang

发明人： Shankar Krishnan ,  Haiming Wang

IPC分类号： G01N21/55 ,  G01J1/42

CPC分类号： G01N21/55 ,  G01B11/065 ,  G01B2210/56 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/42 ,  G01N21/00 ,  G01N21/211 ,  G01N2021/213 ,  G01N2021/214 ,  G01N2201/0675

摘要： A spectroscopic instrument for conducting multi-wavelength, multi-azimuth, multi-angle-of-incidence readings on a substrate, the instrument having a broadband light source for producing an illumination beam, an objective for directing the illumination onto the substrate at multiple azimuth angles and multiple angels-of-incidence simultaneously, thereby producing a reflection beam, an aperture plate having an illumination aperture and a plurality of collection apertures formed therein for selectively passing portions of the reflection beam having desired discreet combinations of azimuth angle and angle-of-incident, a detector for receiving the discreet combinations of azimuth angle and angle-of-incident and producing readings, and a processor for interpreting the readings.

摘要翻译： 一种用于在衬底上进行多波长，多方位角，多角度入射读数的光谱仪器，该仪器具有用于产生照明光束的宽带光源，用于将多个方位角的照明引导到衬底上的物镜 角度和多个入射角，从而产生反射光束，具有照明孔的孔板和形成在其中的多个收集孔，用于选择性地通过具有期望的方位角和角度的离散组合的反射光束的部分 - 用于接收方位角和入射角的离散组合并产生读数的检测器，以及用于解释读数的处理器。

公开(公告)号：US07483133B2

公开(公告)日：2009-01-27

申请号：US11078572

申请日：2005-03-11

申请人： Noah Bareket ,  Haiming Wang

发明人： Noah Bareket ,  Haiming Wang

IPC分类号： G01J3/28 ,  G01J3/42 ,  G01J3/427 ,  G01B11/14 ,  G01B11/04 ,  G01B11/08

CPC分类号： G01B11/0641 ,  G01N21/211 ,  G01N21/956

摘要： Techniques for optimizing the sensitivity of spectroscopic measurement techniques with respect to certain profile variables by selecting desired measurement angles since the measurement sensitivity to each variable depends, at least in part, on the measurement angles of an incident beam. The selected desired set of measurement angles includes both an azimuth angle and a polar angle. Optimizing the sensitivity of spectroscopic measurement techniques can also reduce or eliminates measurement correlation among variable to be measured.

摘要翻译： 由于对每个变量的测量灵敏度，因此通过选择所需的测量角度来优化光谱测量技术对某些分布变量的灵敏度的技术，至少部分取决于入射光束的测量角度。 所选择的所需的测量角度集合包括方位角和极角。 优化光谱测量技术的灵敏度也可以减少或消除待测量的变量之间的测量相关性。

公开(公告)号：US07463369B2

公开(公告)日：2008-12-09

申请号：US11277856

申请日：2006-03-29

申请人： Dan Wack ,  Haiming Wang ,  Kenneth P. Gross

发明人： Dan Wack ,  Haiming Wang ,  Kenneth P. Gross

IPC分类号： G01B11/14 ,  G01N21/55

CPC分类号： G01B11/24 ,  G01N21/211 ,  G01N21/47 ,  G01N21/956 ,  G01N2021/213 ,  G01N2021/217 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792

摘要： Systems and methods for measuring one or more characteristics of patterned features on a specimen are provided. One system includes an optical subsystem configured to acquire measurements of light scattered from the patterned features on the specimen at multiple angles of incidence, multiple azimuthal angles, and multiple wavelengths simultaneously. The system also includes a processor configured to determine the one or more characteristics of the patterned features from the measurements. One method includes acquiring measurements of light scattered from the patterned features on the specimen at multiple angles of incidence, multiple azimuthal angles, and multiple wavelengths simultaneously. The method also includes determining the one or more characteristics of the patterned features from the measurements.

摘要翻译： 提供了用于测量样本上的图案特征的一个或多个特征的系统和方法。 一个系统包括光学子系统，被配置为从多个入射角，多个方位角和多个波长同时获取从样本上的图案化特征散射的光的测量。 该系统还包括配置成从测量中确定图案化特征的一个或多个特性的处理器。 一种方法包括以多个入射角，多个方位角和多个波长同时从样本上的图案化特征散射的光的测量。 该方法还包括从测量中确定图案化特征的一个或多个特性。

公开(公告)号：US20060126079A1

公开(公告)日：2006-06-15

申请号：US11078572

申请日：2005-03-11

申请人： Noah Bareket ,  Haiming Wang

发明人： Noah Bareket ,  Haiming Wang

IPC分类号： G01B11/14

CPC分类号： G01B11/0641 ,  G01N21/211 ,  G01N21/956

摘要： Techniques for optimizing the sensitivity of spectroscopic measurement techniques with respect to certain profile variables by selecting desired measurement angles since the measurement sensitivity to each variable depends, at least in part, on the measurement angles of an incident beam. The selected desired set of measurement angles includes both an azimuth angle and a polar angle. Optimizing the sensitivity of spectroscopic measurement techniques can also reduce or eliminates measurement correlation among variable to be measured.

公开(公告)号：US06184984B2

公开(公告)日：2001-02-06

申请号：US09246922

申请日：1999-02-09

申请人： Shing Lee ,  Haiming Wang ,  Adam Norton ,  Mehrdad Nikoonahad

发明人： Shing Lee ,  Haiming Wang ,  Adam Norton ,  Mehrdad Nikoonahad

IPC分类号： G01N2121

CPC分类号： G01J4/02 ,  G01J3/447 ,  G01N21/21

摘要： A polarized sample beam of broadband radiation is focused onto the surface of a sample and the radiation modified by the sample is collected by means of a mirror system in different planes of incidence. The sample beam focused to the sample has a multitude of polarization states. The modified radiation is analyzed with respect to a polarization plane to provide a polarimetric spectrum. Thickness and refractive information may then be derived from the spectrum. Preferably the polarization of the sample beam is altered only by the focusing and the sample, and the analyzing is done with respect to a fixed polarization plane. In the preferred embodiment, the focusing of the sample beam and the collection of the modified radiation are repeated employing two different apertures to detect the presence or absence of a birefringence axis in the sample. In another preferred embodiment, the above-described technique may be combined with ellipsometry for determining the thicknesses and refractive indices of thin films.

摘要翻译： 将宽带辐射的极化样品束聚焦到样品的表面上，并且通过不同入射平面的反射镜系统收集由样品改性的辐射。 聚焦到样品的样品束具有许多极化状态。 相对于偏振平面分析修改的辐射以提供偏振光谱。 然后可以从光谱导出厚度和折射信息。 优选地，样品光束的偏振仅由聚焦和样品改变，并且相对于固定的偏振平面进行分析。 在优选实施例中，使用两个不同的孔来重复样品束的聚焦和修改的辐射的收集，以检测样品中双折射轴的存在或不存在。 在另一个优选实施例中，上述技术可以与用于确定薄膜的厚度和折射率的椭偏仪组合。

公开(公告)号：US09491766B2

公开(公告)日：2016-11-08

申请号：US13991706

申请日：2010-12-08

申请人： Tao Peng ,  Qianxi Lu ,  Haiming Wang ,  Tao Chen

发明人： Tao Peng ,  Qianxi Lu ,  Haiming Wang ,  Tao Chen

IPC分类号： H04L12/42 ,  H04L12/403 ,  H04W72/04 ,  H04B7/155 ,  H04W84/04

CPC分类号： H04W72/048 ,  H04B7/15528 ,  H04W72/042 ,  H04W76/14 ,  H04W84/047

摘要： A method, apparatus, and computer program for supporting simultaneous multi-use of resources of a backhaul link between a relay base station and another base station of a cellular radio network. The relay base station is configured to forward transmission resources of the backhaul link to at least one communication device located in a cell of the relay base station. The communication device(s) is/are then configured to utilize the resources of the backhaul link for device-to-device connections.

摘要翻译： 一种用于支持中继基站与蜂窝无线电网络的另一个基站之间的回程链路的资源的同时多次使用的方法，装置和计算机程序。 中继基站被配置为将回程链路的传输资源转发到位于中继基站的小区中的至少一个通信设备。 通信设备然后被配置为利用回程链路的资源进行设备到设备连接。

公开(公告)号：US09351185B2

公开(公告)日：2016-05-24

申请号：US14111577

申请日：2011-04-15

申请人： Gilles Charbit ,  Haiming Wang

发明人： Gilles Charbit ,  Haiming Wang

IPC分类号： H04W24/08 ,  H04W24/10 ,  H04W72/04 ,  H04W16/14

CPC分类号： H04B17/345 ,  H04W16/14 ,  H04W24/08 ,  H04W24/10 ,  H04W72/0453

摘要： An apparatus, method and computer program product comprise controlling cellular network based communication in a primary cell on a frequency band related to the cellular network and by using an uplink and downlink configuration specific to the primary cell; controlling communication in a secondary cell on a frequency band related to a television white space channel and by using an uplink and downlink configuration specific to the secondary cell; measuring radio interference on a temporarily set uplink related carrier on the secondary cell based on information on the temporarily set uplink related carrier received on a downlink related carrier on the primary cell; and reporting results of radio interference measurement via the primary cell.

摘要翻译： 一种装置，方法和计算机程序产品包括在与蜂窝网络相关的频带上的主小区中控制基于蜂窝网络的通信，并且通过使用专用于所述主小区的上行链路和下行链路配置; 控制与电视白空间信道相关的频带上的二次小区中的通信，以及通过使用二次小区特有的上行链路和下行链路配置; 基于在所述主小区上的下行链路相关载波上接收的临时设置的上行链路相关载波的信息来测量所述辅助小区上的临时设置的上行链路相关载波上的无线电干扰; 并通过主要小区报告无线电干扰测量结果。

公开(公告)号：US08824326B2

公开(公告)日：2014-09-02

申请号：US13318347

申请日：2009-04-30

申请人： Haiming Wang ,  Shaoyi Xu ,  Tao Peng ,  Qianxi Lu

发明人： Haiming Wang ,  Shaoyi Xu ,  Tao Peng ,  Qianxi Lu

IPC分类号： H04L12/26

CPC分类号： H04W72/082 ,  H04W84/18

摘要： Various methods for managing device-to-device interference are provided. One example method includes receiving an expected interference level for a resource block, where the expected interference level is represented by data indicative of interference associated with the resource block due to device-to-device communications using the resource block. The example method further includes selecting the resource block for a device-to-device communications session based at least in part on the expected interference level for the resource block. Similar and related example methods and example apparatuses are also provided.

摘要翻译： 提供了用于管理设备到设备干扰的各种方法。 一个示例性方法包括接收资源块的预期干扰电平，其中由于使用资源块的设备到设备通信，预期干扰电平由指示与资源块相关联的干扰的数据表示。 该示例方法还包括至少部分地基于资源块的预期干扰级别来选择用于设备到设备通信会话的资源块。 还提供了类似的和相关的示例性方法和示例设备。

公开(公告)号：US08446584B2

公开(公告)日：2013-05-21

申请号：US13106940

申请日：2011-05-13

申请人： Shankar Krishnan ,  Haiming Wang

发明人： Shankar Krishnan ,  Haiming Wang

IPC分类号： G01J4/00

CPC分类号： G01B11/0641 ,  G01B2210/56 ,  G01N21/211 ,  G01N21/956

摘要： A Mueller ellipsometer of the type having a first rotating element on an incident beam side of a sample and a second rotating element on a reflected beam side of the sample and a detector having an integration time, having a controller for selectively and separately adjusting (1) a first angular frequency of the first rotating element and (2) a second angular frequency of the second rotating element.

摘要翻译： 具有在样品的入射光束侧的第一旋转元件和样品的反射光束侧的第二旋转元件和具有积分时间的检测器的Mueller椭偏仪具有用于选择性和分别地调节（1 ）第一旋转元件的第一角频率和（2）第二旋转元件的第二角频率。