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公开(公告)号：US20120105961A1
公开(公告)日：2012-05-03
申请号：US13347320
申请日：2012-01-10
IPC分类号： G02B27/44
CPC分类号： G02B27/44 , G02B5/1838 , G02B5/1876 , G02B27/4244 , G02F1/061 , G03F7/70191 , G21K1/06 , G21K2201/067
摘要： A zone plate includes a plurality of consecutively arranged, adjacent, and alternating first and second regions. The first regions are arranged to be substantially transparent to a first predetermined wavelength of radiation and a second predetermined wavelength of radiation that is different from the first predetermined wavelength of radiation. The second regions are arranged to be substantially opaque, diffractive, or reflective to the first predetermined wavelength of radiation and substantially transparent to the second predetermined wavelength of radiation.
摘要翻译： 区域板包括多个连续布置的，相邻的和交替的第一和第二区域。 第一区域被布置成对于辐射的第一预定波长和不同于第一预定波长辐射的第二预定波长的辐射基本上是透明的。 第二区域被布置为基本上不透明，衍射或反射到第一预定波长的辐射并且对第二预定波长的辐射基本透明。
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公开(公告)号：US08093789B2
公开(公告)日：2012-01-10
申请号：US12602684
申请日：2008-06-02
IPC分类号： H01J1/62
CPC分类号： B32B17/10036 , B32B17/10174 , B32B17/10541 , B32B17/10761 , B32B2307/302 , F21K9/00 , H01L25/0753 , H01L2924/0002 , Y10S362/80 , H01L2924/00
摘要： A light output device comprises a substrate arrangement with a light source device integrated into the structure of the substrate arrangement. The substrate arrangement comprises first and second optically transmissive substrates, an insulating layer in which the light source device is embedded and provided between the substrates, and a thermally conductive layer provided on at least on of the substrates.
摘要翻译： 光输出装置包括具有集成到基板装置的结构中的光源装置的基板装置。 衬底布置包括第一和第二光学透射衬底，其中光源器件被嵌入并设置在衬底之间的绝缘层和设置在至少在衬底上的导热层。
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93.发明申请SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS INCLUDING SUCH A SPECTRAL PURITY FILTER AND DEVICE MANUFACTURING METHOD 审中-公开光谱滤光片，包含这种光谱纯度滤光片和器件制造方法的光刻设备公开(公告)号：US20110157573A1
公开(公告)日：2011-06-30
申请号：US13060901
申请日：2009-07-29
CPC分类号： G03F7/70941 , G02B5/208 , G03F7/70191 , G03F7/70575 , G21K1/10
摘要： A spectral purity filter includes an aperture. The spectral purity filter is configured to enhance the spectral purity of a radiation beam by being configured to absorb radiation of a first wavelength and allow at least a portion of radiation of a second wavelength to transmit through the aperture. The first wavelength is larger than the second wavelength. The spectral purity filter may be used to improve the spectral purity of an Extreme Ultra-Violet (EUV) radiation beam.
摘要翻译： 光谱纯度滤光片包括孔径。 光谱纯度滤光器被配置为通过被配置为吸收第一波长的辐射并且允许第二波长的至少一部分辐射透射通过孔来增强辐射束的光谱纯度。 第一波长大于第二波长。 光谱纯度滤光片可用于提高极紫外（EUV）辐射束的光谱纯度。
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公开(公告)号：US20110127552A1
公开(公告)日：2011-06-02
申请号：US12674940
申请日：2008-08-28
IPC分类号： H01L33/58
CPC分类号： B32B17/10174 , B32B17/10036 , B32B17/10541 , B32B17/10706 , B32B17/10761 , H01L33/56 , H01L33/641 , H01L33/644 , H01L2933/0091
摘要： The present invention relates to a light output device (100) comprising a LED package (4) at least partly embedded in a translucent layer (5) of a thermoplastic material, characterized in that the translucent layer (5) comprises light scattering particles (6) having a higher thermal conductivity than the thermal conductivity of the thermoplastic material of the translucent layer (5).
摘要翻译： 本发明涉及一种光输出装置（100），其包括至少部分地嵌入热塑性材料的半透明层（5）中的LED封装（4），其特征在于，所述透光层（5）包括光散射颗粒（6） ）具有比半透明层（5）的热塑性材料的热导率更高的热导率。
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公开(公告)号：US20100265731A1
公开(公告)日：2010-10-21
申请号：US12743846
申请日：2008-11-17
摘要： The present invention relates to a compartment provided a tufted textile (100) comprising: a backing (10), and yarns (40) forming tufts extending from a first side of the backing, the compartment further comprising a light source (50; 80) and a conductor arrangement (60) for the light source, wherein the light source, the conductor arrangement and the backing are arranged so as to radiate light from the light source at least partly through the backing, the backing being substantially permeable to light. The tufted textile (100) may be a carpet.
摘要翻译： 本发明涉及一种设置有簇绒织物（100）的隔室，包括：背衬（10）和形成从背衬的第一侧延伸的簇的纱线（40），隔室还包括光源（50; 80） 以及用于所述光源的导体装置（60），其中所述光源，所述导体布置和所述背衬被布置成以至少部分地透过所述背衬从所述光源辐射光，所述背衬基本上可透光。 簇绒织物（100）可以是地毯。
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公开(公告)号：US20100244734A1
公开(公告)日：2010-09-30
申请号：US12744088
申请日：2008-11-24
IPC分类号： H05B37/02
CPC分类号： H05B37/0254 , H05B33/0803 , H05B37/0263 , Y10T307/258
摘要： A light output device comprises a power supply and a plurality of light source device arrangements arranged in a line extending from a power connection, with adjacent light source device arrangements in the line connected together with an electrical connector arrangement. Each light source device arrangement is associated with a control circuit from the plurality of control circuits for providing independent control of the light source device arrangement output based on the control signal. The device can be reduced in length by disconnecting the connector arrangement between an adjacent pair of light source device arrangements and the remaining light source device arrangements extending from the power source are independently controlled by the control signal.
摘要翻译： 光输出装置包括电源和布置成从电源连接延伸的线中的多个光源装置布置，其中线路中的相邻光源装置布置与电连接器装置连接在一起。 每个光源装置布置与来自多个控制电路的控制电路相关联，用于基于控制信号提供对光源装置布置输出的独立控制。 通过断开相邻的一对光源装置装置之间的连接器布置，可以减小装置的长度，并且从电源延伸的剩余光源装置布置由控制信号独立地控制。
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公开(公告)号：US20100176705A1
公开(公告)日：2010-07-15
申请号：US12602684
申请日：2008-06-02
IPC分类号： H01J61/52
CPC分类号： B32B17/10036 , B32B17/10174 , B32B17/10541 , B32B17/10761 , B32B2307/302 , F21K9/00 , H01L25/0753 , H01L2924/0002 , Y10S362/80 , H01L2924/00
摘要： A light output device comprises a substrate arrangement with a light source device integrated into the structure of the substrate arrangement. The substrate arrangement comprises first and second optically transmissive substrates, an insulating layer in which the light source device is embedded and provided between the substrates, and a thermally conductive layer provided on at least on of the substrates.
摘要翻译： 光输出装置包括具有集成到基板装置的结构中的光源装置的基板装置。 衬底布置包括第一和第二光学透射衬底，其中光源器件被嵌入并设置在衬底之间的绝缘层和设置在至少在衬底上的导热层。
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公开(公告)号：US20100163754A1
公开(公告)日：2010-07-01
申请号：US12663525
申请日：2008-06-11
CPC分类号： B32B17/10761 , B32B17/10036 , B32B17/10174 , Y10T428/252
摘要： The invention relates to a self-cleaning system (10) and window glass. The self-cleaning system comprises a translucent substrate (20), a light-emitting device (30) and a photo-catalytic layer (40) applied to a surface (22) of the translucent substrate for generating a self-cleaning surface. The photo-catalytic layer produces the self-cleaning effect when illuminated with light of a predefined wavelength range. The translucent substrate is translucent for at least a sub-range of the predefined wavelength range. The light-emitting device is arranged for illuminating the photo-catalytic layer via the translucent substrate, an emission spectrum emitted by the light-emitting device comprising light within the sub-range. The effect of the illumination system according to the invention is that the illumination of the photo-catalytic layer via the translucent substrate enables the light-emitting device to be arranged relatively near to the photo-catalytic layer such that only a relatively low light flux is required from the light-emitting device to activate the self-cleaning process.
摘要翻译： 本发明涉及自清洁系统（10）和窗玻璃。 自清洁系统包括施加到透光性基板的表面（22）的透光性基板（20），发光元件（30）和光催化剂层（40），用于产生自清洁表面。 当用预定波长范围的光照射时，光催化层产生自清洁效果。 半透明基板在预定波长范围的至少一个子范围内是半透明的。 发光装置被布置用于经由透光性基板照射光催化剂层，发光装置发射的发光光谱包括在子范围内的光。 根据本发明的照明系统的效果在于，通过透光性基板对光催化剂层的照射使得发光装置能够相对靠近光催化剂层布置，使得只有较低的光通量为 需要从发光装置启动自清洁过程。
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公开(公告)号：US07687788B2
公开(公告)日：2010-03-30
申请号：US11826525
申请日：2007-07-16
IPC分类号： H05G2/00
CPC分类号： G03F7/70916 , B82Y10/00 , G03F7/70033 , G03F7/70883 , G03F7/70983
摘要： A debris prevention system is constructed and arranged to prevent debris that emanates from a radiation source from propagating with radiation from the radiation source into or within a lithographic apparatus. The debris prevention system includes an aperture that defines a maximum emission angle of the radiation coming from the radiation source, and a first debris barrier having a radiation transmittance. The first debris barrier includes a rotatable foil trap. The debris prevention system also includes a second debris barrier that has a radiation transmittance. The first debris barrier is configured to cover a part of the emission angle and the second debris barrier is configured to cover another part of the emission angle.
摘要翻译： 防碎系统被构造和布置成防止从辐射源发出的碎屑通过来自辐射源的辐射传播到光刻设备内或在光刻设备内。 碎片防止系统包括限定来自辐射源的辐射的最大发射角的孔，以及具有辐射透射率的第一碎片屏障。 第一个碎片障碍物包括一个可旋转的箔片陷阱。 碎片防止系统还包括具有辐射透射率的第二碎片屏障。 第一碎片屏障配置成覆盖发射角的一部分，并且第二碎片屏障构造为覆盖发射角的另一部分。
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100.发明申请Radiation source for generating electromagnetic radiation and method for generating electromagnetic radiation 审中-公开用于产生电磁辐射的辐射源和产生电磁辐射的方法公开(公告)号：US20080239262A1
公开(公告)日：2008-10-02
申请号：US11730187
申请日：2007-03-29
CPC分类号： G03F7/70033 , B82Y10/00 , H05G2/003 , H05G2/005 , H05G2/008
摘要： A radiation source for generating electromagnetic radiation includes an anode, a cathode, and a discharge space. The anode and the cathode are configured to create a discharge in a substance in the discharge space to form a plasma so as to generate the electromagnetic radiation. The radiation source also includes a fuel supply constructed and arranged to supply at least a component of the substance to a location near the discharge space. The fuel supply is located at a distance from the anode and the cathode. The radiation source also includes a further supply constructed and arranged to create and/or maintain a cooling and/or protective layer on or near the anode and/or cathode.
摘要翻译： 用于产生电磁辐射的辐射源包括阳极，阴极和放电空间。 阳极和阴极被配置为在放电空间中的物质中产生放电以形成等离子体，以便产生电磁辐射。 辐射源还包括构造和布置为将物质的至少一部分供应到放电空间附近的位置的燃料供应。 燃料供应位于距离阳极和阴极一定距离处。 辐射源还包括构造和布置成在阳极和/或阴极上或附近产生和/或维持冷却和/或保护层的另外的供给源。
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