公开(公告)号：US20120031147A1

公开(公告)日：2012-02-09

申请号：US13254155

申请日：2010-02-24

申请人： Kunio Arai ,  Yasuhiko Kanaya ,  Kazuhisa Ishii ,  Hiroshi Honda

发明人： Kunio Arai ,  Yasuhiko Kanaya ,  Kazuhisa Ishii ,  Hiroshi Honda

IPC分类号： C03B35/24 ,  C03B23/02

CPC分类号： B23K37/0408 ,  B23K26/0006 ,  B23K26/0853 ,  B23K26/146 ,  B23K26/364 ,  B23K26/40 ,  B23K26/53 ,  B23K2103/16 ,  B23K2103/172 ,  B65G49/064 ,  B65G2249/045 ,  H01L21/6838 ,  H01L31/18

摘要： An apparatus for machining a thin-film layer of a workpiece, which is a transparent glass on which a thin-film layer is disposed on a top surface thereof, includes a workpiece-underside support mechanism for supporting the workpiece in a vertical direction by an air floatation mechanism and a suction mechanism, a clamp device for gripping the workpiece so as to follow the movement in the vertical direction of the workpiece, and a machining head for machining the thin-film layer with a laser beam. The machining head machines the thin-film layer on the top surface of the workpiece by irradiating the workpiece with a laser beam entering through the underside of the workpiece. Further including nozzles, the thin-film layer is machined while the cooling medium is delivered from the nozzles disposed by the thin-film layer side.

摘要翻译： 作为在其上表面设置有薄膜层的透明玻璃的工件的薄膜层的加工装置包括：工件下侧支撑机构，用于将工件沿垂直方向支撑， 空气浮起机构和抽吸机构，用于夹持工件以沿着工件的垂直方向移动的夹紧装置，以及用激光束加工薄膜层的加工头。 加工头通过用通过工件下侧进入的激光束照射工件来在工件的顶表面上加工薄膜层。 进一步包括喷嘴，在从由薄膜层侧设置的喷嘴输送冷却介质的同时加工薄膜层。

公开(公告)号：US20110228537A1

公开(公告)日：2011-09-22

申请号：US13049089

申请日：2011-03-16

申请人： Keiko YOSHIMIZU ,  Hiroshi Aoyama ,  Shigenobu Maruyama ,  Yasuhiro Yoshitake

发明人： Keiko YOSHIMIZU ,  Hiroshi Aoyama ,  Shigenobu Maruyama ,  Yasuhiro Yoshitake

IPC分类号： F21V5/04

CPC分类号： G02B27/0955

摘要： An adjustable beam size illumination optical apparatus includes a beam size adjusting optical system which includes groups of cylindrical array lenses disposed correspondingly to the long and short axis directions respectively and having variable intervals among the lenses, and a group of cylindrical telescope lenses disposed correspondingly to one of the long and short axis directions and having variable intervals among the lenses, and adjusts parallel light from a light source in size in accordance with the two axis directions orthogonal to each other. The lens interval of one of the cylindrical array lens groups and the cylindrical telescope lens group is changed to adjust a beam size on a projection surface in accordance with the long axis direction or the short axis direction. Thus, it is possible to adjust the beam size in accordance with the long axis direction and the short axis direction individually, and it is possible to make irradiation with the beam with uniform intensity.

摘要翻译： 可调光束尺寸照明光学装置包括光束尺寸调整光学系统，该光束尺寸调整光学系统包括分别对应于长轴和短轴方向设置的圆柱形阵列透镜组，并且在透镜之间具有可变的间隔，以及一组圆柱形望远镜，其对应于一个 并且在透镜中具有可变的间隔，并且根据彼此正交的两个轴方向来调整来自光源的尺寸的平行光。 根据长轴方向或短轴方向，改变圆柱形阵列透镜组和圆柱形望远镜透镜组中的一个的透镜间隔，以调整投影表面上的光束尺寸。 因此，可以分别根据长轴方向和短轴方向调整光束尺寸，并且可以以均匀的强度对光束进行照射。

公开(公告)号：US07969636B2

公开(公告)日：2011-06-28

申请号：US12191684

申请日：2008-08-14

申请人： Yoshitatsu Naito ,  Yoshitada Oshida ,  Mitsuhiro Suzuki

发明人： Yoshitatsu Naito ,  Yoshitada Oshida ,  Mitsuhiro Suzuki

IPC分类号： G02B26/08

CPC分类号： G03F7/2006 ,  G03F7/70383

摘要： A laser direct imaging apparatus which can expose photosensitive materials having various sensitivities and which can correct an imaging position in accordance with deformation of a workpiece. In the laser direct imaging apparatus, the workpiece is moved in a sub-scanning direction while a cylindrical lens is used to converge a laser beam, which has been modulated based on raster data, in the sub-scanning direction and deflect the laser beam toward a main scanning direction so as to image a desired pattern on the workpiece. The cylindrical axis of the cylindrical lens is designed to be able to rotate horizontally and to be able to change an angle with respect to the main scanning direction.

摘要翻译： 一种激光直接成像装置，其可以暴露具有各种灵敏度并且可以根据工件的变形校正成像位置的感光材料。 在激光直接成像装置中，工件在副扫描方向上移动，同时使用柱面透镜在副扫描方向上将基于光栅数据调制的激光束会聚在一起，并将激光束朝向 主扫描方向，以便对工件上的期望图案进行成像。 柱面透镜的圆柱轴被设计成能够水平旋转并且能够相对于主扫描方向改变角度。

公开(公告)号：US07820089B2

公开(公告)日：2010-10-26

申请号：US12351304

申请日：2009-01-09

申请人： Todd E. Lizotte

发明人： Todd E. Lizotte

IPC分类号： B29C59/16

CPC分类号： B29C59/16 ,  H01M4/04

摘要： A method for forming an array of three dimensional electrode elements for micro-batteries, including forming a plurality of first parallel channels in a substrate, filling the plurality of first channels with a sacrificial filler material, forming at least one plurality of second parallel channels, each of the pluralities of channels being oriented in a different direction, and removing the sacrificial filler material to leave a grid array of electrode elements. The method may further include a preliminary step of depositing a sacrificial coating onto the surface of the substrate and a final step of removing the sacrificial coating and any debris resulting from the channel forming steps deposited thereon.

摘要翻译： 一种用于形成用于微电池的三维电极元件阵列的方法，包括在衬底中形成多个第一平行通道，用牺牲填充材料填充多个第一通道，形成至少多个第二平行通道， 多个通道中的每一个沿不同的方向取向，并且去除牺牲填充材料以留下电极元件的栅格阵列。 该方法还可以包括将牺牲涂层沉积到衬底的表面上的初步步骤，以及去除牺牲涂层的最终步骤以及沉积在其上的通道形成步骤产生的任何碎屑。

公开(公告)号：US07629714B2

公开(公告)日：2009-12-08

申请号：US11833695

申请日：2007-08-03

申请人： Souichi Toyama ,  Kounosuke Kitamura ,  Akira Doi ,  Hiromu Hirai ,  Kenta Seki ,  Yoshiaki Kano

发明人： Souichi Toyama ,  Kounosuke Kitamura ,  Akira Doi ,  Hiromu Hirai ,  Kenta Seki ,  Yoshiaki Kano

IPC分类号： H02K33/00

CPC分类号： H02K26/00 ,  H02K33/16

摘要： A rocking actuator and a laser machining apparatus which can suppress a temperature rise of a permanent magnet in a moving-magnet actuator. Even when a steerable mirror is positioned by rapid and continuous motions, highly reliable machining can be performed without degrading machining throughput or hole position accuracy. A cooling jacket for cooling a casing and heat transfer units brought into contact with a coil and the casing are provided. Heat generated in the coil is introduced to the casing through the heat transfer bypass units. Thus, the temperature rise of the coil is suppressed. Radial grooves are provided in the permanent magnet opposed to the coil so as to prevent an eddy current from appearing therein. Groove depth is made not smaller than skin depth expressed by a function of volume resistivity and permeability of the permanent magnet and a fundamental frequency of a current applied to the coil.

摘要翻译： 可以抑制移动磁体致动器中的永磁体的温度升高的摆动致动器和激光加工装置。 即使通过快速连续的运动来定位可转向的镜子，也可以在不降低加工吞吐量或孔位置精度的情况下执行高度可靠的加工。 提供了用于冷却壳体的冷却套和与线圈和壳体接触的传热单元。 在线圈中产生的热量通过传热旁路单元引入壳体。 因此，线圈的温度上升被抑制。 在与线圈相对的永磁体中设置有径向槽，以防止其中出现涡流。 凹槽深度不小于由永磁体的体积电阻率和磁导率函数表示的皮肤深度以及施加到线圈的电流的基频。

公开(公告)号：US20090179354A1

公开(公告)日：2009-07-16

申请号：US12351304

申请日：2009-01-09

申请人： Todd E. LIZOTTE

发明人： Todd E. LIZOTTE

IPC分类号： B29C59/16

CPC分类号： B29C59/16 ,  H01M4/04

摘要： A method for forming an array of three dimensional electrode elements for micro-batteries, including forming a plurality of first parallel channels in a substrate, filling the plurality of first channels with a sacrificial filler material, forming at least one plurality of second parallel channels, each of the pluralities of channels being oriented in a different direction, and removing the sacrificial filler material to leave a grid array of electrode elements. The method may further include a preliminary step of depositing a sacrificial coating onto the surface of the substrate and a final step of removing the sacrificial coating and any debris resulting from the channel forming steps deposited thereon.

摘要翻译： 一种用于形成用于微电池的三维电极元件阵列的方法，包括在衬底中形成多个第一平行通道，用牺牲填充材料填充多个第一通道，形成至少多个第二平行通道， 多个通道中的每一个沿不同的方向取向，并且去除牺牲填充材料以留下电极元件的栅格阵列。 该方法还可以包括将牺牲涂层沉积到衬底的表面上的初步步骤，以及去除牺牲涂层的最终步骤以及沉积在其上的通道形成步骤产生的任何碎屑。

公开(公告)号：US07507058B2

公开(公告)日：2009-03-24

申请号：US11252616

申请日：2005-10-19

申请人： Takayuki Hashimoto ,  Katsuhiro Nagasawa ,  Shintarou Takahashi

发明人： Takayuki Hashimoto ,  Katsuhiro Nagasawa ,  Shintarou Takahashi

IPC分类号： B23B51/02

CPC分类号： B23C5/28 ,  B23B49/005 ,  B23B51/06 ,  B23C2210/52 ,  B23C2250/12 ,  B23C2255/12 ,  H05K3/0047 ,  Y10T279/3487 ,  Y10T408/8925 ,  Y10T408/907 ,  Y10T408/99 ,  Y10T409/308624

摘要： A tool positioning device and a machining element have simple structures which can reduce running cost. In addition to a hole that engages with a shank of an end mill, a channel is provided so that it penetrates through the device such that one end thereof communicates with an upper face of the device and the other end communicates with a lower end of the device. In this case, it is more effective to provide a concave portion that is opened to the upper face and communicates with the hole. The same effect may be obtained by making a cylindrical hole, for example, instead of the channel.

摘要翻译： 刀具定位装置和加工元件结构简单，可以降低运行成本。 除了与端铣刀的柄接合的孔之外，还设置有通道，使得其通过装置，使得其一端与装置的上表面连通，另一端与 设备。 在这种情况下，提供对上表面开口并与孔连通的凹部更为有效。 例如通过制造圆柱形孔而不是通道可以获得相同的效果。

公开(公告)号：US07496415B2

公开(公告)日：2009-02-24

申请号：US11442155

申请日：2006-05-30

申请人： Souichi Toyama ,  Yaichi Okubo

发明人： Souichi Toyama ,  Yaichi Okubo

IPC分类号： G06F19/00

CPC分类号： G05B19/21 ,  G05B2219/41144 ,  G05B2219/41186 ,  G05B2219/41232 ,  G05B2219/45165

摘要： A digital servo control unit which uses a D/A converter, which suppresses the spike-like pulsation superimposed on a current error signal inside a current control circuit, and which has control performance not lower than that in the background art even when a low-voltage and low-price power supply circuit is used. A first-order low pass filter acts on an analog signal output by the D/A converter, and a stabilizing compensation occurs for a phase delay caused by the first-order low pass filter. The first-order low pass filter is formed as a low pass filter having a cut-off frequency which is lower than a sampling frequency. The first-order low pass filter may be replaced by a notch filter having a cut-off frequency which is equal to a sampling frequency or which is equal to an integer multiple of a Nyquist frequency.

摘要翻译： 一种数字伺服控制单元，其使用D / A转换器，其抑制叠加在电流控制电路内的电流误差信号上的尖状脉动，并且其控制性能不低于背景技术的控制性能， 使用电压和低价电源电路。 一阶低通滤波器作用于由D / A转换器输出的模拟信号，并且由一阶低通滤波器引起的相位延迟发生稳定补偿。 一阶低通滤波器形成为具有低于采样频率的截止频率的低通滤波器。 一阶低通滤波器可以由具有等于采样频率或等于奈奎斯特频率的整数倍的截止频率的陷波滤波器代替。

公开(公告)号：US07432681B2

公开(公告)日：2008-10-07

申请号：US10927082

申请日：2004-08-27

申请人： Souichi Toyama ,  Haruaki Otsuki ,  Atsushi Sakamoto ,  Kenta Seki ,  Yaichi Okubo

发明人： Souichi Toyama ,  Haruaki Otsuki ,  Atsushi Sakamoto ,  Kenta Seki ,  Yaichi Okubo

IPC分类号： G05B11/42

CPC分类号： G02B26/105 ,  B23K26/08 ,  B23K26/082 ,  H05K3/0026

摘要： A scanner system includes a servo control unit. A rotation angle of a rotating shaft supporting a mirror is detected, and an error of the detected value with respect to a commanded value is integrated by an integral compensator so that the detected value is able to track the commanded value. A tracking error proportional compensator is disposed in parallel with the integral compensator so as to add a correction value proportional to the error to the integrated value of the error. A plurality of gains are prepared for each of the integral compensator, the tracking error proportional compensator, a detected value proportional compensator and a detected value differential compensator of the servo control unit. Each gain is changed in accordance with a travel angle of the commanded value. Thus, the mirror can be positioned quickly so that the machining speed can be improved.

摘要翻译： 扫描仪系统包括伺服控制单元。 检测支撑反射镜的旋转轴的旋转角度，并且通过积分补偿器将检测值相对于指令值的误差积分，使得检测值能够跟踪指令值。 跟踪误差比例补偿器与积分补偿器并联设置，以便将误差成比例的校正值与误差的积分值相加。 为积分补偿器，跟踪误差比例补偿器，检测值比例补偿器和伺服控制单元的检测值差分补偿器中的每一个准备多个增益。 每个增益根据指令值的行进角度而改变。 因此，可以快速地定位镜子，从而可以提高加工速度。

公开(公告)号：US07372478B2

公开(公告)日：2008-05-13

申请号：US11075245

申请日：2005-03-09

申请人： Yoshitada Oshida ,  Yoshitatsu Naito ,  Mituhiro Suzuki ,  Bunji Uchiyama ,  Tsuyoshi Yamaguchi

发明人： Yoshitada Oshida ,  Yoshitatsu Naito ,  Mituhiro Suzuki ,  Bunji Uchiyama ,  Tsuyoshi Yamaguchi

IPC分类号： B41J2/47 ,  G03B27/54

CPC分类号： G03F7/70791 ,  G02B26/123 ,  G03F7/70383 ,  G03F7/70391 ,  G03F7/70466

摘要： A pattern exposure method and a pattern exposure apparatus in which the throughput is improved with an inexpensive apparatus and without a low running cost. Output faces of a plurality of laser beams emitted from a plurality of semiconductor lasers respectively are arranged in two directions. One of the directions is the same direction as the scanning direction of a polygon mirror while the other is a direction crossing the scanning direction of the polygon mirror. In this event, the array pitch of the output faces arranged in the direction crossing the scanning direction of the polygon mirror is made equal to resolution of an exposure pattern. In this event, the wavelength of each laser may be made not longer than 410 nm.

摘要翻译： 图案曝光方法和图案曝光装置，其中通过廉价的装置提高生产量并且没有低的运行成本。 从多个半导体激光器分别发射的多个激光束的输出面分别布置在两个方向上。 方向之一是与多面镜的扫描方向相同的方向，而另一方向是与多面镜的扫描方向交叉的方向。 在这种情况下，使排列在与多面镜的扫描方向交叉的方向上的输出面的阵列间距等于曝光图案的分辨率。 在这种情况下，每个激光器的波长可以不超过410nm。