公开(公告)号：US07587912B2

公开(公告)日：2009-09-15

申请号：US10547053

申请日：2004-02-20

申请人： Yasuo Ohama ,  Hiroshi Matsui

发明人： Yasuo Ohama ,  Hiroshi Matsui

IPC分类号： C03B19/09

CPC分类号： C03B19/095 ,  C03B2201/04 ,  C30B15/10

摘要： The present invention refers to a method for producing a quartz glass crucible for use in pulling silicon single crystal, said crucible having at least a double-layer structure comprising a pore-free transparent inner layer and an opaque base body or outer layer having pores, characterized in that at least the base body is formed with a silica powder maintained in a gas having a mixing ratio of 0.0005 to 0.0065 kg/kg (dry gas), and a quartz glass crucible produced by said production method. The obtained crucible has an average OH group concentration of 50 ppm or lower and is capable of suppressing the vibration occurring on the surface of silicon melt during pulling the silicon single crystal. Further the obtained crucible suffers less deformation of the crucible on pulling the silicon single crystal.

摘要翻译： 本发明涉及一种用于制造用于拉硅单晶的石英玻璃坩埚的方法，所述坩埚至少具有包含无孔透明内层和不透明基体或具有孔的外层的双层结构， 其特征在于，至少所述基体由保持在混合比为0.0005〜0.0065kg / kg（干燥气体）的气体中的二氧化硅粉末和由所述制造方法制造的石英玻璃坩埚形成。 得到的坩埚的OH基浓度的平均值为50ppm以下，能够抑制在拉伸硅单晶时在硅熔体表面发生的振动。 此外，所获得的坩埚在拉制硅单晶时受到较小的坩埚变形。

公开(公告)号：US07299658B2

公开(公告)日：2007-11-27

申请号：US10559086

申请日：2004-05-21

申请人： Yasuo Ohama ,  Takayuki Togawa ,  Shigeo Mizuno

发明人： Yasuo Ohama ,  Takayuki Togawa ,  Shigeo Mizuno

IPC分类号： C03B11/08 ,  C30B35/00

CPC分类号： C03B19/095 ,  C03B2201/03 ,  C30B15/10 ,  Y02P40/57 ,  Y10S65/08 ,  Y10S117/90 ,  Y10T117/10

摘要： A quartz glass crucible for use in pulling up a silicon single crystal, wherein it has, at least in the curved portion thereof, a three-layer structure comprising a transparent inner layer being composed of a synthetic quartz glass and having a low Al concentration, a transparent or nontransparent intermediate layer being composed of a natural quartz glass or a mixture of natural and synthetic quartz glasses and having a high Al concentration, and a nontransparent outer layer being composed of a natural quartz glass and having an Al concentration higher than that of the intermediate layer. The quartz glass crucible is reduced in the deformation of the transparent inner layer, and allows the suppression of the change in the amount of dissolution of the quartz glass crucible associated with the pull-up of a single crystal and the achievement of the uniform oxygen concentration in the longitudinal direction of a single crystal.

摘要翻译： 一种用于拉起单晶硅的石英玻璃坩埚，其中至少在其弯曲部分中具有由合成石英玻璃构成的具有低Al浓度的透明内层的三层结构， 透明或不透明的中间层由天然石英玻璃或天然和合成石英玻璃的混合物组成，具有高Al浓度，不透明的外层由天然石英玻璃组成，Al浓度高于 中间层。 石英玻璃坩埚在透明内层的变形中减少，并且抑制与单晶上拉相关联的石英玻璃坩埚的溶解量的变化，并且实现均匀的氧浓度 在单晶的纵向上。

公开(公告)号：US07226508B2

公开(公告)日：2007-06-05

申请号：US10512114

申请日：2003-04-03

申请人： Gabriele Korus ,  Martin Arndt ,  Hilmar Laudahn ,  Manfred Schwarzbauer

发明人： Gabriele Korus ,  Martin Arndt ,  Hilmar Laudahn ,  Manfred Schwarzbauer

IPC分类号： C30B25/20

CPC分类号： C30B15/10 ,  C03B19/095 ,  C03C3/06 ,  C03C10/0009 ,  C03C2201/40 ,  C03C2201/54 ,  Y10T117/10

摘要： A known quartz glass crucible for crystal pulling consists of a crucible wall, having an outer layer which is provided in an external area thereof with a crystallisation promoter which results in crystallisation of quartz glass, forming cristobalite when the quartz glass crucible is heated according to specified use in crystal pulling. The aim of the invention is to provide a quartz glass crucible which has a long service life. As a result, the crystallisation promoter contains, in addition to a silicon, a first component which acts as a reticulating agent in quartz glass and a second component which is free of alkali metals and which acts as an agent forming separating points in quartz glass. The above mentioned components are contained and incorporated into a doping area (8) of the outer layer (6) having a layer thickness of more than 0.2 mm.

摘要翻译： 已知的用于晶体拉制的石英玻璃坩埚由坩埚壁组成，外壁具有结晶促进剂，结晶促进剂导致石英玻璃结晶，当石英玻璃坩埚根据规定加热时形成方英石 用于水晶拉。 本发明的目的是提供一种使用寿命长的石英玻璃坩埚。 结果，除了硅之外，结晶促进剂还含有在石英玻璃中充当网状剂的第一组分和不含碱金属的第二组分，其作为在石英玻璃中形成分离点的试剂。 上述组分被包含并且结合到层厚度大于0.2mm的外层（6）的掺杂区域（8）中。

公开(公告)号：US20070051297A1

公开(公告)日：2007-03-08

申请号：US11536517

申请日：2006-09-28

申请人： Katsuhiko Kemmochi ,  Yasuo Ohama

发明人： Katsuhiko Kemmochi ,  Yasuo Ohama

IPC分类号： C30B15/00 ,  C30B21/06 ,  C30B27/02 ,  C30B28/10 ,  C30B30/04

CPC分类号： C03B19/095 ,  C30B15/10 ,  Y10S65/08 ,  Y10T117/10 ,  Y10T117/1068

摘要： A silica glass crucible includes a thin barium-doped inner layer, a stable, bubble-free intermediate layer, and a stable opaque outer layer. The fusion process of the present invention controls the dynamic gas balance at the fusion front where formed grain is melted to dense fused silica. The crucible demonstrates reduced bubble growth during a Czochralski process. As a result of the thin barium-doped layer and the reduced bubble growth, the inner surface of the crucible is uniformly minimally textured during a CZ process. The present crucible is especially suited for intense CZ processes for manufacturing silicon ingots used for solar cells or with silicon that is heavily doped with antimony, boron, or arsenic.

摘要翻译： 石英玻璃坩埚包括薄的钡掺杂内层，稳定的无气泡中间层和稳定的不透明外层。 本发明的融合方法控制熔融前沿处的动态气体平衡，其中形成的晶粒被熔化成致密的熔融二氧化硅。 坩埚在切克劳斯基（Czochralski）工艺中表现出减少的气泡生长。 由于薄的钡掺杂层和减少的气泡生长，坩埚的内表面在CZ工艺期间均匀地最小化。 本坩埚特别适用于制造用于太阳能电池的硅锭或重掺杂锑，硼或砷的硅的强CZ工艺。

公开(公告)号：US20060236916A1

公开(公告)日：2006-10-26

申请号：US10555853

申请日：2004-04-26

申请人： Yasuo Ohama

发明人： Yasuo Ohama

IPC分类号： C30B15/00 ,  C30B21/06 ,  C30B27/02 ,  C30B28/10 ,  C30B30/04 ,  C30B11/00

CPC分类号： C30B29/06 ,  C03B19/095 ,  C30B15/10 ,  Y10T117/10 ,  Y10T117/1032 ,  Y10T117/1052

摘要： A quartz glass crucible which has a non-transparent outer layer formed through melting a natural silica powder and a transparent layer formed in the inside of the outer layer, wherein the transparent layer comprises a natural quartz layer having a thickness of 0.4 to 5.0 mm transparent layer comprising a synthetic quarts glass is formed thereon in the inside of the crucible in the range of 0.15 to 0.55 L relative to L, which is the distance from the center of the bottom of the inner surface of the quartz glass crucible to the upper end thereof along the inner surface thereof. The quartz glass crucible can be suitably used for suppressing the occurrence of vibration and reducing the generation of roughened face in the surface of a crucible, and thus for pulling up a silicon single crystal with enhanced stability.

摘要翻译： 一种石英玻璃坩埚，其具有通过熔融天然二氧化硅粉末和形成在外层内部的透明层形成的不透明外层，其中透明层包括厚度为0.4至5.0mm透明的天然石英层 在坩埚内部形成有相对于L的0.15〜0.55L的范围内的合成石英玻璃的层，该距离是从石英玻璃坩埚的内表面的底部的中心到上端 沿其内表面。 石英玻璃坩埚可以适当地用于抑制振动的发生和减少坩埚表面中的粗糙面的产生，从而提高稳定性的硅单晶。

公开(公告)号：US07074731B2

公开(公告)日：2006-07-11

申请号：US10440429

申请日：2003-05-16

申请人： Yasuo Ohama ,  Takayuki Togawa

发明人： Yasuo Ohama ,  Takayuki Togawa

IPC分类号： C03C3/06

CPC分类号： C03C1/026 ,  C03B19/095 ,  C03B19/1095 ,  C03B2201/21 ,  C03C2201/21 ,  C30B15/10 ,  Y10T117/10

摘要： It is an object of the present invention to provide a hydrogen-doped silica powder that is useful in the formation of a quartz glass crucible that is capable of pulling a silicon single crystal without causing a state having dislocations in the silicon single crystal due to peeling of quartz glass segment. It is a further object of the invention to provide a quartz glass crucible for use in pulling a silicon single crystal whose inner surface is formed by use of the hydrogen-doped silica powder and a producing method of the silica powder.In order to achieve the objects above, the present invention provides a hydrogen-doped silica powder for use in producing a quartz glass crucible for use in pulling a silicon single crystal, wherein the silica powder is made of synthetic silica powder, natural silica powder or a mixture thereof, with a hydrogen concentration being in the range of 1×1017 to 5×1019 molecules/cm3, and a producing method thereof, and a quartz glass crucible for pulling a silicon single crystal whose inner surface is made of the silica powders.

摘要翻译： 本发明的目的是提供一种可用于形成石英玻璃坩埚的氢掺杂二氧化硅粉末，其能够拉伸硅单晶而不引起由于剥离而在硅单晶中具有位错的状态 的石英玻璃片段。 本发明的另一个目的是提供一种用于拉动其内表面使用掺氢二氧化硅粉末形成的硅单晶的石英玻璃坩埚和二氧化硅粉末的制造方法。 为了实现上述目的，本发明提供一种用于制造用于拉制硅单晶的石英玻璃坩埚的氢掺杂二氧化硅粉末，其中二氧化硅粉末由合成二氧化硅粉末，天然二氧化硅粉末或 其浓度在1×10 17至5×10 19分子/ cm 3的范围内的混合物及其制备方法， 以及用于拉出其内表面由二氧化硅粉末制成的单晶硅的石英玻璃坩埚。

公开(公告)号：US20060144327A1

公开(公告)日：2006-07-06

申请号：US10559086

申请日：2004-05-21

申请人： Yasuo Ohama ,  Takayuki Togawa ,  Shigeo Mizuno

发明人： Yasuo Ohama ,  Takayuki Togawa ,  Shigeo Mizuno

IPC分类号： C30B11/00

CPC分类号： C03B19/095 ,  C03B2201/03 ,  C30B15/10 ,  Y02P40/57 ,  Y10S65/08 ,  Y10S117/90 ,  Y10T117/10

摘要： A quartz glass crucible for use in pulling up a silicon single crystal, wherein it has, at least in the curved portion thereof, a three-layer structure comprising a transparent inner layer being composed of a synthetic quartz glass and having a low Al concentration, a transparent or nontransparent intermediate layer being composed of a natural quartz glass or a mixture of natural and synthetic quartz glasses and having a high Al concentration, and a nontransparent outer layer being composed of a natural quartz glass and having an Al concentration higher than that of the intermediate layer. The quartz glass crucible is reduced in the deformation of the transparent inner layer, and allows the suppression of the change in the amount of dissolution of the quartz glass crucible associated with the pull-up of a single crystal and the achievement of the uniform oxygen concentration in the longitudinal direction of a single crystal.

摘要翻译： 一种用于拉起单晶硅的石英玻璃坩埚，其中至少在其弯曲部分中具有由合成石英玻璃构成的具有低Al浓度的透明内层的三层结构， 透明或不透明的中间层由天然石英玻璃或天然和合成石英玻璃的混合物组成，具有高的Al浓度，不透明的外层由天然石英玻璃组成，Al浓度高于 中间层。 石英玻璃坩埚在透明内层的变形中减少，并且抑制与单晶上拉相关联的石英玻璃坩埚的溶解量的变化，并且实现均匀的氧浓度 在单晶的纵向上。

公开(公告)号：US06853673B2

公开(公告)日：2005-02-08

申请号：US10383608

申请日：2003-03-10

申请人： Masanori Fukui ,  Masaru Satoh

发明人： Masanori Fukui ,  Masaru Satoh

IPC分类号： C03B20/00 ,  C03B19/09 ,  C30B15/10 ,  C30B35/00 ,  H05B7/22

CPC分类号： C30B35/002 ,  C03B19/095 ,  C30B15/10

摘要： The present invention provides a process and a device for producing a quartz glass crucible, which generates a stable ring-like arc and is suitable for the production of an excellent crucible having the large open diameter.In a production process and a device for producing a quartz glass crucible, wherein a quartz powder in a mould is heated to be fused by an arc discharge of the electrodes being positioned at around of a rotational axis of a mould, this invention is characterized by using an electrode structure, in which electrodes neighboring each other are positioned at regular intervals in the ring configuration, to form the stable ring-like arc being generated between the electrodes neighboring each other without generating an continuous arc between electrodes facing each other across a central portion of the ring, and heating and fusing a quarts powder.

摘要翻译： 本发明提供了一种生产石英玻璃坩埚的方法和装置，其产生稳定的环状电弧，并且适用于制造具有大开口直径的优良坩埚。在制造方法和制造 石英玻璃坩埚，其中模具中的石英粉末通过位于模具的旋转轴线周围的电极的电弧放电加热熔化，本发明的特征在于使用电极结构，其中每个电极 另一个在环形结构中以规则的间隔定位，以形成在彼此相邻的电极之间产生的稳定的环状电弧，而不会在环的中心部分彼此面对的电极之间产生连续的电弧，并且加热和熔化 石粉粉

公开(公告)号：US06808744B2

公开(公告)日：2004-10-26

申请号：US10352654

申请日：2003-01-28

申请人： Yoshiyuki Tsuji ,  Masanori Fukui ,  Ken-ichi Hiroshima

发明人： Yoshiyuki Tsuji ,  Masanori Fukui ,  Ken-ichi Hiroshima

IPC分类号： B05D722

CPC分类号： C03B23/006 ,  C03B19/095 ,  C03B29/02 ,  C30B15/10 ,  C30B35/002 ,  Y10T428/13 ,  Y10T428/131 ,  Y10T428/1314 ,  Y10T428/1317

摘要： A composite crucible for pulling up monocrystalline silicon, which is superior in shape stability and suitable for a large-sized one is provided. The composite crucible is characterized in that a carbonaceous material as an outer layer and a quartz glass as an inner layer are integrally formed. Methods for preparing and regenerating a composite crucible are also disclosed.

摘要翻译： 提供了一种复合坩埚，其用于提升单晶硅，其形状稳定性优异并且适合于大尺寸硅。 复合坩埚的特征在于，作为外层的碳质材料和作为内层的石英玻璃一体形成。 还公开了制备和再生复合坩埚的方法。

公开(公告)号：US06755049B2

公开(公告)日：2004-06-29

申请号：US09902473

申请日：2001-07-10

申请人： Gabriele Korus ,  Hilmar Laudahn ,  Martin Arndt ,  Udo Gertig

发明人： Gabriele Korus ,  Hilmar Laudahn ,  Martin Arndt ,  Udo Gertig

IPC分类号： C03B1909

CPC分类号： C30B15/10 ,  C03B19/095 ,  C03C10/0009

摘要： Known is a method of producing a quartz glass crucible in which a crucible base body is provided at least in part with an inner layer in which the formation of cristobalite is induced by using a crystallization promoter. On the basis thereof, in order to provide an inexpensive method of producing a quartz glass crucible with reproducible characteristics for long service lives, it is suggested according to the invention that the crystallization promoter and a reducing substance are introduced into the inner layer.

摘要翻译： 已知的是制造石英玻璃坩埚的方法，其中坩埚基体至少部分地具有通过使用结晶促进剂诱导方英石形成的内层。 在此基础上，为了提供一种生产具有可重复使用寿命长的石英玻璃坩埚的廉价方法，根据本发明，建议将结晶促进剂和还原物质引入内层。