公开(公告)号：US20080198374A1

公开(公告)日：2008-08-21

申请号：US11708880

申请日：2007-02-21

Applicant: Raphael Desbiens ,  Henry L. Buijs

Inventor： Raphael Desbiens ,  Henry L. Buijs

IPC: G01J3/00

CPC classification number: G01J3/45

Abstract: A spectrometric system has a primary channel with a signal waveform and a reference channel with a signal waveform. A digital representation of the primary signal waveform and a digital representation of the reference signal waveform to provide a digital output representing the primary signal at datum points synchronized with the reference signal are processed by computing the Fourier transform of the primary signal waveform and using a fast reverse non-uniform discrete Fourier Transform technique to compute the reverse non-uniform discrete Fourier transform of the Fourier transform of the primary signal waveform to provide the digital output representing the primary signal at datum points synchronized with the reference signal.

Abstract translation: 光谱系统具有信号波形的主通道和具有信号波形的参考通道。 主信号波形的数字表示和参考信号波形的数字表示，以提供表示与参考信号同步的基准点处的主信号的数字输出，通过计算主信号波形的傅立叶变换并使用快速 反向非均匀离散傅里叶变换技术来计算主信号波形的傅里叶变换的反向非均匀离散傅里叶变换，以在与参考信号同步的基准点处提供表示主信号的数字输出。

公开(公告)号：US20080084564A1

公开(公告)日：2008-04-10

申请号：US11542465

申请日：2006-10-02

Applicant: George G. He ,  Diane E. Deterline

Inventor： George G. He ,  Diane E. Deterline

IPC: G01J3/45 ,  G01B9/02

CPC classification number: G01J3/45 ,  G01J3/02 ,  G01J3/0264

Abstract: A system for comparative interferogram spectrometry includes an interferometer configured to generate interferograms from incident radiation from a target region, an interferogram database containing stored interferograms, and a processing subsystem configured to receive the generated interferograms and compare the received interferograms to the stored interferograms.

Abstract translation: 用于比较干涉图谱的系统包括：干涉仪，被配置为从目标区域的入射辐射产生干涉图，包含存储的干涉图的干涉图数据库;以及处理子系统，被配置为接收生成的干涉图并将接收的干涉图与所存储的干涉图进行比较。

公开(公告)号：US20080037025A1

公开(公告)日：2008-02-14

申请号：US11973448

申请日：2007-10-08

Applicant: Robert Rafac

Inventor： Robert Rafac

IPC: G01J3/45

CPC classification number: G01J3/02 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/28 ,  G01J3/45

Abstract: A bandwidth meter method and apparatus for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter is disclosed, which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth of the light emitted from the laser and a second output representative of a second parameter which is indicative of the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivariable equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter. The actual bandwidth parameter may comprise a spectrum full width at some percent of the maximum within the full width of the spectrum of light emitted from the laser (“FWXM”) or a width between two points on the spectrum enclosing some percentage of the energy of the full spectrum of the spectrum of light emitted from the laser (“EX”). The bandwidth monitor may comprise an etalon and the first output is representative of at least one of a width of a fringe of an optical output of the etalon at FWXM or a width between two points on the spectrum enclosing some percentage of the energy of the full spectrum of light emitted from the laser (“EX'”) and the second output is representative of at least one of a second FWX″M or EX′″, where X≠X″ and X′≠X′″. The precomputed calibration variables may be derived from a measurement of the value of the actual bandwidth parameter utilizing a trusted standard, correlated to the occurrence of the first and second outputs for a calibration spectrum. The value of the actual bandwidth parameter is calculated from the equation: estimated actual BW parameter=K*w1+L*w2+M, where w1=the first measured output representative of FWXM or EX′ and w2 is the second measured output representative of FWX″M or EX′″. The apparatus and method may be implemented in a laser lithography light source and/or in an integrated circuit lithography tool.

公开(公告)号：US07259861B1

公开(公告)日：2007-08-21

申请号：US10959941

申请日：2004-10-06

Applicant: David James Crain ,  Douglas L. Cohen

Inventor： David James Crain ,  Douglas L. Cohen

IPC: G01B9/02

CPC classification number: G01J3/45

Abstract: A method for measuring scene inhomogeneity includes directing radiance of a scene into an interferometer; and oscillating a field-of-view (FOV) of the interferometer, while directing the radiance of the scene into the interferometer. A Fourier transform of signals emerging from the interferometer is obtained with magnitude values of the Fourier transform as a function of wavelength. The magnitude values are separated into (1) component values occurring within a predetermined wavelength band of the interferometer and (2) a component value occurring outside the predetermined wavelength band. The component value occurring outside the predetermined wavelength band is used to measure scene inhomogeneity.

Abstract translation: 用于测量场景不均匀性的方法包括将场景的辐射指向干涉仪; 并且在将场景的辐射度引导到干涉仪中的同时，振荡干涉仪的视场（FOV）。 通过傅立叶变换的幅度值作为波长的函数，获得从干涉仪产生的信号的傅立叶变换。 幅度值被分成在干涉仪的预定波长带内发生的（1）分量值，和（2）在预定波长带外发生的分量值。 在预定波长带外发生的分量值用于测量场景不均匀性。

公开(公告)号：US20070188765A1

公开(公告)日：2007-08-16

申请号：US11656222

申请日：2007-01-19

Applicant: Yonghua Zhao ,  Jay Wei

Inventor： Yonghua Zhao ,  Jay Wei

IPC: G01B9/02 ,  G01B11/02 ,  G01J3/45

CPC classification number: G01B9/02044 ,  G01B9/02068 ,  G01B9/02087 ,  G01B9/02091 ,  G01J3/02 ,  G01J3/0289 ,  G01J3/45 ,  G01J3/4537

Abstract: A Fourier-domain optical coherence tomography (OCT) imager is presented. An OCT imager according to the present invention can have an auto-alignment process. The auto-alignment process automatically adjusts at least one optical component of a spectrometer of the imager so that the spectrometer is aligned during an imaging session. In addition to the auto-alignment process, OCT spectra are normalized for background spectra and for noise characteristics in order to provide a more accurate and clear OCT image.

Abstract translation: 提出了傅里叶域光学相干断层扫描（OCT）成像仪。 根据本发明的OCT成像器可以具有自动对准过程。 自动对准过程自动调整成像仪的光谱仪的至少一个光学组件，使得光谱仪在成像会话期间对准。 除了自动对准过程之外，为了提供更精确和更清晰的OCT图像，将OCT光谱归一化用于背景光谱和噪声特性。

公开(公告)号：US20070035743A1

公开(公告)日：2007-02-15

申请号：US11502330

申请日：2006-08-09

Applicant: Benjamin Vakoc ,  Seok-Hyun Yun ,  Guillermo Tearney ,  Brett Bouma

Inventor： Benjamin Vakoc ,  Seok-Hyun Yun ,  Guillermo Tearney ,  Brett Bouma

IPC: G01B9/02 ,  G01B11/02

CPC classification number: G01B9/02044 ,  A61B5/0059 ,  A61B5/0066 ,  G01B9/02004 ,  G01B9/02072 ,  G01B9/02081 ,  G01B9/02091 ,  G01B2290/45 ,  G01B2290/70 ,  G01J3/45 ,  G01J2009/0265 ,  G01N21/21 ,  G01N21/274 ,  G01N21/4795

Abstract: Apparatus, method and storage medium which can provide at least one first electro-magnetic radiation to a sample and at least one second electromagnetic radiation to a reference, such that the first and/or second electromagnetic radiations have a spectrum which changes over time. In addition, a first polarization component of at least one third radiation associated with the first radiation can be combined with a second polarization component of at least one fourth radiation associated with the second radiation with one another. The first and second polarizations may be specifically controlled to be at least approximately orthogonal to one another.

Abstract translation: 可以向样品提供至少一个第一电磁辐射和至少一个第二电磁辐射至参考物的装置，方法和存储介质，使得第一和/或第二电磁辐射具有随时间变化的光谱。 此外，与第一辐射相关联的至少一个第三辐射的第一偏振分量可以与与第二辐射相关联的至少一个第四辐射的第二偏振分量彼此组合。 可以将第一和第二偏振特别地控制为至少大致彼此正交。

公开(公告)号：US06891162B2

公开(公告)日：2005-05-10

申请号：US10355295

申请日：2003-01-31

Applicant: Toshiyuki Nagoshi ,  Seiichi Kashiwabara ,  Jun Koshoubu

Inventor： Toshiyuki Nagoshi ,  Seiichi Kashiwabara ,  Jun Koshoubu

IPC: G01J3/45 ,  H04N5/33 ,  G01J5/02

CPC classification number: G01J3/45

Abstract: A method capable of acquiring data at a high speed while holding proper precision during measurement with an infrared imaging apparatus uses an FTIR device of a continuous scan type for detecting a signal by a multi-element detector. A method which acquires data from a multi-element detector in an infrared imaging apparatus. The method involves starting to scan an element of the said multi-element detector synchronously with a sampling signal based on a reference signal of an interferometer, and scanning the element at a higher frequency than a sampling frequency of the sampling signal. The method further involves completing the scanning of all the elements before a next sampling signal to the sampling signal starting the element scanning is generated, and repeating a series of operations every time the sampling signal is generated.

Abstract translation: 利用红外成像装置测量时能够以高速度获取数据并保持适当精度的方法使用连续扫描型的FTIR装置，用于通过多元件检测器检测信号。 一种从红外成像装置中的多元件检测器采集数据的方法。 该方法包括基于干涉仪的参考信号开始与采样信号同步扫描所述多元件检测器的元件，并以比采样信号的采样频率更高的频率扫描元件。 该方法还涉及在产生开始元素扫描的采样信号的下一个采样信号之前完成所有元件的扫描，并且每当产生采样信号时重复一系列操作。

公开(公告)号：US20050062975A1

公开(公告)日：2005-03-24

申请号：US10669035

申请日：2003-09-23

Applicant: Michael Morris

Inventor： Michael Morris

IPC: G01J3/45 ,  G01J9/02 ,  G01B9/02

CPC classification number: G01J9/02 ,  G01J3/45

Abstract: An alignment self check of a wavelength meter is performed. A reference signal is placed into a reference signal path of the wavelength meter. The reference signal is also placed into an unknown signal path of the wavelength meter. It is then detected whether after traveling through the unknown signal path, the reference signal has a same period as after traveling through the reference signal path.

Abstract translation: 进行波长计的对准自检。 将参考信号放置在波长计的参考信号路径中。 参考信号也被放置在波长计的未知信号路径中。 然后检测是否在行进通过未知信号路径之后，参考信号具有与行进通过参考信号路径之后相同的周期。

公开(公告)号：US20040263861A1

公开(公告)日：2004-12-30

申请号：US10789328

申请日：2004-02-27

Inventor： Robert J. Rafac

IPC: G01B009/02

CPC classification number: G01J1/4257 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/26 ,  G01J3/28 ,  G01J3/45

Abstract: A bandwidth meter method and apparatus for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter is disclosed, which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth of the light emitted from the laser and a second output representative of a second parameter which is indicative of the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivariable equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter. The actual bandwidth parameter may comprise a spectrum full width at some percent of the maximum within the full width of the spectrum of light emitted from the laser (nullFWXMnull) or a width between two points on the spectrum enclosing some percentage of the energy of the full spectrum of the spectrum of light emitted from the laser (nullEXnull). The bandwidth monitor may comprise an etalon and the first output is representative of at least one of a width of a fringe of an optical output of the etalon at FWXM or a width between two points on the spectrum enclosing some percentage of the energy of the full spectrum of light emitted from the laser (nullEXnullnull) and the second output is representative of at least one of a second FWXnullM or EXnullnull, where XnullXnull and XnullnullXnullnull. The precomputed calibration variables may be derived from a measurement of the value of the actual bandwidth parameter utilizing a trusted standard, correlated to the occurrence of the first and second outputs for a calibration spectrum. Tthe value of the actual bandwidth parameter is calculated from the equation: estimated actual BW parameternullK*w1nullL*w2nullM, where w1nullthe first measured output representative of FWXM or EXnull and w2 is the second measured output representative of FWXnullM or EXnullnull. The apparatus and method may be implemented in a laser lithography light source and/or in an integrated circuit lithography tool.

公开(公告)号：US20040118995A1

公开(公告)日：2004-06-24

申请号：US10626800

申请日：2003-07-24

Inventor： Raul Curbelo

IPC: G01J003/50 ,  H01J005/16 ,  H01J040/14

CPC classification number: G01J3/45 ,  G01J3/453

Abstract: A method and for acquiring interferogram data and a Fourier transform spectrometer, including a detector that provides an output signal that exhibits non-linear distortion in a measured interferogram represented by a power series Imnulla1Inulla2I2nulla3I3null . . . , comprising the steps of representing a measured spectrum as Smnulla1 Snulla2(S*S)nulla3 (S*S*S)nullb3 (S*S*S*S)null . . . where S is the spectrum of the linear interferogram and * indicates convolution, expressing a linear interferogram I as a power series of a measured interferogram Im as in Inullb1Imnullb2Im2nullb3Im3null . . . , expressing the linear spectrum as a power series of the spectra of the interferogram powers Snullb1S1nullb2S2nullb3S3 . . . , and obtaining the coefficients bi where Snull0.

Abstract translation: 一种用于获取干涉图数据和傅里叶变换光谱仪的方法，包括检测器，其提供在由功率级Im = a1I + a2I2 + a3I3 +表示的测量干涉图中呈现非线性失真的输出信号， 。 。 。 包括以下步骤：将测量光谱表示为Sm = a1 S + a2（S * S）+ a3（S * S * S）+ b3（S * S * S * S）+。 。 。 其中S是线性干涉图的光谱，*表示卷积，表示线性干涉图I作为I = b1Im + b2Im2 + b3Im3 +中测量的干涉图Im的幂级数。 。 。 表示线性谱作为干涉图功率S = b1S1 + b2S2 + b3S3的光谱的幂级数。 。 。 ，并获得S = 0的系数bi。