公开(公告)号：US20080034883A1

公开(公告)日：2008-02-14

申请号：US11684592

申请日：2007-03-09

Applicant: Suryakala Majeti

Inventor： Suryakala Majeti

IPC: G01L1/22 ,  H01C17/00

CPC classification number: G01B7/22 ,  G01L1/148 ,  Y10T29/49103 ,  Y10T29/49147

Abstract: A micro-electromechanical capacitive strain sensor. The micro-electromechanical capacitive strain sensor comprises a first bent beam, a second bent beam, and a straight center beam. The first bent beam, second bent beam, and straight center beam are aligned in the X-axis with the straight center beam located between the first and second bent beams. The first bent beam, second bent beam, and straight center beam are disposed between two anchors. The two anchors are aligned in the Y-axis. The first bent beam is bent away from the center beam and the second bent beam is bent towards the center beam to provide a set of differential capacitors with respect to the center beam, wherein the center beam serves as a common reference with respect to the first and second bent beams.

公开(公告)号：US20070256469A1

公开(公告)日：2007-11-08

申请号：US11788849

申请日：2007-04-20

Applicant: Kazuhiro Okada

Inventor： Kazuhiro Okada

IPC: G01P21/00

CPC classification number: G01P1/023 ,  G01L1/148 ,  G01L1/18 ,  G01L5/162 ,  G01L25/00 ,  G01P15/123 ,  G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/084

Abstract: A sensor comprises a semiconductor pellet (10) including a working portion (11) adapted to undergo action of a force, a fixed portion (13) fixed on the sensor body, and a flexible portion (13) having flexibility formed therebetween, a working body (20) for transmitting an exterted force to the working portion, and detector means (60-63) for transforming a mechanical deformation produced in the semiconductor pellet to an electric signal to thereby detect a force exerted on the working body as an electric signal. A signal processing circuit is applied to the sensor. This circuit uses analog multipliers (101-109) and analog adders/subtracters (111-113), and has a function to cancel interference produced in different directions. Within the sensor, two portions (E3, E4-E8) located at positions opposite to each other and producing a displacement therebetween by action of a force are determined. By exerting a coulomb force between both the portions, the test of the sensor is carried out. Further, a pedestal (21, 22) is provided around the working body (20). The working body and the pedestal are located with a predetermined gap or spacing therebetween. A displacement of the working body is caused to limitatively fall within a predetermined range corresponding to the spacing. The working body and the pedestal are provided by cutting a same common substrate (350, 350′).

Abstract translation: 传感器包括半导体颗粒（10），其包括适于承受力的作用部分（11），固定在传感器主体上的固定部分（13）和在其之间形成柔性的柔性部分（13），工作 用于向工作部分传递消除的力的主体（20）和用于将半导体芯片中产生的机械变形转换为电信号的检测器装置（60-63），从而检测施加在工作体上的力作为电信号 。 信号处理电路被应用于传感器。 该电路使用模拟乘法器（101 - 109）和模拟加法器/减法器（111 - 113），并具有消除不同方向产生的干扰的功能。 在传感器内，确定位于彼此相对的位置并通过力的作用产生位移之间的两个部分（E 3，E 4 -E 8）。 通过在两个部分之间施加库仑力，进行传感器的测试。 此外，在工作体（20）的周围设置基座（21,22）。 工作体和基座以其间具有预定的间隙或间隔而定位。 导致工作体的位移被限制地落在对应于间隔的预定范围内。 通过切割相同的公共衬底（350,350'）来提供工作体和基座。

公开(公告)号：US06993980B2

公开(公告)日：2006-02-07

申请号：US10448458

申请日：2003-05-30

Applicant: Makoto Shimizu ,  Masashi Mitsui ,  Hiroyuki Ueda

Inventor： Makoto Shimizu ,  Masashi Mitsui ,  Hiroyuki Ueda

IPC: G01D7/00

CPC classification number: G06K9/0002 ,  G01L1/146 ,  G01L1/148

Abstract: In view of conventional circumstances where a surface pressure distribution sensor has poor reproducibility when mass-produced, so it has been desired to stabilize sensing properties, to secure reliability, and to improve productivity and yield, the invention achieves stabilizing sensing properties, securing reliability, and improving productivity and yield by optimizing the size of the flow barrier provided inside the sealing agent and the gap, the material and location of the contact, and the tension of the common electrode film.

Abstract translation: 考虑到当大规模生产时表面压力分布传感器具有差的再现性的常规情况，因此希望稳定感测性能，以确保可靠性并提高生产率和产量，本发明实现了稳定的感测特性，确保可靠性， 并且通过优化设置在密封剂内部的流动屏障的尺寸和间隙，接触的材料和位置以及公共电极膜的张力来提高生产率和产率。

公开(公告)号：US06860154B2

公开(公告)日：2005-03-01

申请号：US10047627

申请日：2002-01-14

Applicant: Satoshi Yamamoto ,  Osamu Nakao ,  Hitoshi Nishimura ,  Masahiro Sato

Inventor： Satoshi Yamamoto ,  Osamu Nakao ,  Hitoshi Nishimura ,  Masahiro Sato

IPC: G01L1/14 ,  G01L9/00 ,  G01L9/12 ,  G01L7/08 ,  G01L9/16

CPC classification number: G01L9/0073 ,  G01L1/148

Abstract: It is an object of the present invention to provide a touch mode capacitive pressure sensor having higher pressure durability than conventional sensors. In this invention, a touch mode capacitive pressure sensor has a diaphragm made from boron-doped silicon, and the boron concentration at the top face of the diaphragm is equal to or greater than 1×1019 cm−3 and less than 9×1019 cm−3. Further, in this invention, a touch mode capacitive pressure sensor has a conductive diaphragm made by doping of an impurity and anisotropic etching, and the etch pit density on the top face of the diaphragm is equal to or less than five per μm2, and preferably equal to or less than one per μm2. As a result, the pressure durability of the diaphragm is greatly improved.

Abstract translation: 本发明的目的是提供一种具有比常规传感器更高的耐压耐久性的触摸模式电容式压力传感器。 在本发明中，触摸模式电容式压力传感器具有由硼掺杂硅制成的光阑，并且隔膜顶面的硼浓度等于或大于1×10 19 cm -3且小于9×10 9 <19>厘米-3。 此外，在本发明中，触摸模式电容式压力传感器具有通过掺杂杂质和各向异性蚀刻而形成的导电隔膜，并且隔膜顶面上的蚀刻坑密度等于或小于每mum 2的5个/ ，并且优选等于或小于每个m.2的一个。 结果，隔膜的耐久性大大提高。

公开(公告)号：US20030107868A1

公开(公告)日：2003-06-12

申请号：US10204738

申请日：2002-11-05

Inventor： Stavros Emmanuel Chatzandroulis ,  Dimitrios Mattheos Goustouridis ,  Dimitris Konstantin Tsoukalas

IPC: H01G004/005

CPC classification number: G01L1/148 ,  G01L9/0073

Abstract: A method for making capacitive silicon pressure sensors and pressure switches with high long-term stability involves fabrication by wafer bonding of a silicon substrate wafer with another silicon wafer where a highly boron-doped diaphragm is defined by a self-aligned doping process through a window defined on an insulating layer. The long-term stability of the device is secured by anisotropically etching the window, e.g. by reactive ion etching, so as to create vertical window walls. The flatness of the diaphragm can be secured by the provision of an insulating film on the backside of the substrate wafer that compensates the stress on the silicon diaphragm created by the insulating layer present between the two wafers. The cavity formed by the window may contain gas or it may be evacuated in which case the fabrication method may also involve a process step facilitating the evacuation of the cavity and sealing the same using metal employed for making electrical connections.

Abstract translation: 用于制造具有高长期稳定性的电容式硅压力传感器和压力开关的方法涉及通过硅衬底晶片与另一硅晶片的晶片结合来制造，其中通过窗口的自对准掺杂工艺限定高硼掺杂膜片 限定在绝缘层上。 器件的长期稳定性通过各向异性蚀刻窗口来确保，例如， 通过反应离子蚀刻，以产生垂直的窗口壁。 可以通过在衬底晶片的背面设置绝缘膜来补偿隔膜的平坦度，从而补偿由两个晶片之间存在的绝缘层产生的硅膜上的应力。 由窗户形成的空腔可以包含气体，或者可以将其抽真空，在这种情况下，制造方法还可以涉及使用用于制造电气连接的金属使空腔抽真空并将其密封的工艺步骤。

公开(公告)号：US20020189355A1

公开(公告)日：2002-12-19

申请号：US10117303

申请日：2002-04-05

Applicant: Honeywell International, Inc.

Inventor： Ronald B. Leonardson

IPC: G01P015/125

CPC classification number: G01P15/001 ,  G01L1/148 ,  G01L5/165 ,  G01P15/125 ,  G01P15/131

Abstract: An apparatus and method for sensing accelerations and other forces. The apparatus having a cover plate having an inner portion and an outer portion, the inner portion being formed with a plurality of spaced apart electrodes projecting therefrom and defining spaces therebetween; and a proof mass having an inner portion being formed with a plurality of spaced apart electrodes projecting therefrom and defining spaces therebetween, an outer portion being coupled to the outer portion of the cover plate with the electrodes being electrically isolated from the cover plate electrodes, and the proof mass electrodes and spaces being aligned with the cover plate electrodes and spaces such that, when the inner portion of the proof mass is deflected toward the cover plate, the proof mass electrodes pass into the spaces between the cover plate electrodes, and a flexible suspension member coupled between the inner and outer proof mass portions.

Abstract translation: 一种用于感测加速度和其他力的装置和方法。 所述装置具有盖板，该盖板具有内部部分和外部部分，所述内部部分形成有从其突出的多个间隔开的电极并在其间限定空间; 以及具有内部部分的检测物质，其内部形成有从其突出的多个间隔开的电极并且在其间限定空间，外部部分耦合到盖板的外部部分，电极与盖板电极电隔离，以及 检测质量电极和空间与盖板电极和空间对准，使得当证明物质的内部部分朝向盖板偏转时，检验质量电极进入盖板电极之间的空间，并且柔性 悬挂构件联接在内部和外部质量部分之间。

公开(公告)号：US06474133B1

公开(公告)日：2002-11-05

申请号：US08168024

申请日：1993-12-15

Applicant: Kazuhiro Okada

Inventor： Kazuhiro Okada

IPC: G01P2100

CPC classification number: G01P15/125 ,  G01L1/148 ,  G01L1/18 ,  G01L5/162 ,  G01L25/00 ,  G01P15/123 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/084 ,  Y10T29/49103

Abstract: A sensor comprises a semiconductor pellet (10) including a working portion (11) adapted to undergo action of a force, a fixed portion (13) fixed on the sensor body, and a flexible portion (13) having flexibility formed therebetween, a working body (20) for transmitting an exerted force to the working portion, and detector means (60-63) for transforming a mechanical deformation produced in the semiconductor pellet to an electric signal to thereby detect a force exerted on the working body as an electric signal. A signal processing circuit is applied to the sensor. This circuit uses analog multipliers (101-109) and analog adders/subtractors (111-113), and has a function to cancel interference produced in different directions. Within the sensor, two portions (E3, E4-E8) located at positions opposite to each other and producing a displacement therebetween by action of a force are determined. By exerting a coulomb force between both the portions, the test of the sensor is carried out. Further, a pedestal (21, 22) is provided around the working body (20). The working body and the pedestal are located with a predetermined gap or spacing therebetween. A displacement of the working body is caused to limitatively fall within a predetermined range corresponding to the spacing. The working body and the pedestal are provided by cutting a same common substrate (350, 350′).

Abstract translation: 传感器包括半导体颗粒（10），其包括适于承受力的作用部分（11），固定在传感器主体上的固定部分（13）和在其之间形成柔性的柔性部分（13），工作 用于将施加的力传递到工作部的主体（20）和用于将半导体芯片中产生的机械变形变换为电信号的检测器装置（60-63），从而检测作用于工作体上的力作为电信号 。 信号处理电路被应用于传感器。 该电路使用模拟乘法器（101-109）和模拟加法器/减法器（111-113），并具有消除在不同方向产生的干扰的功能。 在传感器内，确定位于彼此相对的位置并通过力的作用产生位移之间的两个部分（E3，E4-E8）。 通过在两个部分之间施加库仑力，进行传感器的测试。 此外，在工作体（20）的周围设置基座（21,22）。 工作体和基座以其间具有预定间隙或间隔而定位。 导致工作体的位移被限制地落在对应于间隔的预定范围内。 通过切割相同的公共衬底（350,350'）来提供工作体和基座。

公开(公告)号：US06470754B1

公开(公告)日：2002-10-29

申请号：US09375969

申请日：1999-08-17

Applicant: Yogesh B. Gianchandani

Inventor： Yogesh B. Gianchandani

IPC: G01L912

CPC classification number: G01L1/148 ,  G01L9/0073 ,  Y10T29/42 ,  Y10T29/49002

Abstract: A micromachined pressure sensor is formed with a minimum number of masking and processing steps. The structure measures changes in pressure by deflection of structures having capacitive plates external to a sealed cavity so that electrical leads can be readily connected to the plates formed on the structures. The pressure sensor includes a substrate, a base secured to the substrate and a diaphragm secured to the base to define a sealed cavity. A skirt may extend outwardly from the base above the substrate to form one of the plates of the capacitor with another plate formed on the base. Changes in ambient pressure deflect the skirt toward or away from the electrode on the substrate, changing the effective capacitance between the electrodes. Electrical connections may be made to the electrode on the skirt and the electrode on the substrate utilizing electrical connectors which are external to the base and thus external to the sealed cavity.

Abstract translation: 微加工压力传感器形成有最少数量的掩模和处理步骤。 该结构通过具有在密封空腔外部的电容板的结构的偏转来测量压力变化，使得电引线可以容易地连接到在结构上形成的板。 压力传感器包括基板，固定到基板的基座和固定到基座以限定密封空腔的隔膜。 裙部可以从基底上方的基部向外延伸以形成电容器的一个板，而另一个板形成在基座上。 环境压力的变化使裙部朝向或远离衬底上的电极偏转，改变了电极之间的有效电容。 可以使用在基座外部并且因此在密封空腔外部的电连接器对裙部上的电极和基板上的电极进行电连接。

公开(公告)号：US5744718A

公开(公告)日：1998-04-28

申请号：US641078

申请日：1996-04-26

Applicant: Kazuhiro Okada

Inventor： Kazuhiro Okada

IPC: G01L1/14 ,  G01L1/18 ,  G01L5/16 ,  G01L25/00 ,  G01P15/12 ,  G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P15/08

CPC classification number: G01P21/00 ,  G01L1/148 ,  G01L1/18 ,  G01L25/00 ,  G01L5/162 ,  G01P15/123 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/084

Abstract: A sensor comprises a semiconductor pellet (10) including a working portion (11) adapted to undergo action of a force, a fixed portion (13) fixed on the sensor body, and a flexible portion (13) having flexibility formed therebetween, a working body (20) for transmitting an exterted force to the working portion, and detector means (60-63) for transforming a mechanical deformation produced in the semiconductor pellet to an electric signal to thereby detect a force exerted on the working body as an electric signal. A signal processing circuit is applied to the sensor. This circuit uses analog multipliers (101-109) and analog adders/subtracters (111-113), and has a function to cancel interference produced in different directions. Within the sensor, two portions (E3, E4-E8) located at positions opposite to each other and producing a displacement therebetween by action of a force are determined. By exerting a coulomb force between both the portions, the test of the sensor is carried out. Further, a pedestal (21, 22) is provided around the working body (20). The working body and the pedestal are located with a predetermined gap or spacing therebetween. A displacement of the working body is caused to limitatively fall within a predetermined range corresponding to the spacing. The working body and the pedestal are provided by cutting a same common substrate (350, 350').

Abstract translation: 传感器包括半导体颗粒（10），其包括适于承受力的作用部分（11），固定在传感器主体上的固定部分（13）和在其之间形成柔性的柔性部分（13），工作 用于向工作部分传递消除的力的主体（20）和用于将半导体芯片中产生的机械变形变换为电信号的检测器装置（60-63），从而检测施加在工作体上的力作为电信号 。 信号处理电路被应用于传感器。 该电路使用模拟乘法器（101-109）和模拟加法器/减法器（111-113），并具有消除在不同方向产生的干扰的功能。 在传感器内，确定位于彼此相对的位置并通过力的作用产生位移之间的两个部分（E3，E4-E8）。 通过在两个部分之间施加库仑力，进行传感器的测试。 此外，在工作体（20）周围设置基座（21,22）。 工作体和基座以其间具有预定的间隙或间隔而定位。 导致工作体的位移被限制地落在对应于间隔的预定范围内。 通过切割相同的公共衬底（350,350'）来提供工作体和基座。

公开(公告)号：US5602411A

公开(公告)日：1997-02-11

申请号：US431492

申请日：1995-04-28

Applicant: Thomas Zettler

Inventor： Thomas Zettler

IPC: G12B1/00 ,  B06B1/06 ,  B81B3/00 ,  B81C1/00 ,  G01L1/14 ,  G01P15/08 ,  G01P15/125 ,  H01L21/306 ,  H01L21/70 ,  H01L21/8234 ,  H01L27/06 ,  H01L29/84 ,  H01L49/00 ,  H02N1/00 ,  H01L29/82

CPC classification number: B81C1/00246 ,  G01L1/14 ,  G01L1/148 ,  G01P15/0802 ,  G01P15/125 ,  H02N1/002 ,  H02N1/006 ,  B81B2201/0235 ,  B81B2207/07 ,  B81C2203/0714 ,  B81C2203/0742

Abstract: A micromechanical component includes a fixed micromechanical structure having a pair of capacitor plates being formed of one or more conductive layers, and a movable micromechanical structure being formed of a dielectric layer to be introduced into or removed from an interstice between the plates. A capacitance change is obtained through the resilient or freely movable dielectric, so that the component can be inserted as a proportional or a non-proportional force sensor. A microsystem with an integrated circuit and a micromechanical component with a movable dielectric, as well as a production method for the component and the microsystem, are also provided.

Abstract translation: 微机械部件包括固定的微机械结构，其具有由一个或多个导电层形成的一对电容器板，以及可移动微机械结构，其由介质层形成，以被引入板或从板之间的间隙中移除。 通过弹性或可自由移动的电介质获得电容变化，使得部件可以作为比例或非比例的力传感器插入。 还提供了具有集成电路的微系统和具有可移动介质的微机械部件以及组件和微系统的制造方法。