METHOD AND APPARATUS FOR PREVENTING CATASTROPHIC CONTACT FAILURE IN ULTRA HIGH TEMPERATURE PIEZORESISTIVE SENSORS AND TRANSDUCERS
    101.
    发明申请
    METHOD AND APPARATUS FOR PREVENTING CATASTROPHIC CONTACT FAILURE IN ULTRA HIGH TEMPERATURE PIEZORESISTIVE SENSORS AND TRANSDUCERS 有权
    用于防止超高温绝缘传感器和传感器中的接触失效的方法和装置

    公开(公告)号:US20100107773A1

    公开(公告)日:2010-05-06

    申请号:US12686990

    申请日:2010-01-13

    IPC分类号: G01L9/06 B29C65/00 B32B38/08

    摘要: A piezoresistive sensor device and a method for making a piezoresistive device are disclosed. The sensor device comprises a silicon wafer having piezoresistive elements and contacts in electrical communication with the elements. The sensor device further comprises a contact glass coupled to the silicon wafer and having apertures aligned with the contacts. The sensor device also comprises a non-conductive frit for mounting the contact glass to a header glass, and a conductive non-lead glass frit disposed in the apertures and in electrical communication with the contacts. The method for making a piezoresistive sensor device, comprises bonding a contact glass to a silicon wafer such that apertures in the glass line up with contacts on the wafer, and filling the apertures with a non-lead glass frit such that the frit is in electrical communication with the contacts. The use of a lead free glass frit prevents catastrophic failure of the piezoresistive sensor and associated transducer in ultra high temperature applications.

    摘要翻译: 公开了压阻传感器装置和制造压阻器件的方法。 传感器装置包括具有压阻元件和与元件电连通的触点的硅晶片。 所述传感器装置还包括接触玻璃,所述接触玻璃联接到所述硅晶片并且具有与所述触点对准的孔。 传感器装置还包括用于将接触玻璃安装到集管玻璃的非导电玻璃料,以及设置在孔中并与触头电连通的导电非铅玻璃料。 用于制造压阻传感器装置的方法包括将接触玻璃接合到硅晶片,使得玻璃中的孔与晶片上的触点对齐,并用非铅玻璃料填充孔,使得玻璃料处于电 与联系人沟通。 使用无铅玻璃料防止压敏传感器和相关传感器在超高温应用中的灾难性故障。

    Low differential pressure transducer
    102.
    发明申请
    Low differential pressure transducer 有权
    低压差传感器

    公开(公告)号:US20090205434A1

    公开(公告)日:2009-08-20

    申请号:US12317788

    申请日:2008-12-29

    申请人: Anthony D. Kurtz

    发明人: Anthony D. Kurtz

    IPC分类号: G01L9/06

    CPC分类号: G01L13/025 G01L19/0645

    摘要: A pressure transducer has an H-shaped cross-sectional header having a front and a back section. The front and back sections are of equal diameter and are circular. Each front and back section has a depression with an isolation diaphragm covering the depression. Each diaphragm is of equal size and the depressions communicate one with the other via a central channel in the central arm of the H. A pressure sensor communicates with the channel, where the pressure sensor responds to a first pressure applied to the first isolation diaphragm and a second pressure applied to the second isolation diaphragm. The pressure sensor produces an output equal to the difference in pressure. The differential pressure transducer having both diaphragms of the same size and still enabling leads from the sensor to be brought out.

    摘要翻译: 压力传感器具有具有前部和后部的H形横截面头部。 前部和后部的直径相等且为圆形。 每个前部和后部都有一个凹陷,隔离膜覆盖着凹陷。 每个隔膜具有相同的尺寸,并且凹部通过H的中心臂中的中心通道彼此连通。压力传感器与通道相通,其中压力传感器响应施加到第一隔离隔膜的第一压力, 施加到第二隔离膜的第二压力。 压力传感器产生等于压力差的输出。 差压传感器具有相同尺寸的两个膜片,并且还使来自传感器的引线被带出。

    Low differential pressure transducer
    103.
    发明申请
    Low differential pressure transducer 有权
    低压差传感器

    公开(公告)号:US20090205433A1

    公开(公告)日:2009-08-20

    申请号:US12070255

    申请日:2008-02-14

    申请人: Anthony D. Kurtz

    发明人: Anthony D. Kurtz

    IPC分类号: G01L9/06

    CPC分类号: G01L13/025 G01L19/0645

    摘要: A pressure transducer has an H-shaped header having a front and a back section. The front and back sections are of equal diameter and are circular. Each front and back section has a depression with a diaphragm covering the depression. Each diaphragm is of equal size and the depressions communicate one with the other via a central channel in the central arm of the H. A pressure sensor communicates with the channel, where the pressure sensor responds to a first pressure applied to the first diaphragm and a second pressure applied to the second diaphragm. The pressure sensor produces an output equal to the difference in pressure. The differential pressure inducer having both diaphragms of the same size and still enabling leads from the sensor to be brought out.

    摘要翻译: 压力传感器具有H形头部,其具有前部和后部。 前部和后部的直径相等且为圆形。 每个前部和后部都有一个凹陷,一个隔膜覆盖着凹陷。 每个隔膜具有相同的尺寸,并且凹部通过H的中心臂中的中心通道彼此连通。压力传感器与通道连通,其中压力传感器响应于施加到第一隔膜的第一压力和 第二压力施加到第二隔膜。 压力传感器产生等于压力差的输出。 差压引导器具有相同尺寸的两个膜片,并且还能够使来自传感器的引线脱出。

    Method and system for determining gas turbine tip clearance
    104.
    发明授权
    Method and system for determining gas turbine tip clearance 失效
    确定燃气轮机顶端间隙的方法和系统

    公开(公告)号:US07540704B2

    公开(公告)日:2009-06-02

    申请号:US11063205

    申请日:2005-02-22

    IPC分类号: F01D25/00

    摘要: A system for sensing at least one physical characteristic associated with an engine including a turbine having a plurality of blades turning inside a casing, the system including: a pressure sensor coupled substantially adjacent to the casing and including at least one output; a port in the turbine casing for communicating a pressure indicative of a clearance between the blades and casing to the pressure sensor; a cooling cavity substantially surrounding the pressure sensor; and, an inlet for receiving fluid from the engine and feeding the fluid to the cooling cavity to cool the pressure sensor; wherein, the pressure sensor output is indicative of the clearance between the blades and casing.

    摘要翻译: 一种用于感测与发动机相关联的至少一个物理特性的系统,包括具有在壳体内部转动的多个叶片的涡轮机,所述系统包括:压力传感器,其基本上与壳体相邻并且包括至少一个输出; 涡轮壳体中的端口,用于将指示叶片和壳体之间的间隙的压力传递到压力传感器; 基本上围绕压力传感器的冷却腔; 以及用于从发动机接收流体并将流体供给到冷却腔以冷却压力传感器的入口; 其中,压力传感器输出表示叶片和壳体之间的间隙。

    Ultra miniature multi-hole probes having high frequency response
    105.
    发明申请
    Ultra miniature multi-hole probes having high frequency response 审中-公开
    具有高频响应的超微型多孔探头

    公开(公告)号:US20090126499A1

    公开(公告)日:2009-05-21

    申请号:US12315438

    申请日:2008-12-03

    申请人: Anthony D. Kurtz

    发明人: Anthony D. Kurtz

    IPC分类号: G01L9/06

    摘要: A pressure probe includes a longitudinal tubular housing symmetrically disposed about a central axis and having an ultra miniature conical front end and an opened back end. A plurality of aperture ports having an opening are disposed about the front end. A plurality of ultra small leadless transducers has a central active deflecting area in a semiconductor substrate, and a layer of oxide on a bottom surface. At least one sensor network is disposed within the active area on the oxide layer. A glass contact wafer is bonded to the non-deflecting portion of sensing network and has a number of apertures surrounding the active area suitable for interconnection with header. A header encloses each transducer and is of a shape and size to be positioned in an associated aperture port of the probe housing. At least one lead is coupled to a header pin extending from bottom of the aperture and directed through the bottom opening into the hollow of the probe housing.

    摘要翻译: 压力探针包括围绕中心轴线对称设置并具有超微型锥形前端和敞开的后端的纵向管状壳体。 具有开口的多个开口端口围绕前端设置。 多个超小型无引线换能器在半导体衬底中具有中心主动偏转区域,在底面上具有氧化物层。 至少一个传感器网络设置在氧化物层上的有效区域内。 玻璃接触晶片结合到感测网络的非偏转部分,并且具有围绕适合于与集管互连的有源区域的多个孔。 头部包围每个换能器,并且具有定位在探针壳体的相关联的孔口中的形状和尺寸。 至少一个引线耦合到从孔的底部延伸并且通过底部开口引导到探针壳体的中空部中的插针。

    Combined temperature and pressure transducer incorporating connector keyway alignment and an alignment method
    106.
    发明申请
    Combined temperature and pressure transducer incorporating connector keyway alignment and an alignment method 失效
    组合温度和压力传感器,包括连接器键槽对准和对准方法

    公开(公告)号:US20090116537A1

    公开(公告)日:2009-05-07

    申请号:US12291451

    申请日:2008-11-10

    IPC分类号: G01K13/00 G01L7/00 G01R3/00

    摘要: A transducer sensor is positioned within a hollow of the body of a housing. The housing has an extending alignment pin, which pin coacts with a corresponding slot or aperture in the wall of a vessel whose pressure or temperature is to be monitored. The transducer body is associated with a connector where the alignment pin is placed and extends from the housing in a fixed relation to the connector. A suitable aperture or slot in the wall of the vessel to be monitored accommodates the extending pin whereby when the transducer is placed in the vessel aperture the connector associated with the transducer is always located in proper position. Positioned on the housing is a sliding nut which can move in a direction parallel to the central axis of the housing and either to the right or left. This sliding nut is rotatably positioned in the housing and coacts with threads formed in the aperture in the wall of the vessel to enable tightening of the transducer housing when placed in the wall and when the alignment pin is positioned within the corresponding slot or aperture. This assures a proper alignment so that an external connector which is not moveable or rotatable can be immediately connected to the transducer connector without further experimentation or adjustment.

    摘要翻译: 换能器传感器定位在壳体的主体的中空部内。 壳体具有延伸的对准销,该销与其压力或温度要监控的容器的壁中的相应的狭槽或孔共同作用。 换能器体与连接器相关联,其中定位销被放置并且与壳体以固定的关系从连接器延伸。 要监测的容器的壁中的合适的孔或狭槽容纳延伸销,由此当换能器放置在容器孔中时,与换能器相关联的连接器总是位于适当的位置。 位于壳体上的是一个滑动螺母,它能够沿平行于壳体的中心轴线的方向移动,也可以向右或向左移动。 该滑动螺母可旋转地定位在壳体中并且与形成在容器的壁中的孔中的螺纹共同作用,以便当放置在壁中时以及当对准销定位在相应的槽或孔内时能够紧固换能器壳体。 这确保了适当的对准,使得不可移动或可旋转的外部连接器可以立即连接到换能器连接器,而无需进一步的实验或调整。

    High temperature pressure sensing system

    公开(公告)号:US07451655B2

    公开(公告)日:2008-11-18

    申请号:US11709639

    申请日:2007-02-22

    IPC分类号: G01L9/06

    CPC分类号: G01L9/065

    摘要: A high temperature pressure sensing system (transducer) including: a pressure sensing piezoresistive sensor formed by a silicon-on-insulator (SOI) process; a SOI amplifier circuit operatively coupled to the piezoresistive sensor; a SOI gain controller circuit including a plurality of resistances that when selectively coupled to the amplifier adjust a gain of the amplifier; a plurality of off-chip contacts corresponding to the resistances, respectively, for electrically activating the corresponding resistances and using a metallization layer for the SOI sensor and SOI ASIC suitable for high temperature interconnections (bonding); wherein the piezoresistive sensor, amplifier circuit and gain control circuit are suitable for use in environments having a temperature greater than 175 degrees C. and reaching between 250° C. and 300° C., and wherein the entire transducer has a high immunity to nuclear radiation.

    Tactile feel apparatus for use with robotic operations
    108.
    发明申请
    Tactile feel apparatus for use with robotic operations 审中-公开
    触觉感觉仪器用于机器人操作

    公开(公告)号:US20080167662A1

    公开(公告)日:2008-07-10

    申请号:US11650643

    申请日:2007-01-08

    申请人: Anthony D. Kurtz

    发明人: Anthony D. Kurtz

    IPC分类号: A61B19/00

    摘要: A system for providing for tactile feedback to a physician or other user employs a robotic control system, which robotic control system enables the user to control an operating instrument such as a scalpel or other instrument. Pressure transducers are placed upon the instrument and the outputs from the transducers are directed to a microprocessor and glove control circuit. The microprocessor receives the signals from the pressure transducer and the signals from the robotic control system to produce output signals for controlling a glove. The glove is worn by the physician during a robotic operation. The glove contains means on the inside of the glove, which means receive the signals generated by the microprocessor and glove control circuit and provides tactile feedback to the hand of the physician or Other user while wearing the glove. This tactile feedback provides indications to the user of the robotic control signal system as to the pressure or force applied by the surgical instrument during the robotic operation. There is also described a technique for training a physician to use this system. The system employs inflatable air sacks positioned on the inner surface of the glove but other tactile indications such as heat can be employed.

    摘要翻译: 用于向医生或其他用户提供触觉反馈的系统采用机器人控制系统,该机器人控制系统使得用户能够控制诸如解剖刀或其它仪器的操作仪器。 压力传感器放置在仪器上,传感器的输出被引导到微处理器和手套控制电路。 微处理器接收来自压力传感器的信号和来自机器人控制系统的信号,以产生用于控制手套的输出信号。 手术在机器人手术期间由医生佩戴。 手套包含手套内部的装置,这意味着接收微处理器和手套控制电路产生的信号,并在佩戴手套的同时向医师或其他用户的手提供触觉反馈。 这种触觉反馈向机器人控制信号系统的用户提供关于在机器人操作期间由外科器械施加的压力或力的指示。 还描述了一种训练医师使用该系统的技术。 该系统采用位于手套内表面上的充气气袋,但也可采用热量等触觉指示。

    Leak detector for a pressurized cylinder
    109.
    发明申请
    Leak detector for a pressurized cylinder 有权
    泄漏检测器用于加压缸

    公开(公告)号:US20080163668A1

    公开(公告)日:2008-07-10

    申请号:US11650686

    申请日:2007-01-08

    IPC分类号: G01M3/26 G01M3/34

    CPC分类号: G01M3/3236 B64C25/60

    摘要: A leak detector apparatus for a pressurized cylinder having a cylinder of a radius (r) with a slidable piston in the cylinder with a gas filled chamber positioned between a cylinder end and the piston face. The length (L) of the chamber is calculated according to load changes on the piston where the volume (Vc) of the chamber changes. The pressure and temperature of the chamber are measured as well as the length. These values are inputted to a processor to solve the ideal gas law equation PV=nRT where a change in n for a change in length indicates a leak.

    摘要翻译: 一种用于加压缸的泄漏检测装置,其具有半径(r)的圆柱体,其中气缸中的可滑动活塞具有位于气缸端部和活塞面之间的充气室。 腔室的长度(L)根据腔室体积(V SUB)的活塞的负荷变化而变化。 测量室的压力和温度以及长度。 这些值被输入到处理器以求解理想气体定律方程PV = nRT,其中长度变化的n中的变化表示泄漏。

    Ultra high temperature hermetically protected wirebonded piezoresistive transducer
    110.
    发明授权
    Ultra high temperature hermetically protected wirebonded piezoresistive transducer 失效
    超高温气密保护接线压阻式换能器

    公开(公告)号:US07363820B2

    公开(公告)日:2008-04-29

    申请号:US11585546

    申请日:2006-10-24

    IPC分类号: G01L9/00

    CPC分类号: G01L19/0084 G01L9/0055

    摘要: An ultra high temperature hermetically protected transducer includes a sensor chip having an active area upon which is deposited piezoresistive sensing elements. The elements are located on the top surface of the silicon wafer chip and have leads and terminals extending from the active area of the chip. The active area is surrounded with an extending rim or frame. The active area is coated with an oxide layer which passivates the piezoresistive sensing network. The chip is then attached to a glass pedestal, which is larger in size than the sensor chip. The glass pedestal has a through hole or aperture at each corner. The entire composite structure is then mounted onto a high temperature header with the metallized regions of the header being exposed to the holes in the glass pedestal; a high temperature lead is then bonded directly to the metallized contact area of the sensor chip at one end. The leads are of sufficient length to extend into the through holes in the glass pedestal. A sealing cover is then attached to the entire composite sensor to hermetically seal all of the interconnections. The sealing cover is a glass structure, has a central aperture which corresponds to the aperture formed by the frame, allowing the active area of the sensor to be exposed to the pressure medium. The sealing cover is bonded to the periphery of the rim and to the glass supporting pedestal.

    摘要翻译: 超高温密封保护换能器包括具有有源区域的传感器芯片,在该有源区域上形成压电感测元件。 这些元件位于硅晶片芯片的顶表面上并且具有从芯片的有源区域延伸的引线和端子。 活动区域被延伸的边缘或框架包围。 有源区域涂覆有钝化压阻感测网络的氧化物层。 然后将芯片连接到玻璃基座,其尺寸大于传感器芯片。 玻璃基座在每个角落都有一个通孔或孔。 然后将整个复合结构安装到高温集管上,其中集管的金属化区域暴露于玻璃基座中的孔; 然后将高温引线一端直接粘合到传感器芯片的金属化接触区域。 引线具有足够的长度以延伸到玻璃基座中的通孔中。 然后将密封盖连接到整个复合传感器以密封所有的互连。 密封盖是玻璃结构,具有对应于由框架形成的孔的中心孔,允许传感器的有效区域暴露于压力介质。 密封盖结合到边缘的周边和玻璃支撑基座上。