摘要:
A vacuum processing apparatus for performing plasma etching in a processing chamber on a base. An actuator, when lowered, forms a closed processing chamber by pressing a lid member onto a work platform, and, when raised, opens the processing chamber by setting the lid member apart from the work platform. The actuator is disposed above the lid member, and frame posts and conveying means, of the work are disposed so as not to block the front side of the lid member, and therefore a free working space for serviceman is kept at the front side of the lid member. Therefore, the serviceman can easily do maintenance work of the lid member or preparation of the processing chamber.
摘要:
An optical apparatus includes a first electrode that can be kept in a transparent state in a visible light region, and a second electrode electrically separated from the first electrode. A space is provided between the first and second electrodes. A certain function is used to provide a driving potential to the first and second electrodes. An electrolyte is poured into the space between the electrodes. The electrolyte is composed of a solution prepared by dissolving a silver salt in at least one type of solvent selected from a group consisting of dimethylformamide, diethylformamide, N, N-dimethylacetamide, N-methylpropionamide, N-methylpyrrolidone, 2-ethoxyethanol, and 2-methoxyethanol. By use of this electrolyte, silver is precipitated and dissolved under driving control over the first and second electrodes. As a result, color-developing and color-fading are effected by precipitation and dissolution of silver, respectively.
摘要:
A multilayered interconnection substrate which prevents contact failure from occurring and a process for fabricating the same, said multilayered interconnection substrate comprising a first interconnection layer formed on a substrate, at least two layers of insulation films differing in composition from each other and being formed on said first interconnection layer, provided that the insulation layers comprise at least one contact hole formed in such a manner to expose the selected portion of said first interconnection layer, a resin wall which buries the stepped portions formed on the inner peripheral portion of said contact hole, and a second interconnection layer formed inside said contact hole along said resin wall and being electrically connected to the first interconnection layer exposed at the bottom portion of the contact hole.
摘要:
An active-matrix substrate has a layered structure in which an upper region including a plurality of pixel electrodes arranged in a matrix and a lower region including a plurality of thin film transistors for driving the individual pixel electrodes are overlapped on each other. A planarization layer is interposed between both of the substrates. An active-matrix liquid crystal display device includes a main substrate and a facing substrate which are disposed to face to each other at a specified interval. A liquid crystal layer having a specified thickness is held between both of the substrates. A device bus line area including a plurality of thin film transistor devices and bus lines is formed on the surface of the main substrate. A planarization layer is formed to embed the irregularities on the surface of the device bus line area. Pixel electrodes in a matrix are formed on the flat surface of the planarization layer. An interval dimension between the adjacent pixel electrodes is set to be larger than a thickness dimension B of the liquid crystal layer, so that the subsidiary lateral electric field is made smaller than the normal vertical electric field.
摘要:
An aluminum non-aqueous electrolyte secondary cell having excellent rechargeable characteristics and comprising an aluminum or an aluminum alloy negative electrode, characterized in that it comprises a negative electrode made from aluminum or an aluminum alloy, a non-aqueous electrolyte containing a non-aqueous solvent with an aluminum halide and an organic halide dissolved therein, and a positive electrode containing FeS.sub.2 as the active material.