Vacuum processing apparatus with improved maintainability
    101.
    发明授权
    Vacuum processing apparatus with improved maintainability 失效
    具有改进的可维护性的真空处理设备

    公开(公告)号:US06468351B1

    公开(公告)日:2002-10-22

    申请号:US09589227

    申请日:2000-06-07

    IPC分类号: C23C1600

    摘要: A vacuum processing apparatus for performing plasma etching in a processing chamber on a base. An actuator, when lowered, forms a closed processing chamber by pressing a lid member onto a work platform, and, when raised, opens the processing chamber by setting the lid member apart from the work platform. The actuator is disposed above the lid member, and frame posts and conveying means, of the work are disposed so as not to block the front side of the lid member, and therefore a free working space for serviceman is kept at the front side of the lid member. Therefore, the serviceman can easily do maintenance work of the lid member or preparation of the processing chamber.

    摘要翻译: 一种用于在基座上的处理室中执行等离子体蚀刻的真空处理设备。 致动器下降时,通过将盖构件按压到工作台上而形成封闭的处理室,并且当升高时,通过将盖构件与工作平台分开设置来打开处理室。 致动器设置在盖构件上方,并且工件的框架柱和输送装置被布置成不阻挡盖构件的前侧,因此,维修人员的自由工作空间保持在 盖子。 因此,维修人员可以容易地进行盖部件的维护工作或处理室的准备。

    Optical apparatus
    102.
    发明授权
    Optical apparatus 失效
    光学仪器

    公开(公告)号:US5764401A

    公开(公告)日:1998-06-09

    申请号:US555813

    申请日:1995-11-09

    IPC分类号: G02F1/15 G02F1/153

    CPC分类号: G02F1/1506

    摘要: An optical apparatus includes a first electrode that can be kept in a transparent state in a visible light region, and a second electrode electrically separated from the first electrode. A space is provided between the first and second electrodes. A certain function is used to provide a driving potential to the first and second electrodes. An electrolyte is poured into the space between the electrodes. The electrolyte is composed of a solution prepared by dissolving a silver salt in at least one type of solvent selected from a group consisting of dimethylformamide, diethylformamide, N, N-dimethylacetamide, N-methylpropionamide, N-methylpyrrolidone, 2-ethoxyethanol, and 2-methoxyethanol. By use of this electrolyte, silver is precipitated and dissolved under driving control over the first and second electrodes. As a result, color-developing and color-fading are effected by precipitation and dissolution of silver, respectively.

    摘要翻译: 光学装置包括可以在可见光区域保持透明状态的第一电极和与第一电极电隔离的第二电极。 在第一和第二电极之间设置空间。 使用某种功能来为第一和第二电极提供驱动电位。 将电解质注入电极之间的空间。 电解质由将银盐溶解在选自二甲基甲酰胺,二乙基甲酰胺,N,N-二甲基乙酰胺,N-甲基丙酰胺,N-甲基吡咯烷酮,2-乙氧基乙醇,和2-乙氧基乙醇的至少一种溶剂中而成的溶液 - 甲氧基乙醇。 通过使用该电解质,银在第一和第二电极的驱动控制下沉淀并溶解。 结果,显色和褪色分别通过银的沉淀和溶解来实现。

    Multilayered interconnection substrate having a resin wall formed on
side surfaces of a contact hole
    103.
    发明授权
    Multilayered interconnection substrate having a resin wall formed on side surfaces of a contact hole 失效
    多层互连基板,具有形成在接触孔的侧面上的树脂壁

    公开(公告)号:US5616960A

    公开(公告)日:1997-04-01

    申请号:US271133

    申请日:1994-07-06

    摘要: A multilayered interconnection substrate which prevents contact failure from occurring and a process for fabricating the same, said multilayered interconnection substrate comprising a first interconnection layer formed on a substrate, at least two layers of insulation films differing in composition from each other and being formed on said first interconnection layer, provided that the insulation layers comprise at least one contact hole formed in such a manner to expose the selected portion of said first interconnection layer, a resin wall which buries the stepped portions formed on the inner peripheral portion of said contact hole, and a second interconnection layer formed inside said contact hole along said resin wall and being electrically connected to the first interconnection layer exposed at the bottom portion of the contact hole.

    摘要翻译: 一种防止接触不良发生的多层互连衬底及其制造方法,所述多层互连衬底包括形成在衬底上的第一互连层,至少两层不同组成的绝缘膜,并形成在所述 第一互连层,只要绝缘层包括以暴露所述第一互连层的选定部分的方式形成的至少一个接触孔,将形成在所述接触孔的内周部上的台阶部分的树脂壁, 以及沿着所述树脂壁在所述接触孔内形成的第二互连层,并且电连接到暴露在接触孔底部的第一互连层。

    Active-matrix substrate
    104.
    发明授权
    Active-matrix substrate 失效
    有源矩阵衬底

    公开(公告)号:US5585951A

    公开(公告)日:1996-12-17

    申请号:US172644

    申请日:1993-12-23

    摘要: An active-matrix substrate has a layered structure in which an upper region including a plurality of pixel electrodes arranged in a matrix and a lower region including a plurality of thin film transistors for driving the individual pixel electrodes are overlapped on each other. A planarization layer is interposed between both of the substrates. An active-matrix liquid crystal display device includes a main substrate and a facing substrate which are disposed to face to each other at a specified interval. A liquid crystal layer having a specified thickness is held between both of the substrates. A device bus line area including a plurality of thin film transistor devices and bus lines is formed on the surface of the main substrate. A planarization layer is formed to embed the irregularities on the surface of the device bus line area. Pixel electrodes in a matrix are formed on the flat surface of the planarization layer. An interval dimension between the adjacent pixel electrodes is set to be larger than a thickness dimension B of the liquid crystal layer, so that the subsidiary lateral electric field is made smaller than the normal vertical electric field.

    摘要翻译: 有源矩阵基板具有层叠结构,其中包括排列成矩阵的多个像素电极的上部区域和包括用于驱动各个像素电极的多个薄膜晶体管的下部区域彼此重叠。 在两个基板之间插入平坦化层。 有源矩阵液晶显示装置包括以指定间隔彼此相对设置的主基板和面对基板。 具有特定厚度的液晶层保持在两个基板之间。 在主基板的表面上形成包括多个薄膜晶体管器件和总线的器件总线线路区域。 形成平坦化层以将不规则物嵌入设备总线区域的表面上。 在平坦化层的平坦表面上形成矩阵中的像素电极。 相邻像素电极之间的间隔尺寸被设定为大于液晶层的厚度尺寸B,使得辅助横向电场小于正常垂直电场。