公开(公告)号：US20080007725A1

公开(公告)日：2008-01-10

申请号：US11822330

申请日：2007-07-05

申请人： Takahiro Togashi ,  Shigeru Matsui

发明人： Takahiro Togashi ,  Shigeru Matsui

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/94 ,  G01N2021/8861 ,  G01N2021/8874 ,  G01N2021/95676

摘要： A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.

公开(公告)号：US20070008521A1

公开(公告)日：2007-01-11

申请号：US11522399

申请日：2006-09-18

申请人： Masami Iizuka ,  Shigeru Matsui ,  Tadashi Suzuki ,  Hiroshi Goto ,  Takayuki Ono

发明人： Masami Iizuka ,  Shigeru Matsui ,  Tadashi Suzuki ,  Hiroshi Goto ,  Takayuki Ono

IPC分类号： G01N21/88

CPC分类号： G01N21/8806 ,  G01N21/21 ,  G01N21/9501 ,  G01N2021/9513

摘要： A lighting optical machine and defect inspection system having high reliability and safety when a laser beam is used as a light source. The lighting optical machine comprises: a housing, which accommodates a laser source, a beam polarization mechanism having first and second plane mirrors enabling a beam emitted from the laser source to be reflected so that the beam travels in the direction almost parallel to the beam emitted from the laser source, a beam expander for converting the beam to a parallel beam having a larger cross-sectional area, an objective lens, through which the parallel beam is reduced and applied to the surface of a sample; a first control mechanism for controlling the directions of the two plane mirrors of the beam polarization mechanism with an electric signal; and a second control mechanism for controlling the focus position of the beam expander with an electric signal.

摘要翻译： 当使用激光束作为光源时，具有高可靠性和安全性的照明光学机器和缺陷检查系统。 照明光学机器包括：容纳激光源的壳体，具有第一和第二平面镜的光束偏振机构，其使得能够反射从激光源发射的光束，使得光束在几乎平行于发射的光束的方向上行进 来自激光源的光束扩展器，用于将光束转换成具有较大截面面积的平行光束，物镜，平行光束通过该物镜被还原并施加到样品的表面; 用于以电信号控制所述光束偏振机构的两个平面镜的方向的第一控制机构; 以及用电信号控制光束扩展器的聚焦位置的第二控制机构。

公开(公告)号：US07133127B2

公开(公告)日：2006-11-07

申请号：US10612148

申请日：2003-07-03

申请人： Masami Iizuka ,  Shigeru Matsui ,  Tadashi Suzuki ,  Hiroshi Goto ,  Takayuki Ono

发明人： Masami Iizuka ,  Shigeru Matsui ,  Tadashi Suzuki ,  Hiroshi Goto ,  Takayuki Ono

IPC分类号： G01N21/00

CPC分类号： G01N21/8806 ,  G01N21/21 ,  G01N21/9501 ,  G01N2021/9513

摘要： A lighting optical machine and defect inspection system having high reliability and safety when a laser beam is used as a light source. The lighting optical machine comprises: a housing, which accommodates a laser source, a beam polarization mechanism having first and second plane mirrors enabling a beam emitted from the laser source to be reflected so that the beam travels in the direction almost parallel to the beam emitted from the laser source, a beam expander for converting the beam to a parallel beam having a larger cross-sectional area, an objective lens, through which the parallel beam is reduced and applied to the surface of a sample; a first control mechanism for controlling the directions of the two plane mirrors of the beam polarization mechanism with an electric signal; and a second control mechanism for controlling the focus position of the beam expander with an electric signal.

摘要翻译： 当使用激光束作为光源时，具有高可靠性和安全性的照明光学机器和缺陷检查系统。 照明光学机器包括：容纳激光源的壳体，具有第一和第二平面镜的光束偏振机构，其使得能够反射从激光源发射的光束，使得光束在几乎平行于发射的光束的方向上行进 来自激光源的光束扩展器，用于将光束转换成具有较大截面面积的平行光束，物镜，平行光束通过该物镜被还原并施加到样品的表面; 用于以电信号控制所述光束偏振机构的两个平面镜的方向的第一控制机构; 以及用电信号控制光束扩展器的聚焦位置的第二控制机构。

公开(公告)号：US07010447B2

公开(公告)日：2006-03-07

申请号：US10888021

申请日：2004-07-12

申请人： Takanori Ninomiya ,  Seiji Isogai ,  Shigeru Matsui ,  Toshiei Kurosaki

发明人： Takanori Ninomiya ,  Seiji Isogai ,  Shigeru Matsui ,  Toshiei Kurosaki

IPC分类号： G01B5/28 ,  G01B5/30 ,  G06F19/00

CPC分类号： H01L21/67288 ,  G01N21/9501 ,  G01N23/22 ,  G01N2021/8861 ,  G06T7/0004 ,  G06T7/73 ,  G06T2207/30148 ,  H01J37/28 ,  H01J2237/24592

摘要： Based on a plurality of defects' position-coordinates and attribute detected by an inspecting apparatus, defects that are easily detectable by an observing apparatus are selected. With these selected defects employed as the indicator, the observing apparatus detects and observes the defects. Moreover, creating a coordinate transformation formula for representing a correlated relationship in the defects' position-coordinates between both the apparatuses, the observing apparatus transforms the defects' position-coordinates so as to observe the defects.

公开(公告)号：US06191849B1

公开(公告)日：2001-02-20

申请号：US09219873

申请日：1998-12-24

申请人： Muneo Maeshima ,  Kazuo Takeda ,  Shigeru Matsui

发明人： Muneo Maeshima ,  Kazuo Takeda ,  Shigeru Matsui

IPC分类号： G01N2147

CPC分类号： G01N21/9501 ,  G01N21/9505

摘要： Disclosed is a wafer inspecting apparatus suitable to determine whether a scattering substance is a surface foreign matter or an internal defect even if the particle size of the scattering substance is smaller than the wavelength of irradiation rays used for inspection. The wafer is obliquely irradiated with irradiation rays at the Brewster angle, and scattered rays which are scattered from a scattering substance on or in the wafer are detected at and angle 0° and an angle of the Brewster angle or more by detectors. Then, it is determined whether the scattering substance is a surface foreign matter or an internal defect on the basis of a ratio between the intensities of the scattered rays detected by the detectors. The intensity of scattered rays which are scattered from a surface foreign matter and detected at an angle of the Brewster angle or more is larger than the intensity of scattered rays which are scattered from the foreign matter and detected at an angle 0°, and the intensity of scattered rays which are scattered from an internal defect and detected at an angle of the Brewster angle or more is smaller than the intensity of scattered rays which are scattered from the internal defect and detected at an angle 0°. This makes it possible to distinguish the surface foreign matter and the internal defect from each other.

摘要翻译： 公开了一种适用于确定散射物质是表面异物还是内部缺陷的晶片检查装置，即使散射物质的粒径小于用于检查的照射射线的波长。 以布鲁斯特角度的照射光线倾斜照射晶片，从晶片上或晶片上的散射物质散射的散射光线以0°的角度和布鲁斯特角度以上的角度检测。 然后，基于由检测器检测到的散射光线的强度之间的比例来确定散射物质是表面异物还是内部缺陷。 从表面异物散射并以布鲁斯特角度以上的角度检测的散射光的强度大于从异物散射并以0°的角度检测的散射光的强度，强度 从内部缺陷散射并以布鲁斯特角度以上的角度检测的散射光的散射光小于从内部缺陷散射并以0°的角度检测的散射光的强度。 这使得可以将表面异物和内部缺陷彼此区分开。

公开(公告)号：US6160615A

公开(公告)日：2000-12-12

申请号：US255766

申请日：1999-02-23

申请人： Shigeru Matsui ,  Muneo Maeshima ,  Isao Nemoto

发明人： Shigeru Matsui ,  Muneo Maeshima ,  Isao Nemoto

IPC分类号： H01L21/66 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  H01L21/00 ,  G01N21/00 ,  C23C16/00 ,  G01B11/06

CPC分类号： H01L21/67288 ,  G01N21/94 ,  G01N21/9501

摘要： A sample is supported flat in high precision by a sample chuck, and is easily mounted and dismounted.A wafer lifting mechanism is arranged in a position separated from a rotating system of a rotatable wafer chuck, and a wafer is lifted from a supporting surface by moving the wafer lifting mechanism upward to let pins penetrate through through holes of the wafer chuck under a state that the wafer chuck is stopped at a sample mounting-and-dismounting position.

摘要翻译： 样品通过样品卡盘以高精度平坦地支撑，并且易于安装和拆卸。 将晶片升降机构设置在与旋转晶片卡盘的旋转系统分离的位置，通过向上移动晶片升降机构使晶片从支撑面抬起，以使引脚在状态下穿过晶片卡盘的通孔 晶片卡盘停在样品安装和拆卸位置。

公开(公告)号：US6157444A

公开(公告)日：2000-12-05

申请号：US198644

申请日：1998-11-24

申请人： Koji Tomita ,  Muneo Maeshima ,  Shigeru Matsui ,  Hitoshi Komuro ,  Kazuo Takeda

发明人： Koji Tomita ,  Muneo Maeshima ,  Shigeru Matsui ,  Hitoshi Komuro ,  Kazuo Takeda

IPC分类号： G01N21/95 ,  G01N21/88

CPC分类号： G01N21/9505 ,  G01N21/9501

摘要： In order to easily evaluate defects of the silicon wafer affecting the characteristic of a device, the present invention provides a defect inspection apparatus for detecting defects existing on a surface of a sample and/or inside the sample, which comprises a display apparatus for displaying a distribution of the defects on a graph having coordinate axes of distance from a central position of the sample and the depth where the defect exists based on the depth information and the positional information obtained by a detecting means.

摘要翻译： 为了容易地评估影响器件特性的硅晶片的缺陷，本发明提供了一种用于检测存在于样品表面和/或样品内部的缺陷的缺陷检查装置，其包括显示装置 基于由检测装置获得的深度信息和位置信息，在具有距离样本的中心位置的距离的坐标轴和存在缺陷的深度的图形上的缺陷的分布。

公开(公告)号：US4777443A

公开(公告)日：1988-10-11

申请号：US119489

申请日：1987-11-12

申请人： Masao Yabusaki ,  Etsuji Yamamoto ,  Takashi Onodera ,  Yukiko Ogura ,  Hideaki Nakane ,  Shigeru Matsui ,  Hideki Kohno

发明人： Masao Yabusaki ,  Etsuji Yamamoto ,  Takashi Onodera ,  Yukiko Ogura ,  Hideaki Nakane ,  Shigeru Matsui ,  Hideki Kohno

IPC分类号： G01R33/035 ,  G01R33/36 ,  G01R33/20

CPC分类号： G01R33/326 ,  G01R33/0358

摘要： Disclosed in a nuclear magnetic resonance (NMR) based inspection apparatus using an SQUID flux meter for detecting a small NMR signal, in which a receiving coil for receiving the NMR signal from an object is connected to a mixer, which mixes a reference high-frequency signal with the NMR signal so that the NMR signal is reduced to a low-frequency signal having a differential component of frequencies of both signals, and the low-frequency signal is applied to the input coil of the SQUID flux meter so that it is converted into a voltage signal. The mixer circuit includes Schottky diodes operative at a liquid helium temperature or Josephson junctions, and the portions of apparatus from the reception coil up to the SQUID flux meter are operated in a superconductive state at a liquid helium temperature.

摘要翻译： 在使用SQUID通量计检测小型NMR信号的基于核磁共振（NMR）的检查装置中公开了一种用于从物体接收NMR信号的接收线圈连接到混频器，该混频器将参考高频 用NMR信号进行信号，使得NMR信号被减少到具有两个信号的频率的差分分量的低频信号，并且低频信号被施加到SQUID通量计的输入线圈，使得其被转换 变成电压信号。 混频器电路包括以液氦温度或约瑟夫逊结操作的肖特基二极管，并且从接收线圈到SQUID通量计的装置部分在液氦温度下处于超导状态。

公开(公告)号：US4689568A

公开(公告)日：1987-08-25

申请号：US750475

申请日：1985-07-01

申请人： Shigeru Matsui ,  Kensuke Sekihara ,  Hideki Kohno ,  Takashi Onodera ,  Hidemi Shiono

发明人： Shigeru Matsui ,  Kensuke Sekihara ,  Hideki Kohno ,  Takashi Onodera ,  Hidemi Shiono

IPC分类号： G01R33/44 ,  A61B5/055 ,  A61B10/00 ,  G01R33/48 ,  G01R33/485 ,  G01R33/561 ,  G01R33/20

CPC分类号： G01R33/485 ,  G01R33/5616

摘要： An NMR imaging method which provides a three-dimensional image representative of the two-dimensional distribution of nuclear spin species resolved by chemical shift or the local spectra resolved by two-dimensional location. After the excitation of nuclear spins and the phase-encoding by application of a field gradient G.sub.y, a periodically inverting field gradient G.sub.x is generated to yield a continuous echo train. The echo train is sampled and separated into data of odd-numbered echoes and data of even-numbered echoes which data are in turn reconstructed into two-dimensional data arrays, respectively. The data thus reconstructed are three-dimensional Fourier-transformed.

摘要翻译： 提供表示通过化学位移分解的核自旋物质的二维分布的三维图像的NMR成像方法或通过二维位置解析的局部光谱。 在核自旋的激励和通过施加场梯度Gy的相位编码之后，产生周期性反转场梯度Gx以产生连续的回波串。 回波串被采样并分离成奇数回波的数据和偶数回波的数据，数据又分别被重建成二维数据阵列。 这样重建的数据是三维傅里叶变换的。

公开(公告)号：US4683433A

公开(公告)日：1987-07-28

申请号：US636995

申请日：1984-08-02

申请人： Etsuji Yamamoto ,  Hideki Kohno ,  Masao Kuroda ,  Shigeru Matsui ,  Hidemi Shiono

发明人： Etsuji Yamamoto ,  Hideki Kohno ,  Masao Kuroda ,  Shigeru Matsui ,  Hidemi Shiono

IPC分类号： G01R33/20 ,  A61B5/055 ,  A61B10/00 ,  G01R33/48 ,  G01R33/54 ,  G01R33/56

CPC分类号： G01R33/482 ,  G01R33/56

摘要： An NMR imaging apparatus and method for detecting a nuclear spin resonance signal from an object, which is placed in a magnetic field, to produce images of the object. At an instant when the spins come into phase after the signal detection by a first spin excitation, RF magnetic field pulses are applied for rotating the direction of the spin to that opposite to the initial state. After that, the spin excitation and the signal direction of second time are conducted to measure the data which are different in the effect of the relaxation time from the first measurements. By repeating these sequences, it is possible to produce a plurality of images such as an intensity image or a relaxation time enhanced image.

摘要翻译： 一种用于检测放置在磁场中的物体的核自旋共振信号的NMR成像设备和方法，以产生物体的图像。 在通过第一自旋激发在信号检测之后自旋进入相位的瞬间，施加RF磁场脉冲以将旋转方向旋转到与初始状态相反的方向。 之后，进行自旋激励和第二次的信号方向，以测量与第一次测量相比，松弛时间的影响不同的数据。 通过重复这些序列，可以产生多个图像，例如强度图像或弛豫时间增强图像。