Optical filters for manipulating spectral power distribution in accelerated weathering devices
    101.
    发明申请
    Optical filters for manipulating spectral power distribution in accelerated weathering devices 有权
    用于操纵加速风化装置中光谱功率分布的光学滤波器

    公开(公告)号:US20040178367A1

    公开(公告)日:2004-09-16

    申请号:US10802430

    申请日:2004-03-17

    CPC classification number: G02B5/208 G01N17/004 G02B5/22 G02B5/226

    Abstract: The present disclosure is directed to an optical filter that advantageously approximates sunlight that is both durable and stable for long periods of time when subject to harsh light intensity, thermal and moisture loads of accelerating weathering devices. The optical filter includes a glass having a lead content of between 0.5% and 50% by weight. In some examples, the filter can be constructed to have a thickness of 0.7 mm to 10 mm. In another aspect of the disclosure, the optical filter is part of an optical filter assembly suitable for manipulating spectral power distribution. The optical filter assembly includes a lead glass optical filter having a lead content of between 0.5% and 50% by weight and an ultraviolet transmissive optical filter. In one example, the ultraviolet transmissive optical filter is constructed from quartz glass. The ultraviolet transmissive optical filter can further include an infrared absorbing coating. In still another aspect of the present disclosure, an optical filter constructed from a lead glass has a thickness selected such that illumination passed through the lead glass has a first ratio and a second ratio. The first ratio is a first total irradiance for wavelengths shorter than 290 nm to a second total irradiance for wavelengths between 300 nm to 400 nm, such that the first ratio is less than 2.0null10null6. The second ratio is an irradiance at 310 nm to the second total irradiance, wherein the second ratio is at least 1.2null10null3.

    Abstract translation: 本公开涉及一种光学滤光器,其有利地接近在经受加速风化装置的苛刻光强度,热和湿度负载的情况下长时间耐久和稳定的阳光。 光学滤光器包括铅含量在0.5重量%至50重量%之间的玻璃。 在一些示例中,过滤器可以被构造成具有0.7mm至10mm的厚度。 在本公开的另一方面,光学滤波器是适于操纵光谱功率分布的光学滤波器组件的一部分。 滤光器组件包括铅含量在0.5重量%至50重量%之间的铅玻璃滤光器和紫外线透过滤光器。 在一个示例中,紫外线透过滤光器由石英玻璃构成。 紫外线透过型滤光器还可以包括红外吸收涂层。 在本公开的另一方面,由铅玻璃构成的滤光器具有选择的厚度,使得通过铅玻璃的照明具有第一比率和第二比率。 第一比率是对于波长小于290nm的波长的第一总辐照度,对于300nm至400nm之间的波长的第二总辐照度,使得第一比率小于2.0×10 -6。 第二比率是在310nm处与第二总辐照度的辐照度,其中第二比率为至少1.2×10 -3。

    Method for determining the angle of incidence of low level, periodic optical signals
    102.
    发明申请
    Method for determining the angle of incidence of low level, periodic optical signals 审中-公开
    确定低电平,周期性光信号入射角的方法

    公开(公告)号:US20040173727A1

    公开(公告)日:2004-09-09

    申请号:US10377407

    申请日:2003-03-03

    CPC classification number: G01S7/4804 G01S3/782

    Abstract: A method for determining an angle of incidence of periodic optical signals is provided. The method includes detecting whether the periodic optical signals are present; generating a pulsed output when the periodic optical signals are present, the pulsed output corresponding to peaks in the periodic optical signals; predicting a timing of the periodic optical signals from the pulsed output; controlling a gated detector array to take a first reading and a second reading of the periodic optical signals based upon the timing, the first reading being out of phase with the timing and the second reading being in phase with the timing; and generating the angle of incidence by filtering the first reading from the second reading.

    Abstract translation: 提供了一种用于确定周期性光信号的入射角的方法。 该方法包括检测周期性光信号是否存在; 当存在周期性光信号时产生脉冲输出,对应于周期性光信号中的峰值的脉冲输出; 预测来自脉冲输出的周期性光信号的定时; 控制门控检测器阵列基于定时对周期性光信号进行第一读和第二读取,第一读取与定时异相,并且第二读数与定时同相; 以及通过从第二读数滤波第一读数来产生入射角。

    Illumination system, particularly for EUV lithography
    103.
    发明申请
    Illumination system, particularly for EUV lithography 有权
    照明系统,特别适用于EUV光刻

    公开(公告)号:US20040140440A1

    公开(公告)日:2004-07-22

    申请号:US10752368

    申请日:2004-01-06

    Abstract: There is provided an illumination system for light having wavelengths null193 nm. The system includes (a) a first raster element for receiving a first diverging portion of the light and directing a first beam of the light, (b) a second raster element for receiving a second diverging portion of the light and directing a second beam of the light, where the first raster element is oriented at an angle with respect to the second raster element to cause a center ray of the first beam to intersect with a center ray of the second beam at an image plane, and (c) an optical element for imaging secondary sources of the light in an exit pupil, where the optical element is situated in a path of the light after the first and second raster elements and before the image plane.

    Abstract translation: 为波长<= 193nm的光提供照明系统。 该系统包括(a)用于接收光的第一发散部分并引导第一光束的第一光栅元件,(b)第二光栅元件,用于接收光的第二发散部分并引导第二光束 所述光,其中所述第一光栅元件相对于所述第二光栅元件以一定角度定向,以使所述第一光束的中心光线在图像平面处与所述第二光束的中心光线相交,以及(c)光学 用于在出射光瞳中成像二次光源的元件,其中光学元件位于第一和第二光栅元件之后的光的路径中以及在图像平面之前。

    Thermal imaging cameras
    104.
    发明申请
    Thermal imaging cameras 有权
    热成像相机

    公开(公告)号:US20040129889A1

    公开(公告)日:2004-07-08

    申请号:US10470702

    申请日:2004-02-27

    Abstract: A modular hyperspectral thermal camera that combines a wide field-of-view with a low erroneous recognition rate is described. The modular hyperspectral thermal camera provides such low erroneous recognition rates without any requirement for cryogenically cooling the associated optical components. The modular nature of the hyperspectral thermal camera permits easy exchange of the optical components and so provides a device that is easily calibrated and varied in resolution. In addition the modular nature allows the hyperspectral thermal camera to be readily converted to a broad band thermal camera, a full field spectrograph or a thermal bandpass filter camera, as required.

    Abstract translation: 描述了结合宽视场和低错误识别率的模块化高光谱热像仪。 模块化高光谱热像仪提供如此低的错误识别率,而无需对相关的光学部件进行低温冷却。 高光谱热像仪的模块化特性允许轻松交换光学元件,因此提供了易于校准和分辨率变化的器件。 此外,模块化特性允许高光谱热像仪可以根据需要轻易地转换成宽带热像仪,全场光谱仪或热带通滤光镜相机。

    Optical sheet and optimizing method thereof
    105.
    发明申请
    Optical sheet and optimizing method thereof 有权
    光学片及其优化方法

    公开(公告)号:US20040125362A1

    公开(公告)日:2004-07-01

    申请号:US10694958

    申请日:2003-10-29

    CPC classification number: G02B5/0226 G02B5/0278 G02F1/133504 Y10T428/31786

    Abstract: An optical sheet optimization method includes the steps of: extracting a statistic sample using transmissivity, haze data and luminance data of an optical diffusion sheet corresponding to the transmissivity and the haze data; making a regression model for the extracted statistic sample; calculating a regression coefficient to minimize an error term (residual) of the regression model and deriving a regression expression using the calculated regression coefficient; and predicting a luminance of the optical diffusion sheet due to changes of the transmissivity and the haze data using the derived regression expression.

    Abstract translation: 光学片优化方法包括以下步骤:使用与透射率和雾度数据相对应的光学漫射片的透射率,雾度数据和亮度数据提取统计样本; 提取统计样本的回归模型; 计算回归系数以最小化回归模型的误差项(残差),并使用计算的回归系数导出回归表达式; 并使用导出的回归表达式预测由于透射率和雾度数据的变化引起的光学漫射片的亮度。

    Extreme ultraviolet light source
    106.
    发明申请
    Extreme ultraviolet light source 失效
    极紫外光源

    公开(公告)号:US20040108473A1

    公开(公告)日:2004-06-10

    申请号:US10409254

    申请日:2003-04-08

    Abstract: The present invention provides a reliable, high-repetition rate, production line compatible high energy photon source. A very hot plasma containing an active material is produced in vacuum chamber. The active material is an atomic element having an emission line within a desired extreme ultraviolet (EUV) range. A pulse power source comprising a charging capacitor and a magnetic compression circuit comprising a pulse transformer, provides electrical pulses having sufficient energy and electrical potential sufficient to produce the EUV light at an intermediate focus at rates in excess of 5 Watts. In preferred embodiments designed by Applicants in-band, EUV light energy at the intermediate focus is 45 Watts extendable to 105.8 Watts.

    Abstract translation: 本发明提供了一种可靠,高重复率的生产线兼容高能光子源。 在真空室中产生含有活性物质的非常热的等离子体。 活性物质是具有期望的极紫外(EUV)范围内的发射线的原子元素。 包括充电电容器和包括脉冲变压器的磁压缩电路的脉冲电源提供电脉冲,其具有足够的能量和电势,足以以超过5瓦的速率在中间焦点处产生EUV光。 在由申请人带内设计的优选实施例中,中间焦点处的EUV光能量可以45瓦可扩展到105.8瓦特。

    Radiation detector, radiation detector element, and radiation imaging apparatus

    公开(公告)号:US20040104350A1

    公开(公告)日:2004-06-03

    申请号:US10678303

    申请日:2003-10-06

    CPC classification number: G01T1/2928

    Abstract: In a gamma camera, a plurality of radiation detector elements having a rod-shaped first electrode, a semiconductor device surrounds the first electrode to contact with it for entering a radiation, and a second electrode provided for the side surface of the semiconductor device are detachably attached to a holding member. The holding member has a first electrode contact portion contacted with the first electrode and a second electrode contact portion contacted with the second electrode. A collimator in which a plurality of radiation paths provided corresponding to the plurality of radiation detector elements are formed is arranged on the radiation entering side of the plurality of radiation detector elements. A null-ray detection signal outputted from the first electrode contact portion is sent to a signal processing integrated circuit. A high voltage is applied to the second electrode via the second electrode contact portion.

    Integral filter support and shutter stop for uv curing system
    108.
    发明申请
    Integral filter support and shutter stop for uv curing system 失效
    紫外固化系统的一体式过滤器支架和快门挡块

    公开(公告)号:US20040094727A1

    公开(公告)日:2004-05-20

    申请号:US10468819

    申请日:2003-08-25

    Inventor: Mark Holmes

    Abstract: A UV spot curing lamp assembly comprises an integral filter support and shutter stop mechanism. The assembly includes a UV lamp and a light guide spaced therefrom for receiving filtered light from the lamp and for directing light through the light guide to a selected target or work site for curing materials thereat. A filter plate in the form of a borosilicate glass, having a selected thickness for the particular application, is disposed in relatively close proximity to the entrance surface of the light guide. A movable shutter plate, having an opening therethrough, is disposed between the filter and the light guide entrance surface. The shutter is movable from a first position wherein the opening is in registry with the light guide entrance surface to receive light from the lamp to a second position wherein a solid portion of the shutter plate blocks light from being received by the light guide entrance surface. Effective cooling of the lamp assembly is provided by a fan by which forced air is drawn over the lamp and the integral filter support and shutter stop, and by an internal mounting system configured to direct the drawn air for effective convective heat dissipation.

    Abstract translation: UV点固化灯组件包括一体式过滤器支架和快门停止机构。 组件包括UV灯和与之隔开的光导,用于接收来自灯的过滤光,并用于将光引导通过光导到选定的目标或工作现场,用于固化材料。 具有用于特定应用的所选厚度的硼硅酸盐玻璃形式的滤板被布置成相对靠近导光体的入射表面。 在过滤器和光导入口表面之间设置有具有穿过其的开口的活动挡板。 快门可从第一位置移动,其中开口与光导入口表面对准,以将来自灯的光接收到第二位置,其中快门板的实心部分阻挡光被光导入口表面接收。 灯组件的有效冷却由风扇提供,通过该风扇强制空气被抽吸在灯和整体过滤器支撑件和快门停止件上,并且通过内部安装系统构造成引导抽吸空气用于有效的对流散热。

    Solid state spark detection
    109.
    发明申请
    Solid state spark detection 失效
    固态火花检测

    公开(公告)号:US20040079905A1

    公开(公告)日:2004-04-29

    申请号:US10282488

    申请日:2002-10-28

    Inventor: Andrew M. Robb

    CPC classification number: F02D35/022 F02P17/12 G01J1/44

    Abstract: An apparatus, system, and method for solid state spark detection are disclosed. A semiconducting photodetector has a pair of electrical conductors for carrying an electrical current generated when the semiconducting photodetector receives light energy generated by sparks. An electrical current detector is operably coupled with the electrical conductors for sensing the electrical current generated to signal receipt of the light energy generated by sparks. The present invention can be coupled to a monitoring device, such as an oscilloscope, for monitoring intensity and/or timing of spark phenomena. A plurality of semiconducting photodetectors and associated electrical current detectors may be used in concert if desired. The semiconducting photodetectors are suitably adapted to respond to light energy of different magnitudes or wavelengths to more particularly study sparks of different natures.

    Abstract translation: 公开了一种用于固态火花检测的装置,系统和方法。 半导体光电检测器具有一对电导体,用于承载当半导体光电检测器接收由火花产生的光能时产生的电流。 电流检测器与电导体可操作地耦合,用于感测所产生的电流,以信号接收由火花产生的光能。 本发明可以耦合到诸如示波器的监测装置,用于监测火花现象的强度和/或定时。 如果需要,可以一起使用多个半导体光电检测器和相关联的电流检测器。 半导体光电探测器适合于响应不同幅度或波长的光能,以更具体地研究不同性质的火花。

    Apparatus and method for treating products with ultraviolet light
    110.
    发明申请
    Apparatus and method for treating products with ultraviolet light 失效
    用紫外线处理产品的装置和方法

    公开(公告)号:US20040065852A1

    公开(公告)日:2004-04-08

    申请号:US10675080

    申请日:2003-09-30

    CPC classification number: B05D3/067 A43D25/20

    Abstract: Apparatus and method for treating a product with ultraviolet light. The apparatus includes a chamber having an inlet and an outlet, and an interior space between the inlet and the outlet. An ultraviolet light permeable conveyor is configured to move the product through the interior space from the inlet to the outlet. The conveyor has a top surface which receives the product and an opposite bottom surface. A source of ultraviolet light is coupled to the chamber and is configured to direct ultraviolet light in at least first and second portions within the interior space toward the conveyor. A first reflector is positioned in the interior space and above the top surface of the conveyor such that the first portion of the ultraviolet light is redirected toward the product on the top surface. A second reflector is positioned in the interior space and below the bottom surface of the conveyor such that the second portion of the ultraviolet light is redirected upwardly through the conveyor toward the product on the top surface.

    Abstract translation: 用紫外线处理产品的装置和方法。 该装置包括具有入口和出口以及入口和出口之间的内部空间的室。 紫外线透光输送机构造成使产品从入口到出口移动通过内部空间。 输送机具有接收产品的顶表面和相对的底表面。 紫外光源耦合到腔室,并且被配置为将紫外光引导到内部空间内的至少第一和第二部分中,朝向传送器。 第一反射器被定位在内部空间中并且位于输送机的顶表面之上,使得紫外光的第一部分被重定向到顶表面上的产品。 第二反射器定位在内部空间中并且位于输送机的底表面下方,使得紫外线的第二部分向上通过输送机向上朝向顶表面上的产品重新定向。

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