SPECTROSCOPY MEASUREMENTS
    111.
    发明申请
    SPECTROSCOPY MEASUREMENTS 审中-公开
    光谱测量

    公开(公告)号:US20100096551A1

    公开(公告)日:2010-04-22

    申请号:US12521174

    申请日:2007-12-20

    IPC分类号: G01J5/02 G01N21/55

    CPC分类号: A61B5/14558

    摘要: The invention relates to a device and method for the measurement of the concentration of at least one substance in a turbid medium. The device comprises at least one radiation source (12) adapted to illuminate the turbid medium (17) on at least one irradiation area. The device further comprises at least one detector adapted to detect backscattered light from the turbid medium from at least one detection area and to generate detection signals representative of the backscattered light. The device is arranged to generate detection signals with respect to at least two different irradiation-detection distances. The irradiation-detection distances are defined as the respective distances between the irradiation areas and the detection areas. The device also comprises at least one spatial light modulator (2), comprising 17 at least two electrode plates (5, 8) enclosing a liquid (7), the electrode plates supporting a plurality of electrodes (6, 10) arranged to define, with the liquid (7), light transmission patterns depending on the electrical field between the electrodes (6, 10), the irradiation areas and/or the detection areas being defined by said light transmission patterns.

    摘要翻译: 本发明涉及一种用于测量混浊介质中至少一种物质浓度的装置和方法。 该装置包括适于在至少一个照射区域上照射混浊介质(17)的至少一个辐射源(12)。 该装置还包括至少一个检测器,适于从至少一个检测区域检测来自混浊介质的反向散射光,并产生表示反向散射光的检测信号。 该装置被布置成相对于至少两个不同的照射检测距离产生检测信号。 照射检测距离被定义为照射区域和检测区域之间的相应距离。 该装置还包括至少一个空间光调制器(2),包括17个至少两个封闭液体(7)的电极板(5,8),所述电极板支撑多个电极(6,10) 利用液体(7),根据电极(6,10)之间的电场的透光图案,照射区域和/或检测区域由所述光透射图案限定。

    Method for filtering particles out of a beam of radiation and filter for a lithographic apparatus
    112.
    发明授权
    Method for filtering particles out of a beam of radiation and filter for a lithographic apparatus 失效
    用于从辐射束中过滤颗粒并用于光刻设备的过滤器的方法

    公开(公告)号:US07692169B2

    公开(公告)日:2010-04-06

    申请号:US11493848

    申请日:2006-07-27

    IPC分类号: H05G2/00

    CPC分类号: G03F7/70916 H05G2/001

    摘要: A method for filtering particles out of a beam of radiation propagating from a radiation source is provided. The method includes passing the beam of radiation through a filter having a first portion within the beam of radiation and a second portion outside of the beam of radiation, capturing at least some of the particles in the beam of radiation with the first portion, and moving the filter in a direction that is transverse to the beam of radiation so that the first portion is moved outside of the beam of radiation and the second portion is moved into the beam of radiation.

    摘要翻译: 提供了从辐射源传播的辐射束中过滤颗粒的方法。 该方法包括将辐射束通过过滤器,该过滤器具有辐射束内的第一部分和位于辐射束之外的第二部分,用第一部分捕获辐射束中的至少一些颗粒,并移动 所述过滤器在横向于所述辐射束的方向上,使得所述第一部分移动到所述辐射束的外部,并且所述第二部分被移动到所述辐射束中。

    Lithographic apparatus with enhanced spectral purity, device manufacturing method and device manufactured thereby
    115.
    发明申请
    Lithographic apparatus with enhanced spectral purity, device manufacturing method and device manufactured thereby 失效
    具有增强的光谱纯度的光刻设备,由此制造的器件制造方法和器件

    公开(公告)号:US20090046267A1

    公开(公告)日:2009-02-19

    申请号:US12216322

    申请日:2008-07-02

    IPC分类号: G03B27/42 G03B27/70

    CPC分类号: G03F7/70191 G03F7/70575

    摘要: A lithographic apparatus includes an illumination system configured to condition a radiation beam; a support configured to support a patterning device, the patterning device being configured to impart the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table configured to hold a substrate; and a projection system configured to project the patterned radiation beam onto a target portion of the substrate, wherein the radiation beam is reflected from at least one grazing incidence mirror that enhances the spectral purity of the radiation beam.

    摘要翻译: 光刻设备包括被配置为调节辐射束的照明系统; 被配置为支撑图案形成装置的支撑件,所述图案形成装置被构造成在其横截面中赋予所述辐射束图案以形成图案化的辐射束; 被配置为保持基板的基板台; 以及投影系统,被配置为将所述图案化的辐射束投影到所述基板的目标部分上,其中所述辐射束从至少一个掠入射镜反射,所述掠入射镜增强了所述辐射束的光谱纯度。

    Method and System for Adjusting the Pitch of Light Spots Used to Read an Information Carrier
    116.
    发明申请
    Method and System for Adjusting the Pitch of Light Spots Used to Read an Information Carrier 审中-公开
    调整用于读取信息载体的光斑间距的方法和系统

    公开(公告)号:US20080298192A1

    公开(公告)日:2008-12-04

    申请号:US12092984

    申请日:2006-11-09

    IPC分类号: G11B20/18

    摘要: The invention relates to a method and system for adjusting the pitch of an array of light spots (103) in an information carrier reading apparatus so as to correspond with the size of the macro-cells in which data is stored. A degree of mismatch between the pitch of the array of light spots (103) and the size of the macro-cells is determined when the probe array generation device (102) is illuminated with an input light beam, and the pitch adjusted accordingly by adjusting the distance of the focus of the light source (12) so as to converge or diverge the input light beam (104) to the probe array generation device (102), thereby to create a non-collimated input light beam (104) and magnify the pitch of the array of light spots (103) accordingly.

    摘要翻译: 本发明涉及一种用于调整信息载体读取装置中的光点阵列(103)的间距的方法和系统,以便与存储数据的宏小区的大小对应。 当用输入光束照射探针阵列产生装置(102)时,确定光点阵列(103)的间距与宏小区的大小之间的失配程度,并且通过调节相应的音调 光源(12)的焦点的距离,以将输入光束(104)会聚或发散到探针阵列产生装置(102),从而产生非准直输入光束(104)并放大 相应地,光点阵列(103)的间距。

    Device For Imaging an Interior of a Turbid Medium
    117.
    发明申请
    Device For Imaging an Interior of a Turbid Medium 审中-公开
    用于成像浊度介质内部的装置

    公开(公告)号:US20080278727A1

    公开(公告)日:2008-11-13

    申请号:US12093965

    申请日:2006-11-02

    IPC分类号: G01N21/59

    摘要: The invention relates to a device for imaging an interior of a turbid medium. Said device (1) comprises a measurement volume (15) for accommodating the turbid medium. Said measurement volume (15) comprises a number of sources capable of communicating light, said sources comprising a preferred source, capable of communicating preferred light and a further source, capable of communicating further light. Said device (1) further comprises a detection unit capable of detecting composed light comprising a preferred component comprising at least a part of the preferred light and a further component comprising at least a part of the further light. The device is adapted such that the negative effect said further component in the composed light may have on detecting the preferred component also present in the composed light is counteracted. According to the invention this object is realized in that the preferred source and the further source are located such that a path followed by the preferred component from the preferred source to the detector unit and a path followed by the further component from the further source to the detector unit are substantially the same.

    摘要翻译: 本发明涉及一种用于对浑浊介质内部进行成像的装置。 所述装置(1)包括用于容纳混浊介质的测量体积(15)。 所述测量体积(15)包括能够通信光的多个光源,所述光源包括能够传送更好的光的能够传送优选光的另一光源的优选光源。 所述装置(1)还包括能够检测合成光的检测单元,其包括包含至少一部分优选光的优选组分和包含至少一部分光的另外组分。 该装置适于使得组合光中所述另外的组分的负面影响可能在检测到组合光中也存在的优选组分时可能被抵消。 根据本发明,该目的的实现是,优选的源和进一步的源被定位成使得从优选的源到检测器单元的优选组件之后的路径以及从另一个源到另一个源的另一个组件的路径 检测器单元基本相同。

    Information Carrier, System and Apparatus for Reading Such an Information Carrier
    119.
    发明申请
    Information Carrier, System and Apparatus for Reading Such an Information Carrier 审中-公开
    用于阅读这样的信息载体的信息载体,系统和装置

    公开(公告)号:US20080100892A1

    公开(公告)日:2008-05-01

    申请号:US11572149

    申请日:2005-07-12

    IPC分类号: G03H1/00

    摘要: The invention relates to an information carrier (801) comprising: a data layer (802) intended to store a set of elementary data, a layer (803) comprising an array of apertures (804) placed parallel to said data layer (802) for generating an array of light spots intended to be applied to said data layer (802). The invention also relates to a system and apparatus for reading such an information carrier.

    摘要翻译: 本发明涉及一种信息载体(801),包括:用于存储一组基本数据的数据层(802),包括平行于所述数据层(802)放置的孔阵列(804)的层(803),用于 产生旨在应用于所述数据层(802)的光点阵列。 本发明还涉及用于读取这种信息载体的系统和装置。