摘要:
The invention relates to a device and method for the measurement of the concentration of at least one substance in a turbid medium. The device comprises at least one radiation source (12) adapted to illuminate the turbid medium (17) on at least one irradiation area. The device further comprises at least one detector adapted to detect backscattered light from the turbid medium from at least one detection area and to generate detection signals representative of the backscattered light. The device is arranged to generate detection signals with respect to at least two different irradiation-detection distances. The irradiation-detection distances are defined as the respective distances between the irradiation areas and the detection areas. The device also comprises at least one spatial light modulator (2), comprising 17 at least two electrode plates (5, 8) enclosing a liquid (7), the electrode plates supporting a plurality of electrodes (6, 10) arranged to define, with the liquid (7), light transmission patterns depending on the electrical field between the electrodes (6, 10), the irradiation areas and/or the detection areas being defined by said light transmission patterns.
摘要:
A method for filtering particles out of a beam of radiation propagating from a radiation source is provided. The method includes passing the beam of radiation through a filter having a first portion within the beam of radiation and a second portion outside of the beam of radiation, capturing at least some of the particles in the beam of radiation with the first portion, and moving the filter in a direction that is transverse to the beam of radiation so that the first portion is moved outside of the beam of radiation and the second portion is moved into the beam of radiation.
摘要:
The invention relates to a device (1) for imaging an interior of a turbid medium (55) comprising a receptacle (20) with the receptacle (20) comprising a measurement volume (15) for receiving the turbid medium (55). The device (1) is adapted such that the inner surface of the receptacle (20), including at least part of the optical channels (70) is covered with a layer (80).
摘要:
The invention relates to a device (1) for imaging an interior of a turbid medium (55) comprising a receptacle (20) with the receptacle (20) comprising a measurement volume (15) for receiving the turbid medium (55). The device (1) is adapted such that the device (1) further comprises a further receptacle (60), arranged to be inserted into the receptacle (20), with the further receptacle (60) comprising a restricted measurement volume (75) for receiving the turbid medium (55).
摘要:
A lithographic apparatus includes an illumination system configured to condition a radiation beam; a support configured to support a patterning device, the patterning device being configured to impart the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table configured to hold a substrate; and a projection system configured to project the patterned radiation beam onto a target portion of the substrate, wherein the radiation beam is reflected from at least one grazing incidence mirror that enhances the spectral purity of the radiation beam.
摘要:
The invention relates to a method and system for adjusting the pitch of an array of light spots (103) in an information carrier reading apparatus so as to correspond with the size of the macro-cells in which data is stored. A degree of mismatch between the pitch of the array of light spots (103) and the size of the macro-cells is determined when the probe array generation device (102) is illuminated with an input light beam, and the pitch adjusted accordingly by adjusting the distance of the focus of the light source (12) so as to converge or diverge the input light beam (104) to the probe array generation device (102), thereby to create a non-collimated input light beam (104) and magnify the pitch of the array of light spots (103) accordingly.
摘要:
The invention relates to a device for imaging an interior of a turbid medium. Said device (1) comprises a measurement volume (15) for accommodating the turbid medium. Said measurement volume (15) comprises a number of sources capable of communicating light, said sources comprising a preferred source, capable of communicating preferred light and a further source, capable of communicating further light. Said device (1) further comprises a detection unit capable of detecting composed light comprising a preferred component comprising at least a part of the preferred light and a further component comprising at least a part of the further light. The device is adapted such that the negative effect said further component in the composed light may have on detecting the preferred component also present in the composed light is counteracted. According to the invention this object is realized in that the preferred source and the further source are located such that a path followed by the preferred component from the preferred source to the detector unit and a path followed by the further component from the further source to the detector unit are substantially the same.
摘要:
The invention relates to a device (1) for detection of excitation (110) using a multiple spot arrangement (60), in which a multiple spot generator (50) is matched to the multiple spot arrangement (60) in such a way that light (100) entering the multiple spot generator (50) will be guided to defined areas on the multiple spot arrangement (60).
摘要:
The invention relates to an information carrier (801) comprising: a data layer (802) intended to store a set of elementary data, a layer (803) comprising an array of apertures (804) placed parallel to said data layer (802) for generating an array of light spots intended to be applied to said data layer (802). The invention also relates to a system and apparatus for reading such an information carrier.
摘要:
A multi-layer mirror includes on top of the multi-layer mirror a spectral purity enhancement layer, for example for application in an EUV lithographic apparatus. This spectral purity enhancement layer includes a first spectral purity enhancement layer, but between the multi-layer mirror and first spectral purity enhancement layer there may optionally be an intermediate layer or a second spectral purity enhancement layer and intermediate layer. Hence, multi-layer mirrors with the following configurations are possible: multi-layer mirror/first spectral purity enhancement layer; multi-layer mirror/intermediate layer/first spectral purity enhancement layer; and multi-layer mirror/second spectral purity enhancement layer/intermediate layer/first spectral purity enhancement layer. The spectral purity of normal incidence radiation may be enhanced, such that DUV radiation is diminished relatively stronger than EUV radiation.