公开(公告)号：US5456796A

公开(公告)日：1995-10-10

申请号：US71288

申请日：1993-06-02

申请人： Anand Gupta ,  Yan Ye ,  Joseph Lanucha

发明人： Anand Gupta ,  Yan Ye ,  Joseph Lanucha

IPC分类号： C23C16/50 ,  C23C16/44 ,  H01J37/32 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065 ,  H05H1/00

CPC分类号： H01J37/32862 ,  C23C16/4401 ,  H01J37/32082 ,  H01J2237/022 ,  Y10S438/905

摘要： An RF signal is rapidly brought to a high power level prior to the introduction of a wafer into the reaction chamber to initiate a plasma that agitates and circulates any particles within the reaction chamber, thereby allowing effective reaction chamber cleaning; and an RF signal is slowly brought to a high power level to initiate a plasma prior to or during wafer processing to avoid disturbing and circulating such particles during wafer processing, thereby preventing particle induced contamination. A magnetic field may be applied to the reaction chamber to move particles from a plasma sheath/glow region interface to a reaction chamber exhaust line, and thereby prevent such particles from falling onto a processed wafer.

摘要翻译： 在将晶片引入反应室之前，RF信号被迅速地达到高功率水平，以启动搅动和循环反应室内的任何颗粒的等离子体，从而允许有效的反应室清洁; 并且将RF信号缓慢地带到高功率水平以在晶片处理之前或期间启动等离子体，以避免在晶片处理期间干扰和循环这种颗粒，从而防止颗粒引起的污染。 可以将磁场施加到反应室以将颗粒从等离子体鞘/辉光区界面移动到反应室排气管线，从而防止这些颗粒落到加工的晶片上。

公开(公告)号：US09396940B2

公开(公告)日：2016-07-19

申请号：US14366210

申请日：2012-12-17

申请人： Yan Ye

发明人： Yan Ye

IPC分类号： H01L21/00 ,  H01L21/02 ,  H01L29/786 ,  H01L21/477 ,  H01L29/66

CPC分类号： H01L21/02614 ,  H01L21/02521 ,  H01L21/0254 ,  H01L21/02554 ,  H01L21/02565 ,  H01L21/02573 ,  H01L21/02581 ,  H01L21/02612 ,  H01L21/477 ,  H01L29/66969 ,  H01L29/7869

摘要： Embodiments disclosed herein relate to a TFT and methods for manufacture thereof. Specifically, the embodiments herein relate to methods for forming a semiconductor layer at a low temperature for use in a TFT. The semiconductor layer may be formed by depositing a nitride or oxynitride layer, such as zinc nitride or oxynitride, and then converting the nitride layer into an oxynitride layer with a different oxygen content. The oxynitride layer is formed by exposing the deposited nitride layer to a wet atmosphere at a temperature between about 85 degrees Celsius and about 150 degrees Celsius. The exposure temperature is lower than the typical deposition temperature used for forming the oxynitride layer directly or annealing, which may be performed at temperatures of about 400 degrees Celsius.

摘要翻译： 本文公开的实施例涉及TFT及其制造方法。 具体来说，本文的实施例涉及用于在TFT中形成低温下的半导体层的方法。 半导体层可以通过沉积诸如氮化锌或氧氮化物的氮化物或氮氧化物层形成，然后将氮化物层转变为具有不同氧含量的氧氮化物层。 氧氮化物层通过在大约85摄氏度到大约150摄氏度之间的温度下将沉积的氮化物层暴露于湿气氛中而形成。 曝光温度低于用于直接形成氧氮化物层或退火的典型沉积温度，其可以在约400摄氏度的温度下进行。

公开(公告)号：US09143803B2

公开(公告)日：2015-09-22

申请号：US12687487

申请日：2010-01-14

申请人： Marta Karczewicz ,  Giovanni Motta ,  Peisong Chen ,  Yan Ye

发明人： Marta Karczewicz ,  Giovanni Motta ,  Peisong Chen ,  Yan Ye

IPC分类号： H04N7/12 ,  H04N11/02 ,  H04N11/04 ,  H04N5/232 ,  G03B13/00 ,  G03B15/08 ,  G06K9/40 ,  H04N19/86 ,  H04N19/46 ,  H04N19/196 ,  H04N19/61 ,  H04N19/117 ,  H04N19/463 ,  H04N19/14 ,  H04N19/80 ,  H04N19/82

CPC分类号： H04N19/86 ,  H04N19/117 ,  H04N19/14 ,  H04N19/196 ,  H04N19/46 ,  H04N19/463 ,  H04N19/61 ,  H04N19/80 ,  H04N19/82

摘要： This disclosure describes techniques associated with filtering of video data in a video encoding and/or decoding process. In accordance with this disclosure, filtering is applied at an encoder, and filter information is encoded in the bitstream to identify the filtering that was applied at the encoder. Different types of filtering may be applied based on an activity metric determined for the video data. Moreover, in accordance with this disclosure, the manner in which the filter information is encoded into the bitstream may be dependent on the activity metric. In particular, for a first range of the activity metric, one or more filters are encoded directly, and for a second range of the activity metric, one or more filters are predictively encoded.

摘要翻译： 本公开描述与视频编码和/或解码过程中的视频数据的过滤相关联的技术。 根据本公开，在编码器处应用滤波，并且将滤波器信息编码在比特流中以识别在编码器处应用的滤波。 可以基于为视频数据确定的活动度量来应用不同类型的过滤。 此外，根据本公开，过滤器信息被编码到比特流中的方式可以取决于活动度量。 特别地，对于活动度量的第一范围，一个或多个过滤器被直接编码，并且对于活动度量的第二范围，一个或多个过滤器被预测编码。

公开(公告)号：US20140363934A1

公开(公告)日：2014-12-11

申请号：US14366210

申请日：2012-12-17

申请人： Yan Ye

发明人： Yan Ye

IPC分类号： H01L21/02 ,  H01L29/66 ,  H01L21/477

CPC分类号： H01L21/02614 ,  H01L21/02521 ,  H01L21/0254 ,  H01L21/02554 ,  H01L21/02565 ,  H01L21/02573 ,  H01L21/02581 ,  H01L21/02612 ,  H01L21/477 ,  H01L29/66969 ,  H01L29/7869

摘要： Embodiments disclosed herein relate to a TFT and methods for manufacture thereof. Specifically, the embodiments herein relate to methods for forming a semiconductor layer at a low temperature for use in a TFT. The semiconductor layer may be formed by depositing a nitride or oxynitride layer, such as zinc nitride or oxynitride, and then converting the nitride layer into an oxynitride layer with a different oxygen content. The oxynitride layer is formed by exposing the deposited nitride layer to a wet atmosphere at a temperature between about 85 degrees Celsius and about 150 degrees Celsius. The exposure temperature is lower than the typical deposition temperature used for forming the oxynitride layer directly or annealing, which may be performed at temperatures of about 400 degrees Celsius.

摘要翻译： 本文公开的实施例涉及TFT及其制造方法。 具体来说，本文的实施例涉及用于在TFT中形成低温下的半导体层的方法。 半导体层可以通过沉积诸如氮化锌或氧氮化物的氮化物或氮氧化物层形成，然后将氮化物层转变为具有不同氧含量的氧氮化物层。 氧氮化物层通过在大约85摄氏度到大约150摄氏度之间的温度下将沉积的氮化物层暴露于湿气氛中而形成。 曝光温度低于用于直接形成氧氮化物层或退火的典型沉积温度，其可以在约400摄氏度的温度下进行。

公开(公告)号：US08891615B2

公开(公告)日：2014-11-18

申请号：US12340205

申请日：2008-12-19

申请人： Marta Karczewicz ,  Yan Ye

发明人： Marta Karczewicz ,  Yan Ye

IPC分类号： H04N7/26 ,  H04N19/132 ,  H04N19/147 ,  H04N19/124 ,  H04N19/19 ,  H04N19/176

CPC分类号： H04N19/124 ,  H04N19/13 ,  H04N19/132 ,  H04N19/147 ,  H04N19/176 ,  H04N19/18 ,  H04N19/19 ,  H04N19/91

摘要： This disclosure describes techniques for quantizing coefficients of a video block for a video coding process that supports context-based adaptive binary arithmetic coding (CABAC). A method may comprise generating a plurality of sets of quantized coefficients for the video block, wherein each of the sets of quantized coefficients is defined based on an assumption that a particular one of the coefficients of the video block corresponds to a last non-zero coefficient of the video block, estimating a plurality of costs associated with coding the video block via the CABAC, wherein the estimated costs are based respectively on different ones of the sets of quantized coefficients, and selecting a given one of the sets of quantized coefficients associated with a lowest cost.

摘要翻译： 本公开描述了用于量化用于支持基于上下文的自适应二进制算术编码（CABAC）的视频编码处理的视频块的系数的技术。 方法可以包括为视频块生成多组量化系数，其中基于视频块的系数中的特定一个对应于最后非零系数的假设来定义每个量化系数集合 估计经由CABAC对与视频块进行编码相关联的多个成本，其中估计成本分别基于量化系数集合中的不同组合，并且选择与 成本最低。

公开(公告)号：US08809132B2

公开(公告)日：2014-08-19

申请号：US13215013

申请日：2011-08-22

申请人： Yan Ye

发明人： Yan Ye

IPC分类号： H01L21/00 ,  H01L21/84 ,  H01L29/786 ,  H01L21/02

CPC分类号： H01L29/7869 ,  H01L21/02521 ,  H01L21/02554 ,  H01L21/02565 ,  H01L21/02631

摘要： A capping layer may be deposited over the active channel of a thin film transistor (TFT) in order to protect the active channel from contamination. The capping layer may affect the performance of the TFT. If the capping layer contains too much hydrogen, nitrogen, or oxygen, the threshold voltage, sub threshold slope, and mobility of the TFT may be negatively impacted. By controlling the ratio of the flow rates of the nitrogen, oxygen, and hydrogen containing gases, the performance of the TFT may be optimized. Additionally, the power density, capping layer deposition pressure, and the temperature may also be controlled to optimize the TFT performance.

摘要翻译： 可以在薄膜晶体管（TFT）的有源沟道上沉积覆盖层，以保护有源沟道免受污染。 封盖层可能会影响TFT的性能。 如果封盖层含有太多的氢，氮或氧，则TFT的阈值电压，次阈值斜率和迁移率可能受到负面影响。 通过控制氮气，氧气和含氢气体的流量比，可以优化TFT的性能。 此外，还可以控制功率密度，覆盖层沉积压力和温度以优化TFT性能。

公开(公告)号：US08705622B2

公开(公告)日：2014-04-22

申请号：US12420270

申请日：2009-04-08

申请人： Yan Ye ,  Marta Karczewicz

发明人： Yan Ye ,  Marta Karczewicz

IPC分类号： H04N7/12 ,  H04N11/02 ,  H04N7/36 ,  H04N7/26 ,  H04N7/01

CPC分类号： H04N7/364 ,  H04N7/014 ,  H04N19/117 ,  H04N19/136 ,  H04N19/147 ,  H04N19/182 ,  H04N19/192 ,  H04N19/463 ,  H04N19/523

摘要： This disclosure describes filtering techniques applied by an encoder and a decoder during the prediction stage of a video encoding and/or decoding process. The filtering techniques may enhance the accuracy of predictive data used during fractional interpolation, and may improve predictive data of integer blocks of pixels. There are several aspects to this disclosure, including a useful twelve-pixel filter support that may be used for interpolation, techniques that use coefficient symmetry and pixel symmetry to reduce the amount of data needed to be sent between an encoder and a decoder to configure the filter support for interpolation, and techniques for filtering data at integer pixel locations in a manner that is similar to sub-pixel interpolation. Other aspects of this disclosure concern techniques for encoding information in the bitstream to convey the type of filter used, and possibly the filter coefficients used. Predictive coding of filter coefficients is also described.

摘要翻译： 本公开描述了在视频编码和/或解码过程的预测阶段期间由编码器和解码器应用的滤波技术。 滤波技术可以增强在分数插值期间使用的预测数据的精度，并且可以改善整数像素块的预测数据。 本公开的方面有几个方面，包括可用于插值的有用的十二像素滤波器支持，使用系数对称性和像素对称性的技术来减少在编码器和解码器之间发送的数据量来配置 用于内插的滤波器支持，以及以类似于子像素插值的方式在整数像素位置处对数据进行滤波的技术。 本公开的其它方面涉及用于对位流中的信息进行编码以传送所使用的滤波器的类型以及可能使用的滤波器系数的技术。 还描述了滤波器系数的预测编码。

公开(公告)号：US08681867B2

公开(公告)日：2014-03-25

申请号：US11350666

申请日：2006-02-08

申请人： Chia-Yuan Teng ,  Sharath Manjunath ,  Yan Ye

发明人： Chia-Yuan Teng ,  Sharath Manjunath ,  Yan Ye

IPC分类号： H04N11/02

CPC分类号： H04N19/117 ,  H04N19/14 ,  H04N19/176 ,  H04N19/61

摘要： This disclosure describes selective deblock filtering techniques that are particularly useful with coding standards that do not specify in-loop deblock filtering for standard compliance. In accordance with this disclosure, deblock filtering may be selectively performed with respect to block boundaries of a given video block being coded, a motion compensation process can be performed using a filtered version of the prediction video frame used to code the given video block, or both. This disclosure also provides selection rules that can be applied to determine what type of deblocking techniques to apply in various scenarios. The selection rules may improve the video coding and may also ensure that mismatch between video blocks at an encoder and a decoder is not introduced by the deblock filtering.

摘要翻译： 本公开描述了选择性去块滤波技术，其特别适用于不规定用于标准符合性的循环去块滤波的编码标准。 根据本公开，可以相对于被编码的给定视频块的块边界来选择性地执行去块滤波，可以使用用于对给定视频块进行编码的预测视频帧的滤波版本来执行运动补偿处理，或 都。 本公开还提供了可以应用于确定在各种情况下应用何种类型的去块技术的选择规则。 选择规则可以改善视频编码，并且还可以确保编码器和解码器之间的视频块之间的不匹配不由去块滤波引入。

公开(公告)号：US08638852B2

公开(公告)日：2014-01-28

申请号：US12348752

申请日：2009-01-05

申请人： Marta Karczewicz ,  Yan Ye

发明人： Marta Karczewicz ,  Yan Ye

IPC分类号： H04N11/02

CPC分类号： H04N19/86 ,  H04N19/117 ,  H04N19/134 ,  H04N19/169 ,  H04N19/176 ,  H04N19/46 ,  H04N19/61 ,  H04N19/82

摘要： This disclosure recognizes and exploits the fact that some of the filter coefficients defined at the encoder may possess symmetry relative to other filter coefficients. Accordingly, this disclosure describes techniques in which a first set of the filter coefficients are used to predictively encode a second set of the filter coefficients, thereby exploiting any symmetry between filter coefficients. Rather than communicate all of the filter coefficients to the decoding device, the encoding device may communicate the first set of filter coefficients and difference values associated with the second set of filter coefficients. Using this information, the decoder may be able to reconstruct all of the filter coefficients. In some cases, if exact symmetry is imposed, the need to send the difference values may be eliminated and the decoder may be able to derive the second set of filter coefficients from the first set of filter coefficients.

摘要翻译： 本公开识别和利用了在编码器处定义的一些滤波器系数相对于其它滤波器系数可能具有对称性的事实。 因此，本公开描述了其中使用第一组滤波器系数来预测性地编码第二组滤波器系数的技术，从而利用滤波器​​系数之间的任何对称性。 编码设备不是将所有的滤波器系数传送到解码设备，而是可以传送与第二组滤波器系数相关联的第一组滤波器系数和差值。 使用该信息，解码器可以能够重构所有的滤波器系数。 在一些情况下，如果施加精确的对称性，则可以消除发送差值的需要，并且解码器可以能够从第一组滤波器系数导出第二组滤波器系数。

公开(公告)号：US20130345176A1

公开(公告)日：2013-12-26

申请号：US14002986

申请日：2011-03-04

申请人： Zhiwei Jiang ,  Aijin Wang ,  Hongwei Hu ,  Jiali Xu ,  Yuesong Hu ,  Xian Li ,  Yan Ye ,  Jie Wang ,  Qinglong Li

发明人： Zhiwei Jiang ,  Aijin Wang ,  Hongwei Hu ,  Jiali Xu ,  Yuesong Hu ,  Xian Li ,  Yan Ye ,  Jie Wang ,  Qinglong Li

IPC分类号： C07D307/92 ,  A61K45/06 ,  A61K31/665 ,  C07F9/655 ,  A61K31/343

CPC分类号： C07D307/92 ,  A61K31/343 ,  A61K31/665 ,  A61K45/06 ,  C07F9/65517

摘要： The present invention discloses esters of 4,9-dihydroxy-naphtho[2,3-b]furans and methods of making and using the same. The present invention also discloses conversion of the esters into therapeutically active 4,9-dihydroxy-naphtho[2,3-b]furans in vivo. The present invention furthermore discloses pharmaceutical compositions comprising the esters of 4,9-dihydroxy-naphtho[2,3-b]furans for the treatment of various indications including proliferative diseases.

摘要翻译： 本发明公开了4,9-二羟基 - 萘并[2,3-b]呋喃的酯及其制备和使用方法。 本发明还公开了在体内将酯转化为治疗活性的4,9-二羟基 - 萘并[2,3-b]呋喃。 本发明还公开了包含4,9-二羟基 - 萘并[2,3-b]呋喃的酯的药物组合物，用于治疗各种适应症，包括增殖性疾病。