公开(公告)号：US20030206000A1

公开(公告)日：2003-11-06

申请号：US10448930

申请日：2003-05-29

发明人： Richard D. Slates

IPC分类号： H01F005/00

CPC分类号： G01D5/202 ,  G01B7/003 ,  G01B7/023 ,  G01D18/00 ,  G01N27/9046

摘要： A digital eddy current proximity system including a digital impedance measuring device for digitally measuring the proximity probes impedance correlative to displacement motion and position of a metallic target object being monitored. The system further including a cable-length calibration method, an automatic material identification and calibration method, a material insensitive method, an inductive ratio method and advanced sensing characteristics.

公开(公告)号：US06566862B1

公开(公告)日：2003-05-20

申请号：US09525281

申请日：2000-03-14

申请人： Atsutoshi Goto ,  Kazuya Sakamoto ,  Hiroshi Sakamoto

发明人： Atsutoshi Goto ,  Kazuya Sakamoto ,  Hiroshi Sakamoto

IPC分类号： G01B714

CPC分类号： G01D5/2013 ,  G01D3/0365 ,  G01D5/202

摘要： Single coil to be excited by a predetermined A.C. signal is provided, with no secondary coil being provided. Magnetism-responsive member is movable relative to the coil so that a self-inductance of the coil progressively increases or decreases in response to displacement of an object to be detected within a predetermined range and a voltage of the coil corresponding to the self-inductance is produced. Predetermined reference voltage is generated and subjected to analog operations with the coil output voltage, to thereby generate first and second A.C. outputs having, as amplitude coefficients, first and second cyclic amplitude functions correlated to the position to be detected. The position is detected on the basis of the phase component of the amplitude coefficient functions. Combination of two coils and one reference voltage may be employed. Further, a plurality of coil segments excitable by a same-phase signal are placed in series along the direction of displacement of the object so that a progressive increase or decrease occurs sequentially in the self-inductance of the coil segments as the magnetism-responsive member moves relative to the coil segments, and the voltage corresponding to the self-inductance is taken out from each of the coil segments. Performing analog arithmetic operations on combinations of the coil voltages produces first and second A.C. outputs having, as amplitude coefficients, first and second cyclic amplitude functions correlated to the position to be detected.

公开(公告)号：US20020047705A1

公开(公告)日：2002-04-25

申请号：US09982025

申请日：2001-10-19

发明人： Mitsuo Tada ,  Hironobu Yamasaki ,  Yasunari Suto

IPC分类号： G01B007/06 ,  G01R033/12

CPC分类号： B24B37/013 ,  B24B49/04 ,  B24B49/10 ,  B24B49/105 ,  G01B7/105 ,  G01D5/202 ,  G01R23/10

摘要： Disclosed is a frequency measuring device capable of accurately detecting an end point of polishing a semiconductor wafer by obtaining a frequency measurement result highly accurately in a short period of time. A device FC for measuring the frequency of a measured signal. Vin comprises a counting section including a number i (i2) of n-nary counters 1nulli, a time reference circuit 13 which outputs a time reference signal T, whose duration is t, every time interval p, and a number I of gate circuits G1 to Gi whose outputs are connected to the inputs of the n-nary counters 1-i. The gate circuits receive the measured signal Vin at a first input and receive the time reference signal T at time intervals p at a second input. With this structure, the counting section supplies the frequency measured result of the measured signal Vin every time interval p. Further, the present invention provides an eddy current sensor capable of stable operation is provided for accurately detecting a polishing end point. The eddy current sensor detects the thickness of a conductive film from a change in an eddy current loss generated in the conductive film. The eddy current sensor comprises a sensor coil for generating an eddy current in the conductive film, and an active element unit connected to the sensor coil for oscillating a variable frequency corresponding to the eddy current loss. The sensor coil and active element unit are integrated to form the eddy current sensor. Alternatively, the eddy current sensor comprises a sensor coil for generating an eddy current in the conductive film, and a detector for detecting a change in the thickness of the conductive film from a change in a resistance component (R) in an impedance formed by the sensor coil and conductive film.

摘要翻译： 公开了一种频率测量装置，其能够通过在短时间内高精度地获得频率测量结果来精确地检测半导体晶片的研磨终点。 用于测量测量信号频率的装置FC。 Vin包括计数部分，其包括n个计数器1-i的数量i（i2），每个时间间隔p输出持续时间为t的时间参考信号T的时间参考电路13和门的数量I 电路G1至Gi的输出连接到n-nary计数器1-i的输入端。 门电路在第一输入处接收测量信号Vin，并在第二输入处以时间间隔p接收时间参考信号T. 利用这种结构，计数部分在每个时间间隔p提供测量信号Vin的频率测量结果。 此外，本发明提供了一种能够稳定运行的涡流传感器，用于精确地检测抛光终点。 涡电流传感器从导电膜中产生的涡流损耗的变化来检测导电膜的厚度。 涡电流传感器包括用于在导电膜中产生涡流的传感器线圈和连接到传感器线圈的有源元件单元，用于振荡对应于涡流损耗的可变频率。 传感器线圈和有源元件单元被集成以形成涡流传感器。 或者，涡电流传感器包括用于在导电膜中产生涡流的传感器线圈，以及用于检测导电膜的厚度变化的检测器，其特征在于，由所述导电膜形成的阻抗中的电阻成分（R）的变化来检测 传感器线圈和导电膜。

公开(公告)号：US06187609B1

公开(公告)日：2001-02-13

申请号：US09321191

申请日：1999-05-27

申请人： Marshall E. Smith, Jr. ,  Peter U. Wolff ,  Richard W. Stettler

发明人： Marshall E. Smith, Jr. ,  Peter U. Wolff ,  Richard W. Stettler

IPC分类号： H01L2100

CPC分类号： F02D41/20 ,  F02B3/06 ,  F02D41/32 ,  F02D2041/1409 ,  F02D2041/2017 ,  F02D2041/2058 ,  F02D2200/063 ,  F02M63/0007 ,  G01D5/12 ,  G01D5/145 ,  G01D5/202 ,  G01D5/2451 ,  G01D5/2492 ,  G01D5/48 ,  G01D11/245 ,  G01R29/12 ,  G01V3/12

摘要： A compact sensing apparatus having reduced cross section and methods are provided for sensing the magnitude and direction of an electrical or magnetic field. The compact sensing apparatus and method preferably provide one of two transducer orientations in relation to the direction of the field arranged in the sensor apparatus to provide the smallest possible cross section. The compact sensing apparatus preferably includes a plurality of mounting pins. Each of the plurality of mounting pins preferably includes a first pin portion and a second pin portion connected to the first pin portion at a predetermined angle. The predetermined angle is preferably less than 180 degrees and more preferably in the range of about 70-110 degrees. A transducer formed from a semiconductor wafer is preferably mounted to the first pin portion for generating a transducer signal, and a signal conditioner also preferably formed from the same semiconductor wafer is mounted to the second pin portion for conditioning the transducer signal.

摘要翻译： 提供了具有减小的横截面的小型感测装置和用于感测电场或磁场的大小和方向的方法。 小型感测装置和方法优选地相对于布置在传感器装置中的场的方向提供两个换能器取向之一以提供尽可能小的横截面。 紧凑感测装置优选地包括多个安装销。 多个安装销中的每一个优选地包括以预定角度连接到第一销部分的第一销部分和第二销部分。 预定角度优选地小于180度，更优选地在大约70-110度的范围内。 由半导体晶片形成的换能器优选安装在第一引脚部分上，用于产生换能器信号，并且也优选地由相同的半导体晶片形成的信号调节器安装到第二引脚部分以调节换能器信号。

公开(公告)号：US5798462A

公开(公告)日：1998-08-25

申请号：US744921

申请日：1996-11-06

申请人： Dennis K. Briefer ,  Gino A. Pinto

发明人： Dennis K. Briefer ,  Gino A. Pinto

IPC分类号： G01L13/06 ,  G01D5/20 ,  G01L1/14 ,  G01L9/00 ,  G01L9/10 ,  G01L9/14

CPC分类号： G01L9/007 ,  G01D5/202 ,  G01L1/14

摘要： A differential pressure transducer includes a pair of interior chambers separated by a peripherally supported, nominally planar electrically conductive diaphragm. A magnetic assembly is positioned on at least one chamber wall opposite to a central portion of the diaphragm. The magnetic assembly includes an electrical conductor and preferably a magnetic field permeable electric field shield between the electrical conductor and the chamber so that as the central portion of diaphragm is displaced from its nominal plane in response to an applied pressure differential, the inductance of the magnetic assembly changes. The transducer may be a portion of a tank circuit of an oscillator having a frequency of oscillation that varies with the pressure differential applied across the diaphragm.

摘要翻译： 差压换能器包括由周边支撑的标称平面的导电隔膜隔开的一对内室。 磁性组件位于与隔膜的中心部分相对的至少一个室壁上。 磁性组件包括电导体并且优选地在电导体和腔室之间的磁场可渗透电场屏蔽，使得当膜片的中心部分响应于施加的压差从其标称平面偏移时，磁体的电感 装配更改。 换能器可以是振荡器的振荡电路的一部分，其振荡频率随施加在隔膜上的压差而变化。

公开(公告)号：US5705751A

公开(公告)日：1998-01-06

申请号：US477327

申请日：1995-06-07

申请人： Dennis K. Briefer ,  Gino A. Pinto

发明人： Dennis K. Briefer ,  Gino A. Pinto

IPC分类号： G01L13/06 ,  G01D5/20 ,  G01L1/14 ,  G01L9/00 ,  G01L9/10 ,  G01L9/14

CPC分类号： G01L9/007 ,  G01D5/202 ,  G01L1/14

摘要： A differential pressure transducer includes a pair of interior chambers separated by a peripherally supported, nominally planar electrically conductive diaphragm. A magnetic assembly is positioned on at least one chamber wall opposite to a central portion of the diaphragm. The magnetic assembly includes an electrical conductor and preferably a magnetic field permeable electric field shield between the electrical conductor and the chamber so that as the central portion of diaphragm is displaced from its nominal plane in response to an applied pressure differential, the inductance of the magnetic assembly changes the transducer may be a portion of a tank circuit of an oscillator having a frequency of oscillation that varies with the pressure differential applied across the diaphragm.

摘要翻译： 差压换能器包括由周边支撑的标称平面的导电隔膜隔开的一对内室。 磁性组件位于与隔膜的中心部分相对的至少一个室壁上。 磁性组件包括电导体并且优选地在电导体和腔室之间的磁场可渗透电场屏蔽，使得当膜片的中心部分响应于施加的压差从其标称平面偏移时，磁体的电感 组件改变传感器可以是振荡器的振荡电路的一部分，其振荡频率随施加在隔膜上的压差而变化。

公开(公告)号：US5670886A

公开(公告)日：1997-09-23

申请号：US471192

申请日：1995-06-07

申请人： Peter U. Wolff ,  Marshall E. Smith, Jr.

发明人： Peter U. Wolff ,  Marshall E. Smith, Jr.

IPC分类号： G01B15/00 ,  G01B7/00 ,  G01D5/12 ,  G01D5/14 ,  G01D5/16 ,  G01D5/20 ,  G01D5/245 ,  G01D5/249 ,  G01D5/48 ,  G01S3/782 ,  G01S13/74 ,  G01V3/10 ,  G01V3/12 ,  G01R27/00 ,  G01B7/14 ,  G01P3/44

CPC分类号： G01D5/48 ,  G01D5/12 ,  G01D5/145 ,  G01D5/202 ,  G01D5/2451 ,  G01D5/2492 ,  G01V3/12

摘要： A method and apparatus for sensing proximity of an object using near-field effects or magnetic effects. The sensor chips are designed to accommodate numerous sensing elements. In the electromagnetic sensor, radio frequency energy is fed to an antenna. The antenna radiates this radio frequency energy to charge the surface of an object. When the position of the object changes, the impedance of the antenna due to near-field effects changes. This impedance change is detected to provide an indication of the object's movement. In the magnetic sensor, the sensing element is placed at a right angle to the sensor electronics to provide a smaller surface area across the diameter of the sensor. The magnet that charges the object to be detected is manufactured as a part of the sensor encapsulant. The sensing device may be packaged to be inserted into a wall to provide a sensor having a leak-free seal.

摘要翻译： 一种使用近场效应或磁效应感测物体接近的方法和装置。 传感器芯片设计用于容纳许多传感元件。 在电磁传感器中，将射频能量馈送到天线。 天线辐射该射频能量以对物体的表面充电。 当物体的位置改变时，由于近场效应引起的天线阻抗变化。 检测该阻抗变化以提供对象运动的指示。 在磁传感器中，感测元件与传感器电子设备成直角放置，以便在传感器的直径上提供更小的表面积。 将要检测的物体充电的磁体作为传感器密封剂的一部分制造。 感测装置可以被包装以插入壁中以提供具有无泄漏密封的传感器。

公开(公告)号：US5644227A

公开(公告)日：1997-07-01

申请号：US379607

申请日：1995-01-27

申请人： Gerhard Geisel

发明人： Gerhard Geisel

IPC分类号： C03B9/193 ,  C03B9/41 ,  G01B7/00 ,  G01D5/20 ,  G01B7/04 ,  C03B23/13 ,  G01B7/02

CPC分类号： C03B9/1936 ,  C03B9/41 ,  G01B7/003 ,  G01D5/2013 ,  G01D5/202

摘要： A piston rod (2) of a piston-cylinder unit (3) carries at the top a pressing plunger (not shown) of a glass forming machine and is guided in a guide sleeve (22). The guide sleeve (22) is seated in a magnetically conductive support sleeve (20) of a retaining flange (14). The support sleeve (20) carries an external coil (27) whose connecting wires (30) are guided outwardly to a plug socket (37). On the top of the piston (6) is fixed an internal flange (39) of a circular annular metallic actuating member (40). At the uppermost end of the pressing stroke of the piston (6) the actuating member (40) enters into an annular chamber (29) around the coil (27) and thereby changes the inductance of the coil.

摘要翻译： PCT No.PCT / EP94 / 00866 Sec。 371日期1995年7月31日 102（e）日期1995年7月31日PCT 1994年3月19日PCT公布。 第WO94 / 27922号公报 日期1994年12月8日活塞 - 气缸单元（3）的活塞杆（2）在顶部承载着玻璃成型机的压力柱塞（未示出），并在导向套筒（22）中被引导。 引导套筒（22）位于保持凸缘（14）的导磁支撑套管（20）中。 支撑套筒（20）承载外部线圈（27），其外部线圈（27）被连接线（30）向外引导到插头插座（37）。 在活塞（6）的顶部固定有环形金属致动构件（40）的内部凸缘（39）。 在活塞（6）的按压行程的最上端，致动构件（40）进入围绕线圈（27）的环形室（29）中，从而改变线圈的电感。

公开(公告)号：US5629619A

公开(公告)日：1997-05-13

申请号：US331478

申请日：1994-10-31

申请人： Felix Mednikov

发明人： Felix Mednikov

IPC分类号： G01B7/00 ,  G01D5/20 ,  G01D5/22 ,  G01F23/74 ,  G01B7/14

CPC分类号： G01F23/74 ,  G01D5/202 ,  G01D5/2225

摘要： A noncontact distance measuring system with a sensor (2) that draws on alternating current and has a measuring coil (1), an electronic supply/evaluation circuit (3) connected with the sensor (2), and an electrically and/or magnetically conductive test object (4) associated to the sensor (2), the measuring coil being packaged in a preferably cylindrical housing, and the test object (4) at least partially surrounding the coil housing (5) and being movable in its longitudinal direction, is structured so as to reduce the overall length and to avoid the output impedance of the measuring coil from the position of the test object, in that the test object (4) is designed as a ring (6) surrounding the coil housing (5) at a distance, that the measuring coil (1) has at least two voltage taps (7), so that depending on the number of voltage taps (7) either voltage values can be tapped sequentially between the individual voltage taps (7) and a reference potential (8), and that the electronic supply/evaluation circuit (3) includes an electronic component (10) for adding up the tapped voltage values to a total voltage correlating with the position of the test object (4), or individual voltages between the voltage taps (7) can be tapped sequentially, and that the electronic supply/evaluation circuit (3) includes an electronic component (9) for adding up the tapped individual voltages to increasing voltage values and a further electronic component (10) for once again adding up the voltage values to a total voltage correlating with the position of the test object.

公开(公告)号：US5394102A

公开(公告)日：1995-02-28

申请号：US44398

申请日：1993-04-08

申请人： Shigeyoshi Mori ,  Ryuji Mizuguchi

发明人： Shigeyoshi Mori ,  Ryuji Mizuguchi

IPC分类号： G01H17/00 ,  G01D5/20 ,  G01M13/00 ,  G01P3/44 ,  G11B19/20 ,  G11B33/10 ,  H02K15/16 ,  H02P6/00 ,  G01R1/04

CPC分类号： G11B19/2009 ,  G01D5/202 ,  G01P3/44 ,  G11B33/10 ,  H02P6/34

摘要： The specification discloses an NRR (Non-Repeatable Run-out) measuring instrument for measuring the NRR of the rotating object motor to be measured without installation of a special attachment such as an encoder. In the NRR measuring instrument of the invention, encoder signals are obtained from back-electromotive forces developed at driving coils of the rotating object motor by removing spike noise thereof by LPF 30U, 30V, 30W and reformed by a wave shaping circuits 32U, 32V, 32W. The encoder signals together with digitized displacement signals generated by noncontact displacement measuring instrument 14 through A/D 28 are inputted to a CPU 34. In the CPU 34, sampled data are acquired from the digitized displacement signals being triggered by the encoder signals and the NRR is calculated based on the sampling data.

摘要翻译： 本说明书公开了一种NRR（不可重复运行）测量仪器，用于在不安装诸如编码器的特殊附件的情况下测量待测量的旋转物体马达的NRR。 在本发明的NRR测量仪器中，通过用LPF 30U，30V，30W除去尖峰噪声并通过波形整形电路32U，32V重新构成，通过在旋转对象电动机的驱动线圈处产生的反电动势获得编码器信号， 32W。 编码器信号与由非接触位移测量仪14通过A / D 28产生的数字化位移信号一起输入到CPU 34.在CPU 34中，从由编码器信号和NRR触发的数字化位移信号中获取采样数据 基于采样数据计算。