Wafer processing apparatus having wafer mapping function
    121.
    发明授权
    Wafer processing apparatus having wafer mapping function 有权
    具有晶片映射功能的晶片处理装置

    公开(公告)号:US06795202B2

    公开(公告)日:2004-09-21

    申请号:US10712040

    申请日:2003-11-14

    IPC分类号: G01B1128

    CPC分类号: H01L21/67265

    摘要: If a plurality of wafers are placed on each shelf of a rack in a pod, some problems will arise in processing processes. In addition, in some apparatus for detecting wafers, driving means having a not so high stability in the speed such as an air-operated cylinder is used for moving the sensor, in order to make the structure simple. In the case that detection is performed while the sensor is moved by such driving means, errors becomes large and it is difficult to detect wafers accurately. The present invention provides a wafer processing apparatus provided with a transmissive wafer detection sensor, a dog having index means and a transmissive sensor for the dog. The wafer processing apparatus calculates the ratio of the duration time of a signal from the transmissive wafer detection sensor and the duration time of a signal from the transmissive sensor for the dog corresponding to the index means and compares the ratio with a threshold value set in advance to determine the number of wafers.

    摘要翻译: 如果将多个晶片放置在盒中的架子的每个搁板上,则在处理过程中将出现一些问题。 此外,在某些用于检测晶片的装置中,为了使结构简单,使用了诸如气动缸的速度不稳定的驱动装置来移动传感器。 在通过这种驱动装置移动传感器时执行检测的情况下,误差变大,并且难以准确地检测晶片。 本发明提供了一种具有透射晶片检测传感器,具有指示装置的狗和用于狗的透射传感器的晶片处理装置。 晶片处理装置计算来自透射晶片检测传感器的信号的持续时间与来自与指示装置相对应的狗的透射传感器的信号的持续时间的比率,并将该比率与预先设定的阈值进行比较 以确定晶片的数量。

    Method for NC- programming and system for NC- machining
    122.
    发明授权
    Method for NC- programming and system for NC- machining 失效
    NC-编程方法和NC-加工系统

    公开(公告)号:US06671571B1

    公开(公告)日:2003-12-30

    申请号:US09763437

    申请日:2001-02-23

    IPC分类号: G05B1500

    摘要: In the present invention, for an NC program for controlling a machine tool, information for machining quality required by a machine tool is prewritten in the program. A measurement program for measuring the machining quality of the workpiece using a measuring machine is produced by analyzing the NC program. The machining quality of the workpiece is measured by the measurement program and the measuring machine. The machining quality of the workpiece can be judged by comparing the measurement results and the machining quality information included in the NC program. By utilizing this quality judgement, simple and effective system control can be achieved when a system such as CIM (Computer Integrated Manufacturing) is constructed in cooperation with other machine tools.

    摘要翻译: 在本发明中,对于用于控制机床的NC程序,在程序中预先写入机床所需的加工质量的信息。 通过分析NC程序,生成使用测量机测量工件加工质量的测量程序。 工件的加工质量由测量程序和测量机测量。 可以通过比较NC程序中包含的测量结果和加工质量信息来判断工件的加工质量。 通过利用这种质量判断,当与其他机床协同构建CIM(计算机集成制造)等系统时,可以实现简单有效的系统控制。

    Power source apparatus for providing a power source in a standby mode and a pulse generating apparatus
    123.
    发明授权
    Power source apparatus for providing a power source in a standby mode and a pulse generating apparatus 有权
    用于在备用模式下提供电源的电源装置和脉冲发生装置

    公开(公告)号:US06462972B2

    公开(公告)日:2002-10-08

    申请号:US09777321

    申请日:2001-02-06

    IPC分类号: H02M324

    摘要: An intermittent pulse generator 1 is provided between terminals Ti1 and Ti2. In the intermittent pulse generator 1, pulses are generated from an AC power source which is supplied and the generated pulses are supplied to a controller 3. The controller 3 controls a switching circuit 2 in accordance with the pulses from the intermittent pulse generator 1 and a signal from a supplying mode detecting circuit 9. A rectifying circuit constructed by a diode bridge 5 and a capacitor 6 is provided for the secondary side of a transformer 4. An output of the rectifying circuit is supplied to an energy saving mode detecting circuit 7 and a supplying mode detecting circuit 9. The energy saving mode detecting circuit 7 is connected to an output terminal To through a switching circuit 8. When the energy saving mode is detected in the energy saving mode detecting circuit 7, a signal is supplied to the intermittent pulse generator 1.

    摘要翻译: 在端子Ti1和Ti2之间设置间歇脉冲发生器1。 在间歇脉冲发生器1中,从提供的交流电源产生脉冲,并将生成的脉冲提供给控制器3.控制器3根据间歇脉冲发生器1的脉冲控制切换电路2, 来自供电模式检测电路9的信号。由变压器4的二次侧设置由二极管电桥5和电容器6构成的整流电路。整流电路的输出被提供给节能模式检测电路7, 供电模式检测电路9.节能模式检测电路7通过开关电路8连接到输出端子T.当在节能模式检测电路7中检测到节能模式时,将信号提供给间歇 脉冲发生器1。

    Error correction apparatus for NC machine tool
    124.
    发明授权
    Error correction apparatus for NC machine tool 失效
    数控机床纠错装置

    公开(公告)号:US06286055B1

    公开(公告)日:2001-09-04

    申请号:US09101197

    申请日:1998-07-02

    IPC分类号: G05B1918

    CPC分类号: G05B19/404 Y10T408/16

    摘要: There is here disclosed a movement error compensating device for a movable unit such as a slider in a numerical control machine tool. A laser beam is emitted from a reference position beam generator installed on a fixed base in the movement direction of the slider. The slider is provided with a beam passing position detector, which detects a deviation on YZ planes of the laser beam. In order to properly detect the irradiation direction of the laser beam, the fixed base is equipped with a movement end beam position detector.

    摘要翻译: 这里公开了一种用于可移动单元的运动误差补偿装置,例如数控机床中的滑块。 激光束从安装在固定基座上的基准位置光束发生器沿滑块的运动方向发射。 滑块设有光束通过位置检测器,其检测激光束的YZ平面上的偏差。 为了适当地检测激光束的照射方向,固定基座配备有移动端束位置检测器。

    Numeric control command generator and method
    126.
    发明授权
    Numeric control command generator and method 失效
    数字控制命令生成器和方法

    公开(公告)号:US06223095B1

    公开(公告)日:2001-04-24

    申请号:US09101155

    申请日:1998-07-02

    IPC分类号: G05B1942

    CPC分类号: G05B19/40937 Y02P90/265

    摘要: An apparatus and a method for generating orientation action commands of NC machine tools. Workpiece surfaces are grouped according to inclination of the surfaces on the basis of machining information. Optimum orientation angles are decided for each of the groups, and numerical control commands are generated on the basis of the decided orientation angle.

    摘要翻译: 一种用于产生NC机床定向动作指令的装置和方法。 工件表面根据加工信息根据表面的倾斜度进行分组。 对于每个组决定最佳取向角,并且基于所确定的取向角来生成数字控制命令。

    Method and for system for detecting damaged bills
    128.
    发明授权
    Method and for system for detecting damaged bills 失效
    检测损坏纸币的方法和系统

    公开(公告)号:US6040584A

    公开(公告)日:2000-03-21

    申请号:US83138

    申请日:1998-05-22

    摘要: A method and system for determining the extent of deterioration of a bill includes generating transmitted and reflected light images. The reflected and transmitted light intensities of the transmission and reflection light intensity images are used to determine one or more disorder curve lengths for each image of the bill. Each disorder curve length is compared with a corresponding predetermined disorder curve length for a corresponding image of a reference bill to generate an evaluation factor. The positions of the evaluation factors on an evaluation map indicate the extent of deterioration of the bill.

    摘要翻译: 用于确定纸币劣化程度的方法和系统包括产生透射和反射光图像。 透射和反射光强度图像的反射和透射光强度用于确定纸币的每个图像的一个或多个无序曲线长度。 将每个紊乱曲线长度与用于参考纸币的相应图像的相应的预定无序曲线长度进行比较以产生评估因子。 评估因素在评估图上的位置表明账单恶化的程度。

    Method of surface roughness measurement using a fiber-optic probe
    129.
    发明授权
    Method of surface roughness measurement using a fiber-optic probe 失效
    使用光纤探针进行表面粗糙度测量的方法

    公开(公告)号:US5757496A

    公开(公告)日:1998-05-26

    申请号:US812598

    申请日:1997-03-07

    申请人: Kazuo Yamazaki

    发明人: Kazuo Yamazaki

    IPC分类号: G01B11/30 G02B6/00

    CPC分类号: G01B11/303

    摘要: A method of surface roughness measurement is disclosed which uses a fiber-optic probe having a sensor head constituted of a light-emitting fiber and multiple light-receiving fibers disposed coaxially with the light-emitting fiber. The surface roughness measurement includes the steps of: (a) pre-measuring a first correlation between detected intensity and gap distance for each of reference samples obtained under a plurality of different processing conditions; (b) searching a second correlation between maximum intensity and surface roughness for each of the reference samples, based on the first correlation, and storing the second correlation in memory; (c) adjusting the gap distance so as to set the probe in a position at which the maximum intensity is obtained for the reference sample machined under the processing condition to be monitored; and (d) monitoring the maximum intensity of the machined surface at the gap distance set in step (c), and determining the roughness of the machined surface based on the second correlation.

    摘要翻译: 公开了一种表面粗糙度测量方法,其使用具有由发光纤维构成的传感器头和与发光纤维同轴设置的多个光接收光纤的光纤探针。 表面粗糙度测量包括以下步骤:(a)在多个不同的处理条件下获得的每个参考样本预测量检测到的强度和间隙距离之间的第一相关性; (b)基于第一相关性搜索每个参考样本的最大强度和表面粗糙度之间的第二相关性,并将第二相关性存储在存储器中; (c)调整所述间隙距离,以将所述探针设定为在待监测的处理条件下对所加工的所述基准样品获得最大强度的位置; 和(d)在步骤(c)中设定的间隙距离处监测加工表面的最大强度,并且基于第二相关性来确定加工表面的粗糙度。

    Magnetic recording and/or reproducing apparatus
    130.
    发明授权
    Magnetic recording and/or reproducing apparatus 失效
    磁记录和/或再现装置

    公开(公告)号:US4445154A

    公开(公告)日:1984-04-24

    申请号:US377986

    申请日:1982-05-13

    摘要: An automatic tape loading and unloading device for a magnetic tape recording and/or reproducing apparatus includes a cylindrical tape guide drum having at least one rotary magnetic head which moves in a circular path substantially coinciding with the circumferential surface of the drum. The tape used in the apparatus is stored on supply and take-up reels having the tape wound thereon in a tape holder such as a cassette or cartridge and in use the holder positions the tape supply at a relatively lower level with respect to the tape guide drum. The device further includes a first tape engaging member, for example, tape guide pins, carried by levers which are rotatable about a fixed pivot to draw the tape from the tape supply reel in a diagonally upward direction to the tape guide drum where it is helically wrapped about at least a portion of the circumferential surface of the drum and a second tape engaging member to draw the tape from the tape supply reel in a horizontal direction opposite to the direction of movement of the first tape engaging member.

    摘要翻译: 一种用于磁带记录和/或再现装置的自动磁带装载和卸载装置包括具有至少一个旋转磁头的圆柱形带导向鼓,所述至少一个旋转磁头以大致与滚筒的圆周表面重合的圆形路径移动。 在装置中使用的胶带存储在具有卷绕在其上的胶带保持器(例如盒式磁带或盒式磁带)中的磁带供应卷轴上,并且在使用中,保持器将磁带供应件相对于磁带引导件位于相对较低的水平位置 鼓。 该装置还包括第一带接合构件,例如带导向销,所述第一带接合构件由杠杆承载,所述杆能够围绕固定枢轴旋转,以使带从带供应卷轴沿对角线向上方向拉到导带鼓,其中螺旋形 缠绕在所述滚筒的周向表面的至少一部分上,以及第二带接合构件,以沿着与所述第一带接合构件的移动方向相反的水平方向从所述带供带盘上拉出所述带。