Electron source, image display device manufacturing apparatus and method, and substrate processing apparatus and method
    121.
    发明申请
    Electron source, image display device manufacturing apparatus and method, and substrate processing apparatus and method 失效
    电子源,图像显示装置的制造装置和方法以及基板处理装置和方法

    公开(公告)号:US20010039161A1

    公开(公告)日:2001-11-08

    申请号:US09797568

    申请日:2001-03-05

    Inventor: Yasue Sato

    CPC classification number: H01J9/027 H01J2201/3165

    Abstract: An electron source/image display device manufacturing apparatus according to this invention includes (A) a support which supports a substrate having a first major surface and a second major surface on which a conductor is arranged, and includes a plurality of electrostatic chucks each having a conductive member, (B) a vessel which has a gas inlet port and an exhaust port, and covers part of the first major surface, (C) a valve connected to the inlet port to introduce gas into the vessel, (D) an exhaust system connected to the exhaust port to exhaust the gas from the vessel, and (E) a power supply for applying a predetermined potential difference between the conductor and the conductive member. This apparatus arrangement enables easy, stable processing in the nullformingnull and nullactivationnull steps.

    Abstract translation: 根据本发明的电子源/图像显示装置制造装置包括:(A)支撑基板,其具有第一主表面和布置有导体的第二主表面,并且包括多个静电卡盘,每个静电卡盘具有 导电构件,(B)具有气体入口和排气口并且覆盖第一主表面的一部分的容器,(C)连接到入口以将气体引入容器的阀,(D)排气 连接到排气口以排出来自容器的气体的系统,以及(E)用于在导体和导电构件之间施加预定电位差的电源。 该装置结构能够在“成形”和“激活”步骤中实现容易且稳定的处理。

    Electron-emitting device and image display apparatus using the same
    122.
    发明申请
    Electron-emitting device and image display apparatus using the same 失效
    电子发射装置和使用其的图像显示装置

    公开(公告)号:US20010024227A1

    公开(公告)日:2001-09-27

    申请号:US09793249

    申请日:2001-02-26

    Inventor: Takuro Sekiya

    Abstract: The present invention relates to an electron-emitting device and an image display apparatus in which the electron-emitting device is provided. In the electron-emitting device, a substrate has sides in two orthogonal first directions. A plurality of pairs of electrodes are disposed on the substrate. A conductive thin film is disposed between each of the electrode pairs. A plurality of surface conduction electron-emitting elements are disposed in the conductive thin film by discharging drops of a source material of the film thereto, each electron-emitting element spaced apart from the opposing electrodes of one of the electrode pairs. The electron-emitting elements are arrayed in a matrix formation, the matrix having rows and columns in two orthogonal second directions, the electron-emitting elements being disposed such that the second directions of the matrix are parallel to the first directions of the substrate. Further, the present invention relates to an electron-emitting device production apparatus wherein an effective area in which a discharge head is capable of discharging the drops to the substrate is larger than an entire region that covers the electron-emitting elements on the substrate.

    Abstract translation: 本发明涉及电子发射器件和其中提供电子发射器件的图像显示装置。 在电子发射器件中,衬底具有两个正交的第一方向的侧面。 多个电极对设置在基板上。 导电薄膜设置在每个电极对之间。 多个表面传导电子发射元件通过从其中的一个电极对的相对电极间隔开每个电子发射元件而将薄膜的源材料的液滴放电到导电薄膜中。 电子发射元件以矩阵形式排列,该矩阵在两个正交的第二方向上具有行和列,电子发射元件被布置成使得矩阵的第二方向平行于衬底的第一方向。 此外,本发明涉及一种电子发射器件制造装置,其中放电头能够将液滴排放到衬底的有效区域大于覆盖衬底上的电子发射元件的整个区域。

    Diamond surfaces
    123.
    发明授权
    Diamond surfaces 有权
    钻石表面

    公开(公告)号:US06284556B1

    公开(公告)日:2001-09-04

    申请号:US09308271

    申请日:1999-07-08

    Abstract: A diamond grit surface is formed on a substrate (1) having a metal surface (2), such as nickel, by applying a paste (4) of low-grade diamond grit in a binder to the surface. After driving off the binder, the diamond coated surface is placed in a reactor chamber (10) having a microwave plasma reactor (11) and connected to a hydrogen gas pump (12). The substrate (1) is heated in the hydrogen atmosphere at a reduced pressure. The metal surface (2) acts as a catalyst in the presence of the hydrogen plasma to cause regrowth of the diamond (6), giving an improved size, shape and adhesion. The method may be used to make diamond surfaces in electron emitter devices, circuit boards or abrasive devices.

    Abstract translation: 在具有金属表面(2)如镍的基板(1)上,通过将粘合剂中的低等级金刚石砂粒的浆料(4)施加到表面上,形成金刚石砂粒表面。 在驱除粘合剂之后,将金刚石涂覆的表面放置在具有微波等离子体反应器(11)并连接到氢气泵(12)的反应器室(10)中。 基板(1)在氢气氛中减压加热。 金属表面(2)在氢等离子体的存在下起催化剂的作用,引起金刚石(6)的再生长,从而改善了尺寸,形状和粘附性。 该方法可用于在电子发射器件,电路板或研磨器件中制造金刚石表面。

    Method for producing electron source having electron emitting portions, and apparatus for producing electron source
    125.
    发明授权
    Method for producing electron source having electron emitting portions, and apparatus for producing electron source 失效
    具有电子发射部分的电子源的制造方法以及电子源的制造装置

    公开(公告)号:US06210245B1

    公开(公告)日:2001-04-03

    申请号:US09074697

    申请日:1998-05-08

    CPC classification number: H01J9/027 H01J2201/3165

    Abstract: In a method for producing an electron source substrate having a matrix of electron emitting elements formed by dispensing droplets of a solution containing a material for conductive thin film between each pair of element electrodes arranged in a matrix pattern on substrate, by use of an ink jet device, the ink jet device is the one having plural nozzles, delivery amounts of the respective nozzles are detected, the delivery amounts of the respective nozzles are adjusted based on the detection results, and thereafter dispensing of the droplets is carried out, during the dispensing of droplets, the substrate is moved relative to the ink jet device, and the droplets are dispensed from the plural nozzles to areas between each pair of element electrodes in plural rows or columns simultaneously and in parallel. An image forming apparatus is produced by placing at least a face plate equipped with fluorescent substance opposite the electron source substrate produced by the above method.

    Abstract translation: 在制造电子源基板的方法中,该电子源基板具有通过在基板上以矩阵图案布置的每对元件电极之间分配含有导电薄膜材料的溶液的液滴而形成的电子发射元件的矩阵,通过使用喷墨 装置中,喷墨装置是具有多个喷嘴的喷墨装置,检测各个喷嘴的输送量,基于检测结果调整各个喷嘴的输送量,然后在分配期间执行液滴的分配 的液滴,基板相对于喷墨装置移动,并且液滴从多个喷嘴分配到多个行或列中的每对元件电极之间的区域同时并行。 通过将至少配备有与通过上述方法制造的电子源基板相对的荧光物质的面板放置在图像形成装置中。

    Electron apparatus using electron-emitting device and image forming apparatus
    126.
    发明授权
    Electron apparatus using electron-emitting device and image forming apparatus 失效
    使用电子发射器件和图像形成装置的电子设备

    公开(公告)号:US06184619B2

    公开(公告)日:2001-02-06

    申请号:US09049975

    申请日:1998-03-30

    Abstract: An electron apparatus includes a rear substrate having an electron-emitting device, a front substrate irradiated with electrons, and a support member for maintaining the interval between these substrates. The distribution of the electric field is controlled, and a force acting in the direction away from the support member is applied to emitted electrons to prevent the electrons from striking the support member. At this time, the electrons are accelerated toward the front substrate. Since the degree of deflection by a deflection force on the rear substrate side is larger than the degree of deflection by a deflection force on the front substrate side, the deflection force on the rear substrate side is relatively weakened.

    Abstract translation: 电子设备包括具有电子发射器件的后衬底,用电子照射的前衬底和用于保持这些衬底之间的间隔的支撑构件。 控制电场的分布,并且沿着远离支撑构件的方向作用的力被施加到发射的电子,以防止电子撞击支撑构件。 此时,电子向前衬底加速。 由于后基板侧的偏转力的偏转度大于前基板侧的偏转力的偏转度,所以后基板侧的偏转力相对变弱。

    Multi-electron beam source with driving circuit for preventing voltage
spikes
    128.
    发明授权
    Multi-electron beam source with driving circuit for preventing voltage spikes 失效
    具有用于防止电压尖峰的驱动电路的多电子束源

    公开(公告)号:US6157137A

    公开(公告)日:2000-12-05

    申请号:US956170

    申请日:1997-10-22

    CPC classification number: G09G3/22 G09G2320/043 H01J2201/3165 H01J2329/00

    Abstract: A multi-electron beam source comprises an electron emitting element part including: a plurality of electron emitting elements provided two-dimensionally in a matrix-like arrangement on a substrate; opposing terminals of electron emitting elements arranged adjacently in the column direction thereof being electrically connected to each other; terminals on the same side of all the electron emitting elements in the same row being electrically connected; and the plurality of electron emitting elements being arranged in "m" rows, "m" representing a number of two or more, and a driving circuit part for driving said electron emitting element part. The multi-electron beam source has means for removing a spike noise superposed onto the driving pulse generated by said driving cirucit part.

    Abstract translation: 多电子束源包括电子发射元件部分,包括:在基板上以矩阵状布置二维地设置的多个电子发射元件; 电子发射元件在其列方向上相邻布置的相对端子彼此电连接; 同一行中所有电子发射元件的同一侧的端子电连接; 并且多个电子发射元件以“m”行排列,“m”表示两个或更多个数量,以及用于驱动所述电子发射元件部分的驱动电路部分。 多电子束源具有用于去除叠加在由所述驱动尖锐部分产生的驱动脉冲上的尖峰噪声的装置。

    Image forming apparatus
    129.
    发明授权
    Image forming apparatus 有权
    图像形成装置

    公开(公告)号:US6124671A

    公开(公告)日:2000-09-26

    申请号:US294332

    申请日:1999-04-20

    Abstract: An image forming apparatus includes a substrate, an electron-emitting device, a wiring electrode for applying an input signal to the electron-emitting device, and an image forming member to which an electron emitted from the electron-emitting device is irradiated. An acceleration electrode is provided opposite to the substrate, and a potential defining electrode is provided between the acceleration electrode and the substrate. A second support member connects the potential defining electrode and the acceleration electrode, and a first support member connects the wiring electrode and the potential defining electrode. The second support member has a semiconductive material surface, and the first support member has a resistance greater than that of the second support member by ten times or more.

    Abstract translation: 图像形成装置包括基板,电子发射器件,用于向电子发射器件施加输入信号的布线电极以及从电子发射器件发射的电子被照射到其上的成像元件。 加速电极与基板相对设置,并且在加速电极和基板之间设置有电位限定电极。 第二支撑构件连接电位限定电极和加速电极,第一支撑构件连接布线电极和电位限定电极。 第二支撑构件具有半导体材料表面,并且第一支撑构件具有大于第二支撑构件的电阻十倍或更多的电阻。

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