公开(公告)号：US20070098893A1

公开(公告)日：2007-05-03

申请号：US11492628

申请日：2006-07-25

Applicant: Michael Stowell

Inventor： Michael Stowell

IPC: C23C16/00 ,  B05D3/00 ,  H05H1/24

CPC classification number: C23C16/515 ,  C23C16/029 ,  C23C16/308 ,  C23C16/401 ,  C23C16/52 ,  H01J37/32201

Abstract: A method of generating a film during a chemical vapor deposition process is disclosed. One embodiment includes creating a substrate by generating a first electrical pulse having a first pulse amplitude; using the first electrical pulse to generate a first density of radicalized species; disassociating a feedstock gas using the radicalized species in the first density of radicalized species, thereby creating a first deposition material; depositing the first deposition material on a substrate; generating a second electrical pulse having a second pulse amplitude, wherein the second pulse amplitude is different from the first pulse width; using the second electrical pulse to generate a second density of radicalized species; disassociating a feedstock gas using the radicalized species in the second density of radicalized species, thereby creating a second deposition material; and depositing the second plurality of deposition materials on the first deposition material.

Abstract translation: 公开了一种在化学气相沉积工艺期间产生膜的方法。 一个实施例包括通过产生具有第一脉冲幅度的第一电脉冲来产生衬底; 使用第一电脉冲产生第一密度的自由基化物种; 使用第一密度的自由基化物质中的自由基化物质分离原料气体，从而产生第一沉积材料; 将第一沉积材料沉积在基底上; 产生具有第二脉冲幅度的第二电脉冲，其中所述第二脉冲幅度不同于所述第一脉冲宽度; 使用第二电脉冲来产生第二密度的激进化物种; 使用第二密度的自由基化物质中的自由基化物质分解原料气体，从而产生第二沉积材料; 以及将所述第二多个沉积材料沉积在所述第一沉积材料上。

公开(公告)号：US07102110B2

公开(公告)日：2006-09-05

申请号：US11097610

申请日：2005-03-30

Applicant: Kibatsu Shinohara

Inventor： Kibatsu Shinohara

IPC: H05B6/68

CPC classification number: H03B9/10 ,  H01J23/34 ,  H01J25/50 ,  H01J37/32201 ,  H01J37/32311

Abstract: A magnetron oscillating apparatus includes a magnetron, power supply unit, and switch circuit. The magnetron oscillates a microwave. The power supply unit applies a power to the magnetron. The switch circuit is connected between the power supply unit and the cathode of the magnetron and turned on/off on the basis of a control signal. When the switch circuit is turned on by the control signal, a voltage is applied between the cathode and the grounded anode of the magnetron to cause the magnetron to pulse-oscillate.

Abstract translation: 磁控管振荡装置包括磁控管，电源单元和开关电路。 磁控管振荡微波。 电源单元向磁控管施加电力。 开关电路连接在电源单元和磁控管的阴极之间，并根据控制信号导通/断开。 当通过控制信号接通开关电路时，在磁控管的阴极和接地阳极之间施加电压，使磁控管发生脉冲振荡。

公开(公告)号：US20060081624A1

公开(公告)日：2006-04-20

申请号：US11237114

申请日：2005-09-28

Applicant: Yutaka Takada ,  Satoshi Fujii

Inventor： Yutaka Takada ,  Satoshi Fujii

IPC: H05B6/68

CPC classification number: H03B5/326 ,  H01J37/32192 ,  H01J37/32201 ,  H01J37/32266 ,  H01J37/32302 ,  H01J37/32311 ,  H01L21/67115 ,  H01L2924/0002 ,  H03H7/18 ,  H03H9/02582 ,  H05B6/686 ,  H05B6/705 ,  H05B6/806 ,  Y02B40/143 ,  H01L2924/00

Abstract: A high-frequency heating device including: a solid-state oscillator that generates a microwave; an amplifier that amplifies the microwave generated by the solid-state oscillator; an isolator that is connected to a stage subsequent to the amplifier and blocks a reflected wave directed from an object exposed with the microwave; an antenna that irradiates the microwave toward the object; and a metal cavity that traps therein the microwave irradiated to the object.

公开(公告)号：US20050218813A1

公开(公告)日：2005-10-06

申请号：US11097610

申请日：2005-03-30

Applicant: Kibatsu Shinohara

Inventor： Kibatsu Shinohara

IPC: H01J23/34 ,  H01J25/50 ,  H03B9/10

CPC classification number: H03B9/10 ,  H01J23/34 ,  H01J25/50 ,  H01J37/32201 ,  H01J37/32311

Abstract: A magnetron oscillating apparatus includes a magnetron, power supply unit, and switch circuit. The magnetron oscillates a microwave. The power supply unit applies a power to the magnetron. The switch circuit is connected between the power supply unit and the cathode of the magnetron and turned on/off on the basis of a control signal. When the switch circuit is turned on by the control signal, a voltage is applied between the cathode and the grounded anode of the magnetron to cause the magnetron to pulse-oscillate.

Abstract translation: 磁控管振荡装置包括磁控管，电源单元和开关电路。 磁控管振荡微波。 电源单元向磁控管施加电力。 开关电路连接在电源单元和磁控管的阴极之间，并根据控制信号导通/断开。 当通过控制信号接通开关电路时，在磁控管的阴极和接地阳极之间施加电压，使磁控管发生脉冲振荡。

公开(公告)号：US5395453A

公开(公告)日：1995-03-07

申请号：US215810

申请日：1994-03-22

Applicant: Shozo Noda

Inventor： Shozo Noda

IPC: C23C16/50 ,  C23C16/511 ,  C23C16/515 ,  H01J37/32 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/31 ,  H03B9/10 ,  H05B6/66

CPC classification number: H05B6/68 ,  H01J37/32192 ,  H01J37/32201 ,  H01J37/32311 ,  H05B2206/043

Abstract: An apparatus for controlling an oscillation output of a magnetron includes a switch circuit controlled of ON/OFF states thereof by a pulse signal, a rectifying circuit for supplying microwave power pulses to the magnetron, and a transformer having a primary side and a secondary side. The primary side has a first terminal and a second terminal, where the first terminal is connected to an A.C. power supply, the second terminal is connected to the switch circuit. The secondary side is connected to the rectifying circuit. The switch circuit is turned ON/OFF by the pulse signal so that a duty factor of the microwave power pulses output from the rectifying circuit and a repetition frequency of the duty cycle thereof become constant.

Abstract translation: 用于控制磁控管的振荡输出的装置包括通过脉冲信号控制其ON / OFF状态的开关电路，用于向磁控管提供微波功率脉冲的整流电路，以及具有初级侧和次级侧的变压器。 初级侧具有第一端子和第二端子，其中第一端子连接到交流电源，第二端子连接到开关电路。 次级侧连接到整流电路。 通过脉冲信号使开关电路接通/断开，使得从整流电路输出的微波功率脉冲的占空因数和其占空比的重复频率变得恒定。