Abstract:
A spatial frequency filter used in a pattern defect detection device, including a pattern which includes a black spot having a diameter expanded by a controlled amount in comparison with the diameter of a black spot on a photosensitive plate obtained by exposure by diffracted light from a pattern on a model specimen
Abstract:
A semiconductor integrated circuit is disclosed, in which a group of sense amplifiers activated at the same time by a selection signal on a selection signal line are divided into a plurality of blocks, and a power-source line for driving sense amplifiers is formed for each sense amplifier block so as to cross the selection signal line. Alternatively, an input/output line is divided into a plurality of sub-input/output lines, and a plurality of input/output lines are formed so that each input/output line crosses its sub-input/output lines, to form a hierarchical structure with respect to input/output lines. Thus, the load capacitance of each power-source line is reduced, and the time constant of each of the charging and discharging of the load capacitance is decreased. That is, the above semiconductor integrated circuit can operate at high speed.
Abstract:
In a voltage converter provided in a semiconductor device and supplying an internal supply voltage to a circuit in the semiconductor device, a circuit is provided for generating a first voltage whose dependency on an external supply voltage is regulated to a predetermined small value, while another circuit is provided for generating a second voltage whose dependency on the external supplying voltage is larger than the dependency of the first voltage. Another circuit selects the first voltage when the semiconductor device is in a state of a standard operation and selects the second voltage when the device is in another state of operation, such as testing or aging. The selected voltage may be converted by a differential amplifier which is constituted by a load of P-channel MOS transistors and a source-coupled pair of N-channel MOS transistors. An output of the differential amplifier is fed back through a directly coupled voltage lowering circuit which generates the converted output.
Abstract:
Disclosed is a one-chip ULSI which can carry out the fixed operation in a wide range of power supply voltage (1 V to 5.5 V). This one-chip ULSI is composed of a voltage converter circuit(s) which serves to a fixed internal voltage for a wide range of power supply voltage, an input/output buffer which can be adapted to several input/output levels, a dynamid RAM(s) which can operate at a power supply voltage of 2 V or less, etc. This one-chip ULSI can be applied to compact and portable electronic devices such as a lap-top type personal computer, an electronic pocket note book, a solid-state camera, etc.
Abstract:
A process for chemical vapor deposition, in which a reactant gas is introduced into a reaction furnace containing a substrate on which a deposited layer is formed by a chemical reaction of the introduced reactant gas, and a used gas resulting from the chemical reaction is exhausted from the furnace through a plurality of exhaust ports disposed radially around an axis of flow of the exhaust gas introduced into the furnace, which comprises the steps of: exhausting the used gas during the forming of the deposited layer on the substrate through an exhaust system comprising; exhaust ports disposed symmetrically with respect to a plane which contains the axis and at a substantially uniform distance from the axis; and exhaust pipes extending from the exhaust ports, each of the pipes being provided with a conductance valve inserted therein and a sensor for measuring a temperature of the pipe surface, the temperature sensor being fixed to the outer surface of the pipe at a position between the exhaust port and the conductance valve, and the exhaust pipes having substantially the same shape, size, and heat capacity over the portion thereof between the exhaust port and the position at which the temperature sensor is disposed: and adjusting the conductance valves during the exhausting of the used gas to minimize the differentials among the temperature values measured by the temperature sensors. An apparatus for carrying out the process is also disclosed.
Abstract:
A semiconductor device comprising a plurality of circuits driven by at least one external power source, and at least one voltage converter transforming the voltage of the external power source into another voltage. At least a part of the plurality of circuits are driven by the output voltage of the at least one voltage converter, which is provided with a controller for controlling its load driving power, corresponding to the operation of the part of the plurality of circuits. The voltage converter includes a voltage limiter which is used exclusively for each of the different natures of the loads, and its operation and load driving power are controlled, depending on the operations of each of the loads.
Abstract:
A water-absorbent resin having excellent physical properties can be produced by a process wherein an aqueous solution containing an .alpha.,.beta.-unsaturated carboxylic acid and an alkali metal salt thereof in a total amount of 25% by weight or more is subjected to polymerization with a radical polymerization initiator in a petroleum-based hydrocarbon solvent in the presence or absence of a crosslinking agent, characterized by using, as a surfactant, a polyglycerine--fatty acid ester having an HLB of 2 to 16 and represented by the general formula ##STR1## (wherein R is an acyl group or hydrogen atom and n is an integer of 0 to 8).
Abstract:
An anti-skid braking control system for use on a motor vehicle having first and second wheels includes first and second wheel cylinders for braking the first and second wheels, respectively, with a braking medium pressure transmitted from a master cylinder, first and second solenoid-operated valves disposed in pipes interconnecting the master cylinder and the first and second wheel cylinders, respectively, for selectively providing communication between the master cylinder and the first and second wheel cylinders through the pipes, and first and second pumps connected to the pipes, respectively, for delivering a braking medium from portions of the pipes downstream of the valves to portions of the pipes upstream of the valves. The first and second pumps comprise a common housing, a common plunger slidably disposed in the common housing and reciprocally movable therein, and first and second pressure varying chambers defined by the plunger independently of each other and having respective volumes variable in response to reciprocating movement of the common plunger, the first and second pressure varying chambers having inlet ports, respectively, connected directly to the downstream portions of the pipes. When the anti-skid braking control system operates in an anti-skid braking control mode, the common plunger is reciprocally moved to enable the first and the second pumps to reduce the braking medium pressures in the first and second wheel cylinders independently of each other.
Abstract:
A distance range limiting device which can readily be accommodated in a miniaturized lens barrel. A limiting protrusion is formed on a rotary ring which is rotated in the focusing operation of an interchangeable lens in such a manner that the limiting protrusion is protruded radially. A switching member which can be externally turned about a rotary shaft perpendicular to the optical axis of the lens is provided on a stationary ring which covers the rotary ring, and a limiting member is provided on the switching member at a position away from the center the center of rotation of the switching member. In response to the operation of the switching member, the limiting member is moved between an interference position where the limiting member interferes with the limiting protrusion and a noninterference position where the limiting member does not interfere with the limiting protrusion.
Abstract:
Water-swellable elastomer composition consisting essentially of a homogeneous mixture of an elastomer, a water-absorbent resin and a water-soluble resin. Said composition exhibits a high degree of swelling and a high swelling rate when it is soaked in water. Also, said composition retains swellability even when it is put in contact with water for a long period of time.