公开(公告)号：US20070247693A1

公开(公告)日：2007-10-25

申请号：US11679134

申请日：2007-02-26

申请人： Mark Miles ,  Jeffrey Sampsell

发明人： Mark Miles ,  Jeffrey Sampsell

IPC分类号： B81B7/04 ,  B81C1/00 ,  G02F1/00

CPC分类号： B81C1/0023 ,  G02B26/001 ,  Y10T29/49002

摘要： A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.

摘要翻译： 描述了基于MEMS的显示装置，其中干涉式调制器的阵列被配置为将光反射通过透明基板。 透明基板被密封到背板，并且背板可以包含用于控制干涉式调制器阵列的电子电路。 背板可以为诸如可用于控制显示器状态的电子部件等设备组件提供物理支持。 背板也可以用作设备的主要结构支撑。

公开(公告)号：US20050286106A1

公开(公告)日：2005-12-29

申请号：US11145926

申请日：2005-06-07

申请人： Koichi Kimura

发明人： Koichi Kimura

IPC分类号： B81B3/00 ,  B81B7/04 ,  G02B26/00 ,  G02B26/08

CPC分类号： G02B26/0891

摘要： A transmission type spatial light modulatoris equipped with a minute transparent optical member for deflecting light in a direction different from an incident direction of incident light and emitting the light, a support member for supporting the minute transparent optical member at a midair position so that the light emission face can be inclined with respect to a plane perpendicular to a travel direction of incident light L1, and a driving member for obliquely displacing the minute transparent optical member by an electrical mechanical operation to vary the emission direction of light from the minute transparent optical member.

摘要翻译： 一种透射型空间光调制器，其具有用于沿与入射光的入射方向不同的方向偏转光并发光的微小透明光学构件，用于将微小透明光学构件支撑在空中位置处的支撑构件，使得光 发射面可以相对于垂直于入射光L1的行进方向的平面倾斜;以及驱动构件，用于通过电机械操作倾斜地移动微小透明光学构件，以改变来自微小透明光学构件的光的发射方向 。

公开(公告)号：US20050248862A1

公开(公告)日：2005-11-10

申请号：US11098700

申请日：2005-04-05

申请人： Takeshi Nanjo ,  Seiichi Katoh ,  Koichi Ohtaka

发明人： Takeshi Nanjo ,  Seiichi Katoh ,  Koichi Ohtaka

IPC分类号： B81B3/00 ,  B81B7/04 ,  G02B7/04 ,  G02B26/08

CPC分类号： G02B26/0841

摘要： A light deflector can be driven by a low voltage by reducing contact area with a plate shape member and other members. The light deflector can be driven by a low voltage by reducing a contact area with a plate shape member and other members. More particularly, a frictional force and fixing strength are reduced at a contact area with a control member deployed around a plate shape member and the plate shape member. The fixing strength is reduced at a contact area with a fulcrum member and the plate shape member. Also, the fixing strength is reduced at a contact area with a substrate (or an insulation layer on a substrate) and the plate shape member.

摘要翻译： 通过减小与板状构件和其他构件的接触面积，可以通过低电压驱动光偏转器。 通过减小与板状构件和其他构件的接触面积，可以通过低电压驱动光偏转器。 更具体地，在与围绕板状构件和板状构件配置的控制构件的接触区域处，摩擦力和固定强度降低。 在与支点构件和板形构件的接触区域处，固定强度降低。 此外，在与基板（或基板上的绝缘层）和板形构件的接触区域处，固定强度降低。

公开(公告)号：US20050213878A1

公开(公告)日：2005-09-29

申请号：US11099253

申请日：2005-04-04

申请人： Keiichi Akagawa ,  Yoshihiko Suzuki ,  Katsuhiko Kurumada ,  Toshiaki Tamamura ,  Masatoshi Kanaya

发明人： Keiichi Akagawa ,  Yoshihiko Suzuki ,  Katsuhiko Kurumada ,  Toshiaki Tamamura ,  Masatoshi Kanaya

IPC分类号： B81B3/00 ,  B81B7/04 ,  G01P15/125 ,  G02B6/26 ,  G02B6/35 ,  G02B6/42 ,  G02B26/08 ,  G02F1/09 ,  H02K33/18 ,  H02K41/035

CPC分类号： G02B6/358 ,  G02B6/3516 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3584 ,  G02B26/0858 ,  H02K33/18 ,  H02K41/0354

摘要： A movable plate 21 is fastened to a substrate 11 via flexure parts 27a and 27b, and can move upward and downward with respect to the substrate 11. The substrate 11 also serves as a fixed electrode. The movable plate 21 has second electrode parts 23a and 23b which can generate an electrostatic force between these electrode parts and the substrate 11 by means of a voltage that is applied across these electrode parts and the substrate 11, and a current path 25 which is disposed in a magnetic field, and which generates a Lorentz force when powered. A mirror 12 which advances into and withdraws from the optical path is disposed on the movable plate 21. When the movable plate 21 is caused to move from the lower position in which the electrostatic force is increased to the upper position, the control part controls the current so that the Lorentz force is generated in a downward orientation and gradually decreases while the movable plate 21 is moving from an intermediate position to the upper position. As a result, the mobility range of the movable part can be expanded without applying a high voltage or sacrificing compact size, and the power consumption can be reduced; furthermore, the reliability in the case of long-term operation can be increased.

摘要翻译： 可移动板21通过挠曲部件27a和27b固定到基板11上，并且可相对于基板11上下移动。 基板11也用作固定电极。 可移动板21具有第二电极部分23a和23b，其可以通过施加在这些电极部分和基板11上的电压而在这些电极部分和基板11之间产生静电力，以及电流通路25， 被设置在磁场中，并且当通电时产生洛伦兹力。 在可动板21上设置有从光路前进和退出的反射镜12。 当可动板21从静电力增加的下部位置移动到上部位置时，控制部分控制电流，使得向下方向产生洛伦兹力并逐渐减小，而可动板21 从中间位置移动到上位置。 结果，可以在不施加高电压或牺牲紧凑尺寸的情况下扩大可移动部件的移动范围，并且可以降低功耗; 此外，可以增加长期运行情况下的可靠性。

公开(公告)号：US20050157365A1

公开(公告)日：2005-07-21

申请号：US10509148

申请日：2002-03-26

申请人： Jan Ravnkilde ,  Henning Henningsen

发明人： Jan Ravnkilde ,  Henning Henningsen

IPC分类号： B81B3/00 ,  B81B7/04 ,  G02B3/00 ,  G02B26/00 ,  G02B26/02 ,  G02F1/01

CPC分类号： G02B26/02

摘要： The invention relates to a micro light modulator arrangement (10) comprising at least one light transmission path (23) and at least one controllable shutter (11, 16) arranged for modulation of light transmitted via said at least one light transmission path (23), said at least a part of said light transmission path comprising a translucent solid material, and said at least a part of said light transmission path being an integral part of a substrate to which said at least one controllable shutter (11, 16) is anchored.

摘要翻译： 本发明涉及一种微光调制器装置（10），其包括至少一个光传输路径（23）和至少一个可控制的快门（11,16），其被布置用于调制经由所述至少一个光传输路径（23）传输的光， 所述光传输路径的至少一部分包括半透明固体材料，并且所述光传输路径的所述至少一部分是所述至少一个可控制快门（11,16）被锚定到的基板的整体部分 。

公开(公告)号：US20050148132A1

公开(公告)日：2005-07-07

申请号：US10751290

申请日：2004-01-01

申请人： Robert Wodnicki

发明人： Robert Wodnicki

IPC分类号： G03F9/00 ,  B06B1/02 ,  B81B7/04 ,  B81C1/00 ,  H01L21/00 ,  H01L21/027

CPC分类号： B06B1/0292 ,  Y10T29/42

摘要： An integrated circuit is fabricated by micromachining a hexagonal array of cMUT elements on top of a substrate comprising a hexagonal array of CMOS cells. Each cMUT element overlies a respective CMOS cell in one-to-one correspondence. During layout of the mask for micromachining the cMUT layer, either the hexagonal pattern or the alignment key is rotated until an axis of symmetry of the hexagonal pattern is aligned with an axis of the alignment key. Later, when the mask is superimposed on the CMOS substrate, the alignment key on the mask is aligned with an alignment key on the substrate. This ensures that the cMUT elements formed by optical lithography will be matched to the CMOS cells.

摘要翻译： 通过在包括六边形阵列的CMOS单元的衬底的顶部上微加工cMUT元件的六边形阵列来制造集成电路。 每个cMUT元件一一对应地覆盖相应的CMOS单元。 在用于微加工cMUT层的掩模的布局期间，旋转六边形图案或对准键直到六边形图案的对称轴线与对准键的轴线对准。 之后，当掩模叠加在CMOS基板上时，掩模上的对准键与衬底上的对准键对齐。 这确保了通过光学光刻形成的cMUT元件将与CMOS单元匹配。

公开(公告)号：US20050146240A1

公开(公告)日：2005-07-07

申请号：US10748920

申请日：2003-12-29

申请人： Lowell Smith ,  Douglas Wildes

发明人： Lowell Smith ,  Douglas Wildes

IPC分类号： B81B3/00 ,  B81B7/04 ,  B81C1/00 ,  H02N1/00 ,  H02N2/00

CPC分类号： B06B1/0292 ,  H02N1/006

摘要： A micromachined ultrasonic transducer array comprising a multiplicity of cMUT cells built on a substrate. Each cMUT cell comprises a compliant support structure built on the substrate, a membrane supported over a cavity by the compliant support structure, a first electrode supported by the membrane, and a second electrode that forms a capacitor with the first electrode, the cavity being disposed between the first and second electrodes. The compliant support structure uncouples the non-membrane outer surface of each cMUT cell from the supporting substrate.

摘要翻译： 一种微机械加工的超声波换能器阵列，其包括建立在基底上的多个cMUT电池。 每个cMUT单元包括构建在基板上的柔性支撑结构，由柔性支撑结构支撑在空腔上的膜，由膜支撑的第一电极，以及与第一电极形成电容器的第二电极， 在第一和第二电极之间。 顺应性支撑结构将每个cMUT电池的非膜外表面与支撑衬底断开。

公开(公告)号：US06914245B2

公开(公告)日：2005-07-05

申请号：US10286919

申请日：2002-11-04

申请人： Takanori Sone ,  Osamu Kaneda

发明人： Takanori Sone ,  Osamu Kaneda

IPC分类号： G01J1/02 ,  B81B3/00 ,  B81B7/04 ,  B81C1/00 ,  G01J5/40 ,  H01L27/14 ,  G01J5/00

CPC分类号： G01J5/40

摘要： An infrared light detection array with a plurality of infrared light detectors, said infrared light detectors each comprising: a supporting leg fixed to said substrate at one end, having a laminated structure of an insulation layer and a wiring layer; and a heat insulation structure portion supported by said supporting leg, comprising an insulation layer having a first surface to serve as a surface of incidence for infrared light to impinge on and a second surface to serve as a surface of incidence for reading light to impinge on, a reflection film which is formed on said second surface of said insulation layer, and a resistor connected with said wiring layer, and as said supporting legs heated up to a detection temperature by said infrared light reversibly warp, said infrared light detectors change the reflection direction of said reading light impinging upon said reflection films.

摘要翻译： 一种具有多个红外光检测器的红外光检测阵列，所述红外光检测器包括：一端固定到所述基板的支撑腿，具有绝缘层和布线层的叠层结构; 以及由所述支撑腿支撑的绝热结构部分，包括绝缘层，其具有用作红外光入射的表面的第一表面和第二表面，以用作用于读取光的入射表面 ，形成在所述绝缘层的所述第二表面上的反射膜和与所述布线层连接的电阻器，并且当所述红外线灯被可逆地翘曲地加热到检测温度的所述支撑腿时，所述红外光检测器改变反射 所述读取光的方向撞击在所述反射膜上。

公开(公告)号：US20050099671A1

公开(公告)日：2005-05-12

申请号：US10999772

申请日：2004-11-30

申请人： Daisuke Matsuo ,  Yoshitaka Kamiya ,  Hiroshi Miyajima ,  Masahiro Nishio

发明人： Daisuke Matsuo ,  Yoshitaka Kamiya ,  Hiroshi Miyajima ,  Masahiro Nishio

IPC分类号： G02B26/08 ,  B81B3/00 ,  B81B7/04 ,  G02B26/00

CPC分类号： G02B26/085 ,  H01L2224/48091 ,  H01L2924/16195 ,  H01L2924/00014

摘要： An optical deflector array has a first board, second board, and magnetic field generator. The first board has movable plates respectively having reflecting surfaces, wirings passing through the respective movable plates, and first connecting portions provided at the two ends of the each wiring. The second board has second connecting portions electrically connected to the first connecting portions of the first board, third connecting portions for external electrical connection, and connecting wirings electrically connecting the second connecting portions and the third connecting portions. The optical deflector array further has connecting members that electrically connect the first connecting portions of the first board to the second connecting portions of the second board.

摘要翻译： 光学偏转器阵列具有第一板，第二板和磁场发生器。 第一板具有分别具有反射面的移动板，通过各个可动板的布线，以及设置在各布线两端的第一连接部。 第二板具有电连接到第一板的第一连接部分的第二连接部分，用于外部电连接的第三连接部分，以及电连接第二连接部分和第三连接部分的连接布线。 光学偏转器阵列还具有将第一板的第一连接部与第二板的第二连接部电连接的连接部件。

公开(公告)号：US06846682B2

公开(公告)日：2005-01-25

申请号：US09907314

申请日：2001-07-17

申请人： James R. Heath ,  R. Stanley Williams ,  Philip J. Kuekes

发明人： James R. Heath ,  R. Stanley Williams ,  Philip J. Kuekes

IPC分类号： B81B7/04 ,  B82B1/00 ,  G01R31/28 ,  G11C13/02 ,  H01L21/00 ,  H01L23/532 ,  H01L27/10 ,  H01L29/861 ,  H01L51/00 ,  H01L51/05 ,  H01L51/30 ,  H01L51/40

CPC分类号： H01L27/10 ,  B82B1/00 ,  B82Y10/00 ,  B82Y30/00 ,  G11C13/0009 ,  G11C13/0014 ,  G11C13/02 ,  G11C2213/72 ,  G11C2213/77 ,  G11C2213/81 ,  H01L51/0595 ,  Y10S977/704 ,  Y10S977/705 ,  Y10S977/936

摘要： A route to the fabrication of electronic devices is provided, in which the devices consist of two crossed wires sandwiching an electrically addressable molecular species. The approach is extremely simple and inexpensive to implement, and scales from wire dimensions of several micrometers down to nanometer-scale dimensions. The device of the present invention can be used to produce crossbar switch arrays, logic devices, memory devices, and communication and signal routing devices. The present invention enables construction of molecular electronic devices on a length scale than can range from micrometers to nanometers via a straightforward and inexpensive chemical assembly procedure. The device is either partially or completely chemically assembled, and the key to the scaling is that the location of the devices on the substrate are defined once the devices have been assembled, not prior to assembly.