公开(公告)号：US08515287B2

公开(公告)日：2013-08-20

申请号：US12136155

申请日：2008-06-10

Applicant: Kenichi Ogawa ,  Kazuhiro Watanabe ,  Hiroyuki Nakano

Inventor： Kenichi Ogawa ,  Kazuhiro Watanabe ,  Hiroyuki Nakano

IPC: H04J14/02 ,  H04B10/00 ,  H04B10/12 ,  H04B10/06

CPC classification number: H04B10/25133 ,  H04B2210/252

Abstract: The optical transmission equipment includes: a demultiplexer for demultiplexing a transmitted wavelength-multiplexed optical signal to first and second optical signals; a first variable dispersion compensation unit; a second variable dispersion compensation unit; a first error detector; a second error detector; and a dispersion compensation control unit for controlling dispersion compensation amounts of the first and second variable dispersion compensation units based on the detection result of the first or second error detector. Upon detection of a signal error in the first optical signal, the first variable dispersion compensation unit is controlled to change from a first compensation amount to a third compensation amount, and the second variable dispersion compensation unit is controlled to change from a second compensation amount to a fourth compensation amount.

Abstract translation: 光传输设备包括：解复用器，用于将传输的波分复用光信号解复用到第一和第二光信号; 第一可变色散补偿单元; 第二可变色散补偿单元; 第一个误差检测器; 第二误差检测器; 以及色散补偿控制单元，用于基于第一或第二误差检测器的检测结果来控制第一和第二可变色散补偿单元的色散补偿量。 在检测到第一光信号中的信号误差时，控制第一可变色散补偿单元从第一补偿量变为第三补偿量，并且控制第二可变色散补偿单元从第二补偿量变为 第四补偿金额。

公开(公告)号：US08411264B2

公开(公告)日：2013-04-02

申请号：US12504972

申请日：2009-07-17

Applicant: Takeo Ueno ,  Hiroyuki Nakano ,  Yasuhiro Yoshitake

Inventor： Takeo Ueno ,  Hiroyuki Nakano ,  Yasuhiro Yoshitake

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N2021/4792 ,  G01N2021/8848

Abstract: An apparatus for inspecting a substrate surface is provided, which includes illumination optics for irradiating the substrate surface linearly with rectilinearly polarized light from an oblique direction, detection optics for acquiring images of the substrate surface, each of the images being formed by the light scattered from the light-irradiated substrate surface, and means for comparing an image selected as an inspection image from the plurality of substrate surface images that the detection optics has acquired to detect defects, and another image selected from the plural images of the substrate surface as a reference image different from the inspection image; the illumination optics being formed with polarization control means for controlling a polarizing direction of the light according to a particular scanning direction of the substrate or a direction orthogonal to the scanning direction.

Abstract translation: 提供了一种用于检查基板表面的装置，其包括用于从倾斜方向线性地用直线偏振光线照射基板表面的照明光学装置，用于获取基板表面的图像的检测光学装置，每个图像由从 光照射的基板表面，以及用于将从检测光学器件已经获取的多个基板表面图像中选择为检查图像的图像与检测缺陷进行比较的装置，以及从基板表面的多个图像中选择的另一图像作为参考 图像与检查图像不同; 所述照明光学元件形成有偏振控制装置，用于根据所述基板的特定扫描方向或与扫描方向正交的方向来控制所述光的偏振方向。

公开(公告)号：US08289507B2

公开(公告)日：2012-10-16

申请号：US13118004

申请日：2011-05-27

Applicant: Akira Hamamatsu ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Sachio Uto ,  Taketo Ueno ,  Hiroyuki Nakano ,  Takahiro Jingu ,  Hisashi Hatano ,  Yukihisa Mohara ,  Seiji Otani ,  Takahiro Togashi

Inventor： Akira Hamamatsu ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Sachio Uto ,  Taketo Ueno ,  Hiroyuki Nakano ,  Takahiro Jingu ,  Hisashi Hatano ,  Yukihisa Mohara ,  Seiji Otani ,  Takahiro Togashi

IPC: G01N21/00

CPC classification number: G01N21/956

Abstract: A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors.

Abstract translation: 通过检查其中形成有多个图案的样本的表面的样本来检测缺陷的方法和装置，通过从仰角不同的多个方向之一的细长形状的光束照射， 根据要检测的缺陷的种类从照明光源发射的光束。 通过用安装在不同仰角方向上的多个图像传感器捕获由细长形状光束照射的样本的多个光学图像，通过根据在照射细长的照射区域中在样品上形成的图案的密度来改变放大倍率 形状光通量。 通过处理由多个图像传感器捕获的图像来检测样本上的缺陷。

公开(公告)号：US20120194809A1

公开(公告)日：2012-08-02

申请号：US13362808

申请日：2012-01-31

Applicant: Hiroyuki Nakano ,  Toshihiko Nakata ,  Sachio Uto ,  Akira Hamamatsu ,  Shunji Maeda ,  Yuta Urano

Inventor： Hiroyuki Nakano ,  Toshihiko Nakata ,  Sachio Uto ,  Akira Hamamatsu ,  Shunji Maeda ,  Yuta Urano

IPC: G01N21/956

CPC classification number: G01N21/956 ,  G01N21/47 ,  G01N21/94 ,  G01N21/9501 ,  G01N2021/8822

Abstract: A method and apparatus for detecting defects are provided for detecting defects or foreign matter on an object to be inspected. The apparatus includes a movable stage for mounting a specimen, an illumination system for irradiating a circuit pattern with light from an inclined direction, and an image-forming optical system for forming an image of an irradiated detection area on a detector from the upward and oblique directions. With this arrangement, diffracted light and scattered light caused on the circuit pattern through the illumination by the illumination system is collected. A spatial filter is provided on a Fourier transform surface for blocking the diffracted light from a linear part of the circuit pattern. The scattered and reflected light received by the detector is converted into an electrical signal. The converted electrical signal of one chip is compared with that of the other adjacent chip.

Abstract translation: 提供一种用于检测缺陷的方法和装置，用于检测被检测物体上的缺陷或异物。 该装置包括用于安装样本的可移动台，用于从倾斜方向的光照射电路图案的照明系统和用于从上方和倾斜形成检测器上的照射检测区域的图像的图像形成光学系统 方向。 利用这种布置，收集通过照明系统的照明在电路图案上产生的衍射光和散射光。 在傅立叶变换表面上提供空间滤波器，用于阻挡来自电路图形的线性部分的衍射光。 由检测器接收的散射和反射光被转换成电信号。 将一个芯片的转换电信号与另一个芯片的转换电信号进行比较。

公开(公告)号：US08121398B2

公开(公告)日：2012-02-21

申请号：US12420932

申请日：2009-04-09

Applicant: Yasuhiro Yoshitake ,  Hiroyuki Nakano ,  Yukihiro Shibata

Inventor： Yasuhiro Yoshitake ,  Hiroyuki Nakano ,  Yukihiro Shibata

IPC: G06K9/00 ,  H04N5/335

CPC classification number: G06K9/00 ,  G01N21/9501 ,  G06T7/0004 ,  G06T2207/30148 ,  H04N5/341 ,  H04N5/3743 ,  H04N5/378

Abstract: A two-dimensional sensor is installed inclining at a predetermined angle to a moving direction of a stage on which an object to be inspected is mounted and, in synchronism with the movement of the stage, a picked up image is rearranged so that there can be obtained an image in high-density sampling with a picture-element size or less of the two-dimensional sensor with respect to a wafer. Thus, interpolation calculation during position alignment becomes unnecessary, and size calculation and classification of a defect can be performed with high accuracy.

Abstract translation: 将二维传感器安装成倾斜预定角度，使其与安装被检查物体的平台的移动方向倾斜，并且与舞台的移动同步，拾取图像被重新排列，使得可以 以相对于晶片的二维传感器的像素大小或更小的高密度采样获得图像。 因此，位置对准中的插补计算变得不必要，可以高精度地执行缺陷的尺寸计算和分类。

公开(公告)号：US07973920B2

公开(公告)日：2011-07-05

申请号：US12950243

申请日：2010-11-19

Applicant: Hiroyuki Nakano ,  Akira Hamamatsu ,  Sachio Uto ,  Yoshimasa Oshima ,  Hidetoshi Nishiyama ,  Yuta Urano ,  Shunji Maeda

Inventor： Hiroyuki Nakano ,  Akira Hamamatsu ,  Sachio Uto ,  Yoshimasa Oshima ,  Hidetoshi Nishiyama ,  Yuta Urano ,  Shunji Maeda

IPC: G01N21/88

CPC classification number: G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/9513 ,  G01N2021/95638 ,  H01L22/12

Abstract: A defect inspection apparatus includes a movable stage for mounting a substrate having circuit patterns as an object of inspection, an irradiation optical system which irradiates a slit-shaped light beam from an oblique direction to the circuit patterns of the substrate, a detection optical system which includes an image sensor for receiving reflected/scattered light from the substrate by irradiation of the slit-shaped light beam and converting the received light into a signal, and an image processor which processes the signal. The irradiation optical system includes a cylindrical lens and a coherency reduction optical system, which receives the light beam and emits a plurality of slit-shaped light sub-beams which are spatially reduced in coherency in a light-converging direction of the cylindrical lens. The cylindrical lens focuses the plurality of slit-shaped light sub-beams into the slit-shaped light beam irradiated to the surface of the substrate.

Abstract translation: 缺陷检查装置包括：可移动台，用于安装具有作为检查对象的电路图案的基板;照射光学系统，其将来自倾斜方向的狭缝状光束照射到基板的电路图案;检测光学系统， 包括图像传感器，用于通过照射狭缝状光束并将接收到的光转换成信号来从基板接收反射/散射光，以及处理该信号的图像处理器。 照射光学系统包括柱面透镜和相干性降低光学系统，其接收光束并发射在柱面透镜的聚光方向上空间相减的多个狭缝状光子束。 柱面透镜将多个狭缝状光子束聚焦成照射到基板表面的狭缝状光束。

公开(公告)号：US20110149275A1

公开(公告)日：2011-06-23

申请号：US12992903

申请日：2009-05-13

Applicant: Hiroyuki Nakano ,  Shunji Maeda ,  Toshihiko Nakata

Inventor： Hiroyuki Nakano ,  Shunji Maeda ,  Toshihiko Nakata

IPC: G01N21/956

CPC classification number: G01N21/95607 ,  G01N21/9501 ,  G01N2021/9563

Abstract: A defect inspection device, which inspects defects such as foreign materials existing on a specimen on which a circuit pattern of wiring or the like is formed, is provided with an illumination optical system which illuminates a plurality of different areas the specimen with a plurality of linear shaped beams and an image forming optical system that forms images of the plurality of the illuminated areas on a plurality of detectors, and the detectors are configured to receive a plurality of polarization components substantially at the same time and individually, wherein the polarization components are different from each other and are contained in each of the plurality of the optical images formed by the image forming optical system, thereby detecting a plurality of signals corresponding to the polarization components and carrying out the inspection at high speed under a plurality of optical conditions.

Abstract translation: 检查存在于其上形成有布线等的电路图案的样本上存在的异物的缺陷检查装置设置有照明光学系统，该照明光学系统用多个线性照射多个不同的区域 以及形成在多个检测器上的多个照明区域的图像的图像形成光学系统，并且检测器被配置为基本上同时和单独地接收多个偏振分量，其中偏振分量是不同的 并且被包含在由图像形成光学系统形成的多个光学图像的每一个中，从而检测对应于偏振分量的多个信号，并且在多个光学条件下高速执行检查。

公开(公告)号：US07953321B2

公开(公告)日：2011-05-31

申请号：US12724881

申请日：2010-03-16

Applicant: Yasuhiro Uchiyama ,  Hiroyuki Nakano

Inventor： Yasuhiro Uchiyama ,  Hiroyuki Nakano

IPC: H04J14/02 ,  H04B10/16

CPC classification number: H04J14/0283 ,  H04J14/0204 ,  H04J14/0206 ,  H04J14/0212 ,  H04J14/0213 ,  H04J14/0221 ,  H04J14/0227 ,  H04J14/0246 ,  H04J14/025

Abstract: An optical transmission equipment includes an optical amplifier that is coupled to an optical transmission path and amplifies a first optical signal which is received from the optical transmission path, a first controller that controls the optical amplifier depending on a first optical power of output light from the optical amplifier and a second optical power of reflecting light to the optical amplifier, an optical coupler that branches a second optical signal from the optical amplifier into a first output and a second output, an optical demultiplexer that demultiplexes the first output of the optical coupler, an optical switch or attenuator that receives the second output of the optical coupler, and a second controller that controls the optical switch or attenuator depending on a third optical power of output light from the optical switch or attenuator and a fourth optical power of reflecting light to the optical switch or attenuator.

Abstract translation: 光传输设备包括耦合到光传输路径并放大从光传输路径接收的第一光信号的光放大器，第一控制器，其根据来自所述光传输路径的输出光的第一光功率来控制所述光放大器 光放大器和将光反射到光放大器的第二光功率;将来自光放大器的第二光信号分支为第一输出和第二输出的光耦合器，对光耦合器的第一输出进行解复用的光解复用器， 接收光耦合器的第二输出的光开关或衰减器，以及根据来自光开关或衰减器的输出光的第三光功率控制光开关或衰减器的第二控制器，以及将光反射到 光开关或衰减器。

公开(公告)号：US07809263B2

公开(公告)日：2010-10-05

申请号：US12323038

申请日：2008-11-25

Applicant: Tetsuya Uda ,  Kenta Noda ,  Yasuhiro Uchiyama ,  Hiroshi Masuda ,  Hiroyuki Nakano

Inventor： Tetsuya Uda ,  Kenta Noda ,  Yasuhiro Uchiyama ,  Hiroshi Masuda ,  Hiroyuki Nakano

IPC: H04J14/02

CPC classification number: H04B10/00

Abstract: An optical transmission apparatus comprising a first detector for detecting the power of the supervisory signal light separated from received wavelength-division multiplexed signal lights; a second detector for detecting the power of the wavelength-division multiplexed signal lights after the separation of the supervisory signal light; a gain-controlled type optical amplifier for amplifying the wavelength-division multiplexed signal lights; an optical attenuator coupled to the amplifier; and a control unit for controlling the optical amplifier and the optical attenuator so as to keep the output level of the wavelength-division multiplexed signal lights to a predetermined target value, wherein the control unit restrains automatic output level control by the optical attenuator when the supervisory signal light power fluctuates within its permissible range and fluctuations in the signal light power have deviated from its permissible range.

Abstract translation: 一种光传输装置，包括：第一检测器，用于检测从接收的波分复用信号光分离的监控信号光的功率; 第二检测器，用于在分离监控信号光之后检测波分复用信号光的功率; 用于放大波分复用信号光的增益控制型光放大器; 耦合到所述放大器的光衰减器; 以及控制单元，用于控制光放大器和光衰减器，以便将波分复用信号光的输出电平保持在预定目标值，其中当监视器控制单元抑制光衰减器的自动输出电平控制 信号光功率在允许范围内波动，信号光功率的波动偏离其允许范围。

公开(公告)号：US07769257B2

公开(公告)日：2010-08-03

申请号：US12196424

申请日：2008-08-22

Applicant: Nobuhiko Kikuchi ,  Takao Fukushima ,  Naohiro Sakakida ,  Hiroyuki Nakano

Inventor： Nobuhiko Kikuchi ,  Takao Fukushima ,  Naohiro Sakakida ,  Hiroyuki Nakano

IPC: G02B6/28

CPC classification number: H04J14/02 ,  H04L1/0057 ,  H04L1/0071 ,  H04L69/08

Abstract: A signal speed converting apparatus to be connected to a WDM transmission end office, comprising a first interface connected to a first optical line group, a plurality of second interfaces connected to a second optical line group, and a speed converter. The first interface has a first framer for terminating a frame in a first format received from the first optical line group and outputting an information signal extracted from the received frames as a serial signal train or parallel signal trains. The speed converter converts the output signal from the first framer into transmission signal trains each including interleaved communication frame by cyclically distributing the output signal from the first framer to a plurality of internal lines. Each of the second interfaces has a second framer for converting the communication frame received from one of the internal lines into information frame in a second format to be transmitted to the second optical line group. Management information inserting units are located between the first and second interfaces in order to insert management information to be communicated with an opposite apparatus into the transmission signal trains on the internal lines.

Abstract translation: 一种要连接到WDM传输端局的信号速度转换装置，包括连接到第一光线路组的第一接口，连接到第二光线路组的多个第二接口和速度转换器。 第一接口具有第一成帧器，用于以从第一光线路组接收的第一格式终止帧，并将从接收到的帧提取的信息信号作为串行信号串或并行信号序列输出。 速度转换器通过将来自第一成帧器的输出信号周期性地分配到多条内部线路，将来自第一成帧器的输出信号转换成各自包括交错通信帧的发送信号列。 每个第二接口具有第二成帧器，用于将从内部线路之一接收的通信帧转换为以第二格式发送到第二光学线路组的第二格式的信息帧。 管理信息插入单元位于第一和第二接口之间，以将要与对方设备通信的管理信息插入到内线上的传输信号列中。