公开(公告)号：US20100327380A1

公开(公告)日：2010-12-30

申请号：US12918660

申请日：2009-04-28

Applicant: Chienliu Chang

Inventor： Chienliu Chang

IPC: H01L29/84 ,  H01L21/30

CPC classification number: B06B1/0292 ,  B81B2201/038 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81B2203/04 ,  B81C1/00476 ,  B81C2201/0114

Abstract: In a method of manufacturing a capacitive electromechanical transducer, a first electrode (8) is formed on a substrate (4), an insulating layer (9) which has an opening (6) leading to the first electrode is formed on the first electrode (8), and a sacrificial layer is formed on the insulating layer. A membrane (3) having a second electrode (1) is formed on the sacrificial layer, and an aperture is provided as an etchant inlet in the membrane. The sacrificial layer is etched to form a cavity (10), and then the aperture serving as an etchant inlet is sealed. The etching is executed by electrolytic etching in which a current is caused to flow between the first electrode (8) and an externally placed counter electrode through the opening (6) and the aperture of the membrane.

Abstract translation: 在制造电容式机电换能器的方法中，在基板（4）上形成第一电极（8），在第一电极上形成具有通向第一电极的开口（6）的绝缘层（9） 8），并且在绝缘层上形成牺牲层。 在牺牲层上形成具有第二电极（1）的膜（3），并且在膜中设置有作为蚀刻剂入口的孔。 蚀刻牺牲层以形成空腔（10），然后密封用作蚀刻剂入口的孔。 蚀刻通过电解蚀刻进行，其中使电流通过开口（6）和膜的孔径在第一电极（8）和外部放置的对电极之间流动。

公开(公告)号：US20100295486A1

公开(公告)日：2010-11-25

申请号：US12845921

申请日：2010-07-29

Applicant: Tamio IKEHASHI

Inventor： Tamio IKEHASHI

IPC: G05D1/02 ,  H01L37/00

CPC classification number: B81B3/0021 ,  B81B2201/038 ,  H01H59/0009 ,  H02N1/008

Abstract: An actuator of the present invention includes a moving part, and a driving electrode which is comprised of electrode parts electrically isolated from each other and drives the moving part. A drive voltage is applied selectively to some of the electrode parts to control an electrostatic force which acts on the moving part.

Abstract translation: 本发明的致动器包括移动部件和驱动电极，驱动电极由彼此电隔离的电极部分组成并驱动移动部件。 驱动电压被选择性地施加到一些电极部分，以控制作用在移动部件上的静电力。

公开(公告)号：US07795778B2

公开(公告)日：2010-09-14

申请号：US11851784

申请日：2007-09-07

Applicant: Tamio Ikehashi

Inventor： Tamio Ikehashi

IPC: H02N1/00 ,  H01G9/00

CPC classification number: B81B3/0021 ,  B81B2201/038 ,  H01H59/0009 ,  H02N1/008

Abstract: An actuator of the present invention includes a moving part, and a driving electrode which is comprised of electrode parts electrically isolated from each other and drives the moving part. A drive voltage is applied selectively to some of the electrode parts to control an electrostatic force which acts on the moving part.

Abstract translation: 本发明的致动器包括移动部件和驱动电极，驱动电极由彼此电隔离的电极部分组成并驱动移动部件。 驱动电压被选择性地施加到一些电极部分，以控制作用在移动部件上的静电力。

公开(公告)号：US07709285B2

公开(公告)日：2010-05-04

申请号：US10578026

申请日：2004-10-26

Applicant: Jozef Thomas Martinus Van Beek ,  Mathieu Joseph Emmanuel Ulenaers

Inventor： Jozef Thomas Martinus Van Beek ,  Mathieu Joseph Emmanuel Ulenaers

IPC: H01L21/00

CPC classification number: H01G5/18 ,  B81B3/0078 ,  B81B2201/016 ,  B81B2201/038 ,  B81B2203/04 ,  B81B2203/053 ,  H01H59/0009 ,  H01H2057/006 ,  H01H2239/01

Abstract: A method for manufacturing a micro-electromechanical systems (MEMS) device, comprising providing a base layer (10) and a mechanical layer (12) on a substrate (14), providing a sacrificial layer (16) between the base layer (10) and the mechanical layer (12), providing an etch stop layer (18) between the sacrificial layer (16) and the substrate (14), and removing the sacrificial layer (16) by means of dry chemical etching, wherein the dry chemical etching is performed using a fluorine-containing plasma, and the etch stop layer (18) comprises a substantially non-conducting, fluorine chemistry inert material, such as HfO2, ZrO2, Al2O3 or TiO2.

Abstract translation: 一种用于制造微机电系统（MEMS）装置的方法，包括在基底（14）上提供基底层（10）和机械层（12），在基底层（10）之间提供牺牲层（16） 和所述机械层（12），在所述牺牲层（16）和所述衬底（14）之间提供蚀刻停止层（18），以及通过干法化学蚀刻去除所述牺牲层（16），其中所述干化学蚀刻 使用含氟等离子体进行，并且蚀刻停止层（18）包括基本上不导电的氟化学惰性材料，例如HfO 2，ZrO 2，Al 2 O 3或TiO 2。

公开(公告)号：US20100066208A1

公开(公告)日：2010-03-18

申请号：US12372369

申请日：2009-02-17

Applicant: Jaeyoung CHOI ,  Jongmin KIM ,  Sang Yoon LEE

Inventor： Jaeyoung CHOI ,  Jongmin KIM ,  Sang Yoon LEE

IPC: H02N2/18

CPC classification number: H02N2/18 ,  B81B2201/038 ,  B81B2203/0376 ,  B81C1/00103 ,  B81C2201/0115

Abstract: Exemplary embodiments relate to an energy converting apparatus and a method for converting energy, which may convert energy of an applied signal into electrical energy. The energy converting apparatus may include at least one nanowire which resonates in response to the applied signal. The resonating nanowire may contact an electrode allowing a current to flow through the electrode and the nanowire by a Schottky contact between the electrode and the nanowire. The method for converting energy may include applying a signal to at least one nanowire to resonate the nanowire, and generating electrical energy through the contact between the resonating nanowire and an electrode.

Abstract translation: 示例性实施例涉及能量转换装置和用于转换能量的方法，其可以将施加的信号的能量转换成电能。 能量转换装置可以包括响应于所施加的信号而谐振的至少一个纳米线。 谐振纳米线可以接触允许电流通过电极和纳米线之间的肖特基接触流过电极和纳米线的电极。 用于转换能量的方法可以包括将信号施加到至少一个纳米线以共振纳米线，以及通过谐振纳米线和电极之间的接触产生电能。

公开(公告)号：US20100033278A1

公开(公告)日：2010-02-11

申请号：US12373778

申请日：2007-07-18

Applicant: David Patrick Arnold ,  Janhavi Shariniwas Agashe

Inventor： David Patrick Arnold ,  Janhavi Shariniwas Agashe

IPC: H01F7/08

CPC classification number: H01H50/005 ,  B81B3/0021 ,  B81B2201/038 ,  B81B2203/051 ,  H02K33/18

Abstract: Embodiments of the subject invention relate to a method and apparatus for electromagnetic actuation. Embodiments of an electromagnet actuator in accordance with the subject invention can include a fixed main body and a deformable membrane or displaceable piston-like member. In the case of piston motion, in specific embodiments, the piston can be supported by a corrugated diaphragm or bellows. In various embodiments, all or portions of the electromagnet actuator can be produced using microfabrication techniques. Specific embodiment of the subject invention can incorporate a plurality of magnets providing magnetic flux to a plurality of coil conductor elements so as to provide a plurality of locations that a force is applied to the moveable body portion of the electromagnetic actuator. Specific embodiments can incorporate an array of magnets interdigitated with an array of coil conductor elements, where the arrays can include 2, 5, 10, 20, or more each. Further specific embodiments allow the relative position of the magnetic flux and coil conductor elements to remain substantially the same during the movement of the moveable body by positioning the magnets and coil conductor elements on the moveable body so that the relative position of the magnets and the coil conductor elements on the moveable body do not change with the movement of the moveable body.

Abstract translation: 本发明的实施例涉及一种用于电磁致动的方法和装置。 根据本发明的电磁致动器的实施例可以包括固定主体和可变形膜或可移动的活塞状构件。 在活塞运动的情况下，在具体实施例中，活塞可由波纹膜片或波纹管支撑。 在各种实施例中，电磁致动器的全部或部分可以使用微细加工技术制造。 本发明的具体实施例可以包括向多个线圈导体元件提供磁通量的多个磁体，以便提供将力施加到电磁致动器的可移动主体部分的多个位置。 具体实施例可以包括与线圈导体元件阵列相互指向的磁体阵列，其中阵列可以包括2,5,10,20或更多个。 进一步的具体实施例允许通过将磁体和线圈导体元件定位在可移动体上，使得磁通量和线圈导体元件的相对位置在移动体的移动期间保持基本相同，使得磁体和线圈的相对位置 可移动体上的导体元件不随着可移动体的移动而变化。

公开(公告)号：US20090288479A1

公开(公告)日：2009-11-26

申请号：US12395213

申请日：2009-02-27

Applicant: SHANE C. WOODY ,  Bethany A. Woody ,  Marcin B. Bauza ,  Stuart T. Smith ,  Nilay Chakraborty

Inventor： SHANE C. WOODY ,  Bethany A. Woody ,  Marcin B. Bauza ,  Stuart T. Smith ,  Nilay Chakraborty

IPC: G01B5/28

CPC classification number: B01F11/0088 ,  B01F13/0059 ,  B81B3/0027 ,  B81B2201/0292 ,  B81B2201/038 ,  B82Y15/00 ,  G01N11/162 ,  G01N2203/0286

Abstract: The present invention provides standing wave fluidic and biological tools, including: at least one elongated fiber that has mesoscale (i.e. milliscale), microscale, nanoscale, or picoscale dimensions, the at least one elongated fiber having a first end and a second end; and an actuator coupled to the first end of the at least one elongated fiber, wherein the actuator is operable for applying oscillation cycles to the at least one elongated fiber in one or more directions, and wherein the actuator is operable for generating a standing wave in the at least one elongated fiber. These standing wave fluidic and biological tools are selectively disposed in a fluid to provide a function such as mixing the fluid, measuring the viscosity of the fluid, attracting particles in the fluid, shepherding particles in the fluid, providing propulsive force in the fluid, pumping the fluid, dispensing the fluid, sensing particles in the fluid, and detecting particles in the fluid, among others.

Abstract translation: 本发明提供了驻波流体学和生物学工具，其包括：至少一种细长纤维，其具有中尺度（即，微米），微米级，纳米级或者尺寸尺寸，所述至少一种细长纤维具有第一端和第二端; 以及联接到所述至少一个细长光纤的第一端的致动器，其中所述致动器可操作以在一个或多个方向上对所述至少一根细长光纤施加振荡周期，并且其中所述致动器可操作以产生驻波 所述至少一根细长纤维。 这些驻波流体和生物工具选择性地设置在流体中以提供诸如混合流体，测量流体的粘度，吸引流体中的颗粒，流体中的游牧颗粒，在流体中提供推进力的泵送 流体，分配流体，感测流体中的颗粒，以及检测流体中的颗粒等。

公开(公告)号：US20090072658A1

公开(公告)日：2009-03-19

申请号：US11592506

申请日：2006-11-03

Applicant: Mohamed Yahia Benslimane ,  Peter Gravesen

Inventor： Mohamed Yahia Benslimane ,  Peter Gravesen

IPC: H02N1/00

CPC classification number: H02N1/006 ,  B81B3/007 ,  B81B2201/038 ,  H01L41/0471 ,  H01L41/083 ,  H01L41/0836 ,  H01L41/0986 ,  H01L41/27 ,  H01L41/333 ,  H01L41/45 ,  H04R23/00 ,  Y10S310/80 ,  Y10T428/24612

Abstract: A composite for a transducer facilitates an increased actuation force as compared to similar prior art composites for transducers. In accordance with the present invention, the composite also facilitates increased compliance of the transducer in one direction and an improved reaction time as compared to similar prior art composites for transducers, as well as provides an increased lifetime of the transducer in which it is applied.

Abstract translation: 与用于换能器的类似的现有技术复合材料相比，用于换能器的复合材料促进了增加的致动力。 根据本发明，与用于换能器的类似的现有技术复合材料相比，复合材料还有助于提高换能器在一个方向上的顺应性和改进的反应时间，并且提供其应用传感器的寿命增加。

公开(公告)号：US20080225370A1

公开(公告)日：2008-09-18

申请号：US11725338

申请日：2007-03-16

Applicant: Justin Dennis Mansell

Inventor： Justin Dennis Mansell

IPC: G02B26/08

CPC classification number: G02B26/06 ,  B81B2201/038 ,  B81B2201/042 ,  B81C1/00158 ,  G02B26/0825

Abstract: This continuous phase sheet deformable mirror leverages advances in polymer manufacturing to create a low-cost alternative to the existing microelectromechanical system (MEMS) and bulk (piezoelectric and electrostrictive) deformable mirror technology. These novel mirrors can be used for any form of phase control including but not limited to piston control, beam steering, and higher order adaptive optics. The preferred mirror surface is a pellicle, but any thin polymer high optical quality surface will suffice. The thin polymer phase sheet can be combined with any actuator structure, like those produced by MEMS, to create a higher quality hybrid deformable mirror.

Abstract translation: 这种连续相片可变形反射镜利用了聚合物制造中的进步，以创建现有的微机电系统（MEMS）和体（压电和电致伸缩）可变形反射镜技术的低成本替代方案。 这些新颖的反射镜可用于任何形式的相位控制，包括但不限于活塞控制，光束转向和较高阶自适应光学。 优选的镜面是防护薄膜，但是任何薄的聚合物高光学质量的表面就足够了。 薄聚合物相片可以与任何致动器结构组合，如由MEMS制造的致动器结构，以产生更高质量的混合可变形反射镜。

公开(公告)号：US07367186B2

公开(公告)日：2008-05-06

申请号：US10449351

申请日：2003-05-30

Applicant: Ken Clements

Inventor： Ken Clements

IPC: F01B29/10

CPC classification number: F03G7/065 ,  B81B3/0029 ,  B81B2201/038 ,  B82Y15/00 ,  C21D2201/01 ,  C22C13/00 ,  C22F1/006 ,  F05B2250/84 ,  Y10S977/725 ,  Y10S977/732 ,  Y10S977/849 ,  Y10S977/89

Abstract: The present invention is a method and apparatus for achieving high work output per unit volume in micro-robotic actuators, and in particular TiNi actuators. Such actuators are attractive as a means of powering nano-robotic movement, and are being developed for manipulation of structures at near the molecular scale. In these very small devices (one micron scale), one means of delivery of energy is by electron beams. Movement of mechanical structures a few microns in extent has been demonstrated in a scanning electron microscope. Results of these and subsequent experiments will be described, with a description of potential structures for fabricating moving a microscopic x-y stage.

Abstract translation: 本发明是一种用于在微型机器人致动器，特别是TiNi致动器中实现每单位体积的高工作输出的方法和装置。 这样的致动器作为对纳米机器人运动的供电的手段是有吸引力的，并且正在开发用于在分子规模附近的结构的操纵。 在这些非常小的器件（一微米级）中，一种能量传递方式是电子束。 已经在扫描电子显微镜中证明了在几微米范围内的机械结构的移动。 将描述这些和随后的实验的结果，并描述了用于制造移动微观x-y阶段的潜在结构。