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公开(公告)号：US20150315012A1
公开(公告)日：2015-11-05
申请号：US14647529
申请日：2012-11-27
IPC分类号： B81B3/00 , G02B26/00 , F03G6/00 , G02F1/1333
CPC分类号： B81B3/0029 , B81B2201/038 , F03G6/00 , F03G7/005 , G02B26/004 , G02F1/133362 , Y02E10/46 , Y10S901/01
摘要： A liquid crystal elastomer actuator to move in a fluid is described herein. The actuator includes a body with dimensions between 100 nm and 800 μm having a low Reynolds number. The body includes a first and a second spatially separated volume, each comprising a liquid crystal elastomer. The first volume is doped with a first photoactive doping substance to absorb electromagnetic radiation at a first wavelength and the second volume is doped with a second photoactive doping substance to absorb electromagnetic radiation at a second wavelength. The first and second volumes change shape as a consequence of light absorption at the first or second wavelength, defining a first and a second joint. A first absorbance of the first volume at a given wavelength is different than a second absorbance of the second volume at a given wavelength, the first and second absorbance are measured in the same time interval.
摘要翻译： 这里描述了在流体中移动的液晶弹性体致动器。 致动器包括具有低雷诺数的尺寸在100nm和800μm之间的主体。 本体包括第一和第二空间分离的体积，每个体积包含液晶弹性体。 第一体积掺杂有第一光活性掺杂物质以吸收第一波长的电磁辐射，并且第二体积掺杂有第二光活性掺杂物质以吸收第二波长的电磁辐射。 第一和第二体积由于在第一或第二波长处的光吸收的结果而改变形状，限定了第一和第二接头。 在给定波长处的第一体积的第一吸光度与给定波长处的第二体积的第二吸光度不同，在相同的时间间隔中测量第一和第二吸光度。
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公开(公告)号：US08648206B2
公开(公告)日：2014-02-11
申请号：US12518862
申请日：2007-10-22
申请人： Masahiro Irie , Shizuka Takami
发明人： Masahiro Irie , Shizuka Takami
IPC分类号： C07D417/08
CPC分类号： B81B3/0029 , F03G7/005 , Y02E10/46
摘要： Disclosed is light-driven actuator element characterized in that, inter alia, it can be reduced to micrometer size, is rapidly responsive, and reversibly changes to enable repeated use. The light-driven actuator element includes a crystal of diarylethene compound which changes shape upon photoisomerization (e.g., the compound of Structural Formula (I) below, where R1 represents a hydrogen atom or methyl group and R2 represents a methyl group). The element can be a rod-shaped or plate-like microcrystal having a size on the order of micrometer. The element bends (or contracts) on irradiation with ultraviolet light and expands to return to the original size on irradiation with visible light.
摘要翻译： 公开了一种光驱动致动器元件，其特征在于，特别地，其可以减小到微米尺寸，快速响应，并且可逆地改变以使得能够重复使用。 光驱动致动器元件包括在光异构化时改变形状的二芳基乙烯化合物的晶体（例如，下述结构式（I）的化合物，其中R 1表示氢原子或甲基，R 2表示甲基）。 该元件可以是具有大约数量级的尺寸的棒状或板状微晶。 元件在紫外线照射下弯曲（或收缩），并在可见光照射下膨胀回到原始尺寸。
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公开(公告)号：US20140034820A1
公开(公告)日：2014-02-06
申请号：US14111720
申请日：2011-04-20
CPC分类号： B81B3/0029 , G01J1/0266 , G01J1/0407 , G01J1/0411 , G01J1/0422 , G01J1/0425 , G01J1/0488 , G01J1/4257 , G02B5/18 , G02B5/1809
摘要： Light-detection systems that do not destroy the light to be detected or change the propagation direction of the light are described. In one aspect, a light-detection system includes an optical element composed of a substrate with a planar surface and a polarization insensitive, high contrast, sub-wavelength grating composed of posts that extend from the planar surface. The posts and/or lattice arrangement of the posts are non-periodically varied to impart orbital angular momentum and at least one helical wavefront on the light transmitted through the optical element.
摘要翻译： 描述了不破坏待检测光或改变光的传播方向的光检测系统。 一方面，光检测系统包括由具有平坦表面的基板和由平面表面延伸的柱构成的偏振不敏感的高对比度的亚波长光栅组成的光学元件。 柱的柱和/或格子布置不是周期性地变化的，以在透过光学元件的光上赋予轨道角动量和至少一个螺旋波前。
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公开(公告)号：US20180208454A1
公开(公告)日：2018-07-26
申请号：US15872271
申请日：2018-01-16
发明人： Tsjerk Hans HOEKSTRA
CPC分类号： B81B3/0021 , B81B3/0029 , B81B2201/0257 , B81B2201/047 , B81B2203/0109 , B81C1/00158 , G01H9/00 , G01H9/004 , H04R7/04 , H04R19/005 , H04R23/008 , H04R31/006 , H04R2201/003
摘要： There is provided a flexible membrane for use in a microelectromechanical transducer, the flexible membrane comprising an electromagnetic waveguide. There is further provided a microelectromechanical system comprising a substrate which comprises the flexible membrane, and a process for forming the flexible membrane. The flexible membrane may be configured to operate within an optical microphone system.
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5.发明授权公开(公告)号：US09511994B2
公开(公告)日：2016-12-06
申请号：US14480051
申请日：2014-09-08
申请人： INVENSENSE, INC.
CPC分类号： B81B7/007 , B81B3/0029 , B81B2201/032 , B81B2207/012 , B81B2207/07 , B81C1/00182 , B81C1/00269 , B81C1/00301 , B81C2201/013 , B81C2201/019 , B81C2203/0109 , B81C2203/0792
摘要： A micro-electro-mechanical system device is disclosed. The micro-mechanical system device comprises a first silicon substrate comprising: a handle layer comprising a first surface and a second surface, the second surface comprises a cavity; an insulating layer deposited over the second surface of the handle layer; a device layer having a third surface bonded to the insulating layer and a fourth surface; a piezoelectric layer deposited over the fourth surface of the device layer; a metal conductivity layer disposed over the piezoelectric layer; a bond layer disposed over a portion of the metal conductivity layer; and a stand-off formed on the first silicon substrate; wherein the first silicon substrate is bonded to a second silicon substrate, comprising: a metal electrode configured to form an electrical connection between the metal conductivity layer formed on the first silicon substrate and the second silicon substrate.
摘要翻译： 公开了一种微机电系统装置。 微机械系统装置包括第一硅衬底，其包括：手柄层，包括第一表面和第二表面，所述第二表面包括空腔; 沉积在手柄层的第二表面上的绝缘层; 具有结合到绝缘层的第三表面和第四表面的器件层; 沉积在器件层的第四表面上的压电层; 设置在所述压电层上的金属导电层; 设置在所述金属导电层的一部分上的接合层; 以及在所述第一硅衬底上形成的间隔件; 其中所述第一硅衬底接合到第二硅衬底，包括：金属电极，被配置为在所述第一硅衬底上形成的所述金属传导层与所述第二硅衬底之间形成电连接。
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公开(公告)号：US20150187828A1
公开(公告)日：2015-07-02
申请号：US13854834
申请日：2013-04-01
IPC分类号： H01L27/146 , H04N5/33 , B81B3/00 , G02B13/00
CPC分类号： B81B3/0029 , B81B2201/032 , G01J3/0229 , G01J3/2823 , G06F3/0304 , H01L27/14629 , H04N5/2258 , H04N5/332 , H04N9/045
摘要： Imaging systems may include an image sensor and a microelectromechanical systems array. The microelectromechanical systems array may be mounted over the image sensor. The system may include an infrared lens that focuses infrared light onto a first surface of the microelectromechanical systems array and a visible light source that illuminates an opposing second surface of the microelectromechanical systems array. The image sensor may capture images of the opposing second surface of the microelectromechanical systems array. The system may include processing circuitry that generates infrared images of a scene using the captured images of the microelectromechanical systems array. Microelectromechanical systems elements in the microelectromechanical systems array may change position or shape in response to infrared light that is absorbed by the microelectromechanical systems elements. Each microelectromechanical systems element may include infrared absorbing material on a metal layer. The system may include optical elements that focus visible light onto the image sensor.
摘要翻译： 成像系统可以包括图像传感器和微机电系统阵列。 微机电系统阵列可以安装在图像传感器上。 该系统可以包括将红外光聚焦到微机电系统阵列的第一表面上的红外透镜和照亮微机电系统阵列的相对的第二表面的可见光源。 图像传感器可以捕获微机电系统阵列的相对的第二表面的图像。 该系统可以包括利用微机电系统阵列的捕获图像产生场景的红外图像的处理电路。 微机电系统阵列中的微电子机械系统元件可以响应于被微机电系统元件吸收的红外光而改变位置或形状。 每个微机电系统元件可以包括在金属层上的红外吸收材料。 该系统可以包括将可见光聚焦到图像传感器上的光学元件。
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公开(公告)号：US20150060756A1
公开(公告)日：2015-03-05
申请号：US14016699
申请日：2013-09-03
申请人： JAE I. PARK
发明人： JAE I. PARK
CPC分类号： B81B3/0029 , B81B3/0021 , B81B7/0093 , B81B2201/0292 , B81B2201/047 , B82Y20/00 , G02B6/00 , G02B6/1225 , G02B6/1228
摘要： An optical-microwave-quantum transducer can include a tapered optical fiber configured to transmit and receive optical signals. The optical-microwave-quantum transducer can also include a cantilever that can include an optical cavity that includes a nanophotonic crystal. The optical cavity can be configured to provide mechanical excitation in response to electromagnetic excitation induced by photons emitted from the tapered optical fiber. The cantilever can also include a mechanical coupler that is configured to induce electrical modulation onto a superconducting cavity in response to the mechanical excitation. The mechanical coupler can also be configured to provide mechanical excitation in response to electromagnetic excitation induced by photons from the superconducting cavity. The optical cavity can further be configured to provide electromagnetic excitation that induces optical modulation on the tapered optical fiber in response to the mechanical excitation.
摘要翻译： 光学微波量子换能器可以包括配置成发送和接收光信号的锥形光纤。 光学微波量子换能器还可以包括悬臂，其可以包括包括纳米光子晶体的光学腔。 光腔可以被配置为响应于从锥形光纤发射的光子引起的电磁激发而提供机械激励。 悬臂还可以包括机械耦合器，其被配置为响应于机械激励而在超导腔上引起电调制。 机械耦合器还可以被配置为响应于来自超导腔的光子引起的电磁激励而提供机械激励。 光腔可以进一步配置成提供响应于机械激励而在锥形光纤上引起光调制的电磁激励。
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公开(公告)号：US08859879B2
公开(公告)日：2014-10-14
申请号：US13136087
申请日：2011-07-21
申请人： Ravi Doraiswami , Michael G. Pecht , Arvind Sai Sarathi Vasan , Yunhan Huang , Andrew Michael Kluger
发明人： Ravi Doraiswami , Michael G. Pecht , Arvind Sai Sarathi Vasan , Yunhan Huang , Andrew Michael Kluger
IPC分类号： H01L31/0216 , H01L31/02 , B81B3/00 , H01G9/20
CPC分类号： B81B3/0029 , H01G9/2059
摘要： Described herein is an energy harvesting device and a method for its fabrication for the harvesting of solar energy. Solar energy is absorbed using a photosensitive material which is coated upon a flexible membrane, which is suspended over a metal signal line of an RF MEMS structure. By controlling the discharge sequence the stored electrical charge can be transferred as high voltage pulses to an external load or rechargeable batteries. The output voltage can be adjusted by controlling the on/off frequency of operation of the switch.
摘要翻译： 本文描述了能量收集装置及其制造用于收集太阳能的方法。 使用感光材料吸收太阳能，该光敏材料涂覆在柔性膜上，该柔性膜悬挂在RF MEMS结构的金属信号线上。 通过控制放电顺序，存储的电荷可以作为高电压脉冲传送到外部负载或可充电电池。 可以通过控制开关的开/关频率来调节输出电压。
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公开(公告)号：US20120017978A1
公开(公告)日：2012-01-26
申请号：US13136087
申请日：2011-07-21
申请人： Ravi Doraiswami , Michael G. Pecht , Arvind Sai Sarathi Vasan , Yunhan Huang , Andrew Michael Kluger
发明人： Ravi Doraiswami , Michael G. Pecht , Arvind Sai Sarathi Vasan , Yunhan Huang , Andrew Michael Kluger
IPC分类号： H01L31/0216 , H01L31/02
CPC分类号： B81B3/0029 , H01G9/2059
摘要： Described herein is an energy harvesting device and a method for its fabrication for the harvesting of solar energy. Solar energy is absorbed using a photosensitive material which is coated upon a flexible membrane, which is suspended over a metal signal line of an RF MEMS structure. By controlling the discharge sequence the stored electrical charge can be transferred as high voltage pulses to an external load or rechargeable batteries. The output voltage can be adjusted by controlling the on/off frequency of operation of the switch.
摘要翻译： 本文描述了能量收集装置及其制造用于收集太阳能的方法。 使用感光材料吸收太阳能，该光敏材料涂覆在柔性膜上，该柔性膜悬挂在RF MEMS结构的金属信号线上。 通过控制放电顺序，存储的电荷可以作为高电压脉冲传送到外部负载或可充电电池。 可以通过控制开关的开/关频率来调节输出电压。
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公开(公告)号：US06588208B1
公开(公告)日：2003-07-08
申请号：US10058887
申请日：2002-01-28
申请人： Ken Clements
发明人： Ken Clements
IPC分类号： F01B2910
CPC分类号： F03G7/065 , B81B3/0029 , B81B2201/038 , B82Y15/00 , C21D2201/01 , C22C13/00 , C22F1/006 , F05B2250/84 , Y10S977/725 , Y10S977/732 , Y10S977/849 , Y10S977/89
摘要： The present invention is a method and apparatus for achieving high work output per unit volume in micro-robotic actuators, and in particular TiNi actuators. Such actuators are attractive as a means of powering nano-robotic movement, and are being developed for manipulation of structures at near the molecular scale. In these very small devices (one micron scale), one means of delivery of energy is by electron beams. Movement of mechanical structures a few microns in extent has been demonstrated in a scanning electron microscope. Results of these and subsequent experiments will be described, with a description of potential structures for fabricating moving a microscopic x-y stage.
摘要翻译： 本发明是一种用于在微型机器人致动器，特别是TiNi致动器中实现每单位体积的高工作输出的方法和装置。 这样的致动器作为对纳米机器人运动的供电的手段是有吸引力的，并且正在开发用于在分子规模附近的结构的操纵。 在这些非常小的器件（一微米级）中，一种能量传递方式是电子束。 已经在扫描电子显微镜中证明了在几微米范围内的机械结构的移动。 将描述这些和随后的实验的结果，并描述了用于制造移动微观x-y阶段的潜在结构。
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