Fabrication of filamentary field-emission device, including self-aligned
gate
    152.
    发明授权
    Fabrication of filamentary field-emission device, including self-aligned gate 失效
    制造丝状场致发射器件,包括自对准栅极

    公开(公告)号:US5462467A

    公开(公告)日:1995-10-31

    申请号:US118490

    申请日:1993-09-08

    Abstract: A field-emission structure suitable for large-area flat-panel televisions centers around an insulating porous layer (24A) that overlies a lower conductive region (22) situated over insulating material of a supporting substrate (20). Electron-emissive filaments (30) occupy pores (28) extending through the porous layer. A conductive gate layer (34A) through which openings (36) extend at locations centered on the filaments typically overlies the porous layer. Cavities (38) are usually provided in the porous layer along its upper surface at locations likewise centered on the filaments.In fabricating the structure, the pores are preferably formed by etching charged-particle tracks. Electrochemical deposition is employed to selectively create the filaments in the pores. Self-alignment of the gate openings to the filaments is achieved with charged-particle track etching and/or further electrochemical processing.

    Abstract translation: 适用于大面积平板电视的场发射结构围绕位于位于支撑衬底(20)的绝缘材料之上的下导电区域(22)的绝缘多孔层(24A)周围。 电子发射丝(30)占据延伸穿过多孔层的孔(28)。 开口(36)通过所述导电栅极层(34A)延伸穿过长丝的位置,通常覆盖在多孔层上。 通常在多孔层中沿着其上表面在同样位于细丝上的位置处设置空腔(38)。 在制造结构时,优选通过蚀刻带电粒子迹线形成孔。 使用电化学沉积来选择性地在孔中产生细丝。 通过带电粒子轨迹蚀刻和/或进一步的电化学处理实现了栅极开口对长丝的自对准。

    Field emission device
    153.
    发明授权
    Field emission device 失效
    场发射装置

    公开(公告)号:US4663559A

    公开(公告)日:1987-05-05

    申请号:US798587

    申请日:1985-11-15

    CPC classification number: H01J3/021 H01J1/3042 H01J2201/30403 H01J2201/319

    Abstract: A device is disclosed which produces high current, low noise, low lateral energy, stochastic electron emission from a multiplicity of insulative particles subjected to a field. The insulative particles are in and of a surface thickness comprised of a random mixture of insulative and conductive particles in ohmic contact. Emission is achieved at applied potentials of about 5 volts which produce a field sufficient to emit electron currents of nanoamperes to milliamperes. Single devices or arrays of devices may be batch fabricated. Each device has an imtegral, implicity self-aligned electron optic system comprising means for modulating, focusing and deflecting the formed current beam, and means shielding the device from ambient magnetic fields.

    Abstract translation: 公开了一种从多个经过场的绝缘粒子产生高电流,低噪声,低横向能量,随机电子发射的装置。 绝缘颗粒处于由欧姆接触的绝缘和导电颗粒的无规混合物组成的表面厚度内。 在约5伏的施加电位下实现发射,其产生足以发射纳米电流至毫安的电场。 单个器件或器件阵列可以批量制造。 每个器件具有一个整体的,包含自对准的电子光学系统,其包括用于调制,聚焦和偏转形成的电流束的装置,以及将该装置与环境磁场屏蔽的装置。

    Composite field emission source and method of fabricating the same
    155.
    发明申请
    Composite field emission source and method of fabricating the same 有权
    复合场发射源及其制造方法

    公开(公告)号:US20090167147A1

    公开(公告)日:2009-07-02

    申请号:US12154903

    申请日:2008-05-27

    Abstract: A method of fabricating a composite field emission source is provided. A first stage of film-forming process is performed by using RF magnetron sputtering, so as to form a nano structure film on a substrate, in which the nano structure film is a petal-like structure composed of a plurality of nano graphite walls. Afterward, a second stage of film-forming process is performed for increasing carbon accumulation amount on the nano structure film. Therefore, the composite field emission source with high strength and nano coral-like structures can be obtained, whereby improving the effect and life of electric field emission.

    Abstract translation: 提供了一种制造复合场致发射源的方法。 通过使用RF磁控管溅射进行成膜处理的第一阶段,以在纳米结构膜为由多个纳米石墨壁构成的花瓣状结构的基板上形成纳米结构膜。 之后,进行第二阶段的成膜工艺以增加纳米结构膜上的碳积累量。 因此,可以获得具有高强度和纳米珊瑚状结构的复合场发射源,从而提高电场发射的效果和寿命。

    Triode structure field emission display device using carbon nanotubes and method of fabricating the same
    156.
    发明授权
    Triode structure field emission display device using carbon nanotubes and method of fabricating the same 失效
    使用碳纳米管的三极结构场致发射显示装置及其制造方法

    公开(公告)号:US07527988B2

    公开(公告)日:2009-05-05

    申请号:US10949524

    申请日:2004-09-27

    Abstract: A field emission display device and a method of fabricating the same are provided. The field emission display device may include a substrate, a transparent cathode layer, an insulation layer, a gate electrode, a resistance layer, and carbon nanotubes. The transparent cathode layer is deposited on the substrate. The insulation layer is formed on the cathode layer and has a well exposing the cathode layer. The gate electrode is formed on the insulation layer and has an opening corresponding to the well. The resistance layer is formed to surround the surface of the gate electrode and the inner walls of the opening and the well so as to block ultraviolet rays. The carbon nanotube field emitting source is positioned on the exposed cathode layer.

    Abstract translation: 提供场发射显示装置及其制造方法。 场致发射显示装置可以包括基板,透明阴极层,绝缘层,栅电极,电阻层和碳纳米管。 透明阴极层沉积在衬底上。 绝缘层形成在阴极层上并具有使阴极层暴露的良好状态。 栅电极形成在绝缘层上并且具有对应于阱的开口。 电阻层形成为围绕栅电极的表面和开口和阱的内壁,以阻挡紫外线。 碳纳米管场发射源位于暴露的阴极层上。

    Method of operating and process for fabricating an electron source
    157.
    发明授权
    Method of operating and process for fabricating an electron source 失效
    用于制造电子源的操作和处理方法

    公开(公告)号:US07317278B2

    公开(公告)日:2008-01-08

    申请号:US10763552

    申请日:2004-01-23

    Applicant: Heinz H. Busta

    Inventor: Heinz H. Busta

    Abstract: A method of operating and process for fabricating an electron source. A conductive rod is covered by an insulating layer, by dipping the rod in an insulation solution, for example. The rod is then covered by a field emitter material to form a layered conductive rod. The rod may also be covered by a second insulating material. Next, the materials are removed from the end of the rod and the insulating layers are recessed with respect to the field emitter layer so that a gap is present between the field emitter layer and the rod. The layered rod may be operated as an electron source within a vacuum tube by applying a positive bias to the rod with respect to the field emitter material and applying a higher positive bias to an anode opposite the rod in the tube. Electrons will accelerate to the charged anode and generate soft X-rays.

    Abstract translation: 一种用于制造电子源的操作和处理方法。 导电棒被绝缘层覆盖,例如通过将棒浸入绝缘溶液中。 然后将杆用场发射体材料覆盖以形成层状导电棒。 杆也可以被第二绝缘材料覆盖。 接下来,从棒的端部去除材料,并且绝缘层相对于场发射极层凹陷,使得在场发射极层和棒之间存在间隙。 层叠的杆可以通过相对于场致发射体材料向杆施加正偏压并且向与管中的杆相对的阳极施加更高的正偏压而在真空管内作为电子源来操作。 电子将加速到带电阳极并产生软X射线。

    Cathode structure for field emission device and method of fabricating the same
    159.
    发明授权
    Cathode structure for field emission device and method of fabricating the same 有权
    场致发射器件的阴极结构及其制造方法

    公开(公告)号:US06682383B2

    公开(公告)日:2004-01-27

    申请号:US09860397

    申请日:2001-05-17

    CPC classification number: H01J9/025 H01J2201/30403

    Abstract: A cathode structure for a field emission device, which is an essential component of a field emission device, and a method of fabricating the same are provided. An emitter material for electron emission constituting cathodes is formed in a particulate emitter, the particulate emitter is formed of a material from which electrons can be easily emitted at a low electric field. A significant advantage of the present invention over a conventional art is that the present invention patterns an emitter material to a cathode electrode using a photolithography process or a lift-off process. In the lift-off process, the emitting compound is patterned using a sacrifice layer. Also, in another embodiment of the present invention, there is disclosed a method of easily fabricating cathodes for a triode-type field emission device using a particulate emitter material at a low process temperature. Therefore, the present invention provides a method of fabricating a cathode for a triode-type field emission device using particulate emitter that is synthesized at a high temperature of 600° C. over, as the emitter material.

    Abstract translation: 提供了场致发射器件的阴极结构及其制造方法。 用于形成阴极的电子发射用发射体材料形成在颗粒状发射体中,微粒发射体由电子能够以低电场容易地发射的材料形成。 本发明相对于传统技术的显着优点是本发明使用光刻工艺或剥离工艺将发射极材料图案化成阴极电极。 在剥离过程中,使用牺牲层对发光化合物进行图案化。 此外,在本发明的另一个实施例中,公开了一种在低工艺温度下使用颗粒发射体材料容易地制造用于三极管型场致发射器件的阴极的方法。 因此,本发明提供一种使用在600℃的高温下合成的粒子发射体作为发射极材料的三极管型场致发射器件的阴极的制造方法。

    Method of making field emitters
    160.
    发明授权

    公开(公告)号:US06620640B2

    公开(公告)日:2003-09-16

    申请号:US10156284

    申请日:2002-05-28

    Inventor: Terry L. Gilton

    CPC classification number: H01J9/025 H01J2201/30403 H01J2209/0226

    Abstract: A process is provided for forming sharp asperities useful as field emitters. The process comprises patterning and doping a silicon substrate. The doped silicon substrate is anodized. The anodized area is then used for field emission tips. The process of the present invention is also useful for low temperature sharpening of tips fabricated by other methods. The tips are anodized, and then exposed to radiant energy and the resulting oxide is removed.

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