公开(公告)号：US20170074834A1

公开(公告)日：2017-03-16

申请号：US15341567

申请日：2016-11-02

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe ,  Stefan Kolb ,  Horst Theuss

IPC: G01N29/24 ,  G01N29/30

Abstract: A photoacoustic gas sensor device for analyzing gas includes an emitter module and a pressure-sensitive module. The emitter module is arranged on a carrier substrate and emits light pulses. The pressure-sensitive module is arranged on the carrier substrate within a reference gas volume. The reference gas volume is separated from a volume intended to be filled with a gas to be analyzed. Further, the pressure-sensitive module generates a sensor signal indicating information on an acoustic wave caused by light pulses emitted by the emitter module interacting with a reference gas within the reference gas volume. Additionally, the emitter module is arranged so that light pulses emitted by the emitter module reach the reference gas volume after crossing the volume intended to be filled with the gas to be analyzed.

Abstract translation: 用于分析气体的光声气体传感器装置包括发射器模块和压敏模块。 发射器模块布置在载体衬底上并发射光脉冲。 压敏模块布置在载体基板上的参考气体体积内。 将参考气体体积与要被分析的气体填充的体积分离。 此外，压敏模块产生传感器信号，该传感器信号指示由与参考气体体积内的参考气体相互作用的发射器模块发射的光脉冲引起的声波信息。 此外，发射器模块被布置成使得发射器模块发射的光脉冲在穿过要被分析的气体填充的体积之后达到参考气体体积。

公开(公告)号：US09580299B2

公开(公告)日：2017-02-28

申请号：US14971879

申请日：2015-12-16

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe ,  Martin Wurzer ,  Christian Herzum

IPC: H04R19/04 ,  B81B3/00 ,  H04R19/00 ,  B81C1/00 ,  H04R7/06

CPC classification number: B81B3/007 ,  B81B3/0018 ,  B81B3/0035 ,  B81B3/0051 ,  B81B2201/0257 ,  B81C1/00158 ,  H04R7/06 ,  H04R19/005 ,  H04R19/04

Abstract: A MEMS device and a method of making a MEMS device are disclosed. In one embodiment a semiconductor device comprises a substrate, a moveable electrode and a counter electrode, wherein the moveable electrode and the counter electrode are mechanically connected to the substrate. The movable electrode is configured to stiffen an inner region of the movable membrane.

Abstract translation: 公开了MEMS器件和制造MEMS器件的方法。 在一个实施例中，半导体器件包括衬底，可移动电极和对电极，其中可移动电极和对电极机械连接到衬底。 可移动电极构造成加强可移动膜的内部区域。

公开(公告)号：US20170034634A1

公开(公告)日：2017-02-02

申请号：US15290877

申请日：2016-10-11

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe ,  Stefan Barzen ,  Marc Fueldner

IPC: H04R19/04 ,  H04R31/00

CPC classification number: H04R19/04 ,  H04R7/00 ,  H04R19/005 ,  H04R31/00 ,  H04R31/003 ,  H04R31/006 ,  Y10T29/49005

Abstract: A sound transducer structure includes a membrane and a counter electrode. The membrane includes a first main surface in a sound transducing region made of a membrane material, and an edge region. The counter electrode includes a second main surface arranged in parallel to the first main surface of the membrane on a side of a free volume opposite the first main surface of the membrane. A plurality of elevations extend in the sound transducing region from the second main surface of the counter electrode into the free volume. The membrane and the counter electrode are arranged to provide a capacity therebetween. The membrane comprises a corrugation groove extending in the sound transducing region from the first main surface of the membrane into the free volume.

Abstract translation: 声换能器结构包括膜和对电极。 膜包括由膜材料制成的声音传导区域中的第一主表面和边缘区域。 对电极包括与膜的第一主表面相对的自由体积的一侧平行于膜的第一主表面布置的第二主表面。 多个高度在声音传播区域中从对置电极的第二主表面延伸到自由体积中。 膜和对电极被布置成在它们之间提供容量。 膜包括在声音传播区域中从膜的第一主表面延伸到自由体积的波纹沟槽。

公开(公告)号：US09533874B2

公开(公告)日：2017-01-03

申请号：US14811050

申请日：2015-07-28

Applicant: Infineon Technologies AG

Inventor： Marc Fueldner ,  Alfons Dehe

IPC: H01L41/113 ,  B81C1/00 ,  B81B3/00

CPC classification number: B81B3/0021 ,  B81B2201/0257 ,  B81B2203/0127 ,  B81C1/00158 ,  B81C1/0023 ,  H01L2224/48091 ,  H01L2224/48195 ,  H01L2224/48471 ,  H01L2224/73265 ,  H01L2924/10253 ,  H01L2924/3025 ,  H04R2201/003 ,  H01L2924/00014 ,  H01L2924/00

Abstract: A sensor module and semiconductor chip. One embodiment provides a carrier. A semiconductor chip includes a first recess and a second recess and a main surface of the semiconductor chip. The semiconductor chip is mounted to the carrier such that the first recess forms a first cavity with the carrier and the second recess forms a second cavity with the carrier. The first cavity is in fluid connection with the second cavity.

Abstract translation: 传感器模块和半导体芯片。 一个实施例提供一种载体。 半导体芯片包括半导体芯片的第一凹部和第二凹部以及主表面。 半导体芯片被安装到载体上，使得第一凹槽形成第一空腔，载体和第二凹槽与载体形成第二腔。 第一腔与第二腔流体连接。

公开(公告)号：US20160313288A1

公开(公告)日：2016-10-27

申请号：US15136469

申请日：2016-04-22

Applicant: Infineon Technologies AG

Inventor： Horst Theuss ,  Gottfried Beer ,  Sebastian Beer ,  Alfons Dehe ,  Franz Jost ,  Stefan Kolb ,  Guenther Ruhl ,  Rainer Markus Schaller

IPC: G01N29/24 ,  G01N29/02

CPC classification number: G01N29/2425 ,  G01N29/032 ,  G01N2291/021

Abstract: A photo-acoustic gas sensor includes a light emitter unit having a light emitter configured to emit a beam of light pulses with a predetermined repetition frequency and a wavelength corresponding to an absorption band of a gas to be sensed, and a detector unit having a microphone. The light emitter unit is arranged so that the beam of light pulses traverses an area configured to accommodate the gas. The detector unit is arranged so that the microphone can receive a signal oscillating with the repetition frequency.

Abstract translation: 光声气体传感器包括光发射器单元，其具有光发射器，其被配置为发射具有预定重复频率和对应于待感测气体的吸收带的波长的光脉冲束，以及具有麦克风的检测器单元 。 光发射器单元布置成使得光束脉冲穿过配置成容纳气体的区域。 检测器单元布置成使得麦克风可以接收以重复频率振荡的信号。

公开(公告)号：US20160014538A1

公开(公告)日：2016-01-14

申请号：US14864746

申请日：2015-09-24

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe

IPC: H04R31/00

CPC classification number: H04R31/00 ,  H04R1/00 ,  H04R1/005 ,  H04R9/06 ,  H04R17/00 ,  H04R19/005 ,  H04R19/02 ,  H04R2201/003 ,  H04R2231/00 ,  Y10T29/49005

Abstract: A digital loudspeaker includes a substrate, a first stator fixed with respect to the substrate, a second stator fixed with respect to the substrate and spaced at a distance from the first stator, and a membrane between the first stator and the second stator. The membrane is displaceable between a first position in which the membrane mechanically contacts the first stator and a second position in which the membrane mechanically contacts the second stator. The first stator and the second stator are arranged to electrostatically move the membrane from a rest position spaced apart from the first position and the second position to the first position and the second position, respectively.

Abstract translation: 数字扬声器包括基板，相对于基板固定的第一定子，相对于基板固定并与第一定子间隔一定距离的第二定子，以及在第一定子和第二定子之间的隔膜。 膜可以在其中机械地接触第一定子的第一位置和薄膜机械地接触第二定子的第二位置之间移位。 第一定子和第二定子被布置成使隔膜从静止位置静止地从第一位置和第二位置间隔开移动到第一位置和第二位置。

公开(公告)号：US09181080B2

公开(公告)日：2015-11-10

申请号：US13931584

申请日：2013-06-28

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe ,  Andreas Froemel

IPC: B81B3/00 ,  H04R23/00 ,  B81C1/00 ,  H04R7/02

CPC classification number: H04R19/04 ,  B81B3/0021 ,  B81B3/0078 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81C1/00158 ,  H04R7/02 ,  H04R7/08 ,  H04R19/005 ,  H04R23/006 ,  H04R31/00 ,  H04R2201/003 ,  H04R2410/03

Abstract: A MEMS microphone includes a first diaphragm element, a counter electrode element, and a low pressure region between the first diaphragm element and the counter electrode element. The low pressure region has a pressure less than an ambient pressure.

Abstract translation: MEMS麦克风包括第一隔膜元件，对电极元件和第一隔膜元件与对电极元件之间的低压区域。 低压区域的压力小于环境压力。

公开(公告)号：US20150256913A1

公开(公告)日：2015-09-10

申请号：US14198634

申请日：2014-03-06

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe

IPC: H04R1/08

CPC classification number: H04R1/08 ,  H04R17/02 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00 ,  H04R2201/003 ,  H04R2207/00 ,  H04R2499/11

Abstract: A sensor structure, including: a first diaphragm structure, an electrode element, and a second diaphragm structure arranged on an opposite side of the electrode element from the first diaphragm structure is disclosed. The sensor structure may also include a chamber formed by the first and second diaphragm structures, where the pressure in the chamber is lower than the pressure outside of the chamber. A method for forming the sensor structure is likewise disclosed.

Abstract translation: 公开了一种传感器结构，包括：第一隔膜结构，电极元件和布置在电极元件与第一隔膜结构相对侧的第二隔膜结构。 传感器结构还可以包括由第一和第二隔膜结构形成的室，其中室中的压力低于室外的压力。 同样公开了一种用于形成传感器结构的方法。

公开(公告)号：US20150251899A1

公开(公告)日：2015-09-10

申请号：US14198645

申请日：2014-03-06

Applicant: INFINEON TECHNOLOGIES AG

Inventor： Alfons Dehe ,  Roland Helm

IPC: B81B7/00 ,  H04R23/00 ,  G01L9/00

CPC classification number: B81B7/04 ,  B81B7/0041 ,  B81B2201/0257 ,  B81B2201/0264 ,  G01L1/14 ,  G01L9/0041 ,  G01L9/0042 ,  G01L9/0072 ,  G01L9/0073 ,  G01L13/025 ,  H04R19/005 ,  H04R23/00 ,  H04R2201/003

Abstract: In various embodiments, a sensor structure is provided. The sensor structure may include a first conductive layer; an electrode element; and a second conductive layer arranged on an opposite side of the electrode element from the first conductive layer. The first conductive layer and the second conductive layer may form a chamber. The pressure in the chamber may be lower than the pressure outside of the chamber.

Abstract translation: 在各种实施例中，提供传感器结构。 传感器结构可以包括第一导电层; 电极元件; 以及布置在电极元件的与第一导电层相对的一侧的第二导电层。 第一导电层和第二导电层可以形成室。 室中的压力可以低于室外的压力。

公开(公告)号：US20150245118A1

公开(公告)日：2015-08-27

申请号：US14711630

申请日：2015-05-13

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe

IPC: H04R1/00

CPC classification number: H04R31/00 ,  H04R1/00 ,  H04R1/005 ,  H04R9/06 ,  H04R17/00 ,  H04R19/005 ,  H04R19/02 ,  H04R2201/003 ,  H04R2231/00 ,  Y10T29/49005

Abstract: A digital loudspeaker and a method for operating a digital loudspeaker are disclosed. In an embodiment a digital loudspeaker includes a substrate, a first stator fixed with respect to the substrate, a second stator fixed with respect to the substrate and spaced at a distance from the first stator, and a membrane between the first stator and the second stator. The membrane is displaceable between a first position in which the membrane mechanically contacts the first stator and a second position in which the membrane mechanically contacts the second stator. The first stator and the second stator are arranged to electrostatically move the membrane from a rest position spaced apart from the first position and the second position to the first position and the second position, respectively.

Abstract translation: 公开了一种用于操作数字扬声器的数字扬声器和方法。 在一个实施例中，数字扬声器包括基板，相对于基板固定的第一定子，相对于基板固定并与第一定子隔开一段距离的第二定子，以及在第一定子和第二定子之间的隔膜 。 膜可以在其中机械地接触第一定子的第一位置和薄膜机械地接触第二定子的第二位置之间移位。 第一定子和第二定子被布置成使隔膜从静止位置静止地从第一位置和第二位置间隔开移动到第一位置和第二位置。