公开(公告)号：US07098453B2

公开(公告)日：2006-08-29

申请号：US11054504

申请日：2005-02-09

Applicant: Kazunori Ando ,  Amiko Nihei

Inventor： Kazunori Ando ,  Amiko Nihei

IPC: H01J37/28

CPC classification number: G01Q30/18 ,  G01Q30/20

Abstract: A scanning probe microscopy system has a cantilever having a probe at a distal end thereof and a heating unit for heating the sample. A moving unit effects relative movement between the cantilever probe and the sample to bring the cantilever probe into contact with a surface of the sample for measuring a property of the sample. A shielding unit shields between the cantilever probe and the sample during heating of the sample by the heating unit.

Abstract translation: 扫描探针显微镜系统具有在其远端具有探针的悬臂和用于加热样品的加热单元。 移动单元影响悬臂探头和样品之间的相对运动，使悬臂探头与样品表面接触，以测量样品的性质。 屏蔽单元在通过加热单元加热样品期间在悬臂探头和样品之间屏蔽。

公开(公告)号：US06949745B2

公开(公告)日：2005-09-27

申请号：US10438145

申请日：2003-05-14

Applicant: Akira Yonezawa

Inventor： Akira Yonezawa

IPC: H01J37/244 ,  H01J37/145 ,  H01J37/28 ,  G21K7/00 ,  G01K1/08

CPC classification number: H01J37/244 ,  H01J37/10 ,  H01J37/28 ,  H01J2237/2449

Abstract: An electron beam apparatus has an optical axis, an electron beam source for generating an electron beam directed along the optical axis, and a magnetic field lens having an axis coincident with the optical axis for focusing the electron beam onto a sample which is subjected to a negative voltage so that secondary electrons are emitted from the sample. The magnetic field lens has a conductive cylinder surrounding a part of the optical axis to permit the passage therethrough of an electron beam from the electron beam source. A first detector detects secondary electrons emitted by the sample in a direction away from the optical axis and is disposed at a position generally confronting the conductive cylinder. A second detector is disposed over the conductive cylinder. A Wien filter deflector deflects secondary electrons emitted by the sample toward and for detection by the second detector. The Wien filter deflector is disposed on the optical axis and between the conductive cylinder and the second detector.

Abstract translation: 电子束装置具有光轴，用于产生沿着光轴定向的电子束的电子束源和具有与光轴重合的轴的磁场透镜，用于将电子束聚焦到经受 负电压使得二次电子从样品发射。 磁场透镜具有围绕光轴的一部分的导电圆柱体，以允许电子束从电子束源通过。 第一检测器检测样品沿远离光轴的方向发射的二次电子，并且设置在通常面对导电圆柱体的位置。 第二检测器设置在导电圆柱体上。 维恩滤波器偏转器将由样本发射的二次电子偏转并由第二检测器检测。 维恩滤波器偏转器设置在光轴上并且在导电圆柱体和第二检测器之间。

公开(公告)号：US06932504B2

公开(公告)日：2005-08-23

申请号：US10395683

申请日：2003-03-24

Applicant: Hiroshi Takahashi ,  Yoshiharu Shirakawabe ,  Tadashi Arai

Inventor： Hiroshi Takahashi ,  Yoshiharu Shirakawabe ,  Tadashi Arai

IPC: G01K7/02 ,  G01B7/16 ,  G01K1/18 ,  G01Q60/00 ,  G01Q60/36 ,  G01Q60/38 ,  G01B7/28

CPC classification number: G01Q60/58 ,  G01K1/18 ,  G01Q20/04 ,  Y10S977/867

Abstract: A self-detecting type cantilever for an atomic force microscope (AFM) has an electro-flexural conversion element for converting a flexural amount of the cantilever into an electric current or voltage, a temperature measurement element disposed at a front end portion of the cantilever for measuring a temperature, and a heating element disposed at the front end portion of the cantilever for heating the temperature measurement element. The temperature measurement element and the heating element are superposed with each other on a main face of the cantilever via an electrical insulating layer. As a result, even if the amount of electric energy supplied to the heating element is reduced, it is possible to effectively supply an amount of heat necessary for measurement to the temperature measurement element. Therefore, by minimizing the heat to be supplied to a sample and the cantilever, the respondency of measurement is improved and temperature measurement can be performed with a high degree of accuracy.

Abstract translation: 用于原子力显微镜（AFM）的自检型悬臂具有用于将悬臂的弯曲量转换为电流或电压的电 - 弯曲转换元件，设置在悬臂的前端部的温度测量元件， 测量温度，以及设置在悬臂前端部分的加热元件，用于加热温度测量元件。 温度测量元件和加热元件经由电绝缘层彼此重叠在悬臂的主面上。 结果，即使供给到加热元件的电能量减少，也可以有效地向测量元件供给测量所需的热量。 因此，通过将供给到样品和悬臂的热量最小化，可以提高测量的响应度，并且可以以高精度进行温度测量。

公开(公告)号：US06924481B2

公开(公告)日：2005-08-02

申请号：US10158356

申请日：2002-05-30

Applicant: Yutaka Ikku ,  Tetsuji Nishimura

Inventor： Yutaka Ikku ,  Tetsuji Nishimura

IPC: G01B21/00 ,  G01B21/30 ,  G01N23/225 ,  G01Q30/04 ,  H01J37/22 ,  H01J37/28 ,  G01N23/00

CPC classification number: G01N23/225 ,  H01J2237/2817

Abstract: Automatic pattern matching and shape measurement are enabled by adjusting a brightness level of a microscope image based on information of a local region of the image so that a magnified image of the local region takes on an appropriate brightness and is not affected by brighter peripheral portions of the image, thereby enabling feature extraction of a desired pattern. By using the inventive method in an energized beam apparatus having a sample stage capable of linear and tilting movement, a series of operations including cross section forming, sample tilting, cross section observation, and pattern recognition, may be performed on an automated basis.

Abstract translation: 通过基于图像的局部区域的信息调整显微镜图像的亮度水平来实现自动图案匹配和形状测量，使得局部区域的放大图像具有适当的亮度并且不受更明亮的外围部分的影响 图像，从而使得能够提取期望图案的特征。 通过在具有能够线性和倾斜运动的样品台的带电束装置中使用本发明的方法，可以在自动化的基础上执行包括截面形成，样品倾斜，横截面观察和图案识别的一系列操作。

公开(公告)号：US06911979B2

公开(公告)日：2005-06-28

申请号：US10005032

申请日：2001-12-04

Applicant: Rintaro Nakatani

Inventor： Rintaro Nakatani

IPC: G01N25/20 ,  G06T11/20 ,  G09G5/36 ,  G09G5/22 ,  G11B27/00 ,  H04N5/44 ,  H04N7/173

CPC classification number: G06T11/206

Abstract: A derived data display adjustment system for a sample analyzer allows user selection of one or more displayed images to be subjected to a derived data calculation process. A derived data user interface is displayed on a display screen in response to user selection of one or more displayed images to enable user selection of a derived data calculation process. A determination is made as to whether or not display of the derived data may be achieved without interfering with other displayed images. If not, a derived data adjustment user interface is displayed to enable a user to select a convenient display location for display of the derived data.

Abstract translation: 用于样本分析器的派生数据显示调整系统允许用户选择要进行衍生数据计算处理的一个或多个显示图像。 响应于用户选择一个或多个显示的图像，导出数据用户界面被显示在显示屏幕上，以使用户能够选择导出的数据计算过程。 确定是否可以在不干扰其他显示图像的情况下实现导出数据的显示。 如果不是，则显示派生数据调整用户界面以使用户能够选择用于显示派生数据的方便的显示位置。

公开(公告)号：US06904791B2

公开(公告)日：2005-06-14

申请号：US10438038

申请日：2003-05-14

Applicant: Akihiko Honma

Inventor： Akihiko Honma

IPC: G01B21/30 ,  G01Q30/04 ,  G01Q60/24 ,  G21K7/00 ,  G01N23/00

CPC classification number: G01Q30/06 ,  Y10S977/852

Abstract: A scanning probe microscope simply and accurately confirms whether or not a sample shape satisfies specified conditions. A pseudo reference image Sref1 comprises a pair of reference line profiles Lref1 and Lref2 arranged apart from each other in parallel. An operator moves and rotates the position of the pseudo reference image Sref1 on a screen so that a sample shape line profile fits between the reference line profiles Lref1 and Lref2 of the pseudo reference image Sref1. If it is possible to fit the line profile of the sample shape between the reference line profiles Lref1 and Lref2, it is determined that the sample shape is in spec, while if it is not possible to fit the line profile of the sample shape between the reference line profiles Lref1 and Lref2, no matter how the pseudo reference image Sref1 is moved and rotated, it is determined that the sample shape is out of spec.

Abstract translation: 扫描探针显微镜简单准确地确认样品形状是否满足规定的条件。 伪参考图像Sref 1包括彼此平行布置的一对参考线轮廓Lref 1和Lref 2。 操作者将伪参考图像Sref 1的位置移动并旋转到屏幕上，使得样本形状线轮廓拟合在伪参考图像Sref 1的参考线轮廓Lref 1和Lref 2之间。 如果可以将样品形状的线轮廓拟合在参考线轮廓Lref 1和Lref 2之间，则确定样品形状是规格的，而如果不可能将样品形状的线轮廓拟合 在参考线轮廓Lref 1和Lref 2之间，无论伪参考图像Sref 1如何被移动和旋转，都确定样本形状不合格。

公开(公告)号：US06885727B2

公开(公告)日：2005-04-26

申请号：US10213260

申请日：2002-08-06

Applicant: Koichi Tamura

Inventor： Koichi Tamura

IPC: G01B15/02 ,  C25D7/00 ,  C25D21/12 ,  G01N23/20 ,  G01N23/207 ,  G01N23/223

CPC classification number: G01N23/20

Abstract: An apparatus determines the thickness and composition of a multi-layered sample comprised of at least a copper layer and a tin-copper alloy plating layer disposed on the copper layer. The sample is irradiated with primary X-rays and an energy-dispersive X-ray detector detects fluorescent X-rays and diffracted X-rays emitted from the sample. An X-ray spectrum of the detected fluorescent X-rays and diffracted X-rays is generated. The concentration of copper in the tin-copper alloy plating layer of the sample is determined utilizing peak intensities of the diffracted X-rays in the X-ray spectrum. The thickness of the tin-copper alloy plating layer of the sample is determined utilizing peak intensities of the fluorescent X-rays in the X-ray spectrum and the determined copper concentration.

Abstract translation: 一种装置确定由至少铜层和设置在铜层上的锡 - 铜合金镀层组成的多层样品的厚度和组成。 样品用初级X射线照射，能量色散X射线检测器检测荧光X射线和从样品发射的衍射X射线。 产生检测出的荧光X射线和衍射X射线的X射线光谱。 使用X射线光谱中的衍射X射线的峰值强度来确定样品的锡 - 铜合金镀层中的铜浓度。 使用X射线光谱中的荧光X射线的峰强度和测定的铜浓度来确定样品的锡 - 铜合金镀层的厚度。

公开(公告)号：US06852973B2

公开(公告)日：2005-02-08

申请号：US10410224

申请日：2003-04-09

Applicant: Hidekazu Suzuki ,  Atsushi Uemoto

Inventor： Hidekazu Suzuki ,  Atsushi Uemoto

IPC: G02B7/28 ,  G01N23/225 ,  G02B7/36 ,  G21K7/00 ,  H01J37/21 ,  H01J37/28 ,  G01N13/16

CPC classification number: G01N23/225 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/216 ,  H01J2237/2817

Abstract: The present invention sets out to provide a scanning charged particle microscope equipped with a rapid control function capable of extrapolating an in-focus point from image information for a single frame and an automatic focusing system capable of reliably and precisely carrying out a focusing operation for a horizontal pattern image. The automatic focusing system provided in the scanning charged particle microscope of the present invention is provided with means for changing a focal point each raster scan line, and control means for comparing image information each scanning line and extrapolating focusing positions. The scanning line can then be made to be an inclined scanning line that is a combination of a horizontal component and a vertical component with respect to a chip array on a semiconductor wafer. Further, a method is adopted comprising a first step of reliably taking in a coarse in-focus point and a second step of detecting the in-focus point with a high degree of precision.

Abstract translation: 本发明提供了一种装备有能够从单帧的图像信息中外推聚焦点的快速控制功能的扫描带电粒子显微镜，以及能够可靠且精确地进行聚焦操作的自动对焦系统 水平图案图像。 提供在本发明的扫描带电粒子显微镜中的自动对焦系统设置有用于改变每个光栅扫描线的焦点的装置，以及用于将每个扫描线和外插聚焦位置的图像信息进行比较的控制装置。 然后可以将扫描线制成为相对于半导体晶片上的芯片阵列的水平分量和垂直分量的组合的倾斜扫描线。 此外，采用包括可靠地获取粗焦点的第一步骤和以高精度检测对焦点的第二步骤的方法。

公开(公告)号：US06850593B1

公开(公告)日：2005-02-01

申请号：US09531660

申请日：2000-03-20

Applicant: Koichi Tamura

Inventor： Koichi Tamura

IPC: G01N23/223 ,  G21K1/02

CPC classification number: G21K1/025 ,  G01N23/223 ,  G01N2223/076

Abstract: In a fluorescent X-ray analysis apparatus, a diffraction X-ray is removable from a sample even if it is formed of a mixture of fine crystals. A movable collimator mechanism capable of detecting only a collimate component of an X-ray optical flux is provided in a secondary X-ray path extending between a sample and an X-ray detector. Spectrum measurement is conducted on the same sample when the collimator mechanism is inserted and removed from the secondary X-ray path.

Abstract translation: 在荧光X射线分析装置中，即使衍射X射线由微细晶体的混合物形成，也能够从样品中除去衍射X射线。 在样品和X射线检测器之间延伸的次级X射线路径中设置能够仅检测X射线光通量的准直分量的可移动准直器机构。 当准直器机构从次X射线路径插入和移除时，对同一样品进行光谱测量。