APPARATUS AND METHOD FOR CENTERING A SUBSTRATE IN A PROCESS CHAMBER
    11.
    发明申请
    APPARATUS AND METHOD FOR CENTERING A SUBSTRATE IN A PROCESS CHAMBER 有权
    用于在过程室中设置基板的装置和方法

    公开(公告)号:US20090017228A1

    公开(公告)日:2009-01-15

    申请号:US12171594

    申请日:2008-07-11

    CPC classification number: H01L21/68 Y10S414/136

    Abstract: The present invention comprises an apparatus and method for centering a substrate in a process chamber. In one embodiment, the apparatus comprises a substrate support having a support surface adapted to receive the placement of a substrate and a reference axis substantially perpendicular to the support surface, and a plurality of centering members extending above the support surface. Each centering member is biased into a first position and is movable to a second position by interacting with an opposing member. A movement between the first position and the second position thereby causes each centering member to releasably engage with a peripheral edge of the substrate to push the substrate in a direction toward the reference axis.

    Abstract translation: 本发明包括用于使处理室中的衬底居中的装置和方法。 在一个实施例中,该装置包括具有适于接收基板的放置和基本上垂直于支撑表面的参考轴的支撑表面的基板支撑件,以及在支撑表面上方延伸的多个定心构件。 每个定心构件被偏压到第一位置,并且通过与相对构件相互作用而可移动到第二位置。 第一位置和第二位置之间的运动使得每个定心构件可释放地与基板的周缘接合,以沿着基准轴线的方向推动基板。

    Structure for transistor devices in an SRAM cell
    12.
    再颁专利
    Structure for transistor devices in an SRAM cell 有权
    SRAM单元中晶体管器件的结构

    公开(公告)号:USRE40579E1

    公开(公告)日:2008-11-25

    申请号:US09694051

    申请日:2000-10-20

    Abstract: An SRAM memory cell having first and second transfer gate transistors. The first transfer gate transistor includes a first source/drain connected to a bit line and the second transfer gate transistor has a first source/drain connected to a complement bit line. Each transfer gate transistor has a gate connected to a word line. The SRAM memory cell also includes first and second pull-down transistors configured as a storage latch. The first pull-down transistor has a first source/drain connected to a second source/drain of said first transfer gate transistor; the second pull-down transistor has a first source/drain connected to a second source/drain of said second transfer gate transistor. Both first and second pull-down transistors have a second source/drain connected to a power supply voltage node. The first and second transfer gate transistors each include a gate oxide layer having a first thickness, and the first and second pull-down transistors each include a gate oxide layer having a second thickness, wherein and the first thickness is different from the second thickness.

    Abstract translation: 一种具有第一和第二传输门晶体管的SRAM存储单元。 第一传输门晶体管包括连接到位线的第一源极/漏极,第二传输门晶体管具有连接到补码位线的第一源极/漏极。 每个传输门晶体管具有连接到字线的栅极。 SRAM存储单元还包括被配置为存储锁存器的第一和第二下拉晶体管。 第一下拉晶体管具有连接到所述第一传输栅极晶体管的第二源极/漏极的第一源极/漏极; 所述第二下拉晶体管具有连接到所述第二传输栅极晶体管的第二源极/漏极的第一源极/漏极。 第一和第二下拉晶体管都具有连接到电源电压节点的第二源极/漏极。 第一和第二传输门晶体管各自包括具有第一厚度的栅极氧化物层,并且第一和第二下拉晶体管各自包括具有第二厚度的栅极氧化物层,其中第一厚度不同于第二厚度。

    Winch-actuated umbrella
    13.
    发明授权
    Winch-actuated umbrella 有权
    绞车伞

    公开(公告)号:US07406976B1

    公开(公告)日:2008-08-05

    申请号:US11693181

    申请日:2007-03-29

    CPC classification number: A45B25/14

    Abstract: A winch for opening and closing an umbrella includes a winch drum mounted within an elongate support tube of the umbrella, to rotate about a longitudinal axis thereof. A threaded shaft is coaxial and rotationally fast with the drum. A line is fixed at one end to the drum and at other end to a sleeve, to which struts are pivotally connected, each strut being associated with a canopy-supporting rib. A travelling nut is engaged with the threaded shaft and blocked for rotation relative to the tube. A guide is fixed to the nut for guiding the line onto the drum, and a motor is also enclosed in the support tube and drivingly connected to the winch drum.

    Abstract translation: 用于打开和关闭伞的绞盘包括安装在伞的细长支撑管内的绞盘鼓,以围绕其纵向轴线旋转。 螺纹轴与滚筒同轴且旋转快。 线路一端固定在滚筒上,另一端固定在套筒上,支柱枢转地连接在该套筒上,每个支柱都与篷盖支撑肋相连。 行进的螺母与螺纹轴接合并且相对于管被阻挡以旋转。 引导件固定在螺母上,用于将引导线引导到滚筒上,马达也被封装在支撑管中并驱动地连接到绞盘鼓上。

    Motorized umbrella
    14.
    发明申请
    Motorized umbrella 有权
    机动伞

    公开(公告)号:US20080023053A1

    公开(公告)日:2008-01-31

    申请号:US11493543

    申请日:2006-07-27

    Applicant: Ping Chiu Chan

    Inventor: Ping Chiu Chan

    CPC classification number: A45B25/143

    Abstract: Radially disposed ribs for supporting the canopy of an umbrella are pivotally connected by a crown mounted on the outer end of a rod. A sleeve is in external sliding relationship with the rod. Struts are pivotally connected to the sleeve, each strut being associated with one of the ribs for splaying the ribs and collapsing them inwardly. A support tube is connected by a coaxial shaft to the rod, and the sleeve is telescopically received in the support tube. The shaft is threaded and rotated by motor, opposing ends of the threaded shaft being supported for rotation in first and second journals fixed within the support tube and the rod, respectively. A threaded nut fixedly connected to the sleeve is engaged with the threaded shaft for moving the sleeve along the rod between extended and retracted positions.

    Abstract translation: 用于支撑伞的顶盖的径向布置的肋通过安装在杆的外端上的冠部枢转地连接。 套筒与杆体处于外部滑动关系。 支柱枢转地连接到套筒,每个支柱与一个肋条相关联,用于展开肋条并将它们向内折叠。 支撑管通过同轴轴连接到杆上,并且套筒可伸缩地容纳在支撑管中。 轴被螺纹旋转并由电动机旋转,螺纹轴的相对端被分别支撑在第一和第二轴颈中,以固定在支撑管和杆内。 固定地连接到套筒的螺纹螺母与螺纹轴接合,用于沿延伸和缩回位置之间的杆移动套筒。

    Golf sunshade
    15.
    发明授权
    Golf sunshade 失效
    高尔夫遮阳伞

    公开(公告)号:US07069938B2

    公开(公告)日:2006-07-04

    申请号:US10714651

    申请日:2003-11-18

    CPC classification number: A45B17/00

    Abstract: A golf-sunshade, the main structure of the golf-sunshade comprises a middle-stick, an upper nest member, an under nest member, a fixture and a rib; wherein the top end of the middle-stick connects to the fixture, a flex member is disposed on the fixture, the upper nest member is fixed on the end of a soft pipe, the under nest member is disposed around the outer surface of the middle-stick and is able to slide up/down along the middle-stick and the soft pipe. A main rib and a branch rib of the forefront sector of the rib respectively connects to the upper nest member and the under nest member for effecting opening/closing of the sunshade; the user put the surface of the sunshade at any angle through the flex member disposed on the end of the middle-stick, and the user can take out a golf club etc. from the bag under the sunshade without closing the sunshade. The flex member disposed on the end of the middle-stick makes the user much more conveniently use the sunshade and efficiently reduces the production cost and the size and weight of the sunshade are small and light for easily carrying.

    Abstract translation: 一种高尔夫遮阳罩,高尔夫遮阳罩的主要结构包括中棒,上巢构件,下巢构件,夹具和肋; 其中中棒的顶端连接到固定装置,柔性构件设置在固定装置上,上嵌件构件固定在软管的端部上,下嵌件构件围绕中间的外表面设置 可以沿中棒和软管上下滑动。 肋骨的前缘部分的主肋和分支肋分别连接到上部嵌套构件和下部嵌套构件,用于实现遮阳罩的打开/关闭; 使用者通过设置在中棒的端部的柔性构件将遮阳板的表面以任何角度放置,并且使用者可以在遮阳罩下从袋中取出高尔夫球杆等,而不关闭遮阳。 设置在中棒的端部的柔性构件使得使用者更方便地使用遮阳罩并且有效地降低了生产成本,并且遮阳罩的尺寸和重量小而轻,便于携带。

    Methods of forming thermo-mechanical sensor
    16.
    发明授权
    Methods of forming thermo-mechanical sensor 有权
    形成热机械传感器的方法

    公开(公告)号:US06171879B2

    公开(公告)日:2001-01-09

    申请号:US09222171

    申请日:1998-12-29

    CPC classification number: G01K5/486 H01H2037/008

    Abstract: An integrated circuit and method are provided for sensing activity such as temperature variations in a surrounding environment. The integrated released beam sensor preferably includes a switch detecting circuit region and a sensor switching region connected to the switch detecting circuit region. The sensor switching region preferably includes a fixed contact layer, a sacrificial layer on the fixed contact layer, and a floating contact on the sacrificial layer and having portions thereof overlying the fixed contact layer in spaced relation therefrom in an open switch position and extending lengthwise generally transverse to a predetermined direction. The floating contact preferably includes at least two layers of material. Each of the at least two layers have a different thermal expansion coefficient so that the floating contact displaces in the predetermined direction responsive to a predetermined temperature variation so as to contact the fixed contact layer and thereby form a closed switch position. The methods of forming an integrated sensor advantageously are preferably compatible with known integrated circuit manufacturing processes, such as for CMOS circuit manufacturing, with only slight variations therefrom.

    Abstract translation: 提供集成电路和方法用于感测诸如周围环境中的温度变化的活动。 集成释放的光束传感器优选地包括开关检测电路区域和连接到开关检测电路区域的传感器开关区域。 传感器切换区域优选地包括固定接触层,固定接触层上的牺牲层和牺牲层上的浮动接触,并且在开放的开关位置中具有以与间隔开的关系的固定接触层上的部分,并且纵向延伸 横向于预定方向。 浮动接触件优选地包括至少两层材料。 所述至少两个层中的每一个具有不同的热膨胀系数,使得浮动触点响应于预定的温度变化而在预定方向上移位,以便接触固定接触层,从而形成闭合的开关位置。 有利地形成集成传感器的方法优选地与已知的集成电路制造工艺相兼容,例如用于CMOS电路制造,仅具有轻微的变化。

    Integrated released beam oscillator and associated methods
    17.
    发明授权
    Integrated released beam oscillator and associated methods 失效
    集成放大束振荡器及相关方法

    公开(公告)号:US6124765A

    公开(公告)日:2000-09-26

    申请号:US957804

    申请日:1997-10-24

    CPC classification number: H03B5/32 H03H9/24

    Abstract: An integrated oscillator and associated methods are provided for providing clock signals. The integrated oscillator preferably includes a micro-mechanical oscillating circuit for providing an oscillating clock signal. The micro-mechanical oscillating circuit preferably includes a support layer, a fixed layer positioned on a support layer, remaining portions of a sacrificial layer positioned only on portions of the fixed layer, and an oscillating layer positioned on the remaining portions of the sacrificial layer, overlying the fixed layer in spaced relation therefrom, and extending lengthwise generally transverse to a predetermined direction for defining a released beam for oscillating at a predetermined frequency. The spaced relation is preferably formed by removal of unwanted portions of the sacrificial layer. The integrated oscillator also preferably includes a clock signal controlling circuit connected to the micro-mechanical oscillating circuit for controlling the micro-mechanical oscillating circuit and for generating clock signals therefrom.

    Abstract translation: 提供集成振荡器和相关方法来提供时钟信号。 集成振荡器优选地包括用于提供振荡时钟信号的微机械振荡电路。 微机械振荡电路优选地包括支撑层,位于支撑层上的固定层,仅位于固定层的部分上的牺牲层的剩余部分和位于牺牲层的剩余部分上的振荡层, 以与其隔开的关系覆盖固定层,并且沿纵向延伸大致横向于预定方向,以限定用于以预定频率振荡的释放光束。 优选地,通过去除牺牲层的不需要的部分来形成间隔关系。 集成振荡器还优选地包括连接到微机械振荡电路的时钟信号控制电路,用于控制微机械振荡电路并从其产生时钟信号。

    Integrated released beam sensor for sensing acceleration and associated
methods
    18.
    发明授权
    Integrated released beam sensor for sensing acceleration and associated methods 失效
    集成释放的光束传感器,用于感测加速度和相关方法

    公开(公告)号:US6028343A

    公开(公告)日:2000-02-22

    申请号:US957568

    申请日:1997-10-24

    CPC classification number: G01P15/135 B81C1/00246 B81B2201/018 B81C2203/0735

    Abstract: An integrated circuit and method are provided for sensing activity such as acceleration in a predetermined direction. The integrated released beam sensor preferably includes a switch detecting circuit region and a sensor switching region connected to and positioned adjacent the switch detecting circuit region. The sensor switching region preferably includes a fixed contact layer, remaining portions of a sacrificial layer on the fixed contact layer, and a floating contact on the remaining portions of the sacrificial layer and having only portions thereof directly overlying the fixed contact layer and in spaced relation therefrom in a normally open position and extending lengthwise generally transverse to the predetermined direction so that the floating contact contacts the fixed contact layer responsive to acceleration in the predetermined direction. The floating contact is preferably a released beam which is released by opening a window or removing unwanted portions of the sacrificial layer. The methods of forming an integrated sensor advantageously are preferably compatible with know integrated circuit manufacturing processes, such as for CMOS circuit manufacturing, with only slight variations therefrom.

    Abstract translation: 提供集成电路和方法来感测诸如在预定方向上的加速度的活动。 集成释放的光束传感器优选地包括开关检测电路区域和连接到并且位于开关检测电路区域附近的传感器开关区域。 传感器切换区域优选地包括固定接触层,固定接触层上的牺牲层的剩余部分和牺牲层的其余部分上的浮动接触,并且仅具有直接覆盖固定接触层的部分并且间隔开 从而处于常开位置并且大致横向于预定方向延伸,使得浮动接触件响应于预定方向上的加速度而接触固定接触层。 浮动触点优选地是释放的光束,其通过打开窗口或去除牺牲层的不需要的部分来释放。 有利地形成集成传感器的方法优选地与知道的集成电路制造工艺相兼容,例如用于CMOS电路制造,仅具有轻微的变化。

    Integrated circuit having selective bias of transistors for low voltage
and low standby current and related methods
    19.
    发明授权
    Integrated circuit having selective bias of transistors for low voltage and low standby current and related methods 失效
    具有用于低电压和低待机电流的晶体管的选择性偏置的集成电路及相关方法

    公开(公告)号:US5929695A

    公开(公告)日:1999-07-27

    申请号:US867538

    申请日:1997-06-02

    CPC classification number: H03F1/30 G05F3/205 G11C5/146

    Abstract: An integrated circuit includes a plurality of MOSFETs on a substrate. The plurality of MOSFETs preferably includes at least one MOSFET having a first conductivity type and at least one MOSFET having a second conductivity type. Each MOSFET has an initial threshold voltage. The integrated circuit also preferably includes first and second biasing circuits which selectively bias only a selected well a corresponding conductivity type of the plurality of MOSFETs to produce an absolute value of an effective threshold voltage of only the selected MOSFET which is lower than an absolute value of the initial threshold voltage thereof and thereby inhibit a high standby current for the integrated circuit. Method aspects of the invention are also disclosed.

    Abstract translation: 集成电路包括在衬底上的多个MOSFET。 多个MOSFET优选地包括具有第一导电类型的至少一个MOSFET和具有第二导电类型的至少一个MOSFET。 每个MOSFET都具有初始阈值电压。 集成电路还优选地包括第一和第二偏置电路,其选择性地仅偏压所选择的阱以对应多个MOSFET的导电类型,以产生仅所选MOSFET的有效阈值电压的绝对值,该绝对值低于绝对值 其初始阈值电压,从而抑制集成电路的高待机电流。 还公开了本发明的方法方面。

    Integrated released beam, thermo-mechanical sensor for sensing
temperature variations and associated methods
    20.
    发明授权
    Integrated released beam, thermo-mechanical sensor for sensing temperature variations and associated methods 失效
    用于感应温度变化和相关方法的集成放射束,热机械传感器

    公开(公告)号:US5917226A

    公开(公告)日:1999-06-29

    申请号:US957802

    申请日:1997-10-24

    CPC classification number: G01K5/486 H01H2037/008

    Abstract: An integrated circuit and method are provided for sensing activity such as temperature variations in a surrounding environment. The integrated released beam sensor preferably includes a switch detecting circuit region and a sensor switching region connected to the switch detecting circuit region. The sensor switching region preferably includes a fixed contact layer, a sacrificial layer on the fixed contact layer, and a floating contact on the sacrificial layer and having portions thereof overlying the fixed contact layer in spaced relation therefrom in an open switch position and extending lengthwise generally transverse to a predetermined direction. The floating contact preferably includes at least two layers of material. Each of the at least two layers have a different thermal expansion coefficient so that the floating contact displaces in the predetermined direction responsive to a predetermined temperature variation so as to contact the fixed contact layer and thereby form a closed switch position. The methods of forming an integrated sensor advantageously are preferably compatible with known integrated circuit manufacturing processes, such as for CMOS circuit manufacturing, with only slight variations therefrom.

    Abstract translation: 提供集成电路和方法用于感测诸如周围环境中的温度变化的活动。 集成释放的光束传感器优选地包括开关检测电路区域和连接到开关检测电路区域的传感器开关区域。 传感器切换区域优选地包括固定接触层,固定接触层上的牺牲层和牺牲层上的浮动接触,并且在开放的开关位置中具有以与间隔开的关系的固定接触层上的部分,并且纵向延伸 横向于预定方向。 浮动接触件优选地包括至少两层材料。 所述至少两个层中的每一个具有不同的热膨胀系数,使得浮动触点响应于预定的温度变化而在预定方向上移位,以便接触固定接触层,从而形成闭合的开关位置。 有利地形成集成传感器的方法优选地与已知的集成电路制造工艺相兼容,例如用于CMOS电路制造,仅具有轻微的变化。

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