公开(公告)号：US20100206454A1

公开(公告)日：2010-08-19

申请号：US12769218

申请日：2010-04-28

申请人： Hidehiro MAEDA ,  Satoshi Katagiri

发明人： Hidehiro MAEDA ,  Satoshi Katagiri

IPC分类号： B29C65/48 ,  B32B41/00 ,  B32B37/10

CPC分类号： H01L21/30 ,  B32B7/12 ,  B32B37/10 ,  B32B38/1833 ,  H01L21/2007 ,  H01L21/67092 ,  H01L21/683 ,  H01L21/6831 ,  H01L2924/00 ,  H01L2924/0002 ,  H05K3/0061 ,  H05K3/0067 ,  H05K3/321 ,  H05K3/325 ,  H05K3/386 ,  H05K3/4611 ,  H05K3/4638 ,  H05K13/0015 ,  Y10T29/49126 ,  Y10T29/4913 ,  Y10T29/5313 ,  Y10T29/53196 ,  Y10T156/10

摘要： Provided is a substrate holding unit that holds a pair of substrates that are aligned and layered, comprising a first holding member that holds one of the substrates; a plurality of members to be joined that are connected to the first holding member; a second holding member that holds the other of the substrates to face the one of the substrates; a plurality of joining members that exert an adhesion force on the members to be joined and are connected to the second holding member at positions corresponding to positions of the members to be joined; and an adhesion restricting section that restricts the adhesion force until the substrates are aligned.

摘要翻译： 提供一种基板保持单元，其保持对准且分层的一对基板，包括保持基板之一的第一保持构件; 多个待接合的构件，其连接到第一保持构件; 第二保持构件，其保持另一个基板面对所述一个所述基板; 多个连接构件，其对要接合的构件施加粘合力，并且在对应于待接合构件的位置的位置处连接到第二保持构件; 以及限制直到基板对准的粘合力的粘合限制部。

公开(公告)号：US10714351B2

公开(公告)日：2020-07-14

申请号：US13761348

申请日：2013-02-07

申请人： Hidehiro Maeda ,  Satoshi Katagiri

发明人： Hidehiro Maeda ,  Satoshi Katagiri

IPC分类号： H01L21/30 ,  H05K3/00 ,  H05K3/46 ,  H05K13/00 ,  H05K3/38 ,  H05K3/32 ,  H01L21/20 ,  H01L21/683 ,  H01L21/67 ,  B32B38/18 ,  B32B7/12 ,  B32B37/10

摘要： Provided is a substrate holding unit that holds a pair of substrates that are aligned and layered, comprising a first holding member that holds one of the substrates; a plurality of members to be joined that are connected to the first holding member; a second holding member that holds the other of the substrates to face the one of the substrates; a plurality of joining members that exert an adhesion force on the members to be joined and are connected to the second holding member at positions corresponding to positions of the members to be joined; and an adhesion restricting section that restricts the adhesion force until the substrates are aligned.

公开(公告)号：US08570704B2

公开(公告)日：2013-10-29

申请号：US12879779

申请日：2010-09-10

申请人： Hidehiro Maeda ,  Masahiro Yoshihashi

发明人： Hidehiro Maeda ,  Masahiro Yoshihashi

IPC分类号： H01T23/00

CPC分类号： H01L21/6831 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/68771

摘要： A substrate holder is reliably transported in a state of holding a substrate. There is provided a substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate holder is to be transported in a state of holding the substrate. The substrate holder includes a holder body that is to have the substrate placed thereon, and a connector terminal that is externally exposed through the holder body, where the connector terminal is attachable to and detachable from an external power supply terminal. There is also provided a substrate transport apparatus for transporting a substrate holder holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate transport apparatus includes a placement section that has a placement surface on which the substrate holder is placed, where the placement section holds the substrate holder, and a power supply terminal that supplies power to the substrate holder placed on the placement surface.

摘要翻译： 在保持基板的状态下，可靠地输送基板保持架。 提供了一种用于通过由外部源提供的电力产生的静电力来保持基板的基板保持器。 在保持基板的状态下输送基板支架。 衬底保持器包括：具有放置在其上的衬底的保持器主体和通过保持器主体外部暴露的连接器端子，其中连接器端子可附接到外部电源端子并可从其拆卸。 还提供了一种用于通过由从外部源供给的电力产生的静电力来运送保持基板的基板保持架的基板输送装置。 基板输送装置包括：放置部，其具有放置基板保持件的放置面，放置部保持基板保持件;电源端子，其向放置面放置的基板保持器供电。

公开(公告)号：US20130274915A1

公开(公告)日：2013-10-17

申请号：US13916149

申请日：2013-06-12

申请人： Hidehiro Maeda ,  Kazuya Okamoto ,  Yasuaki Tanaka

发明人： Hidehiro Maeda ,  Kazuya Okamoto ,  Yasuaki Tanaka

IPC分类号： H01L21/677

CPC分类号： H01L21/677 ,  H01L21/67092 ,  H01L21/67259 ,  H01L21/68 ,  H01L24/34 ,  H01L2924/00014 ,  Y10T156/10 ,  H01L2224/37099 ,  H01L2224/84

摘要： Provided is a transport method comprising judging whether there is a possibility that misalignment greater than or equal to a threshold value occurs between substrates to be layered that are held by a pair of substrate holders aligned and stacked by an aligning section, the misalignment occurring when the pair of substrate holders is transported from the aligning section to a pressure applying section; and if the judgment indicates that there is the possibility of misalignment, transporting the pair of substrate holders to a region other than the pressure applying section. Whether there is the possibility of misalignment may be judged based on acceleration of the substrate holders. Whether there is the possibility of misalignment may be judged based on acceleration of a transporting section that transports the substrate holders. Whether there is the possibility of misalignment may be judged based on relative positions of the substrate holders. Whether there is the possibility of misalignment may be judged based on relative positions of (i) a transporting section that transports the pair of substrate holders and (ii) one of the pair of substrate holders.

摘要翻译： 提供了一种传送方法，包括判断是否存在由被对准部对准和堆叠的一对基板保持器保持的要分层的基板之间的大于或等于阈值的偏移的可能性， 一对基板支架从对准部分输送到压力施加部分; 并且如果判断表示存在不对准的可能性，则将一对基板保持器传送到除压力施加部以外的区域。 可以基于基板保持器的加速度判断是否存在未对准的可能性。 可以基于输送基板保持器的输送部的加速度判断是否存在未对准的可能性。 可以基于基板保持器的相对位置来判断是否存在未对准的可能性。 可以基于（i）输送一对基板保持器的输送部和（ii）一对基板保持件中的一个的相对位置来判断是否存在未对准的可能性。

公开(公告)号：US08489227B2

公开(公告)日：2013-07-16

申请号：US13548287

申请日：2012-07-13

申请人： Hidehiro Maeda ,  Kazuya Okamoto ,  Yasuaki Tanaka

发明人： Hidehiro Maeda ,  Kazuya Okamoto ,  Yasuaki Tanaka

IPC分类号： G06F7/00 ,  G06F19/00 ,  H01L21/68 ,  H01L23/544 ,  B29C65/00 ,  G01B11/00

CPC分类号： H01L21/677 ,  H01L21/67092 ,  H01L21/67259 ,  H01L21/68 ,  H01L24/34 ,  H01L2924/00014 ,  Y10T156/10 ,  H01L2224/37099 ,  H01L2224/84

摘要： Provided is a transport method comprising judging whether there is a possibility that misalignment greater than or equal to a threshold value occurs between substrates to be layered that are held by a pair of substrate holders aligned and stacked by an aligning section, the misalignment occurring when the pair of substrate holders is transported from the aligning section to a pressure applying section; and if the judgment indicates that there is the possibility of misalignment, transporting the pair of substrate holders to a region other than the pressure applying section. Whether there is the possibility of misalignment may be judged based on at least one of an acceleration of the substrate holders, an acceleration of a transporting section that transports the substrate holders, relative positions of the substrate holders, or relative positions of the transporting section and one of the pair of substrate holders.

摘要翻译： 提供了一种传送方法，包括判断是否存在由被对准部对准和堆叠的一对基板保持器保持的要分层的基板之间的大于或等于阈值的偏移的可能性， 一对基板支架从对准部分输送到压力施加部分; 并且如果判断表示存在不对准的可能性，则将一对基板保持器传送到除压力施加部以外的区域。 是否存在未对准的可能性可以基于基板保持器的加速度，输送基板保持器的输送部分的加速度，基板保持器的相对位置或输送部分的相对位置和 一对基板支架之一。

公开(公告)号：US20110007447A1

公开(公告)日：2011-01-13

申请号：US12879779

申请日：2010-09-10

申请人： Hidehiro MAEDA ,  Masahiro Yoshihashi

发明人： Hidehiro MAEDA ,  Masahiro Yoshihashi

IPC分类号： H01L21/683

CPC分类号： H01L21/6831 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/68771

摘要： A substrate holder is reliably transported in a state of holding a substrate. There is provided a substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate holder is to be transported in a state of holding the substrate. The substrate holder includes a holder body that is to have the substrate placed thereon, and a connector terminal that is externally exposed through the holder body, where the connector terminal is attachable to and detachable from an external power supply terminal. There is also provided a substrate transport apparatus for transporting a substrate holder holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate transport apparatus includes a placement section that has a placement surface on which the substrate holder is placed, where the placement section holds the substrate holder, and a power supply terminal that supplies power to the substrate holder placed on the placement surface.

摘要翻译： 在保持基板的状态下，可靠地输送基板保持架。 提供了一种用于通过由外部源提供的电力产生的静电力来保持基板的基板保持器。 在保持基板的状态下输送基板支架。 衬底保持器包括：具有放置在其上的衬底的保持器主体和通过保持器主体外部暴露的连接器端子，其中连接器端子可附接到外部电源端子并且可从外部电源端子拆卸。 还提供了一种用于通过由从外部源供给的电力产生的静电力来运送保持基板的基板保持架的基板输送装置。 基板输送装置包括：放置部，其具有放置基板保持件的放置面，放置部保持基板保持件;电源端子，其向放置面放置的基板保持器供电。

公开(公告)号：US20110288674A1

公开(公告)日：2011-11-24

申请号：US13112719

申请日：2011-05-20

申请人： Isao Sugaya ,  Satoru Sanada ,  Hidehiro Maeda ,  Masahiro Yoshihashi ,  Mikio Ushijima

发明人： Isao Sugaya ,  Satoru Sanada ,  Hidehiro Maeda ,  Masahiro Yoshihashi ,  Mikio Ushijima

IPC分类号： G06F17/00 ,  B23Q7/00 ,  B23Q3/00

CPC分类号： H01L21/67092 ,  H01L21/67276 ,  H01L21/67294 ,  Y10T29/49998

摘要： Management of the holding member that holds the semiconductor substrate is efficiently implemented. Provided is a holding member management apparatus that manages a substrate holding member that holds a semiconductor substrate in a manufacturing apparatus that manufactures a stacked semiconductor apparatus by joining a plurality of semiconductor substrates; comprising a history storing part that stores the usage history of the substrate holding member in association with identification information that specifies the substrate holding member and a holding member specifying part that specifies and outputs identification information of the substrate holding member whose usage is to be suspended based on the usage history stored in the history storing part.

摘要翻译： 有效地实施保持半导体基板的保持构件的管理。 提供一种保持构件管理装置，其通过接合多个半导体衬底来管理在制造半导体装置的制造装置中保持半导体衬底的衬底保持构件; 包括历史存储部分，其与用于指定基板保持部件的识别信息相关联地存储基板保持部件的使用历史;以及保持部件指定部，其指定并输出其使用被暂停的基板保持部件的识别信息 关于存储在历史存储部分中的使用历史。