公开(公告)号：US5904159A

公开(公告)日：1999-05-18

申请号：US751769

申请日：1996-11-08

申请人： Hiroshi Kato ,  Kazuhiko Hayashi ,  Hiroyuki Kohno

发明人： Hiroshi Kato ,  Kazuhiko Hayashi ,  Hiroyuki Kohno

IPC分类号： C09G1/02 ,  B08B7/00

CPC分类号： C09G1/02

摘要： A polishing slurry is formed of a silica-dispersed solution obtained by dispersing, in an aqueous solvent, a fumed silica having an average primary particle size of from 5 to 30 nm, the silica-dispersed solution exhibiting a light scattering index (n) of from 3 to 6 at a silica concentration of 1.5% by weight, and the fumed silica dispersed therein having an average secondary particle size of from 30 to 100 nm on the weight basis. The polishing slurry is produced by pulverizing, using a high-pressure homogenizer, a silica-dispersed solution obtained by dispersing a fumed silica in an aqueous solvent, so that the fumed silica possesses an average secondary particle size of from 30 to 100 nm on the weight basis. The polishing slurry is used for polishing semiconductor wafers and inter-layer dielectric in an IC process.

摘要翻译： 抛光浆料由二氧化硅分散溶液形成，其通过在水性溶剂中分散平均一次粒径为5〜30nm的热解法二氧化硅，显示出光散射指数（n）的二氧化硅分散溶液 3〜6，二氧化硅浓度为1.5重量％，分散在其中的热解法二氧化硅的重均分子量为30〜100nm。 抛光浆料通过使用高压均化器将通过将热解法二氧化硅分散在水性溶剂中获得的二氧化硅分散溶液进行粉碎来制备，使得煅制二氧化硅的平均二次粒径为30〜100nm， 重量基础。 抛光浆料用于在IC工艺中研磨半导体晶片和层间电介质。

公开(公告)号：US5854569A

公开(公告)日：1998-12-29

申请号：US890027

申请日：1997-07-31

申请人： Hiroyuki Kohno ,  Yasuyuki Nakamura ,  Takahiro Miki

发明人： Hiroyuki Kohno ,  Yasuyuki Nakamura ,  Takahiro Miki

IPC分类号： H01L27/04 ,  G05F3/24 ,  H01L21/822 ,  H03K17/16 ,  H03K17/687 ,  G05F3/02

CPC分类号： G05F3/242 ,  H03K2217/0018

摘要： A current source and a semiconductor integrated circuit device for suppressing fluctuations occured in an output current of current sources composed MOS transistors for switching. A back gate voltage of MOS transistors M1, M3 for switching connected in series to a constant current generator 9 is supplied through a power source line 5d independent of a power source line 4d which supplies a driving voltage. The stabilization of the back gate voltage leads the operation of the MOS transistors M1, M3 to be stabilized, thereby suppressing the fluctuations occured in the output currents I.sub.out and I.sub.out current sources.

摘要翻译： 电流源和半导体集成电路器件，用于抑制组合用于切换的MOS晶体管的电流源的输出电流发生的波动。 用于与恒定电流发生器9串联连接的开关用的MOS晶体管M1，M3的背栅电压通过电源线5d供给，而电源线5d独立于提供驱动电压的电源线4d。 背栅极电压的稳定导致MOS晶体管M1，M3的操作稳定，从而抑制输出电流Iout和+ E，ovs Iout + EE电流源中发生的波动。

公开(公告)号：US5657018A

公开(公告)日：1997-08-12

申请号：US538485

申请日：1995-10-03

申请人： Hiroyuki Kohno ,  Yasuyuki Nakamura ,  Takahiro Miki

发明人： Hiroyuki Kohno ,  Yasuyuki Nakamura ,  Takahiro Miki

IPC分类号： H03M1/76 ,  H03M7/00 ,  H03M7/08 ,  H03M7/16 ,  H03M5/00

CPC分类号： H03M7/165

摘要： A bar graph decoder includes input terminals to which 5-bit digital data is input, a logic circuit for outputting a thermometer code changing continuously at a constant ratio in response to the input data, and output terminals connected to the logic circuit for outputting switch select signals according to the digital input. The logic circuit is configured only of 2-input OR circuits and 2-input AND circuits. As a result, a bar graph decoder having a simple configuration and a reduced number of elements can be provided.

摘要翻译： 条形图解码器包括输入5位数字数据的输入端子，用于输出响应于输入数据以恒定比例连续变化的温度计代码的逻辑电路，以及连接到用于输出开关选择的逻辑电路的输出端子 信号根据数字输入。 逻辑电路仅由2输入OR电路和2输入AND电路组成。 结果，可以提供具有简单配置和数量减少的元件的条形图解码器。