公开(公告)号：US06377140B1

公开(公告)日：2002-04-23

申请号：US09526490

申请日：2000-03-15

申请人： Hisanori Ehara ,  Hajime Shimamura ,  Yoshiaki Fujita ,  Tomokazu Komazaki

发明人： Hisanori Ehara ,  Hajime Shimamura ,  Yoshiaki Fujita ,  Tomokazu Komazaki

IPC分类号： H03H964

CPC分类号： H03H9/6483

摘要： A surface-acoustic-wave filter has a pair of series-arm surface-acoustic-wave resonators and a shunt-arm surface-acoustic-wave resonator coupled in a T configuration. An additional bridging surface-acoustic-wave resonator is coupled between the input and output terminals, in parallel with the series arm. The bridging surface-acoustic-wave resonator provides enhanced attenuation of spurious signals at multiples of the passband frequency.

摘要翻译： 表面声波滤波器具有一对串联臂表面声波谐振器和以T构型耦合的分流臂表面声波谐振器。 另外的桥接表面声波谐振器与串联臂并联在输入端和输出端之间。 桥接表面声波谐振器在通带频率的倍数提供杂散信号的增强衰减。

公开(公告)号：US08756777B2

公开(公告)日：2014-06-24

申请号：US12647794

申请日：2009-12-28

申请人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Go Endo ,  Yasuyuki Saitou ,  Hisanori Ehara ,  Masanori Ueda

发明人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Go Endo ,  Yasuyuki Saitou ,  Hisanori Ehara ,  Masanori Ueda

IPC分类号： H04R17/00 ,  H03H9/205 ,  H03H9/56 ,  H03H9/64 ,  H03H9/15 ,  H03H9/17 ,  H03H9/54 ,  H03H9/60 ,  H03H3/00 ,  H03H3/007

CPC分类号： H03H9/205 ,  H03H3/00 ,  H03H3/0073 ,  H03H3/04 ,  H03H9/0211 ,  H03H9/02118 ,  H03H9/02133 ,  H03H9/02149 ,  H03H9/131 ,  H03H9/132 ,  H03H9/15 ,  H03H9/173 ,  H03H9/174 ,  H03H9/178 ,  H03H9/54 ,  H03H9/568 ,  H03H9/587 ,  H03H9/588 ,  H03H9/605 ,  H03H9/6483 ,  H03H2003/021 ,  H03H2003/023 ,  H03H2003/0414 ,  H03H2003/0471 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/49124 ,  Y10T29/49208 ,  Y10T29/49224

摘要： A method of manufacturing a ladder filter including first and second resonators includes: forming a piezoelectric film on an entire surface of a substrate that has respective lower electrodes of the first and second resonator formed thereon, an conductive film on the piezoelectric film, and a second film on the conductive film; forming a pattern of the second film in a prescribed region in the second area; forming a first film on an entire surface of the substrate; etching the first film, forming a pattern of the first film, the second film and the conductive film in the second area, and forming a pattern of the first film and the conductive film in the first area, to form respective upper electrodes from the conductor film; and thereafter, etching the piezoelectric film to form respective patterns of the piezoelectric film in the first and second areas, respectively.

摘要翻译： 一种制造包括第一和第二谐振器的梯形滤波器的方法包括：在其上形成有第一和第二谐振器的各个下电极的基板的整个表面上形成压电膜，在压电膜上形成导电膜， 导电膜上的膜; 在所述第二区域中的规定区域中形成所述第二膜的图案; 在所述基板的整个表面上形成第一膜; 蚀刻第一膜，在第二区域中形成第一膜，第二膜和导电膜的图案，并且在第一区域中形成第一膜和导电膜的图案，以从导体形成相应的上电极 电影; 然后蚀刻压电膜，分别在第一和第二区域形成压电膜的各自图案。

公开(公告)号：US07545077B2

公开(公告)日：2009-06-09

申请号：US11806129

申请日：2007-05-30

申请人： Shinji Taniguchi ,  Tsuyoshi Yokoyama ,  Motoaki Hara ,  Takeshi Sakashita ,  Jun Tsutsumi ,  Masafumi Iwaki ,  Tokihiro Nishihara ,  Masanori Ueda ,  Hisanori Ehara

发明人： Shinji Taniguchi ,  Tsuyoshi Yokoyama ,  Motoaki Hara ,  Takeshi Sakashita ,  Jun Tsutsumi ,  Masafumi Iwaki ,  Tokihiro Nishihara ,  Masanori Ueda ,  Hisanori Ehara

IPC分类号： H03H9/00 ,  H01L41/08

CPC分类号： H03H9/605 ,  H03H3/02 ,  H03H9/02118 ,  H03H9/02141 ,  H03H9/132 ,  H03H9/173 ,  H03H9/174 ,  H03H2003/021

摘要： A filter includes multiple piezoelectric thin-film resonators each having a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the lower electrode, and an upper electrode provided on the piezoelectric film so that the upper electrode and the lower electrode face each other across the piezoelectric film. The multiple piezoelectric thin-film resonators include a first resonator in which at least a part of an outer curved portion of the piezoelectric film of the first resonator is located further out than an outer curved portion of a region in which the upper electrode and the lower electrode face each other across the piezoelectric film. The multiple piezoelectric thin-film resonators includes a second resonator in which at least a part of an outer curved portion of the piezoelectric film of the second resonator substantially coincides with an outer curved portion of a region in which the upper electrode and the lower electrode face each other across the piezoelectric film or is further in than the outer curved portion of the region.

摘要翻译： 滤波器包括多个压电薄膜谐振器，每个压电薄膜谐振器均具有基板，形成在基板上的下电极，形成在下电极上的压电薄膜和设置在压电薄膜上的上电极，使得上电极和下电极面 彼此横跨压电薄膜。 多个压电薄膜谐振器包括：第一谐振器，其中第一谐振器的压电膜的外弯曲部分的至少一部分位于比上电极和下电极的区域的外弯曲部分更远的位置 电极彼此面对压电薄膜。 多个压电薄膜谐振器包括第二谐振器，其中第二谐振器的压电膜的外部弯曲部分的至少一部分基本上与上电极和下电极面的区域的外弯曲部分重合 彼此隔着压电膜，或者比该区域的外部弯曲部分进一步。

公开(公告)号：US06424239B1

公开(公告)日：2002-07-23

申请号：US09580218

申请日：2000-05-26

申请人： Hisanori Ehara ,  Kazushige Noguchi ,  Yoshikazu Kihara

发明人： Hisanori Ehara ,  Kazushige Noguchi ,  Yoshikazu Kihara

IPC分类号： H03H964

CPC分类号： H03H9/0042

摘要： In a differential surface acoustic wave resonator, when an unbalanced electric signal is inputted between an input terminal 301 and an output terminal connected to a ground potential, this electric signal is inputted to two-terminal-pair surface acoustic wave resonators 351 and 352. The electric signal inputted to the two-terminal-pair surface acoustic wave resonator 351 is converted into a surface acoustic wave, and thereafter it is again converted into an electric signal to be outputted to a two-terminal-pair surface acoustic wave resonator 353. The electric signal inputted to the two-terminal-pair surface acoustic wave resonator 353 is converted into a surface acoustic wave, and thereafter it is again converted into an electric signal to be outputted from an output terminal 302 of the differential surface acoustic wave filter as a balanced signal. On the other hand, the electric signal inputted to the two-terminal-pair surface acoustic wave resonator 352 is converted into a surface acoustic wave, and thereafter it is again converted into an electric signal to be outputted to a two-terminal-pair surface acoustic wave resonator 354. The electric signal inputted to the two-terminal-pair surface acoustic wave resonator 354 is converted into a surface acoustic wave, and thereafter it is again converted into an electric signal to be outputted from an output terminal 303 of the differential surface acoustic wave filter as a balanced signal. Here, in the respective two-terminal-pair surface acoustic wave resonators 351 to 354, the phase of the electric signal to be inputted is substantially 180° different from that of the electric signal to be outputted. The balanced signals having the same phase and the same amplitude are outputted from the two output terminals of the differential surface acoustic wave filter.

摘要翻译： 在差分表面声波谐振器中，当在输入端子301和连接到地电位的输出端子之间输入不平衡电信号时，该电信号被输入到两端对声表面波谐振器351和352。 输入到两端对声表面波谐振器351的电信号被转换为表面声波，然后再次转换为电信号以输出到两端对声表面波谐振器353. 输入到两端对声表面波谐振器353的电信号被转换为表面声波，然后再次转换为从差动表面声波滤波器的输出端子302输出的电信号作为 平衡信号。 另一方面，输入到两端对声表面波谐振器352的电信号被转换为表面声波，然后再次转换为电信号以输出到两端对表面 输入到两端对声表面波谐振器354的电信号被转换成表面声波，之后再次转换为从差分的输出端子303输出的电信号 表面声波滤波器作为平衡信号。 这里，在各个双端子对表面声波谐振器351〜354中，输入的电信号的相位与输出的电信号的相位大致相差180°。 从差动表面声波滤波器的两个输出端子输出具有相同相位和幅度相同的平衡信号。