公开(公告)号：US09151775B2

公开(公告)日：2015-10-06

申请号：US13569580

申请日：2012-08-08

Applicant: Mitsuhiro Yoda

Inventor： Mitsuhiro Yoda

IPC: G01P15/02 ,  G01P15/125 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01P2015/0831

Abstract: An acceleration sensor includes a base substrate provided with a first recess part, and a sensor part located on the first recess part and swingably supported in a depth direction of the first recess part by a support part, wherein the sensor part is sectioned into a first part and a second part by the support part, includes a movable electrode part in the first part and the second part, a through hole is provided at least at an end side in the second part larger in mass than the first part, and the base substrate includes a fixed electrode part in a position opposed to the movable electrode part in the first recessed part, and a second recess part deeper than the first recess part is provided in a position opposed to the end side of the sensor part.

Abstract translation: 加速度传感器包括设置有第一凹部的基底基板和位于第一凹部上的传感器部，并且通过支撑部在第一凹部的深度方向上可摆动地支撑，其中，传感器部分被分割为第一凹部 所述第一部分和所述第二部分中包括可移动电极部分，至少在所述第二部分的至少端部侧设置有比所述第一部分更大质量的通孔，并且所述基部 基板包括与第一凹部中的可动电极部相对的位置的固定电极部，在与传感器部的端侧相对的位置设置比第一凹部更深的第二凹部。

公开(公告)号：US09086428B2

公开(公告)日：2015-07-21

申请号：US13277511

申请日：2011-10-20

Applicant: Mitsuhiro Yoda ,  Shuichi Kawano ,  Shigekazu Takagi ,  Seiji Yamazaki

Inventor： Mitsuhiro Yoda ,  Shuichi Kawano ,  Shigekazu Takagi ,  Seiji Yamazaki

IPC: G01P15/125 ,  G01C19/56 ,  H01S4/00 ,  H01L29/84 ,  H01L21/08 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01P3/44 ,  G01P15/0802 ,  G01P2015/0814 ,  Y10T29/49002

Abstract: A functional device according to an embodiment of the invention includes: an insulating substrate; a movable section; movable electrode fingers provided in the movable section; and fixed electrode fingers provided on the insulating substrate and arranged to be opposed to the movable electrode fingers. The fixed electrode fingers include: first fixed electrode fingers arranged on one side of the movable electrode fingers; and second fixed electrode fingers arranged on the other side of the movable electrode fingers. The first fixed electrode fingers and the second fixed electrode fingers are arranged to be spaced apart from each other.

Abstract translation: 根据本发明的实施例的功能装置包括：绝缘基板; 可移动部分; 设置在可动部中的可动电极指; 以及设置在所述绝缘基板上且与所述可动电极指相对配置的固定电极指。 固定电极指包括：布置在可动电极指的一侧上的第一固定电极指; 以及布置在可动电极指的另一侧上的第二固定电极指。 第一固定电极指和第二固定电极指被布置成彼此间隔开。

公开(公告)号：US07926369B2

公开(公告)日：2011-04-19

申请号：US11472263

申请日：2006-06-21

Applicant: Mitsuhiro Yoda

Inventor： Mitsuhiro Yoda

IPC: B06B3/00

CPC classification number: G02B6/3578 ,  G02B6/3512 ,  G02B6/3594 ,  G02B26/0858 ,  Y10T74/10

Abstract: The actuator has a movable mass portion and a pair of drive mechanisms for driving the movable mass portion. Each of the pair of drive mechanisms includes a drive mass portion, a support portion for supporting the drive mass portion, a first elastic connecting portion interconnecting the drive mass portion and the support portion so as to allow the drive mass portion to be pivoted about a pivotal axis with respect to the support portion, and a second elastic connecting portion interconnecting the drive mass portion and the movable mass portion so as to allow the movable mass portion to be pivoted about a pivotal axis with respect to the drive mass portion. The first elastic connecting portion includes a pair of bending bars opposed to each other with interposing the pivotal axis of the drive mass portion therebetween. The first elastic connecting portion includes a pair of piezoelectric elements jointed respectively onto the pair of bending bars so as to bend the pair of bending bars in opposite directions to cause pivotal movement to the drive mass portion. The pivotal movement of the drive mass portion causes torsional deformation to the second elastic connecting portion so as to pivot the movable mass portion.

Abstract translation: 致动器具有可移动质量部分和用于驱动可移动质量部分的一对驱动机构。 所述一对驱动机构中的每一个包括驱动质量部分，用于支撑驱动质量部分的支撑部分，将驱动质量部分和支撑部分互连的第一弹性连接部分，以便允许驱动质量部分围绕 枢转轴线相对于支撑部分的第二弹性连接部分，以及互连驱动质量部分和可移动质量部分的第二弹性连接部分，以允许可移动质量部分围绕相对于驱动质量部分的枢转轴线枢转。 第一弹性连接部分包括彼此相对的一对弯曲杆，其中驱动质量部分的枢转轴线介于其间。 第一弹性连接部分包括分别连接在一对弯曲杆上的一对压电元件，以便使一对弯曲杆在相反的方向上弯曲以引起对驱动质量部分的枢转运动。 驱动质量部的枢转运动引起对第二弹性连接部的扭转变形，以使可动质量部分枢转。

公开(公告)号：US07808150B2

公开(公告)日：2010-10-05

申请号：US12607341

申请日：2009-10-28

Applicant: Mitsuhiro Yoda ,  Keiji Isamoto ,  Hiroshi Toshiyoshi

Inventor： Mitsuhiro Yoda ,  Keiji Isamoto ,  Hiroshi Toshiyoshi

IPC: H02N1/00 ,  G02B26/08

CPC classification number: B81B3/004 ,  B81B2201/042 ,  B81B2201/045 ,  H02N1/008

Abstract: An actuator that can be driven at a reduced voltage and manufactured with ease, and a method for manufacturing the same are provided. The actuator includes second supporting portions 31 and 32 secured to a supporting substrate 4 through a spacer, fixed portions 33 and 34 secured to the supporting substrate 4 with no intervention of the spacer, fixed comb electrodes 331 and 341 integrally formed the fixed portions 33 and 34 and meshing with movable comb electrodes 211 and 212 in a spaced-apart relationship, and bridge portions 35 and 36 for connecting the fixed portions 33 and 34 to the second supporting portions 31 and 32. The fixed portions 33 and 34 are affixed to the supporting substrate 4 in a condition that they are deflected toward the supporting substrate 4 with respect to the second supporting portions 31 and 32 while bending the bridge portions 35 and 36, thereby initially deflecting the fixed comb electrodes 331 and 341 so as to be out of alignment with the movable comb electrodes 211 and 212 in a thickness direction of the supporting substrate 4.

Abstract translation: 提供能够以降低的电压驱动并且容易制造的致动器及其制造方法。 致动器包括通过间隔件固定到支撑基板4的第二支撑部分31和32，固定在支撑基板4上的固定部分33和34，而不需要间隔件，固定梳状电极331和341一体地形成固定部分33和 并且与间隔开的可动梳状电极211,212啮合，以及用于将固定部33,34连接到第二支撑部31,32的桥接部35,36。固定部33,34固定在 支撑基板4在弯曲桥接部分35和36的同时相对于第二支撑部分31和32偏转到支撑基板4的状态，从而最初偏转固定梳状电极331和341以便脱离 在支撑基板4的厚度方向上与可动梳状电极211和212对准。

公开(公告)号：US20100045137A1

公开(公告)日：2010-02-25

申请号：US12607341

申请日：2009-10-28

Applicant: Mitsuhiro YODA ,  Keiji ISAMOTO ,  Hiroshi TOSHIYOSHI

Inventor： Mitsuhiro YODA ,  Keiji ISAMOTO ,  Hiroshi TOSHIYOSHI

IPC: H02N11/00

CPC classification number: B81B3/004 ,  B81B2201/042 ,  B81B2201/045 ,  H02N1/008

Abstract: An actuator that can be driven at a reduced voltage and manufactured with ease, and a method for manufacturing the same are provided. The actuator includes second supporting portions 31 and 32 secured to a supporting substrate 4 through a spacer, fixed portions 33 and 34 secured to the supporting substrate 4 with no intervention of the spacer, fixed comb electrodes 331 and 341 integrally formed the fixed portions 33 and 34 and meshing with movable comb electrodes 211 and 212 in a spaced-apart relationship, and bridge portions 35 and 36 for connecting the fixed portions 33 and 34 to the second supporting portions 31 and 32. The fixed portions 33 and 34 are affixed to the supporting substrate 4 in a condition that they are deflected toward the supporting substrate 4 with respect to the second supporting portions 31 and 32 while bending the bridge portions 35 and 36, thereby initially deflecting the fixed comb electrodes 331 and 341 so as to be out of alignment with the movable comb electrodes 211 and 212 in a thickness direction of the supporting substrate 4.

Abstract translation: 提供能够以降低的电压驱动并且容易制造的致动器及其制造方法。 致动器包括通过间隔件固定到支撑基板4的第二支撑部分31和32，固定在支撑基板4上的固定部分33和34，而不需要间隔件，固定梳状电极331和341一体地形成固定部分33和 并且与间隔开的可动梳状电极211,212啮合，以及用于将固定部33,34连接到第二支撑部31,32的桥接部35,36。固定部33,34固定在 支撑基板4在弯曲桥接部分35和36的同时相对于第二支撑部分31和32偏转到支撑基板4的状态，从而最初偏转固定梳状电极331和341以便脱离 在支撑基板4的厚度方向上与可动梳状电极211和212对准。

公开(公告)号：US07190523B2

公开(公告)日：2007-03-13

申请号：US10861229

申请日：2004-06-03

Applicant: Mitsuhiro Yoda

Inventor： Mitsuhiro Yoda

IPC: G02B27/00

CPC classification number: G02B6/29358 ,  G02B6/29395

Abstract: A wavelength-tunable optical filter includes a stationary mirror, a movable mirror disposed so as to face the stationary mirror, an actuating plate for actuating the movable mirror, and a peripheral supporting portion holding the actuating plate which are disposed above a base layer. The movable mirror is displaced by applying a voltage between the electrodes provided on the actuating plate and the base layer, and the actuating plate is disposed between the movable mirror and the peripheral supporting portion so as to be displaced due to an electrostatic force.

Abstract translation: 波长可调光学滤光器包括固定反射镜，设置成面对静止反射镜的可移动反射镜，用于致动可移动反射镜的致动板，以及保持致动板的周边支撑部分，其设置在基底层之上。 通过在设置在致动板上的电极和基底层之间施加电压来移动可移动镜，并且致动板设置在可动反射镜和周边支撑部分之间，以便由于静电力而移位。

公开(公告)号：US07161275B2

公开(公告)日：2007-01-09

申请号：US11449792

申请日：2006-06-08

Applicant: Mitsuhiro Yoda

Inventor： Mitsuhiro Yoda

IPC: G02B26/00 ,  H02N1/00

CPC classification number: H02N1/006 ,  H02K33/16

Abstract: An actuator 100 of the type employing a two-degree-of-freedom vibration system includes: a pair of first mass portions 1, 11; a second mass portion 2 provided between the pair of first mass portions 1, 11; a pair of supporting portions 3, 3 for supporting the pair of first mass portions 1, 11 and the second mass portion 2; at least a pair of first elastic connecting portions 4, 4 which respectively connect the first mass portions 1, 11 to the supporting portions 3, 3 so that each of the first mass portions 1, 11 can rotate with respect to the supporting portions 3, 3; and at least a pair of second elastic connecting portions 5, 5 which respectively connect the second mass portion 2 to the first mass portions 1, 11 so that the second mass portion 2 can rotate with respect to the first mass portion 1, 11. Each of the first mass portions 1, 11 is driven by the application of an alternating voltage, causing the second mass portion 2 to rotate.

Abstract translation: 采用二自由度振动系统的致动器100包括：一对第一质量部分1,11; 设置在所述一对第一质量部分11,11之间的第二质量部分2; 一对用于支撑一对第一质量部分1,11和第二质量部分2的支撑部分3,3; 至少一对第一弹性连接部分4,4将第一质量部分11,11分别连接到支撑部分3,3，使得第一质量部分1,11可相对于支撑部分3旋转， 3; 以及至少一对第二弹性连接部5,5，其分别将第二质量部2与第一质量部1,11连接，使得第二质量部2能够相对于第一质量部1,11旋转。 通过施加交流电压来驱动第一质量部分1,11，使得第二质量部分2旋转。

公开(公告)号：US20060279169A1

公开(公告)日：2006-12-14

申请号：US11443471

申请日：2006-05-30

Applicant: Mitsuhiro Yoda ,  Keiji Isamoto ,  Hiroshi Toshiyoshi

Inventor： Mitsuhiro Yoda ,  Keiji Isamoto ,  Hiroshi Toshiyoshi

IPC: G02B26/08 ,  H02N1/00

CPC classification number: B81B3/004 ,  B81B2201/042 ,  B81B2201/045 ,  H02N1/008

Abstract: An actuator that can be driven at a reduced voltage and manufactured with ease, and a method for manufacturing the same are provided. The actuator includes second supporting portions 31 and 32 secured to a supporting substrate 4 through a spacer, fixed portions 33 and 34 secured to the supporting substrate 4 with no intervention of the spacer, fixed comb electrodes 331 and 341 integrally formed the fixed portions 33 and 34 and meshing with movable comb electrodes 211 and 212 in a spaced-apart relationship, and bridge portions 35 and 36 for connecting the fixed portions 33 and 34 to the second supporting portions 31 and 32. The fixed portions 33 and 34 are affixed to the supporting substrate 4 in a condition that they are deflected toward the supporting substrate 4 with respect to the second supporting portions 31 and 32 while bending the bridge portions 35 and 36, thereby initially deflecting the fixed comb electrodes 331 and 341 so as to be out of alignment with the movable comb electrodes 211 and 212 in a thickness direction of the supporting substrate 4.

Abstract translation: 提供能够以降低的电压驱动并且容易制造的致动器及其制造方法。 致动器包括通过间隔件固定到支撑基板4的第二支撑部分31和32，固定在支撑基板4上的固定部分33和34，而不需要间隔件，固定梳状电极331和341一体地形成固定部分33和 并且与间隔开的可动梳状电极211和212啮合，以及用于将固定部分33和34连接到第二支撑部分31和32的桥接部分35和36。 固定部分33和34在弯曲桥接部分35和36的同时相对于第二支撑部分31和32偏转到支撑基板4的状态被固定到支撑基板4上，从而使固定的梳子 电极331和341在支撑基板4的厚度方向上与可动梳状电极211和212不对准。

公开(公告)号：US11796793B2

公开(公告)日：2023-10-24

申请号：US16953826

申请日：2020-11-20

Applicant: Mitsuhiro Yoda ,  Yukito Sato ,  Mizuki Shinkawa ,  Goichi Akanuma ,  Shuichi Suzuki

Inventor： Mitsuhiro Yoda ,  Yukito Sato ,  Mizuki Shinkawa ,  Goichi Akanuma ,  Shuichi Suzuki

IPC: G02B26/08 ,  G02B26/10 ,  G02B7/182 ,  G02B5/08

CPC classification number: G02B26/105 ,  G02B7/182 ,  G02B5/08

Abstract: An optical deflector includes a mirror configured to reflect light; a pair of support portions each having an end connected to the mirror, and configured to support the mirror; first actuators connected to the respective support portions, and configured to deform the support portions so as to cause the mirror to oscillate about a first axis; a movable frame configured to support the first actuators; and second actuators connected to the movable frame and disposed opposite to the first actuators, with the support portions being interposed between the first actuators and the second actuators. The second actuators are not connected to the support portions. The first actuators and the second actuators bend and deform in the same direction.

公开(公告)号：US09068835B2

公开(公告)日：2015-06-30

申请号：US13449619

申请日：2012-04-18

Applicant: Mitsuhiro Yoda ,  Shuichi Kawano ,  Shigekazu Takagi ,  Seiji Yamazaki

Inventor： Mitsuhiro Yoda ,  Shuichi Kawano ,  Shigekazu Takagi ,  Seiji Yamazaki

IPC: H05K1/11 ,  G01C19/5783 ,  G01P15/08 ,  G01P15/125

CPC classification number: G01C19/5783 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  H05K1/118

Abstract: A functional element including a substrate having a principal surface, a groove portion (a first groove portion, a second groove portion) disposed on the principal surface, and a fixed electrode section (a first fixed electrode finger, a second fixed electrode finger) laid across the groove portion on the substrate, wherein, in the groove portion, a raised portion formed by using at least one of the substrate and the fixed electrode section is provided in a position overlapping with the fixed electrode section in a plan view, the raised portion has a bonded surface (an end face), a wiring line (a first wiring line, a second wiring line) is disposed on the bonded surface, and the substrate and the fixed electrode section are connected with the wiring line sandwiched between the substrate and the fixed electrode section.

Abstract translation: 一种功能元件，包括具有主表面的基底，设置在主表面上的凹槽部分（第一凹槽部分，第二凹槽部分）和固定电极部分（第一固定电极指，第二固定电极指） 横跨基板上的凹槽部分，其中在凹槽部分中，通过使用基板和固定电极部分中的至少一个形成的凸起部分设置在与固定电极部分重叠的位置，平面图中，凸起 部分具有接合表面（端面），在接合表面上布置布线（第一布线，第二布线），并且基板和固定电极部分与夹在基板之间的布线相连接 和固定电极部。