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公开(公告)号：US11842879B2
公开(公告)日：2023-12-12
申请号：US17996213
申请日：2021-08-20
Applicant: PHOTO ELECTRON SOUL INC.
Inventor： Tomohiro Nishitani
IPC: H01J37/073
CPC classification number: H01J37/073 , H01J2237/024 , H01J2237/06333 , H01J2237/06375
Abstract: Provided are an electron gun, an electron gun component, an electron beam applicator, and an alignment method that can align the emission axis of an electron beam with the optical axis of the electron optical system of the counterpart device even when misalignment of a mounted position of the electron gun being mounted to the counterpart device is larger. The electron gun includes: a light source; a vacuum chamber; a photocathode that emits an electron beam in response to receiving light from the light source; an electrode kit; and an electrode kit drive device, the electrode kit includes a photocathode supporting part, and an anode arranged spaced apart from the photocathode supporting part, the photocathode is placed on the photocathode supporting part, and the electrode kit drive device moves the electrode kit in an X-Y plane, where one direction is defined as an X direction, a direction orthogonal to the X direction is defined as a Y direction, and a plane including the X direction and the Y direction is defined as the X-Y plane.
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公开(公告)号：US20220359146A1
公开(公告)日：2022-11-10
申请号：US17763186
申请日：2020-09-04
Applicant: Photo electron Soul Inc.
Inventor： Hokuto IIJIMA
Abstract: An object is to provide an electron gun that makes it possible to verify whether or not an electron beam emitted form a photocathode is misaligned from a designed emission center axis. The object can be achieved by an electron gun including: a light source; a photocathode; and an anode. The electron gun includes an intermediate electrode arranged between the photocathode and the anode, an electron beam shielding member configured to block a part of an electron beam, a measurement unit configured to measure an intensity of an electron beam blocked by the electron beam shielding member, and an electron beam emission direction deflector arranged between the anode and the electron beam shielding member and configured to change a position where an electron beam that passed through the anode reaches the electron beam shielding member. The intermediate electrode has an electron beam passage hole and a drift space.
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公开(公告)号：US20220181111A1
公开(公告)日：2022-06-09
申请号：US17604368
申请日：2020-07-31
Applicant: Photo electron Soul Inc.
Inventor： Haruka SHIKANO , Daiki SATO , Reiki WATANABE , Tomoaki MORIYA , Hokuto IIJIMA
IPC: H01J1/34 , H01J37/073
Abstract: Provided is a photocathode kit that does not require adjustment of the distance between a photocathode film and a lens focusing on the photocathode film when the photocathode and the lens are installed inside an electron gun. The photocathode kit includes: a photocathode including a substrate in which a photocathode film is formed on a first surface; a lens; and a holder that holds the substrate and the lens, and the holder has a retaining member that retains the photocathode film and the lens to be spaced apart by a predetermined distance, and a first communication path that communicates between inside of the holder and outside of the holder.
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公开(公告)号：US11195685B2
公开(公告)日：2021-12-07
申请号：US17044856
申请日：2019-08-07
Applicant: Photo electron Soul Inc.
Inventor： Hokuto Iijima
Abstract: The present invention addresses the problem of providing a device with which it is possible to adjust the focal point of an electron beam both toward a shorter focal point and toward a longer focal point after an electronic gun was fitted on a counterpart device.
The aforementioned problem can be solved by an electron gun including a photocathode, and an anode, the electron gun furthermore comprising an intermediate electrode disposed between the photocathode and the anode, the intermediate electrode comprising an electron-beam passage hole through which an electron beam released from the photocathode passes, and the electron-beam passage hole having formed therein a drift space in which, when an electrical field is formed between the photocathode and the anode due to application of a voltage, the effect of the electrical field can be disregarded.-
公开(公告)号：US11150204B2
公开(公告)日：2021-10-19
申请号：US16609728
申请日：2018-12-20
Applicant: PHOTO ELECTRON SOUL INC.
Inventor： Tomohiro Nishitani , Atsushi Koizumi , Haruka Shikano
IPC: G01N23/2251 , H01J37/073 , H01J37/244 , H01J37/22 , H01J37/252
Abstract: The present invention addresses the problem of providing a sample inspection device and a sample inspection method, whereby noise is removed from a detection signal, and a generated electron beam is utilized effectively for inspection. A sample inspection device according to the present invention is provided with a light source for emitting frequency-modulated light, a photocathode for emitting an electron beam in response to receiving the frequency-modulated light, a detector for detecting electrons emitted from a sample irradiated by the electron beam and generating a detection signal, and a signal extractor for extracting a signal having a frequency corresponding to a modulation frequency of the frequency-modulated light from within the detection signal.
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Patent Agency Ranking
公开(公告)号：US20210035766A1
公开(公告)日：2021-02-04
申请号：US16500789
申请日：2018-03-30
Applicant: PHOTO ELECTRON SOUL INC.
Inventor： Tomohiro Nishitani , Atsushi Koizumi , Tomoaki Kawamata , Haruka Shikano
Abstract: The present invention addresses the problem of providing an electron beam generator and an electron beam applicator for which maintenance is facilitated. The electron beam generator comprises a vacuum chamber, a photocathode holder, an activation vessel, and an internal motive power transmission member. The photocathode holder is capable of moving relative to the activation vessel.
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17.发明申请公开(公告)号：US20240412939A1
公开(公告)日：2024-12-12
申请号：US18702780
申请日：2022-10-17
Applicant: PHOTO ELECTRON SOUL INC.
Inventor： Tomohiro NISHITANI
IPC: H01J37/073 , H01J1/34 , H01J37/244 , H01J37/28
Abstract: This electron beam applicator includes: a light source; a photocathode; an anode; a detector; and a control unit. The photocathode receives two or more pulsed excitation light beams, and are emitted so that the excitation light beams are received by the photocathode at different timings, the control unit sets two or more irradiation regions and causes two or more pulsed electron beams formed in response to receiving the two or more pulsed excitation light beams of the different timings to be emitted to different irradiation regions, respectively, the detector generates detection signals by detecting, at different timings, pulsed emitted substances emitted from the different irradiation regions and outputs the generated detection signals in association with position information on the different irradiation regions, and the number of detectors is less than the number of electron beams emitted to the irradiation targets.
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18.发明公开公开(公告)号：US20230207249A1
公开(公告)日：2023-06-29
申请号：US17996213
申请日：2021-08-20
Applicant: PHOTO ELECTRON SOUL INC.
Inventor： Tomohiro Nishitani
IPC: H01J37/073
CPC classification number: H01J37/073 , H01J2237/06333 , H01J2237/06375 , H01J2237/024
Abstract: Provided are an electron gun, an electron gun component, an electron beam applicator, and an alignment method that can align the emission axis of an electron beam with the optical axis of the electron optical system of the counterpart device even when misalignment of a mounted position of the electron gun being mounted to the counterpart device is larger. The electron gun includes: a light source; a vacuum chamber; a photocathode that emits an electron beam in response to receiving light from the light source; an electrode kit; and an electrode kit drive device, the electrode kit includes a photocathode supporting part, and an anode arranged spaced apart from the photocathode supporting part, the photocathode is placed on the photocathode supporting part, and the electrode kit drive device moves the electrode kit in an X-Y plane, where one direction is defined as an X direction, a direction orthogonal to the X direction is defined as a Y direction, and a plane including the X direction and the Y direction is defined as the X-Y plane.
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19.发明申请公开(公告)号：US20220199350A1
公开(公告)日：2022-06-23
申请号：US17604373
申请日：2020-10-13
Applicant: Photo electron Soul Inc.
Inventor： Tomohiro NISHITANI
IPC: H01J37/075 , H01J37/12 , H01J37/28
Abstract: An object is to provide an electron beam applicator suitable for an electron gun having a photocathode and an electron beam emission method in the electron beam applicator. The object can be achieved by an electron beam applicator including: an electron gun section; a main body section; and a control unit. The electron gun section includes a light source, a photocathode that emits an electron beam in response to receiving excitation light emitted from the light source, and an anode. The main body section includes an objective lens that converges an electron beam emitted from the electron gun section. The control unit controls at least convergence power of the objective lens in accordance with a size of an electron beam emitted from the photocathode.
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公开(公告)号：US11302507B2
公开(公告)日：2022-04-12
申请号：US16500789
申请日：2018-03-30
Applicant: PHOTO ELECTRON SOUL INC.
Inventor： Tomohiro Nishitani , Atsushi Koizumi , Tomoaki Kawamata , Haruka Shikano
Abstract: The present invention addresses the problem of providing an electron beam generator and an electron beam applicator for which maintenance is facilitated. The electron beam generator comprises a vacuum chamber, a photocathode holder, an activation vessel, and an internal motive power transmission member. The photocathode holder is capable of moving relative to the activation vessel.
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