摘要:
A process for removing thiothionylfluoride from a composition containing sulfur tetrafluoride and thiothionylfluoride includes contacting the composition with a high surface area material, such as activated carbon. The process can provide purified sulfur tetrafluoride free of thiothionylfluoride. The high surface area material can be replaced for further processing. Alternatively, the material can be regenerated by contacting it with a gas mixture of oxygen and nitrogen at 150-450° C. and converting the adsorbed elemental sulfur to sulfur dioxide without oxidation of the material.
摘要:
This invention relates to an improvement in a process for removing C2F6 as an impurity from a CF4 containing gas, preferably CF4 produced by the reaction of F2 with carbon. The improvement in the process comprises the steps: contacting the CF4 containing gas, containing C2F6 impurity, with an activated carbon having a CCl4 activity from 43 to 55 in an adsorption bed to effect adsorption of the C2F6 impurity; and, recovering purified CF4 product in the effluent from the adsorbent bed.
摘要翻译:本发明涉及从含有CF 4的气体中除去作为杂质的C2F6的方法的改进,优选通过F2与碳的反应制备的CF4。 该方法的改进包括以下步骤:在吸附床中将含有C 2 F 6杂质的含CF 4的气体与CCl 4活性的活性炭从43至55接触以实现C2F6杂质的吸附; 并且在来自吸附床的流出物中回收纯化的CF 4产物。
摘要:
The present invention discloses plasma enhanced chemical vapor deposition (PECVD) process for depositing n-type and p-type zinc oxide-based transparent conducting oxides (TCOs) at low temperatures with excellent optical and electrical properties on glass and temperature sensitive materials such as plastics and polymers. Specifically, it discloses PECVD process for depositing n-type ZnO by doping it with B or F and p-type ZnO by doping it with nitrogen excellent optical and electrical properties on glass and temperature sensitive materials such as plastics and polymers for TCO application. The process utilizes a mixture of volatile zinc compound, argon and/or helium as a diluent gas, carbon dioxide as an oxidant, and a dopant or reactant to deposit the desired ZnO-based TCOs.
摘要:
During the conventional temperature swing adsorption (TSA) process, NF3 co-adsorbed with the impurities is vented during regeneration. This invention is a novel TSA cycle in which the co-adsorbed NF3 is recovered. In this novel TSA cycle, a control scheme is used to stop the adsorption prior to the saturation of the adsorber with impurities and use a recovery purge gas (either co-current or counter-current) to release the co-adsorbed NF3 off the saturated adsorber. The effluent of the inert purge gas can be combined with the effluent of the on-stream vessel or can be recycled to the feed of the on-stream vessel. 10%-100% of the co-adsorbed NF3 is recovered and made available as product in this novel TSA cycle. Thus the overall process yield of NF3 is increased. The removing of the co-adsorbed NF3 from the adsorber also prevents adsorber degradation thus prolonging the useful life of the adsorber.
摘要:
A mixture and method for the storage and delivery of a gas are disclosed herein. In one aspect, there is provided a mixture comprising: an ionic liquid comprising an anion and a cation, at least a portion of the gas that is disposed within and reversibly chemically reacted with the ionic liquid, and optionally an unreacted gas. In another aspect, there is provided a method for delivering a gas from a mixture comprising an ionic liquid and one or more gases comprising: reacting at least a portion of the gas with the ionic liquid to provide the mixture comprising a chemically reacted gas and an ionic liquid and separating the chemically reacted gas from the mixture wherein the chemically reacted gas after the separating step has substantially the same chemical identity as the chemically reacted gas prior to the reacting step.
摘要:
A method of producing an electrochromic device, includes the steps of: providing a first electron conducting layer on a substrate, providing a working electrode in communication with the first electron conducting layer, providing an ion conducting layer in communication with the working electrode, providing an ion storage electrode in communication with the ion conducting layer, and providing a second electron conducting layer in communication with the ion storage electrode, wherein at least one and less than all of the providing steps include(s) plasma chemical vapor deposition. An electrochromic device produced by the method of the invention is disclosed, as is an apparatus adapted to perform the method of the invention, including plasma CVD devices and vacuum sputtering devices.
摘要:
This invention relates to an improvement in a low-pressure storage and delivery system for gases having Lewis basicity, particularly hazardous specialty gases such as phosphine and arsine, which are utilized in the electronics industry. The improvement resides in storing the gases in a liquid incorporating a reactive compound having Lewis acidity capable of effecting a reversible reaction between a gas having Lewis basicity. The reactive compound comprises a reactive species that is dissolved, suspended, dispersed, or otherwise mixed with a nonvolatile liquid.
摘要:
This invention relates generally to an improvement in low pressure storage and dispensing systems for the selective storing of gases having Lewis acidity or basicity, and the subsequent dispensing of said gases at pressures, e.g., generally below 5 psig and typically below atmospheric pressure, by modest heating, pressure reduction or both. The improvement resides in storing the gases in a reversibly reacted state within a reactive liquid having opposing Lewis basicity or acidity.
摘要:
A method of producing an electrochromic device, includes the steps of: providing a first electron conducting layer on a substrate, providing a working electrode in communication with the first electron conducting layer, providing an ion conducting layer in communication with the working electrode, providing an ion storage electrode in communication with the ion conducting layer, and providing a second electron conducting layer in communication with the ion storage electrode, wherein at least one and less than all of the providing steps include(s) plasma chemical vapor deposition. An electrochromic device produced by the method of the invention is disclosed, as is an apparatus adapted to perform the method of the invention, including plasma CVD devices and vacuum sputtering devices.
摘要:
An apparatus and method are used to modify the surface chemistry of an article. The article to be surface treated has at least a surface region that includes at least one polymer. The method comprises the steps of placing one or more articles into a closed reaction chamber which is evacuated to a negative pressure. After evacuation, a treatment gas is rapidly injected into the reaction chamber, the treatment gas having an essentially predetermined composition comprising one or more components which are reactive with the articles within the reaction chamber. The treatment gas is allowed to react with the articles within the closed reaction chamber for a predetermined period of time. The treatment gas is then removed from within the reaction chamber and replaced with an inert gas at about atmospheric pressure. Finally, the treated articles are removed from the treatment chamber.