公开(公告)号：US06633711B1

公开(公告)日：2003-10-14

申请号：US09584788

申请日：2000-06-01

Applicant: Saeed Pilevar ,  Klaus Edinger ,  Walid Atia ,  Igor I. Smolyaninov ,  Christopher C. Davis

Inventor： Saeed Pilevar ,  Klaus Edinger ,  Walid Atia ,  Igor I. Smolyaninov ,  Christopher C. Davis

IPC: G02B600

CPC classification number: G01Q60/22

Abstract: A method of forming a fiber probe having an aperture for use in near-field scanning optical microscopy. The method includes a first steps of coating an optical fiber having a tapered tip with a metal layer. Next is a step of milling the tapered tip and metal layer such that an aperture is formed through the metal layer at the tapered tip. The milling step includes focused ion-beam milling the tapered tip and metal layer. The focused ion-beam milling can be done by raster scanning the focused ion-beam in a rectangular pattern at an apex of the tapered tip. Also, the fiber probe made through the above outlined method is used in near-field scanning optical microscopy.

Abstract translation: 一种形成具有用于近场扫描光学显微镜的孔径的光纤探针的方法。 该方法包括用金属层涂覆具有锥形尖端的光纤的第一步骤。 接下来是铣削锥形尖端和金属层的步骤，使得在锥形尖端处通过金属层形成孔。 铣削步骤包括聚焦离子束铣削锥形尖端和金属层。 聚焦离子束研磨可以通过在锥形尖端的顶点处以矩形图案光栅扫描聚焦离子束来完成。 此外，通过上述方法制造的光纤探针也用于近场扫描光学显微镜

公开(公告)号：US20070024847A1

公开(公告)日：2007-02-01

申请号：US11419193

申请日：2006-05-18

Applicant: James Zambuto ,  Walid Atia ,  Christopher Cook

Inventor： James Zambuto ,  Walid Atia ,  Christopher Cook

IPC: G01J3/00

CPC classification number: G01J3/108 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/4338

Abstract: A process monitoring system determines a spectral response of a process material. This system has a tunable laser for generating an optical signal that is wavelength tuned over a scan band and an optical probe for conveying the optical signal to the process material and detecting the spectral response of the process material. The optical probe expands a beam of the optical signal to a diameter of greater than 10 millimeters. This avoids one of the difficulties with monitoring these process applications by ensuring that the spectroscopy measurements are accurate and repeatable. It is desirable to sample a relatively large area of the processed material since it can be heterogeneous. Additionally the large area mitigates spectral noise such as from speckle.

Abstract translation: 过程监控系统确定过程材料的光谱响应。 该系统具有用于产生在扫描带上波长调谐的光信号的可调谐激光器和用于将光信号传送到处理材料并检测处理材料的光谱响应的光学探针。 光学探头将光信号的光束扩展到大于10毫米的直径。 通过确保光谱测量是准确和可重复的，这避免了监控这些过程应用的困难之一。 由于可以是异质的，所以对于相对较大面积的处理材料进行采样是理想的。 此外，大面积减轻光谱噪声，如斑点。

公开(公告)号：US20060215713A1

公开(公告)日：2006-09-28

申请号：US11158617

申请日：2005-06-22

Applicant: Dale Flanders ,  Mark Kuznetsov ,  Walid Atia

Inventor： Dale Flanders ,  Mark Kuznetsov ,  Walid Atia

IPC: H01S3/10 ,  H01S3/08

CPC classification number: H01S3/08059 ,  H01S3/105 ,  H01S5/06 ,  H01S5/141 ,  H01S5/146

Abstract: An external cavity laser has a mirror-based resonant tunable filter, such as a Fabry Perot tunable filter or Gires-Tournois interferometer tuning element, with the tunable filter being preferably used as a laser cavity mirror. A mirror-based resonant tunable filter is selected in which the spectral response in reflection has an angular dependence. A tilt scheme is used whereby by selecting an appropriate angle between the filter's nominal optical axis and the cavity optical axis, a narrowband peak spectral reflection is provided to the laser cavity. This tunable narrowband spectral reflection from the filter is used to lock and tune the laser output wavelength.

Abstract translation: 外腔激光器具有基于镜子的共振可调谐滤波器，例如法布里·珀罗可调谐滤波器或Gires-Tournois干涉仪调谐元件，其中可调谐滤波器优选地用作激光腔镜。 选择基于镜像的谐振可调谐滤波器，其中反射中的光谱响应具有角度依赖性。 使用倾斜方案，由此通过选择滤光片的标称光轴和腔光轴之间的适当角度，向激光腔提供窄带峰值光谱反射。 来自滤波器的可调窄带光谱反射用于锁定和调谐激光输出波长。

公开(公告)号：US20070071040A1

公开(公告)日：2007-03-29

申请号：US11550503

申请日：2006-10-18

Applicant: Dale Flanders ,  Walid Atia ,  Mark Kuznetsov

Inventor： Dale Flanders ,  Walid Atia ,  Mark Kuznetsov

IPC: H01S3/10

CPC classification number: G01N21/39 ,  G01J1/32 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0224 ,  G01J3/0256 ,  G01J3/10 ,  G01J3/26 ,  G01J3/4338 ,  G01J2003/1286 ,  H01S3/08013 ,  H01S3/083 ,  H01S5/005 ,  H01S5/0064 ,  H01S5/0085 ,  H01S5/02248 ,  H01S5/02252 ,  H01S5/06817 ,  H01S5/0683 ,  H01S5/1071 ,  H01S5/141 ,  H01S2301/02

Abstract: An optical power control system for a semiconductor source spectroscopy system controls power fluctuations in the tunable signal from the spectroscopy system and thus improves the noise performance of the system. This general solution has advantages relative to other systems that simply detect reference power levels during the scan and then correct the detected signal after interaction with the sample by reducing the requirements for coordinating the operation of the sample detectors and power or reference detectors. The spectroscopy system comprises a semiconductor source and a tunable filter. The combination of the semiconductor source and tunable signal illuminate a sample with a tunable signal, being tunable over a scan band. The power control system comprises an amplitude detector system for detecting the power of the tunable optical signal and power control system for regulating the amplitude of the tunable optical signal in response to its detected power.

Abstract translation: 用于半导体源光谱系统的光功率控制系统控制来自光谱系统的可调谐信号中的功率波动，从而改善系统的噪声性能。 该通用解决方案相对于在扫描期间简单地检测参考功率电平然后在与样品相互作用之后校正检测到的信号的其它系统具有优点，通过减少协调样品检测器和功率或参考检测器的操作的要求。 光谱系统包括半导体源和可调谐滤波器。 半导体源和可调信号的组合用可调信号照射样品，可在扫描带上调谐。 功率控制系统包括用于检测可调谐光信号的功率的振幅检测器系统和用于响应于其检测到的功率来调节可调谐光信号的幅度的功率控制系统。

公开(公告)号：US20060210276A1

公开(公告)日：2006-09-21

申请号：US09745157

申请日：2000-12-20

Applicant: Jeffrey Korn ,  Walid Atia

Inventor： Jeffrey Korn ,  Walid Atia

IPC: H04J14/02

CPC classification number: H04J14/0227 ,  H04B10/0795 ,  H04B10/07957 ,  H04J14/0246

Abstract: A scanning optical monitoring system and method are appropriate for high speed scanning of a WDM signal band. The system and method are able to identify dropped channels or, more generally, discrepancies between the determined or detected channel inventory and a perpetual inventory for the WDM signal, which perpetual inventory specifies the channels that should be present in the WDM signal assuming proper operation of the network. The system includes a tunable optical filter that scans a pass band across a signal band of a WDM signal to generate a filtered signal. A photodetector then generates an electrical signal in response to this filtered signal. A decision circuit compares the electrical signal to a threshold and a controller, which is responsive to the decision circuit, inventories the channels in the WDM signal.

Abstract translation: 扫描光学监测系统和方法适用于WDM信号频带的高速扫描。 系统和方法能够识别丢失的信道，或者更一般地，识别出所确定的或检测到的信道库存与WDM信号的永久库存之间的差异，该永久库存指定在WDM信号中应存在的信道，假定正确操作 网络。 该系统包括可调谐滤光器，其扫描WDM信号的信号带上的通带以产生滤波信号。 然后光电检测器响应于该滤波信号产生电信号。 判定电路将电信号与阈值进行比较，并且响应于判定电路的控制器存储WDM信号中的信道。

公开(公告)号：US20060072632A1

公开(公告)日：2006-04-06

申请号：US10953043

申请日：2004-09-29

Applicant: Dale Flanders ,  Walid Atia ,  Mark Kuznetsov

Inventor： Dale Flanders ,  Walid Atia ,  Mark Kuznetsov

IPC: H01S3/10 ,  H01S3/08

CPC classification number: H01S5/141 ,  G01J1/4257 ,  G01J3/02 ,  G01J3/0213 ,  G01J3/0256 ,  G01J3/10 ,  G01J3/26 ,  G01J3/433 ,  G01J2003/2866 ,  G01N21/39 ,  G01N2021/399 ,  H01S3/08013 ,  H01S3/083 ,  H01S5/02252

Abstract: An optical power control system for a semiconductor source spectroscopy system controls power fluctuations in the tunable signal from the spectroscopy system and thus improves the noise performance of the system. This general solution has advantages relative to other systems that simply detect reference power levels during the scan and then correct the detected signal after interaction with the sample by reducing the requirements for coordinating the operation of the sample detectors and power or reference detectors. The spectroscopy system comprises a semiconductor source and a tunable filter. The combination of the semiconductor source and tunable signal illuminate a sample with a tunable signal, being tunable over a scan band. The power control system comprises an amplitude detector system for detecting the power of the tunable optical signal and power control system for regulating the amplitude of the tunable optical signal in response to its detected power.

Abstract translation: 用于半导体源光谱系统的光功率控制系统控制来自光谱系统的可调谐信号中的功率波动，从而改善系统的噪声性能。 该通用解决方案相对于在扫描期间简单地检测参考功率电平然后在与样品相互作用之后校正检测到的信号的其它系统具有优点，通过减少协调样品检测器和功率或参考检测器的操作的要求。 光谱系统包括半导体源和可调谐滤波器。 半导体源和可调信号的组合用可调信号照射样品，可在扫描带上调谐。 功率控制系统包括用于检测可调谐光信号的功率的振幅检测器系统和用于响应于其检测到的功率来调节可调谐光信号的幅度的功率控制系统。

公开(公告)号：US20050083533A1

公开(公告)日：2005-04-21

申请号：US10688690

申请日：2003-10-17

Applicant: Walid Atia ,  Dale Flanders ,  Petros Kotidis ,  Mark Kuznetsov

Inventor： Walid Atia ,  Dale Flanders ,  Petros Kotidis ,  Mark Kuznetsov

IPC: B81B7/02 ,  G01J3/10 ,  G01J3/26 ,  G01J3/36 ,  G01N21/25 ,  G02B5/28 ,  G02B26/00 ,  G01B9/02

CPC classification number: G01J3/36 ,  G01J3/0256 ,  G01J3/10 ,  G01J3/26 ,  G01N21/255

Abstract: Integrated spectroscopy systems are disclosed. In some examples, integrated tunable detectors, using one or multiple Fabry-Perot tunable filters, are provided. Other examples use integrated tunable sources. The tunable source combines one or multiple diodes, such as superluminescent light emitting diodes (SLED), and a Fabry Perot tunable filter or etalon. The advantages associated with the use of the tunable etalon are that it can be small, relatively low power consumption device. For example, newer microelectrical mechanical system (MEMS) implementations of these devices make them the size of a chip. This increases their robustness and also their performance. In some examples, an isolator, amplifier, and/or reference system is further provided integrated.

Abstract translation: 公开了集成光谱系统。 在一些示例中，提供使用一个或多个法布里 - 珀罗可调滤波器的集成可调谐检测器。 其他示例使用集成的可调源。 可调谐源组合了一个或多个二极管，例如超发光发光二极管（SLED）和法布里珀罗可调滤波器或标准具。 与可调谐标准具的使用相关的优点是它可以是小的，相对较低的功率消耗装置。 例如，这些器件的较新的微电机械系统（MEMS）实现使其成为芯片的尺寸。 这增加了它们的稳健性和性能。 在一些示例中，还集成了隔离器，放大器和/或参考系统。